会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 4. 发明授权
    • Microwave processing
    • 微波处理
    • US5317081A
    • 1994-05-31
    • US799378
    • 1991-11-27
    • Jeffrey D. GelormeDavid A. LewisJane M. Shaw
    • Jeffrey D. GelormeDavid A. LewisJane M. Shaw
    • B01J19/12C08G73/10G01N22/00H01L21/312H05B6/68H05B6/80H05K1/03H05K3/46C08G69/26B05D5/12
    • H05B6/705B01J19/126C08G73/1025G01N22/00H05B6/68B01J2219/00191B01J2219/1215H05K1/0346H05K3/4644Y02B40/143Y10T428/31681Y10T428/31721
    • A method and apparatus are disclosed for conducting a physical process and a chemical reaction by exposing a material containing a volatile substance to microwave radiation where the morphology of said material will change when exposed to such radiation. The power of said radiation is adjusted over time as the morphology of the material changes to maximize the effect of the radiation in order to produce a product in a minimum amount of time that is substantially free of said volatile substance.The method and apparatus can also be used to conduct such a process or reaction with materials that do not contain a volatile material.In one embodiment a method and apparatus are disclosed for manufacturing a polyimide from a precursor in a solvent by exposing the precursor to microwave radiation in a tuneable microwave resonant cavity that is tuned during imidization to achieve critical coupling of the system. Microwave power is controlled to remove the solvent and obtain the desired level of reaction. Processing time has been reduced thirty fold as compared to conventional thermal methods.
    • 公开了一种用于通过将含有挥发性物质的材料暴露于微波辐射进行物理过程和化学反应的方法和装置,其中当暴露于这种辐射时所述材料的形态将改变。 随着材料的形态发生变化,随着时间的推移调整所述辐射的功率以最大化辐射的影响,以便在基本上不含所述挥发性物质的最小时间内产生产物。 该方法和装置也可用于对不含挥发性物质的材料进行这种处理或反应。 在一个实施方案中,公开了一种用于通过在可调谐的微波谐振腔中将前体暴露于微波辐射中的溶剂中的前体制造聚酰亚胺的方法和装置,其在亚胺化期间被调谐以实现系统的临界耦合。 控制微波功率以除去溶剂并获得所需的反应水平。 与常规热法相比,处理时间减少了三十倍。
    • 8. 发明授权
    • Precision alignment of plates
    • 板的精确对准
    • US06177975B1
    • 2001-01-23
    • US09559958
    • 2000-04-27
    • Stephen L. BuchwalterDavid A. LewisShui-Chih Alan LienSampath PurushothamanJohn J. Ritsko
    • Stephen L. BuchwalterDavid A. LewisShui-Chih Alan LienSampath PurushothamanJohn J. Ritsko
    • G02F113
    • G02F1/1333G02F2001/133354
    • A system for aligning two plates, in accordance with the present invention, includes a first plate having a lithographically patterned structure formed on a first surface. A second plate also has a lithographically patterned structure formed on a second surface, the first and second surfaces being disposed to face each other. The patterned structures of the plates have corresponding and opposing edges to provide an interference fit between the patterned structures of the first and second plates wherein self-alignment between the first and second plates is realized by engaging the corresponding and opposing edges in the interference fit. A method for aligning two plates includes the steps of providing the system described above, coarsely aligning the plates in a first state which includes an interference between the patterned structures, adjusting at least one of plates to provide a second state having a clearance fit between the patterned structures and moving the plates together and returning to the first state to align the plates relative to each other.
    • 根据本发明的用于对准两个板的系统包括形成在第一表面上的具有光刻图案化结构的第一板。 第二板还具有形成在第二表面上的光刻图案结构,第一和第二表面被设置为彼此面对。 板的图案化结构具有对应的和相对的边缘,以在第一和第二板的图案化结构之间提供过盈配合,其中第一和第二板之间的自对准是通过在干涉配合中接合相应和相对的边缘来实现的。 一种用于对准两个板的方法包括以下步骤:提供上述系统,在第一状态下将板粗略对准,该第一状态包括图案化结构之间的干涉,调节板中的至少一个以提供第二状态, 图案化结构并将板移动到一起并返回到第一状态以使板相对于彼此对准。
    • 9. 发明授权
    • Hierarchical system of the simple modification of process steps for a
manufacturing tool
    • 制造工具的工艺步骤的简单修改的​​分层系统
    • US5790406A
    • 1998-08-04
    • US546364
    • 1995-10-20
    • John P. DunnDavid A. Lewis
    • John P. DunnDavid A. Lewis
    • G05B19/418G06F9/00G06F11/00
    • G05B19/41835Y02P90/12Y02P90/26
    • A system and method for controlling an apparatus, in particular an apparatus for performing manufacturing operations on a work piece is described. The system uses a hierarchical series of levels of functional operations. The system has a highest level and a series of lower levels. There is a means for initiating an instruction in the highest level which results in executing of instructions in the series of lower levels until an instruction is executed to control the apparatus. A particular example consists of four levels all written as sample programming language files which are fully editable and modifiable by end users: A manufacturing operations consists of a cell or cluster of manufacturing the operations of which are controlled by the system of the invention which enables on-line tool diagnostics and simulations that can predict the effects of proposed process changes, thereby reducing the time normally required to make alterations to a process.
    • 描述了用于控制装置的系统和方法,特别是用于在工件上执行制造操作的装置。 该系统使用层次化的功能操作级别。 该系统具有最高级别和一系列较低级别。 存在用于启动最高级别的指令的装置,其导致执行下一系列级别的指令,直到执行指令以控制该装置。 一个特定的例子包括四个层次,所有这些层面都是作为最终用户完全可编辑和修改的示例编程语言文件编写的:制造操作包括由本发明的系统控制的制造单元或集群, 可以预测所提出的过程变化的影响的线工具诊断和模拟,从而减少对过程进行更改所需的时间。