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1. 发明申请

US20060171093A1 Plasma processing method and plasma processing apparatus 有权
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US20060171093A1
公开(公告)日：2006-08-03
申请号：US11069551
申请日：2005-03-02
申请人： Hiroaki Ishimura , Ken Yoshioka , Takahiro Abe , Go Saito , Motohiko Yoshigai
发明人： Hiroaki Ishimura , Ken Yoshioka , Takahiro Abe , Go Saito , Motohiko Yoshigai
IPC分类号： H01H1/00
CPC分类号： H01J37/32706 , H01J37/321 , H01L21/6833
摘要： In a plasma processing apparatus using electrostatic chuck, increase of plasma potential is prevented and abnormal discharge is avoided. The plasma processing apparatus comprises an RF source for generating plasma in a vacuum container, another RF source for applying an RF bias power to a sample, a sample stage having an electrostatic chuck electrode, a DC power supply for applying an electrostatic chuck voltage to the electrode, and a controller for shifting the electrostatic chuck voltage to negative by a potential difference of quarter to half of peak-to-peak voltage of the RF bias power for suppressing increase of plasma potential.
摘要翻译：在使用静电卡盘的等离子体处理装置中，防止等离子体电位的增加，避免异常放电。等离子体处理装置包括用于在真空容器中产生等离子体的RF源，用于向样品施加RF偏置功率的另一RF源，具有静电卡盘电极的样品台，用于向静电卡盘电压施加静电卡盘电压的DC电源电极，以及控制器，用于将静电卡盘电压转换为负值，以抑制RF偏置功率的峰 - 峰电压的四分之一到一半的电位差，以抑制等离子体电位的增加。

2. 发明授权

US07224568B2 Plasma processing method and plasma processing apparatus 有权
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US07224568B2
公开(公告)日：2007-05-29
申请号：US11069551
申请日：2005-03-02
申请人： Hiroaki Ishimura , Ken Yoshioka , Takahiro Abe , Go Saito , Motohiko Yoshigai
发明人： Hiroaki Ishimura , Ken Yoshioka , Takahiro Abe , Go Saito , Motohiko Yoshigai
IPC分类号： H01L21/683
CPC分类号： H01J37/32706 , H01J37/321 , H01L21/6833
摘要： In a plasma processing apparatus using electrostatic chuck, increase of plasma potential is prevented and abnormal discharge is avoided. The plasma processing apparatus comprises an RF source for generating plasma in a vacuum container, another RF source for applying an RF bias power to a sample, a sample stage having an electrostatic chuck electrode, a DC power supply for applying an electrostatic chuck voltage to the electrode, and a controller for shifting the electrostatic chuck voltage to negative by a potential difference of quarter to half of peak-to-peak voltage of the RF bias power for suppressing increase of plasma potential.
摘要翻译：在使用静电卡盘的等离子体处理装置中，防止等离子体电位的增加，避免异常放电。等离子体处理装置包括用于在真空容器中产生等离子体的RF源，用于向样品施加RF偏置功率的另一RF源，具有静电卡盘电极的样品台，用于向静电卡盘电压施加静电卡盘电压的DC电源电极，以及控制器，用于将静电卡盘电压转换为负值，以抑制RF偏置功率的峰 - 峰电压的四分之一到一半的电位差，以抑制等离子体电位的增加。

3. 发明申请

US20050072444A1 Method for processing plasma processing apparatus 审中-公开
标题翻译：等离子体处理装置的处理方法
公开(公告)号：US20050072444A1
公开(公告)日：2005-04-07
申请号：US10791856
申请日：2004-03-04
申请人： Shigeru Shirayone , Tetsuo Ono , Naoshi Itabashi , Motohiko Yoshigai , Takahiro Abe , Takahiro Shimomura , Hiroyuki Kitsunai
发明人： Shigeru Shirayone , Tetsuo Ono , Naoshi Itabashi , Motohiko Yoshigai , Takahiro Abe , Takahiro Shimomura , Hiroyuki Kitsunai
IPC分类号： B08B7/00 , H01L21/3213 , B08B3/12
CPC分类号： H01J37/32082 , B08B7/0035 , H01J2237/334 , H01L21/32136
摘要： A method for processing a plasma processing apparatus having plasma generating means 3, 8, 10, 13 through 15 for generating plasma within a processing chamber, a high-frequency power applying means 18 for applying high-frequency power to an object 17 to be processed, a processing chamber 1 to which an evacuating device 7 is connected and capable of having its interior evacuated, and a gas supply device (not shown) for the processing chamber, wherein the method comprises mounting a Si wafer 17 on an electrode 4 for holding the object to be processed, introducing hydrobromic gas and chlorine gas into the processing chamber and generating plasma, and removing the aluminum-based deposit adhered to the interior of the processing chamber.
摘要翻译：一种用于处理具有用于在处理室内产生等离子体的等离子体产生装置3,8,10,13至15的等离子体处理装置的方法，用于向要处理的物体17施加高频电力的高频电力施加装置18 ，排气装置7连接并能够将其内部抽真空的处理室1和用于处理室的气体供给装置（未示出），其中该方法包括将Si晶片17安装在用于保持的电极4上要处理的物体，将氢溴酸气体和氯气引入处理室并产生等离子体，以及去除附着在处理室内部的铝基沉积物。

