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1. 发明授权

US07266137B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US07266137B2
公开(公告)日：2007-09-04
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注入的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

2. 发明授权

US06965624B2 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US06965624B2
公开(公告)日：2005-11-15
申请号：US10338779
申请日：2003-01-06
申请人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： G02B5/18 , G03F7/20 , H01S3/036 , H01S3/038 , H01S3/08 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225 , H01S3/00 , H01S3/09 , H01S3/097 , H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
摘要翻译：提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。分子氟以初始分压提供，并在激光放电室内耗尽。每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选地每次注射小于0.2毫巴，或者已经在其中的2％的量的7％在激光室内。可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。在每个范围内，气体注入和气体替换优选基于对放电的总施加电能和/或时间和/或脉冲计数进行。

3. 发明授权

US07006541B2 Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp 失效
公开(公告)号：US07006541B2
公开(公告)日：2006-02-28
申请号：US10354945
申请日：2003-01-29
申请人： Peter Lokai , Thomas Schroeder , Juergen Kleinschmidt , Uwe Stamm , Klaus Wolfgang Vogler
发明人： Peter Lokai , Thomas Schroeder , Juergen Kleinschmidt , Uwe Stamm , Klaus Wolfgang Vogler
IPC分类号： H01S3/13
CPC分类号： H01S3/225 , H01S3/1392
摘要： A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

4. 发明授权

US06795473B1 Narrow band excimer laser with a prism-grating as line-narrowing optical element 失效
标题翻译：具有棱镜光栅的窄带准分子激光器作为窄线光学元件
公开(公告)号：US06795473B1
公开(公告)日：2004-09-21
申请号：US09602184
申请日：2000-06-22
申请人： Juergen Kleinschmidt , Thomas Schroeder
发明人： Juergen Kleinschmidt , Thomas Schroeder
IPC分类号： H01S322
CPC分类号： G02B5/1838 , G02B5/1814 , H01S3/08004 , H01S3/08009 , H01S3/081 , H01S3/0812 , H01S3/1055 , H01S3/225
摘要： An excimer or molecular fluorine laser system includes a laser chamber filled with a gas mixture at least including a halogen-containing species and a buffer gas, and multiple electrodes with the laser chamber connected to a discharge circuit energizing the gas mixture. The laser chamber is within a laser resonator generating an output beam. The resonator includes a line-narrowing package for reducing a bandwidth of the output beam. The line-narrowing package includes a grating or grism element for use with a highly reflective (HR) and/or an anti-reflective (AR) dielectric coating. The grating may serve as a resonator reflector having a dielectric HR coating. The grating may be disposed before a HR mirror and thus have a dielectric AR or HR coating when the grating is configured in transmission or reflection mode, respectively. The grating may be used as an output coupler, and may be partially reflective with or without a coating. The grism may have a dielectric AR coating on any transmissive surface and a dielectric HR coating on any reflective surface.
摘要翻译：准分子或分子氟激光系统包括填充有至少包含含卤物质和缓冲气体的气体混合物的激光室，以及激光室连接到对气体混合物通电的放电回路的多个电极。激光室在产生输出光束的激光谐振器内。谐振器包括用于减小输出光束的带宽的线窄化封装。线条窄化包装包括用于高反射（HR）和/或抗反射（AR）电介质涂层的光栅或棱镜元件。光栅可以用作具有介电HR涂层的谐振器反射器。光栅可以设置在HR反射镜之前，并且因此在光栅被配置为透射或反射模式时分别具有介电AR或HR涂层。光栅可以用作输出耦合器，并且可以是部分反射的，具有或不具有涂层。棱镜可以在任何反射表面上的任何透射表面上具有介电AR涂层和介电HR涂层。

