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1. 发明授权

US06430324B1 Optical probe and method for manufacturing same and scanning proximity field optical microscope 失效
标题翻译：光学探针及其制造方法及扫描近场光学显微镜
公开(公告)号：US06430324B1
公开(公告)日：2002-08-06
申请号：US09378209
申请日：1999-08-19
申请人： Hiroshi Muramatsu , Katsunori Honma , Norio Chiba , Noritake Yamamoto , Akira Egawa
发明人： Hiroshi Muramatsu , Katsunori Honma , Norio Chiba , Noritake Yamamoto , Akira Egawa
IPC分类号： G02B626
CPC分类号： G01Q60/22 , G02B6/241 , G02B6/2552 , Y10S977/862
摘要： A proximity field optical microscope is provided which can simultaneously conduct optical observation in the ultraviolet and infrared light ranges and conduct geometrical observation and detect other physical information, wherein a microscopic opening is stably and easily formed in a probe tip with low manufacturing cost and high yield. The microscope has an optical probe which comprises a tube having a tip portion formed with a smaller diameter than an overall diameter of the tube, an optically opaque material coated on the tube, an optical microscope opening formed at the tip portion, and an optical waveguide having at least two optical end surfaces, one end surface being inserted in the tube facing the microscopic opening.
摘要翻译：提供一种近场光学显微镜，可以在紫外线和红外光范围内同时进行光学观察，并进行几何观察并检测其他物理信息，其中微型开口稳定且容易地形成在探针尖端，制造成本低，产量高。该显微镜具有光学探头，该光学探头包括具有直径小于管的总直径的尖端部分的管，涂覆在管上的光学不透明材料，形成在尖端部分处的光学显微镜开口和光波导具有至少两个光学端面，一个端面插入面向微观开口的管中。

2. 发明授权

US06280647B1 Method for sharpening a probe 有权
标题翻译：探头探头的方法
公开(公告)号：US06280647B1
公开(公告)日：2001-08-28
申请号：US09310268
申请日：1999-05-12
申请人： Hiroshi Muramatsu , Katsunori Honma , Norio Chiba , Noritaka Yamamoto , Akira Egawa
发明人： Hiroshi Muramatsu , Katsunori Honma , Norio Chiba , Noritaka Yamamoto , Akira Egawa
IPC分类号： B44C122
CPC分类号： G01Q70/16
摘要： In a method for sharpening a probe, a probe preform having a longitudinal axis is at least partially immersed in a mixture containing at least an etch solution and a non-etch solution having a lower specific gravity than and which is not miscible with the etch solution. The probe preform is moved in the mixture along the longitudinal axis thereof during etching at a speed which does not exceed a taper length forming speed for a probe preform which is not moved in the etch solution during etching. An end of the probe preform is etched into a sharp tapered tip having a taper angle greater than that obtained for the probe preform which is not moved during etching.
摘要翻译：在用于磨削探针的方法中，具有纵向轴线的探针预成型件至少部分地浸没在至少含有蚀刻溶液和比重低于不与蚀刻溶液混溶的非蚀刻溶液的混合物中。在蚀刻期间，探针预成型件沿着其纵向轴线以不超过在蚀刻期间在蚀刻溶液中移动的探针预成型件的锥形长度形成速度的速度在其蚀刻期间沿其纵向轴线移动。探针预成型件的端部被蚀刻成具有大于在蚀刻期间不移动的探针预成型件获得的锥形角的尖锐锥形尖端。

