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1. 发明授权

US5832420A Data collection apparatus 失效
标题翻译：数据采集装置
公开(公告)号：US5832420A
公开(公告)日：1998-11-03
申请号：US715277
申请日：1996-09-16
申请人： Hiroshi Yuhara , Masahiko Takahashi , Yukinori Kasajima , Noriyuki Sakuma , Hideki Sano , Kazutoshi Okamoto , Kiyofumi Miyahara , Shuji Katsuoka , Mayumi Tamura , Naoyuki Harada
发明人： Hiroshi Yuhara , Masahiko Takahashi , Yukinori Kasajima , Noriyuki Sakuma , Hideki Sano , Kazutoshi Okamoto , Kiyofumi Miyahara , Shuji Katsuoka , Mayumi Tamura , Naoyuki Harada
IPC分类号： G06F17/40 , G01K7/00
CPC分类号： B41J29/393 , B41J29/02 , B41J29/13 , B41J29/38 , B41J19/205
摘要： A data processor for processing, recording and/or displaying data obtained from an object being examined, comprising a plurality of detachable units formed of functional blocks connected together by communication cables; a carriage driver using a screw to improve character print quality and resolution; a plurality of input units which convert signals obtained from the object into digital output signals; a control unit comprising a plurality of connectors attached to the respective input units and an arithmetic/communication device having information about positions at which the connectors are mounted and collecting signals obtained from the object and arithmetically processing the signals, and storage device wherein results of the arithmetic processing are stored; wherein the control unit processes data obtained from the object using signals tored in the storage device, and produces the recording and/or display; and wherein the character printing portion of the control unit comprises a support and driver for driving the carriage, with the support holding the carriage on which the recording head is carried so that the carriage can move across the paper, and wherein the driver comprises a motor and a screw connected to the motor shaft, and a nut mounted on the carriage and meshed with the screw. Advantageously, the functions can be flexibly increased or decreased as desired, and the number of components can be flexibly decreased so that the entire system has a greatly increased efficiency, economy, and reliability.
摘要翻译：一种用于处理，记录和/或显示从被检查对象获得的数据的数据处理器，包括由通过通信电缆连接在一起的功能块形成的多个可拆卸单元; 使用螺丝的马达驱动程序来提高字符打印质量和分辨率; 将从对象获得的信号转换为数字输出信号的多个输入单元; 控制单元，包括附接到各个输入单元的多个连接器和具有关于连接器的安装位置的信息的算术/通信装置，以及从该对象获得的收集信号和对该信号进行算术处理的存储装置，其中，存储算术处理; 其中所述控制单元使用在所述存储装置中被重构的信号来处理从所述对象获得的数据，并且产生所述记录和/或显示; 并且其中所述控制单元的字符打印部分包括用于驱动所述托架的支撑件和驱动器，其中所述支撑件保持承载所述记录头的托架，使得所述托架能够移动穿过所述纸张，并且其中所述驱动器包括马达以及连接到电动机轴的螺钉，以及安装在滑架上并与螺钉啮合的螺母。有利地，可以根据需要灵活地增加或减少功能，并且可以灵活地减少部件的数量，使得整个系统具有大大提高的效率，经济性和可靠性。

2. 发明授权

US07886594B2 Thermal type fluid flow sensor with metal film resistor 有权
标题翻译：带有金属膜电阻的热式流体流量传感器
公开(公告)号：US07886594B2
公开(公告)日：2011-02-15
申请号：US12699170
申请日：2010-02-03
申请人： Noriyuki Sakuma
发明人： Noriyuki Sakuma
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , Y10T29/49085
摘要： A thermal-type fluid flow sensor is provided to measure an air flow rate flowing through an air intake passage. The thermal-type fluid flow sensor includes a heating resistive element; a first temperature-measuring resistive element for detecting a temperature of the heating resistive element; a second temperature-measuring resistive element for detecting the temperature of air on an upstream side of air heated by the heating resistive element; a third temperature-measuring resistive element for detecting the temperature of air on a downstream side of air heated by the heating resistive element, and a fourth temperature-measuring resistive element for detecting the temperature of air, wherein the heating resistive element and the first, second, third and fourth temperature-measuring resistive elements are formed on a substrate, the heating resistive element is disposed in an upper layer or a lower layer of the first temperature-measuring resistive element, and a resistance ratio of materials of the heating resistive element is larger than a resistance ratio of materials of the first temperature-measuring resistive element.
摘要翻译：提供热型流体流量传感器来测量流过进气通道的空气流量。热式流体流量传感器包括加热电阻元件; 第一温度测量电阻元件，用于检测加热电阻元件的温度; 第二温度测量电阻元件，用于检测由加热电阻元件加热的空气的上游侧的空气的温度; 第三温度测量电阻元件，用于检测由加热电阻元件加热的空气的下游侧的空气的温度;以及第四温度测量电阻元件，用于检测空气的温度，其中加热电阻元件和第一，第二，第三和第四温度测量电阻元件形成在基板上，加热电阻元件设置在第一温度测量电阻元件的上层或下层中，加热电阻元件的材料的电阻比大于第一温度测量电阻元件的材料的电阻比。