5. 发明申请

US20060056478A1 Laser gas replenishment method 有权
标题翻译：激光加气方式
公开(公告)号：US20060056478A1
公开(公告)日：2006-03-16
申请号：US11263626
申请日：2005-10-31
申请人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
发明人： Hans-Stephen Albrecht , Klaus Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S3/22
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： Output beam parameters of a gas discharge laser are stabilized by maintaining a molecular fluorine component at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is subject to depletion within the discharge chamber. Gas injections including molecular fluorine can increase the partial pressure of molecular fluorine by a selected amount. The injections can be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure. The amount per injection and/or the interval between injections can be varied, based on factors such as driving voltage and a calculated amount of molecular fluorine in the discharge chamber. The driving voltage can be in one of multiple driving voltage ranges that are adjusted based on system aging. Within each range, gas injections and gas replacements can be performed based on, for example, total applied electrical energy or time/pulse count.
摘要翻译：气体放电激光器的输出光束参数通过使用气体供应单元和处理器将分子氟成分保持在预定的分压来稳定。分子氟在放电室内会耗尽。包括分子氟在内的气体注入可以将分子氟的分压提高一定量。注射可以以选定的间隔进行，以使构成气体基本保持在初始分压。基于诸如驱动电压和排放室中分子量的计算量的因素，可以改变每次注射的量和/或注射间隔。驱动电压可以是根据系统老化进行调整的多个驱动电压范围之一。在每个范围内，可以基于例如总施加的电能或时间/脉冲计数进行气体注入和气体替换。

6. 发明申请

US20110029344A1 Creating Purchase Orders with Mobile Devices 有权
标题翻译：使用移动设备创建采购订单
公开(公告)号：US20110029344A1
公开(公告)日：2011-02-03
申请号：US12533129
申请日：2009-07-31
申请人： Thomas Weiler , Martina Wingert , Timur Fichter , Thomas Schroeder , Ruediger Zuerl
发明人： Thomas Weiler , Martina Wingert , Timur Fichter , Thomas Schroeder , Ruediger Zuerl
IPC分类号： G06Q10/00 , G01C21/00 , G06Q30/00 , G06F3/048
CPC分类号： G06Q30/06 , G06Q10/087 , G06Q30/0633
摘要： Among other disclosed subject matter, a computer-implemented method of remotely generating a purchase order is to be initiated. The method includes receiving a communication in an enterprise resource planning (ERP) system. The ERP system has a purchasing transaction configured for communicating with each of multiple vendor systems for performing the acquisitions. The received communication is sent wirelessly from a mobile device operated by a user. The mobile device is configured for obtaining information from the user in a process compatible with the purchasing transaction for generating a purchase order in the ERP system. The method includes generating the purchase order in the ERP system. The purchase order includes an instruction to a vendor operating a first vendor system to deliver a quantity of a product type. The method includes forwarding the purchase order from the ERP system to the first vendor system.
摘要翻译：在其他公开的主题之中，将开始远程产生采购订单的计算机实现的方法。该方法包括在企业资源规划（ERP）系统中接收通信。 ERP系统具有配置用于与多个供应商系统中的每一个进行通信以进行采集的采购交易。所接收的通信是由用户操作的移动设备无线发送的。移动设备被配置为在与用于在ERP系统中生成采购订单的购买交易兼容的过程中从用户获取信息。该方法包括在ERP系统中生成采购订单。采购订单包括向经营第一供应商系统的供应商提供一定量的产品类型的指令。该方法包括将采购订单从ERP系统转发到第一供应商系统。

7. 发明申请

US20080291962A1 BANDWIDTH-LIMITED AND LONG PULSE MASTER OSCILLATOR POWER OSCILLATOR LASER SYSTEMS 有权
标题翻译： BANDWIDTH有限公司和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20080291962A1
公开(公告)日：2008-11-27
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O.W. Weissner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