4. 发明授权

US08029224B2 Substrate transfer apparatus, substrate transfer method, and storage medium 有权
标题翻译：基板转印装置，基板转印方法和存储介质
公开(公告)号：US08029224B2
公开(公告)日：2011-10-04
申请号：US12076648
申请日：2008-03-20
申请人： Yo Abe , Mitsuru Obara , Takahiro Abe
发明人： Yo Abe , Mitsuru Obara , Takahiro Abe
IPC分类号： H01L21/00 , G01N21/86
CPC分类号： H01L21/67781 , H01L21/67265 , H01L21/67766 , Y10S414/138
摘要： A substrate transfer apparatus 100 includes a substrate transport means 4 having a transport base 5 and a plurality of retention arms 41a-41e for retaining substrates W, an optical sensor 62 that is used to define a horizontal optical axis L, an elevator means 52 for moving the transport base 5 up and down, and a height detection means 54 for detecting the height of the transport base 5 relative to the optical axis L. In accordance with a light-reception/no-light-reception detection result fed from the optical sensor 62 and the height of the transport base 5, a judgment means 72a of a control section 7 judges whether the postures of the retention arms 41a-41e relative to the horizontal plane are normal. When the judgment means 72a judges that the postures of the retention arms 41a-41e relative to the horizontal plane are abnormal, the control section 7 exercises control to stop the substrate transport means 4.
摘要翻译：基板输送装置100具备：基板输送机构4，具有输送基座5和保持基板W的多个保持臂41a-41e，用于限定水平光轴L的光学传感器62;电梯装置52，移动基座5上下移动的高度检测单元54，检测运送台5相对于光轴L的高度的高度检测单元54.根据来自光学系统的光接收/无光接收检测结果传感器62和传送基座5的高度，控制部分7的判断装置72a判断保持臂41a-41e相对于水平面的姿势是否正常。当判断装置72a判定保持臂41a-41e相对于水平面的姿势异常时，控制部分7进行控制以停止基板输送装置4。

5. 发明授权

US07577135B2 IP telephone system 失效
标题翻译： IP电话系统
公开(公告)号：US07577135B2
公开(公告)日：2009-08-18
申请号：US11371227
申请日：2006-03-09
申请人： Hiroyuki Sato , Shinji Saitou , Tadashi Saitou , Takahiro Sasaki , Fumio Urayama , Hiroshi Endo , Tatsuya Yoshida , Shinsuke Isono , Kaoru Mashiko , Takahiro Abe , Kazuhiko Kubo
发明人： Hiroyuki Sato , Shinji Saitou , Tadashi Saitou , Takahiro Sasaki , Fumio Urayama , Hiroshi Endo , Tatsuya Yoshida , Shinsuke Isono , Kaoru Mashiko , Takahiro Abe , Kazuhiko Kubo
IPC分类号： H04L12/50 , H04Q11/00
CPC分类号： H04Q3/0075 , H04Q2213/13097 , H04Q2213/13166 , H04Q2213/13167 , H04Q2213/13176 , H04Q2213/13204 , H04Q2213/13299 , H04Q2213/13349 , H04Q2213/13389
摘要： When a trouble is developed in an IP exchange (TM) 2 or a circuit (network) 5, a backup exchange 6 (backup TM) is switched over from a waiting system to an operating system, and all IP terminals Eqi inside lodgments A, B, . . . N also log out from the IP exchange (TM) 2, and transmit the IP addresses to the backup exchanges 6 (backup TM) inside own lodgment, respectively, and log in there with a result that the extension telephone calls inside own lodgment is made possible by a control of the backup exchange 6 (backup TM), and therefore, even when a fault occurs in the IP exchange or the circuit, the IP terminals inside the lodgment are backed up and the actuations of the IP terminals are continuously operated, and for example, the extension phone calls inside the lodgment can be realized.
摘要翻译：当在IP交换机（TM）2或电路（网络）5中发生故障时，备用交换机6（备用TM）从等待系统切换到操作系统，并且所有IP终端Eqi内部的A， B，。。。 N也从IP交换机TM TM 2注销，并将IP地址分别发送到自己的分支机构内的备份交换机6（备份TM），并登录在那里，使得分机电话在自己的分机内进行可以通过备份交换机6（备用TM）的控制，因此即使在IP交换机或电路中出现故障时，备份内的IP终端被备份，并且IP终端的启动被连续地操作，例如，可以实现在该段内的分机电话呼叫。

