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1. 发明授权

US06365055B1 Process for producing a sensor membrane substrate 失效
标题翻译：传感器膜基板的制造方法
公开(公告)号：US06365055B1
公开(公告)日：2002-04-02
申请号：US09320402
申请日：1999-05-26
申请人： Heribert Weber , Steffen Schmidt
发明人： Heribert Weber , Steffen Schmidt
IPC分类号： H01L2984
CPC分类号： G01L9/0048 , G01F1/6845 , G01F1/86
摘要： A process for producing a sensor membrane substrate, in particular, for a mass flow sensor or a pressure sensor, the substrate having on its front a membrane, which is fixed at the edge of an opening that is etched free from the back. The process includes the following steps: providing a substrate; local thickening the substrate in an area on the front opposite the edge, the thickened portion having a continuous transition to the substrate; depositing a membrane layer on the front having the locally oxidized area; and etching free the opening from the back to clear the membrane in such a way that the edge is located underneath the thickened area.
摘要翻译：一种用于制造传感器膜基材的方法，特别是用于质量流量传感器或压力传感器的基片，该基底在其前面具有膜，该膜固定在从背面被免去蚀刻的开口的边缘处。该方法包括以下步骤：提供衬底; 在与边缘相对的前面的区域中局部加厚基底，加厚部分与基底有连续的过渡; 在前面沉积具有局部氧化区域的膜层; 并且从背面去除开口以使膜以使得边缘位于加厚区域下方的方式清除膜。

2. 发明授权

US06240777B1 Sensor having a membrane 失效
标题翻译：传感器有膜
公开(公告)号：US06240777B1
公开(公告)日：2001-06-05
申请号：US09168394
申请日：1998-10-06
申请人： Christoph Treutler , Herbert Goebel , Heribert Weber , Wolfgang Mueller , Steffen Schmidt , Klaus Heyers , Hans-Friedemann Kober , Werner Steiner
发明人： Christoph Treutler , Herbert Goebel , Heribert Weber , Wolfgang Mueller , Steffen Schmidt , Klaus Heyers , Hans-Friedemann Kober , Werner Steiner
IPC分类号： G01F168
CPC分类号： G01F1/6845 , G01F1/692
摘要： A sensor has a membrane, on which at least one resistor element is situated. The membrane has a membrane layer which is composed of a plurality of partial layers. In addition, a covering layer is provided which is composed of a plurality of partial layers. The partial layers of the membrane and the covering layer are selected so that both in the membrane and in the covering layer light tensile stresses are set, the tensile stresses preferably being roughly the same.
摘要翻译：传感器具有膜，至少一个电阻元件位于该膜上。膜具有由多个部分层构成的膜层。此外，提供由多个部分层组成的覆盖层。膜和覆盖层的部分层被选择为使得膜和覆盖层中的两者都具有轻的拉伸应力，拉伸应力优选地大致相同。

3. 发明申请

US20090260460A1 Drive system of a forming press 有权
标题翻译：成型机的驱动系统
公开(公告)号：US20090260460A1
公开(公告)日：2009-10-22
申请号：US12308145
申请日：2007-06-07
申请人： Uwe Darr , Steffen Schmidt , Edwin Goetz , Gerhard Voegel , Wolfgang Meinhardt
发明人： Uwe Darr , Steffen Schmidt , Edwin Goetz , Gerhard Voegel , Wolfgang Meinhardt
IPC分类号： B30B1/26
CPC分类号： B30B15/148 , B30B1/266 , B30B15/10 , B30B15/14 , B30B15/287 , Y10T74/18248
摘要： A drive system of a forming press for driving the plunger with a crank mechanism controllable by a servomotor is refined in such a way that on the one hand a high pressure force is achievable with the available torques of servomotors and that on the other hand the technical complexity of the drive is reduced during the design of the drive with multiple mechanically synchronized pressure points and also with pressure points that can each be controlled independently of one another. The concept of the method consists of transferring the torques of the servomotors that are required to achieve a high pressure force for the plunger by means of intermediate gearing, preferably with a double gear transmission, to the cam or crank mechanism, wherein the symmetrically configured drive arms of multipoint presses for the right and the left pressure points of two-point presses or the pressure point groups of four-point presses are optionally mechanically synchronized with one another in such a way that each of the intermediate gears of the first or of one of the first gear transmissions is effectively connected to the others.
摘要翻译：用伺服电动机控制的曲柄机构驱动柱塞的成形机的驱动系统以这样一种方式进行精炼，一方面可以通过伺服电动机的可用转矩实现高压力，另一方面技术性在具有多个机械同步的压力点的驱动器的设计期间以及每个都可以彼此独立地控制的压力点之间，驱动器的复杂性降低。该方法的概念包括：通过中间传动装置（优选用双齿轮传动装置）传递用于为柱塞实现高压力所需的伺服电动机的转矩到凸轮或曲柄机构，其中对称配置的驱动两点压力的左右压力点或四点压力机的压力点组的多点压力机臂可选择地彼此机械地同步，使得第一或一个压力机的每个中间齿轮的第一档传动装置有效地连接到其他传动装置。