3. 发明申请

US20080168650A1 Thermal Type Fluid Flow Sensor and Manufacturing Method Thereof 有权
标题翻译：热式流体流量传感器及其制造方法
公开(公告)号：US20080168650A1
公开(公告)日：2008-07-17
申请号：US11964105
申请日：2007-12-26
申请人： Noriyuki Sakuma
发明人： Noriyuki Sakuma
IPC分类号： H01C7/02 , G01F1/68 , C23F1/00
CPC分类号： G01F1/6845 , G01F1/692 , Y10T29/49085
摘要： A thermal-type fluid flow sensor technology for measuring more precisely the temperature of the heater for an improved sensibility of detecting flow measurements. The thermal-type fluid flow sensor for measuring the air flow rate includes a heating resistive element formed on the semiconductor substrate through a first insulating layer, temperature-measuring resistive elements for heating resistive element for measuring the temperature of the heating resistive element, upstream and downstream temperature-measuring resistive elements for detecting the temperature of air on the upstream side and the downstream side of the air heated by the heating resistive element, and an air temperature measuring resistive element for measuring the temperature of the air heated by the heating resistive element, and at least the temperature-measuring resistive element for the heating resistive element is disposed in the upper layer or lower layer of the heating resistive element.
摘要翻译：一种热式流体流量传感器技术，用于更精确地测量加热器的温度，以提高检测流量测量的灵敏度。用于测量空气流量的热式流体流量传感器包括通过第一绝缘层形成在半导体衬底上的加热电阻元件，用于加热电阻元件的温度测量电阻元件，用于测量上游的加热电阻元件的温度，用于检测由加热电阻元件加热的空气的上游侧和下游侧的空气的温度的下游温度测量电阻元件，以及用于测量由加热电阻元件加热的空气的温度的空气温度测量电阻元件并且至少用于加热电阻元件的温度测量电阻元件设置在加热电阻元件的上层或下层中。

4. 发明授权

US07183212B2 Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device 有权
标题翻译：抛光方法，金属化制造方法，制造半导体器件和半导体器件的方法
公开(公告)号：US07183212B2
公开(公告)日：2007-02-27
申请号：US10898252
申请日：2004-07-26
申请人： Seiichi Kondo , Masaaki Fujimori , Noriyuki Sakuma , Yoshio Homma
发明人： Seiichi Kondo , Masaaki Fujimori , Noriyuki Sakuma , Yoshio Homma
IPC分类号： H01L21/302
CPC分类号： C23F1/18 , C09G1/04 , C23F3/06 , H01L21/3212 , H01L21/7684
摘要： Described is a polishing technique adapted for multilevel metallization of an electronic circuit device, which comprises polishing a metal film with a polishing liquid containing an oxidizing substance, a phosphoric acid and a protection-layer forming agent. The present invention makes it possible to polishing a metal film at a high removal rate while suppressing occurrence of scratches, delamination, dishing or erosion.
摘要翻译：描述了适用于电子电路器件的多层金属化的抛光技术，其包括用包含氧化物质，磷酸和保护层形成剂的抛光液抛光金属膜。本发明能够在抑制划痕，分层，凹陷或侵蚀的发生的同时以高的去除率对金属膜进行研磨。