3. 发明授权

US6100534A Microscopic area scanning apparatus 失效
标题翻译：显微镜扫描仪
公开(公告)号：US6100534A
公开(公告)日：2000-08-08
申请号：US97478
申请日：1998-06-15
申请人： Katsunori Honma , Hiroshi Muramatsu , Norio Chiba
发明人： Katsunori Honma , Hiroshi Muramatsu , Norio Chiba
IPC分类号： G01B21/30 , G01N37/00 , G01Q10/04 , G01Q30/08 , G01Q30/20 , G01Q60/00 , G01Q90/00 , G05D3/00 , G21K5/10
CPC分类号： G01Q10/04 , B82Y35/00 , Y10S977/872
摘要： A microscopic area scanning apparatus is provided with at least three hollow cylindrical piezoelectric elements each driven in three XYZ directions by one of divided electrodes. Three or more hollow cylindrical piezoelectric elements are arranged on a circumference of a common plane. Balls are each axially provided at a free end of the hollow cylindrical piezoelectric element. Ball retainers rotatably and slidably support a respective ball in contact therewith. A sample stage is fixed to the ball retainers. A table fixes the hollow cylindrical piezoelectric elements on the circumference of the common plane. Thus, the microscopic area scanning apparatus can realize both a wide X-Y scanning range and a high Z-direction resonant frequency without utilizing an elastic hinge.
摘要翻译：微观区域扫描装置设置有至少三个中空圆柱形压电元件，每个中空圆柱形压电元件通过一个分割电极以三个XYZ方向驱动。三个或更多个中空圆柱形压电元件布置在公共平面的圆周上。球体各自轴向设置在中空圆柱形压电元件的自由端。球保持器可旋转并可滑动地支撑与其接触的相应球。样品台固定在球保持器上。一个表固定在公共平面圆周上的中空圆柱形压电元件。因此，微区域扫描装置可以在不使用弹性铰链的情况下实现宽X-Y扫描范围和高Z方向共振频率。

4. 发明授权

US06396050B1 Self-emitting optical probe, method for producing the same, and scanning near-field optical microscope 有权
标题翻译：自发光探针，其制造方法和扫描近场光学显微镜
公开(公告)号：US06396050B1
公开(公告)日：2002-05-28
申请号：US09497012
申请日：2000-02-02
申请人： Noritaka Yamamoto , Hiroshi Muramatsu , Norio Chiba , Katsunori Honma
发明人： Noritaka Yamamoto , Hiroshi Muramatsu , Norio Chiba , Katsunori Honma
IPC分类号： H01J314
CPC分类号： G01Q60/22 , Y10S977/862
摘要： A self-emitting optical probe having a built-in light-emitting function, wherein the light-emitting mechanism and the aperture portion of the optical probe are formed by depositing an electrically conductive thin film, an organic thin film, and a metallic film by means of sputtering and oblique vacuum evaporation while rotating the core. The self-emitting optical probe enables an inexpensive scanning near field optical microscope yet simplified in operation.
摘要翻译：具有内置发光功能的自发光光学探针，其中所述发光机构和所述光学探针的开口部分通过以下方式形成：通过沉积导电薄膜，有机薄膜和金属膜来形成旋转芯片时溅射和倾斜真空蒸发的手段。自发光光学探针能够在近场光学显微镜下实现便宜的扫描，但操作简化。