4. 发明授权

US07603200B2 Method and system for assessing the state of at least one axial joint 有权
标题翻译：评估至少一个轴向关节状态的方法和系统
公开(公告)号：US07603200B2
公开(公告)日：2009-10-13
申请号：US11153041
申请日：2005-06-15
申请人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
发明人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
IPC分类号： G06F19/00 , G05B9/02 , G06F11/00
CPC分类号： B25J9/1641
摘要： A method assesses a state of at least one axial joint of an industrial robot, on the basis of data of a mechanical backlash present at the axial joint of the industrial robot, a state of wear of the axial joint being determined. On the basis of data of a torque profile, a first loading state of the axial joint is determined at the axial joint during at a first working cycle of the industrial robot. On a basis of data of a movement sequence at the axial joint during a second working cycle of the industrial robot, a second loading state of the axial joint is determined. An assessment of the state is carried out by pre-assessing the state of wear, the first loading state and the second loading state and a subsequent comparison with an empirically obtained comparison value matrix.
摘要翻译：一种方法基于工业机器人轴向接合处存在的机械齿隙的数据，确定轴向接头的磨损状态来评估工业机器人的至少一个轴向接头的状态。基于扭矩分布的数据，在工业机器人的第一工作循环期间，在轴向接合处确定轴向接头的第一加载状态。基于在工业机器人的第二工作循环期间的轴向关节处的运动顺序的数据，确定轴向关节的第二加载状态。通过预先评估磨损状态，第一加载状态和第二加载状态以及随后与经验获得的比较值矩阵的比较来进行状态评估。

5. 发明授权

US07316170B2 Method and measuring configuration for measuring backlash at an axial joint 有权
标题翻译：测量轴向接缝间隙的方法和测量结构
公开(公告)号：US07316170B2
公开(公告)日：2008-01-08
申请号：US11153043
申请日：2005-06-15
申请人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
发明人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
IPC分类号： G01N19/00
CPC分类号： G01B5/146 , G01B21/16
摘要： A method measures the backlash at an axial joint of an industrial robot having a first and a second robot knuckle that are movably connected to each other in a direction of rotation by the axial joint. A load-transmitting device applies a predeterminable force alternately in a measuring line to the first robot knuckle, connected to the free end of a robot arm. A deflection sensor measures the deflection of the first robot knuckle at a predetermined distance from the axis of rotation of the axial joint, and an evaluation device connected to the displacement sensor calculates a turning angle of the first robot knuckle as a measure of a backlash present at the axial joint, taking into account the geometrical arrangement data in the measurement of the deflection sensor and the industrial robot and also the measured deflection.
摘要翻译：一种方法测量具有第一和第二机器人转向节的工业机器人的轴向接合处的间隙，所述第一和第二机器人转向节在轴向接头的旋转方向上彼此可移动地连接。负载传递装置在与机器人手臂的自由端连接的第一机器人转向节的测量线中交替地施加可预定的力。偏转传感器测量第一机器人转向节在距离轴向旋转轴线预定距离处的偏转，并且连接到位移传感器的评估装置计算第一机器人转向节的转角，作为存在的间隙的量度考虑到偏转传感器和工业机器人的测量中的几何布置数据以及测量的偏转，在轴向接合处。