5. 发明授权

US06750128B2 Methods of polishing, interconnect-fabrication, and producing semiconductor devices 失效
标题翻译：抛光，互连制造和制造半导体器件的方法
公开(公告)号：US06750128B2
公开(公告)日：2004-06-15
申请号：US10396410
申请日：2003-03-26
申请人： Seiichi Kondo , Noriyuki Sakuma , Yoshio Homma
发明人： Seiichi Kondo , Noriyuki Sakuma , Yoshio Homma
IPC分类号： H01L213205
CPC分类号： H01L21/3212 , B24B37/044 , C09G1/02 , H01L21/7684
摘要： The present invention provides a technique to reduce and suppress scratches and delamination, to suppress and control the development of dishing and erosion, and to polish at high polishing rate. Polishing is performed using a polishing solution, which contains an oxidizer, phosphoric acid, organic acid, a chemical to form inhibition layer, and water.
摘要翻译：本发明提供减少和抑制划痕和分层，抑制和控制凹陷和侵蚀的发展并以高抛光速率抛光的技术。使用包含氧化剂，磷酸，有机酸，形成抑制层的化学品和水的抛光溶液进行抛光。

6. 发明授权

US06596638B1 Polishing method 有权
标题翻译：抛光方法
公开(公告)号：US06596638B1
公开(公告)日：2003-07-22
申请号：US09618999
申请日：2000-07-18
申请人： Seiichi Kondo , Yoshio Homma , Noriyuki Sakuma , Kenichi Takeda , Kenji Hinode
发明人： Seiichi Kondo , Yoshio Homma , Noriyuki Sakuma , Kenichi Takeda , Kenji Hinode
IPC分类号： H01L21302
CPC分类号： C23F3/06 , B24B37/04 , C09G1/02 , C09K3/1463 , H01L21/02074 , H01L21/3212 , H01L21/7684
摘要： A polishing technique wherein scratches, peeling, dishing and erosion are suppressed, a complex cleaning process and slurry supply/processing equipment are not required, and the cost of consumable items, such as slurries and polishing pads, is reduced. A metal film formed on an insulating film having a groove is polished with a polishing solution containing an oxidizer and a substance which renders oxides water-soluble, but not containing a polishing abrasive.
摘要翻译：抑制了划痕，剥离，凹陷和侵蚀的抛光技术，不需要复杂的清洁处理和浆料供应/处理设备，并且消耗品如浆料和抛光垫的成本降低。在具有凹槽的绝缘膜上形成的金属膜用含有氧化剂和使氧化物水溶性但不含抛光磨料的物质的抛光溶液抛光。

7. 发明授权

US06561875B1 Apparatus and method for producing substrate with electrical wire thereon 失效
标题翻译：用于生产具有电线的基底的装置和方法
公开(公告)号：US06561875B1
公开(公告)日：2003-05-13
申请号：US09558593
申请日：2000-04-26
申请人： Yoshio Homma , Noriyuki Sakuma , Naofumi Ohashi , Toshinori Imai
发明人： Yoshio Homma , Noriyuki Sakuma , Naofumi Ohashi , Toshinori Imai
IPC分类号： B24B2900
CPC分类号： B24B49/006 , B24B37/042 , B24B49/16 , B24B57/02
摘要： The apparatus and method for producing a substrate whose surface includes a metallic wire by polishing the substrate surface. A polishing liquid is supplied to a clearance between the substrate and the surface of a polishing pad. The polishing liquid includes an acid which dissolves the oxidized part of the substrate surface and is substantially free of solid abrasive powder. A relative movement is generated between the substrate surface and the polishing pad surface while the substrate surface is pressed against the polishing pad surface while the polishing liquid is supplied so that the dissolved oxidized part of the substrates surface can be removed from the substrate.
摘要翻译：通过研磨基板表面来制造表面包括金属线的基板的装置和方法。将研磨液供给到基板与研磨垫的表面之间的间隙。抛光液包括溶解基材表面的氧化部分并基本上不含固体磨料粉末的酸。当衬底表面被压靠在抛光垫表面上时，在衬底表面和抛光垫表面之间产生相对运动，同时提供抛光液体，使得可以从衬底去除基底表面的溶解的氧化部分。

8. 发明授权

US4891684A Semiconductor device 失效
标题翻译：半导体器件
公开(公告)号：US4891684A
公开(公告)日：1990-01-02
申请号：US81231
申请日：1987-08-04
申请人： Yasushiro Nishioka , Hiroshi Shinriki , Noriyuki Sakuma , Kiichiro Mukai
发明人： Yasushiro Nishioka , Hiroshi Shinriki , Noriyuki Sakuma , Kiichiro Mukai
IPC分类号： H01L21/314 , H01G4/005 , H01G4/33 , H01L21/822 , H01L27/04 , H01L27/108 , H01L29/94
CPC分类号： H01L29/94 , H01G4/005 , H01G4/33 , H01L27/10805
摘要： A reaction-preventing film is provided between a capacitor insulating film made of a material having a high dielectric constant, such as Ta.sub.2 O.sub.5, and an upper electrode in order to prevent a reaction of the upper electrode with the capacitor insulating film. This effectively prevents the reaction between the upper electrode and the capacitor caused by a heat treatment conducted after formation of the capacitor, and hence prevents an increase in leakage current caused by the reaction. Thus, the reliability of a semiconductor device is remarkably increased.
摘要翻译：为了防止上部电极与电容绝缘膜的反应，在由具有高介电常数的材料制成的电容器绝缘膜（例如Ta 2 O 5）和上部电极之间设置防反射膜。这有效地防止了在形成电容器之后进行的热处理引起的上部电极和电容器之间的反应，从而防止了由反应引起的漏电流的增加。因此，半导体器件的可靠性显着增加。