5. 发明授权

US5821409A Scanning near-field optic/atomic-force microscope with observing function in liquid 失效
标题翻译：用液体观察功能扫描近场光学/原子力显微镜
公开(公告)号：US5821409A
公开(公告)日：1998-10-13
申请号：US525348
申请日：1995-09-07
申请人： Katsunori Honma , Hiroshi Muramatsu , Norio Chiba
发明人： Katsunori Honma , Hiroshi Muramatsu , Norio Chiba
IPC分类号： G01B21/30 , G01B7/34 , G01B11/30 , G01N37/00 , G01Q30/12 , G01Q30/14 , G01Q30/20 , G01Q60/06 , G01Q60/18 , G01Q60/24 , G01Q60/32 , G01Q80/00 , G02B21/00 , H01J37/28 , G01B5/28 , H01J3/14
CPC分类号： G01Q20/02 , B82Y20/00 , B82Y35/00 , G01Q30/14 , G01Q60/06 , G01Q60/22 , Y10S977/862
摘要： A scanning near-field optic/atomic-force microscope comprises a holder for holding a sample immersed in a liquid, and a plate disposed over the holder for covering a surface of the liquid and for transmitting therethrough a laser light. A probe has an optical propagation body terminating in a distal end, and a light reflecting element disposed thereon, and the probe is immersed in the liquid. A light source emits a light which is introduced into the optical propagation body of the probe, which guides the light through the probe and out the distal end thereof to irradiate the sample. A detecting device detects information from the light irradiated on the sample and converts the information to an electric signal. A laser source irradiates the light reflecting element of the probe with a laser light for detecting a bending amount of the probe resulting from an interaction between the sample and the probe. An angle adjusting mechanism adjusts an optical axis of the laser light transmitted through the plate. A photoelectric conversion device receives the laser light reflected from the light reflecting element and converts the reflected light into an electric signal. A moving mechanism moves the sample relative to the probe, and a distance control device controls a distance between the surface of the sample and the distal end of the probe.
摘要翻译：扫描近场光学/原子力显微镜包括用于保持浸没在液体中的样品的保持器和设置在保持器上的用于覆盖液体表面并用于透射激光的板。探针具有终端的光传播体，设置在其上的光反射元件，探针浸入液体中。光源发射被引入到探针的光传播体中的光，该光引导光穿过探针并从其远端引出照射样品。检测装置从照射在样本上的光检测信息，并将该信息转换为电信号。激光源用激光照射探针的光反射元件，用于检测由样品和探针之间的相互作用产生的探针的弯曲量。角度调节机构调节透过板的激光的光轴。光电转换装置接收从光反射元件反射的激光，并将反射光转换为电信号。移动机构使样本相对于探针移动，并且距离控制装置控制样品表面与探针的远端之间的距离。

6. 发明授权

US5960147A Probe, manufacturing method therefor and scanning probe microscope 失效
标题翻译：探头，其制造方法和扫描探针显微镜
公开(公告)号：US5960147A
公开(公告)日：1999-09-28
申请号：US821533
申请日：1997-03-21
申请人： Hiroshi Muramatsu , Noritaka Yamamoto , Norio Chiba , Kunio Nakajima
发明人： Hiroshi Muramatsu , Noritaka Yamamoto , Norio Chiba , Kunio Nakajima
IPC分类号： G01B11/30 , G01N37/00 , G01Q20/04 , G01Q60/18 , G01Q60/22 , G01Q60/32 , G01Q60/38 , G01Q70/10 , G01Q70/16 , G02B6/02 , G01N23/00 , G02B21/00
CPC分类号： G01Q60/06 , B82Y20/00 , B82Y35/00 , G01Q60/22 , G01Q60/38 , Y10S385/902 , Y10S977/862 , Y10S977/878
摘要： A tip of a probe is sharpened and a level difference portion 6 in a boundary zone between a base portion 5 and an elastic functioning portion 4 is formed into a tapered configuration. The diameter of the elastic functioning portion 4 is made smaller than that of the base portion 5. Also, a part of the elastic functioning portion 4 is shaped into a constricted configuration. Also, the probe material is an optical fiber and this probe is composed of a core portion 2 that propagates light therethrough and clad portions 3 that differ in refractive index from each other. And the portion of the probe that excludes a aperture is clothed by a metal film cladding 7.
摘要翻译：探针的尖端被磨削，并且基部5和弹性功能部分4之间的边界区域中的水平差部分6形成为锥形构造。弹性功能部分4的直径被制成小于基部5的直径。此外，弹性功能部分4的一部分成形为收缩构型。此外，探针材料是光纤，该探针由将光透过的芯部2和折射率不同的包层部3构成。并且不包括孔的探针的部分被金属膜包层7覆盖。