6. 发明申请

US20080232937A1 Substrate transfer apparatus, substrate transfer method, and storage medium 有权
标题翻译：基板转印装置，基板转印方法和存储介质
公开(公告)号：US20080232937A1
公开(公告)日：2008-09-25
申请号：US12076648
申请日：2008-03-20
申请人： Yo Abe , Mitsuru Obara , Takahiro Abe
发明人： Yo Abe , Mitsuru Obara , Takahiro Abe
IPC分类号： H01L21/00
CPC分类号： H01L21/67781 , H01L21/67265 , H01L21/67766 , Y10S414/138
摘要： A substrate transfer apparatus 100 includes a substrate transport means 4 having a transport base 5 and a plurality of retention arms 41a-41e for retaining substrates W, an optical sensor 62 that is used to define a horizontal optical axis L, an elevator means 52 for moving the transport base 5 up and down, and a height detection means 54 for detecting the height of the transport base 5 relative to the optical axis L. In accordance with a light-reception/no-light-reception detection result fed from the optical sensor 62 and the height of the transport base 5, a judgment means 72a of a control section 7 judges whether the postures of the retention arms 41a-41e relative to the horizontal plane are normal. When the judgment means 72a judges that the postures of the retention arms 41a-41e relative to the horizontal plane are abnormal, the control section 7 exercises control to stop the substrate transport means 4.
摘要翻译：基片传送装置100包括具有传输基座5和用于保持基片W的多个保持臂41a-41e，用于限定水平光轴L的光学传感器62的基片传送装置4，电梯装置 52，用于检测传送基座5相对于光轴L的高度的高度检测单元54.根据从传送基座5的光接收检测结果光学传感器62和传送基座5的高度，控制部7的判断装置72a判断保持臂41a-41e相对于水平面的姿势是否正常。当判断装置72a判定保持臂41a-41e相对于水平面的姿势异常时，控制部分7进行控制以停止基板传送装置4。

7. 发明申请

US20060217997A1 IP telephone system 失效
标题翻译： IP电话系统
公开(公告)号：US20060217997A1
公开(公告)日：2006-09-28
申请号：US11371227
申请日：2006-03-09
申请人： Hiroyuki Sato , Shinji Saitou , Tadashi Saitou , Takahiro Sasaki , Fumio Urayama , Hiroshi Endo , Tatsuya Yoshida , Shinsuke Isono , Kaoru Mashiko , Takahiro Abe , Kazuhiko Kubo
发明人： Hiroyuki Sato , Shinji Saitou , Tadashi Saitou , Takahiro Sasaki , Fumio Urayama , Hiroshi Endo , Tatsuya Yoshida , Shinsuke Isono , Kaoru Mashiko , Takahiro Abe , Kazuhiko Kubo
IPC分类号： G06Q99/00
CPC分类号： H04Q3/0075 , H04Q2213/13097 , H04Q2213/13166 , H04Q2213/13167 , H04Q2213/13176 , H04Q2213/13204 , H04Q2213/13299 , H04Q2213/13349 , H04Q2213/13389
摘要： When a trouble is developed in an IP exchange (TM) 2 or a circuit (network) 5, a backup exchange 6 (backup TM) is switched over from a waiting system to an operating system, and all IP terminals Eqi inside lodgments A, B, . . . N also log out from the IP exchange (TM) 2, and transmit the IP addresses to the backup exchanges 6 (backup TM) inside own lodgment, respectively, and log in there with a result that the extension telephone calls inside own lodgment is made possible by a control of the backup exchange 6 (backup TM), and therefore, even when a fault occurs in the IP exchange or the circuit, the IP terminals inside the lodgment are backed up and the actuations of the IP terminals are continuously operated, and for example, the extension phone calls inside the lodgment can be realized.
摘要翻译：当在IP交换机（TM）2或电路（网络）5中发生故障时，备用交换机6（备用TM）从等待系统切换到操作系统，并且所有IP终端Eqi内部的A， B，。。。 N也从IP交换机TM TM 2注销，并将IP地址分别发送到自己的分支机构内的备份交换机6（备份TM），并登录在那里，使得分机电话在自己的分机内进行可以通过备份交换机6（备用TM）的控制，因此即使在IP交换机或电路中出现故障时，备份内的IP终端被备份，并且IP终端的启动被连续地操作，例如，可以实现在该段内的分机电话呼叫。