8. 发明申请

US20080241519A1 Semiconductor Wafer and Process For Its Production 有权
标题翻译：半导体晶圆及其生产工艺
公开(公告)号：US20080241519A1
公开(公告)日：2008-10-02
申请号：US12055356
申请日：2008-03-26
申请人： Thomas Schroeder , Peter Storck , Hans-Joachim Muessig
发明人： Thomas Schroeder , Peter Storck , Hans-Joachim Muessig
IPC分类号： H01L23/00 , C30B15/14
CPC分类号： H01L21/31604 , H01L21/02381 , H01L21/02488 , H01L21/02505 , H01L21/0251 , H01L21/02521 , H01L21/02532 , H01L21/0254 , H01L21/31691 , H01L21/7624 , Y10T428/24975 , Y10T428/26
摘要： A layered semiconductor wafer contains the following layers in the given order: a monocrystalline substrate wafer (1) containing substantially silicon, a first amorphous intermediate layer (2) of an electrically insulating material having a thickness of 2 nm to 100 nm, a monocrystalline first oxide layer (3) having a cubic Ia-3 crystal structure, a composition of (M12O3)1-x(M22O3)x wherein each of M1 and M2 is a metal and wherein 0≦x≦1, and a lattice constant which differs from the lattice constant of the material of the substrate wafer by 0% to 5%. The invention also relates to a process for manufacturing such semiconductor wafers by epitaxial deposition.
摘要翻译：分层半导体晶片按照给定的顺序包含以下层：基本上含有硅的单晶衬底晶片（1），具有2nm至100nm厚度的电绝缘材料的第一非晶中间层（2），第一单晶具有立方体Ia-3晶体结构的氧化物层（3），（M 1 -O 2 O 3 O 3）1的组成（2）其中M 1，M 2， / SUP>和M 2是金属，并且其中0≤x≤1，并且晶格常数不同于衬底晶片的材料的晶格常数0％至5％。本发明还涉及通过外延沉积制造这种半导体晶片的方法。

9. 发明授权

US07175109B2 Double-swirl spray nozzle 有权
标题翻译：双旋喷嘴
公开(公告)号：US07175109B2
公开(公告)日：2007-02-13
申请号：US10872817
申请日：2004-06-21
申请人： Thomas Schroeder , Juergen Speier
发明人： Thomas Schroeder , Juergen Speier
IPC分类号： B05B1/34
CPC分类号： B05B1/14 , B05B1/3426
摘要： A double-swirl spray nozzle includes two swirl chambers which are connected to a common supply channel which extends in a central plane between the swirl chambers. Both swirl chambers have outlet openings which open outwardly from the supply channel to the same side. The axes of the swirl chambers are furthermore inclined at an angle with respect to one another. Thus with one single compact spray nozzle it is possible to create atomizing cones with a very large impact area which mutually overlap on the side facing one another and in spite of the speed component unidirected in the overlapping area result in a secondary division of the liquid droplets in the two atomizing cones, which increases the efficiency when the nozzle is utilized in so-called gas washers for cleaning purposes.
摘要翻译：双涡流喷嘴包括两个旋转室，其连接到在涡流室之间的中心平面中延伸的公共供应通道。两个涡流室具有从供应通道向外向同一侧开口的出口。漩涡室的轴线进一步相对于彼此倾斜一定角度。因此，利用一个紧凑的喷嘴，可以产生具有非常大的冲击面积的雾化锥体，该冲击区域在彼此相对的侧面上相互重叠，并且尽管在重叠区域中指向的速度分量导致液滴的二次分割在两个雾化锥体中，当喷嘴用于所谓的用于清洁的气体洗涤器时，这提高了效率。

10. 发明授权

US06735225B2 Chirp compensation method and apparatus 失效
标题翻译：啁啾补偿方法及装置
公开(公告)号：US06735225B2
公开(公告)日：2004-05-11
申请号：US10165766
申请日：2002-06-06
申请人： Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
发明人： Hans-Stephan Albrecht , Matthias Kramer , Marcus Serwazi , Thomas Schroeder , Stefan Niedermeier
IPC分类号： H01S310
CPC分类号： H01S3/225 , H01S3/1055 , H01S3/1062
摘要： A wavelength chirp compensation method for an excimer or molecular fluorine laser system operating in burst mode, includes pre-programming into a computer of the laser system resonator tuning optic adjustments for making the adjustments during pauses between bursts to compensate wavelength chirp at beginnings of succeeding bursts.
摘要翻译：用于以突发模式操作的准分子或分子氟激光系统的波长啁啾补偿方法包括对激光系统谐振器调谐光调节器的计算机进行预编程，以在脉冲串之间的暂停期间进行调整以补偿在后续脉冲串开始时的波长啁啾。

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