9. 发明授权

US4809052A Semiconductor memory device 失效
标题翻译：半导体存储器件
公开(公告)号：US4809052A
公开(公告)日：1989-02-28
申请号：US860413
申请日：1986-05-07
申请人： Yasushiro Nishioka , Takeo Shiba , Hiroshi Shinriki , Kiichiro Mukai , Akihisa Uchida , Ichiro Mitamura , Keiichi Higeta , Katsumi Ogiue , Kunihiko Yamaguchi , Noriyuki Sakuma
发明人： Yasushiro Nishioka , Takeo Shiba , Hiroshi Shinriki , Kiichiro Mukai , Akihisa Uchida , Ichiro Mitamura , Keiichi Higeta , Katsumi Ogiue , Kunihiko Yamaguchi , Noriyuki Sakuma
IPC分类号： G11C11/411 , H01L27/102 , H01L27/10 , H01L29/40 , H01L29/48
CPC分类号： G11C11/4116 , H01L27/1025
摘要： A semiconductor memory device is provided such as the type having flip-flop memory cells each including two bipolar transistors in cross connection with each other. In certain embodiments, at least a part of a Schottky barrier diode or capacitor in the memory cell is formed under a digit line. This memory device is greatly reduced in its required area, and the Schottky barrier diode and capacitor are negligibly influenced by the digit line. In other embodiments, it is arranged to provide different electrodes for the Schottky barrier diode and the capacitor to optimize construction in a minimized space.
摘要翻译：提供半导体存储器件，例如具有触发器存储单元的类型，每个触发器存储单元包括彼此交叉连接的两个双极晶体管。在某些实施例中，在数字线下形成存储单元中的肖特基势垒二极管或电容器的至少一部分。该存储器件的所需面积大大降低，肖特基势垒二极管和电容器受数字线影响不大。在其他实施例中，它被设置为为肖特基势垒二极管和电容器提供不同的电极，以在最小化的空间中优化结构。

10. 发明申请

US20140284753A1 Thermal Air Flow Sensor 有权
标题翻译：热空气流量传感器
公开(公告)号：US20140284753A1
公开(公告)日：2014-09-25
申请号：US14355104
申请日：2011-11-28
申请人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
发明人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
IPC分类号： G01F1/69
CPC分类号： G01F1/69 , G01F1/692
摘要： A thermal air flow sensor that produces less measurement error is provided. The thermal air flow sensor includes: a semiconductor substrate; a heating resistor, resistance temperature detectors, and an electrical insulator that includes a silicon oxide film, wherein the heating resistor, the resistance temperature detectors, and the electrical insulator are formed on the semiconductor substrate; and a diaphragm portion formed by removing a portion of the semiconductor substrate. The heating resistor and the resistance temperature detectors are formed on the diaphragm portion. The thermal air flow sensor further includes a silicon nitride film formed as the electrical insulator above the heating resistor and the resistance temperature detectors. The silicon nitride film has steps conforming to the patterns of the heating resistor and the resistance temperature detectors. The silicon nitride film has a multilayer structure.
摘要翻译：提供了产生较少测量误差的热空气流量传感器。热空气流量传感器包括：半导体衬底; 加热电阻器，电阻温度检测器和包括氧化硅膜的电绝缘体，其中在半导体衬底上形成有加热电阻器，电阻温度检测器和电绝缘体; 以及通过去除半导体衬底的一部分而形成的膜片部分。加热电阻器和电阻温度检测器形成在隔膜部分上。热空气流量传感器还包括形成为加热电阻器上方的电绝缘体的电阻温度检测器的氮化硅膜。氮化硅膜具有符合加热电阻器和电阻温度检测器的图案的步骤。氮化硅膜具有多层结构。

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