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    • 7. 发明申请
    • CRUCIBLE PROTECTION SHEET AND CRUCIBLE APPARATUS USING THE CRUCIBLE PROTECTION SHEET
    • 使用防腐片保护片和可疑装置
    • US20090308307A1
    • 2009-12-17
    • US12373182
    • 2007-07-09
    • Yoshiaki HiroseTetsuya YukiTeruhisa KondoOsamu Okada
    • Yoshiaki HiroseTetsuya YukiTeruhisa KondoOsamu Okada
    • C30B15/12B32B9/00
    • F27B14/10C30B15/10Y10T117/10Y10T117/1004Y10T117/1024Y10T117/1052
    • A crucible protection sheet is provided that can prevent damages to an inner crucible, hinder an outer crucible from silicon-carbidization, and transmit heat from the outer crucible to the inner crucible uniformly.In a crucible having an inner crucible 2 and an outer crucible 3, the crucible protection sheet is arranged between the two crucibles and is made of expanded graphite. The planar thermal conductivity is 120 W/(m·K) or higher, the gas permeability is less than 1.0×10−4 cm2/s, and the compression ratio is 20% or higher when the sheet is compressed in a thickness direction at a pressure of 34.3 MPa. Since the compression ratio is high, the effect of preventing breakage is great when inserting the inner crucible, improving workability and preventing the inner crucible from tilting inside the outer crucible. In addition, even though the compression ratio is high, the thermal conductivity is kept to such a degree that the inner crucible can be heated uniformly, and the gas shielding capability is also ensured. As a result, the outer crucible is prevented from silicon-carbidization and thickness decrease.
    • 提供了可以防止内坩埚损坏的坩埚保护片,阻止外坩埚从硅碳化,并将热量从外坩埚均匀地传递到内坩埚。 在具有内坩埚2和外坩埚3的坩埚中,坩埚保护片布置在两个坩埚之间并且由膨胀石墨制成。 平面导热率为120W /(mK)以上,气体透过率小于1.0×10 -4 cm 2 / s,压缩比为20%以上时,在厚度方向压缩片材的压力为 34.3MPa。 由于压缩比高,所以在插入内坩埚时,防止破损的效果大,提高加工性,防止内坩埚在外坩埚内部倾斜。 此外,即使压缩比高,导热率也保持在内坩埚能均匀加热的程度,并且也保证了气体屏蔽能力。 结果,防止了外坩埚的硅 - 碳化和厚度的减小。