8. 发明授权

US07054446B2 Chaos cryptographic communication method and chaos cryptographic communication system 有权
公开(公告)号：US07054446B2
公开(公告)日：2006-05-30
申请号：US09855798
申请日：2001-05-16
申请人： Tetsuya Ishihara , Takahiro Abe , Katsufusa Shono
发明人： Tetsuya Ishihara , Takahiro Abe , Katsufusa Shono
IPC分类号： H04L9/00
CPC分类号： H04L9/001 , H04L9/0852 , H04L2209/805 , H04L2209/84
摘要： Each of plural CPUs enciphers a plaintext code which is a secrecy object according to chaos block encryption and then enciphers it according to chaos stream encryption. Then, it transmits an obtained cipher code through communication line. On the other hand, each of plural CPUs that received the cipher code synchronously restores the received cipher code according to chaos stream encryption and then restores according to chaos block encryption thereby to obtain an original plaintext code.

9. 发明授权

US06958580B2 Electronic ballast for a high intensity discharge lamp 有权
标题翻译：电子镇流器用于高强度放电灯
公开(公告)号：US06958580B2
公开(公告)日：2005-10-25
申请号：US10479042
申请日：2002-06-10
申请人： Takeshi Kamoi , Takahiro Abe
发明人： Takeshi Kamoi , Takahiro Abe
IPC分类号： H05B41/288 , H05B41/392 , G05F1/00
CPC分类号： H05B41/3921 , H05B41/2882
摘要： An electronic ballast for a discharge lamp is capable of dimming the lamp over a wide range, yet assuring to operate the lamp efficiently with a minimum lamp power variation in compensation for a possible lamp characteristic variation. The ballast provides an unique voltage-wattage output characteristic which varies with a varying dimming ratio for reducing the lamp power as the dimming ratio decreases. The output characteristic is designed to follow a true lamp characteristic that the lamp voltage will decrease as the lamp power is reduced to a certain level. With this result, it is possible to give a wide voltage range within which the lamp power being supplied to the lamp is kept substantially constant irrespective of the lamp characteristic variation, thereby assuring to reduce the lamp power exactly as intended by the dimming ratio even in the presence of the lamp characteristic variation.
摘要翻译：用于放电灯的电子镇流器能够在宽范围内对灯进行调光，但是确保以可能的灯特性变化补偿的最小灯功率变化来有效地操作灯。镇流器提供独特的电压功率输出特性，随着调光比降低，随着变化的调光比而变化，以减小灯功率。输出特性被设计为遵循真正的灯特性，灯电压将随着灯功率降低到一定水平而降低。由此，可以提供宽电压范围，其中供给灯的灯功率与灯特性变化无关地保持基本恒定，从而确保即使在调光比下也能按照调光比精确地降低灯功率存在灯的特性变化。

10. 发明授权

US06702624B2 Electronic component in which an insert member is tightly held by a resin portion and prevented from deformation thereof 有权
标题翻译：电子部件，其中插入部件被树脂部分紧紧地保持并防止其变形
公开(公告)号：US06702624B2
公开(公告)日：2004-03-09
申请号：US09274859
申请日：1999-03-23
申请人： Hiroshi Akimoto , Katsumi Arai , Katsuma Ushijima , Takahiro Abe
发明人： Hiroshi Akimoto , Katsumi Arai , Katsuma Ushijima , Takahiro Abe
IPC分类号： H01R1700
CPC分类号： H01R12/57 , H01L23/057 , H01L23/49861 , H01L2924/0002 , H01R12/716 , H01R43/24 , H01L2924/00
摘要： An electronic component has an insert member embedded in a resin portion by an insert molding method, with a part of the insert member exposed at an outer surface of the resin portion. At least a part of the exposed portion of the insert member is depressed relative to the outer surface of the resin portion.
摘要翻译：电子部件具有通过插入成型方法嵌入在树脂部中的插入部件，插入部件的一部分露出在树脂部的外表面。插入构件的暴露部分的至少一部分相对于树脂部分的外表面被压下。

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