7. 发明授权

US07282157B2 Method of manufacturing light-propagating probe for near-field microscope 有权
标题翻译：制造近场显微镜的光传播探头的方法
公开(公告)号：US07282157B2
公开(公告)日：2007-10-16
申请号：US10692345
申请日：2003-10-23
申请人： Norio Chiba , Hiroshi Muramatsu , Masato Iyoki
发明人： Norio Chiba , Hiroshi Muramatsu , Masato Iyoki
IPC分类号： B29D11/00 , B44C1/22 , C25F3/00 , C23F1/00 , C03C15/00
CPC分类号： G01Q60/22 , G02B6/262
摘要： A manufacturing method for a light propagating probe comprises a step of sharpening a light-propagating body having a sharpened section formed on an optical fiber, a step of forming the light-propagating body into a hook shape close to the sharpened section, a metal film coating step for forming a transparent opening section in a tip section, a step of protecting the transparent opening section with a resist material, a step of forming a reflecting surface for a light lever method, a step for metal film coating a spring operating part to the rear from the hook-shaped section, and a step of removing the resist material protecting the transparent opening section.
摘要翻译：光传播探针的制造方法包括对形成在光纤上的锐化部的光传播体进行磨削的步骤，将光传播体形成为靠近锐化部的钩状的步骤，金属膜在前端部形成透明开口部的涂布工序，利用抗蚀剂材料保护透明开口部的工序，形成光杆法的反射面的工序，将弹簧工作部的金属膜涂敷到从钩形部分的后部，以及去除保护透明开口部分的抗蚀剂材料的步骤。

8. 发明授权

US5654131A Optical memory medium 失效
标题翻译：光存储介质
公开(公告)号：US5654131A
公开(公告)日：1997-08-05
申请号：US595097
申请日：1996-02-01
申请人： Masamichi Fujihira , Hiroshi Muramatsu , Norio Chiba , Tatsuaki Ataka
发明人： Masamichi Fujihira , Hiroshi Muramatsu , Norio Chiba , Tatsuaki Ataka
IPC分类号： G01Q20/02 , G01Q20/04 , G01Q60/26 , G11B7/12 , G11B7/135 , G11B7/244 , G11B7/253 , G11B9/00 , G11B11/00 , G11B7/24
CPC分类号： G11B7/12 , B82Y10/00 , G11B11/007 , G11B7/1384 , G11B7/244 , G11B7/2531 , G11B9/1463 , G01Q80/00 , Y10S430/146 , Y10S430/163
摘要： There is provided an optical memory medium comprising a flat plate modified on the surface thereof by a photolytic residual group, an optical recording apparatus comprising an optical probe having a microscopic aperture on the leading end thereof, a light source, X-Y-Z position control means, and a controller for controlling the apparatus as whole and an apparatus for reading the optical memory medium comprising the optical memory medium, a friction detecting probe, an X-Y-Z position control means and a controller for controlling the apparatus as a whole. Further, information is written and read with high density less than the wavelength of light using an apparatus for writing to and reading from an optical memory piezoelectric medium comprising the optical memory piezoelectric medium constituted by a piezoelectric element modified on the surface thereof by a photolytic residual group, an optical probe having a microscopic aperture on the leading end thereof, a light source, an X-Y-Z position control means, a means for measuring the resonance characteristics of the piezoelectric element and a controller for controlling the apparatus as a whole.
摘要翻译：提供了一种光学存储介质，其包括通过光解残留组在其表面上改性的平板，光学记录装置，包括在其前端具有微小孔的光学探针，光源，XYZ位置控制装置和用于整体控制装置的控制器和用于读取包括光学存储介质的光学存储介质的装置，摩擦检测探针，XYZ位置控制装置和用于整体控制装置的控制器。此外，使用用于写入和读取由光学存储器压电介质构成的光学存储器压电介质的装置，以比光的波长高的密度来写入和读取信息，该光存储器压电介质由其表面上由光解残留物修饰的压电元件构成组，在其前端具有微小孔的光学探针，光源，XYZ位置控制装置，用于测量压电元件的谐振特性的装置和用于整体控制装置的控制器。

9. 发明授权

US5627365A Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating position of an optical fiber probe 失效
标题翻译：扫描近场光学/原子力显微镜，其中成像光相对于光纤探针的振动位置被控制
公开(公告)号：US5627365A
公开(公告)日：1997-05-06
申请号：US408622
申请日：1995-03-22
申请人： Norio Chiba , Hiroshi Muramatsu
发明人： Norio Chiba , Hiroshi Muramatsu
IPC分类号： G01B11/30 , G01N37/00 , G01Q60/06 , G01Q60/18 , G01Q60/24 , G01Q60/32 , G02B21/00 , G03F7/20 , H01J3/14
CPC分类号： G01Q60/22 , B82Y20/00 , B82Y35/00 , G01Q60/06 , G01Q60/32 , G03F7/70375 , Y10S977/862
摘要： A radiated light of a light source for optical characteristic measurement is amplitude modulated by an optical modulator and directed into a light-propagating probe. A phase and intermittent rate of the optical modulator are adjusted by a phase shifter. A sample characteristic measuring light is radiated onto the surface of the sample from the distal end of the probe. A light transmitted through or scattered by the sample, or fluorescent light generated from the sample is directed into a photoelectric converter via an optical system. The light radiating area of sample characteristic measuring light can be efficiently modified to improve the resolution of a light characteristic image of the surface topography and optical characteristic of the sample at high resolution, without relying on the existence of transmissivity and conductivity in the sample.
摘要翻译：用于光学特性测量的光源的辐射光由光学调制器进行幅度调制并被引导到光传播探针中。通过移相器调整光调制器的相位和间歇速率。样品特征测量光从探头的远端辐射到样品的表面上。通过样品透射或散射的光或从样品产生的荧光通过光学系统被引导到光电转换器中。可以有效地修改样品特征测量光的光辐射面积，以提高样品表面形貌和光学特性的光特性图像的分辨率，而不依赖于样品中透射率和导电性的存在。

10. 发明授权

US06229609B1 Scanning near-field optic/atomic force microscope 失效
标题翻译：扫描近场光学/原子力显微镜
公开(公告)号：US06229609B1
公开(公告)日：2001-05-08
申请号：US08225756
申请日：1994-04-11
申请人： Hiroshi Muramatsu , Tatsuaki Ataka , Masamichi Fujihira , Norio Chiba
发明人： Hiroshi Muramatsu , Tatsuaki Ataka , Masamichi Fujihira , Norio Chiba
IPC分类号： G01B1124
CPC分类号： G01Q30/02 , G01Q60/06 , G01Q60/22 , G01Q60/38 , G01Q70/02 , G02B6/241 , Y10S977/862 , Y10S977/863 , Y10S977/871 , Y10S977/951
摘要： An apparatus capable of measuring the topography and the optical characteristics of the surface of a sample at high resolution irrespective of the transmittance and the conductivity of the sample is realized. The apparatus comprises a probe, a light source for illuminating a sample with light, a photoelectric converter device and optics for receiving light transmitted through the sample or light reflected by the sample, a laser emitting laser light for detecting deflections of the probe, a condenser lens for directing the laser light to the rear surface of the probe, a detection system for detecting reflected light, a rough-motion mechanism and a fine-motion mechanism for moving the sample and the probe relative to each other, a control means for controlling the distance between the sample and the probe, and a computer for controlling the whole apparatus. The probe has a front end portion and a light-propagating body continuous with the front end portion. The front end portion and the light-propagating body are shaped like a hook. The apparatus observes the topography and the optical characteristics of the surface of the sample.
摘要翻译：实现了能够以高分辨率测量样品的表面的形貌和光学特性的装置，而与样品的透射率和导电性无关。该装置包括探针，用光照射样品的光源，光电转换器装置和用于接收通过样品透射的光或由样品反射的光的光学器件，用于检测探针偏转的激光发射激光，冷凝器用于将激光引导到探针的后表面的透镜，用于检测反射光的检测系统，用于使样品和探针相对于彼此移动的粗动作机构和细微运动机构;控制装置，样品与探针之间的距离，以及用于控制整个装置的计算机。探针具有与前端部连续的前端部和光传播体。前端部分和光传播体形状如钩。该装置观察样品表面的形貌和光学特性。

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