6. 发明申请

US20060287768A1 Method and system for determining a servicing requirement 有权
标题翻译：确定维修要求的方法和系统
公开(公告)号：US20060287768A1
公开(公告)日：2006-12-21
申请号：US11153042
申请日：2005-06-15
申请人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
发明人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B2219/32234
摘要： A method determines the servicing requirements of axes of a robot arm of an industrial robot. The data of a movement sequence of at least one axis during at least one working cycle of the industrial robot is made available. The rotational movements of the at least one axis are established on the basis of the data, and a servicing interval for the at least one axis is determined by an assessment of the rotational movements established. A system for determining a servicing requirement performs the method.
摘要翻译：一种方法确定工业机器人的机器人手臂的轴的维修要求。提供了在工业机器人的至少一个工作循环期间至少一个轴的运动顺序的数据。基于数据建立至少一个轴的旋转运动，并且通过对建立的旋转运动的评估来确定至少一个轴的维修间隔。用于确定服务需求的系统执行该方法。

7. 发明申请

US20050274208A1 Method and measuring configuration for measuring backlash at an axial joint 有权
标题翻译：测量轴向接缝间隙的方法和测量结构
公开(公告)号：US20050274208A1
公开(公告)日：2005-12-15
申请号：US11153043
申请日：2005-06-15
申请人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
发明人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
IPC分类号： G01B5/14 , G01B21/16 , B25J17/00
CPC分类号： G01B5/146 , G01B21/16
摘要： A method measures the backlash at an axial joint of an industrial robot having a first and a second robot knuckle that are movably connected to each other in a direction of rotation by the axial joint. A load-transmitting device applies a predeterminable force alternately in a measuring line to the first robot knuckle, connected to the free end of a robot arm. A deflection sensor measures the deflection of the first robot knuckle at a predetermined distance from the axis of rotation of the axial joint, and an evaluation device connected to the displacement sensor calculates a turning angle of the first robot knuckle as a measure of a backlash present at the axial joint, taking into account the geometrical arrangement data in the measurement of the deflection sensor and the industrial robot and also the measured deflection.
摘要翻译：一种方法测量具有第一和第二机器人转向节的工业机器人的轴向接合处的间隙，所述第一和第二机器人转向节在轴向接头的旋转方向上彼此可移动地连接。负载传递装置在与机器人手臂的自由端连接的第一机器人转向节的测量线中交替地施加可预定的力。偏转传感器测量第一机器人转向节在距离轴向旋转轴线预定距离处的偏转，并且连接到位移传感器的评估装置计算第一机器人转向节的转角，作为存在的间隙的量度考虑到偏转传感器和工业机器人的测量中的几何布置数据以及测量的偏转，在轴向接合处。

8. 发明授权

US08504177B2 Assembly for diagnosing a device with moving parts 有权
标题翻译：用于诊断具有移动部件的设备的组件
公开(公告)号：US08504177B2
公开(公告)日：2013-08-06
申请号：US13396395
申请日：2012-02-14
申请人： Nicolaie Fantana , Steffen Schmidt
发明人： Nicolaie Fantana , Steffen Schmidt
IPC分类号： G05B21/02 , G05B15/00
CPC分类号： G05B19/4063 , G05B2219/33221 , G05B2219/33284 , G05B2219/33324 , Y02P90/265
摘要： The invention is based on refining and developing an arrangement such that reliable diagnosis of the state and/or of the operating parameters of an apparatus can be performed inexpensively.
摘要翻译：本发明基于精炼和开发这样的布置，使得可以廉价地执行装置的状态和/或操作参数的可靠诊断。

9. 发明授权

US08290708B2 Method and system for determining a servicing requirement 有权
标题翻译：确定维修要求的方法和系统
公开(公告)号：US08290708B2
公开(公告)日：2012-10-16
申请号：US11153042
申请日：2005-06-15
申请人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
发明人： Axel Bader , Sven Hansen , Steffen Schmidt , Kim Henrich
IPC分类号： G01C21/10
CPC分类号： G06Q10/06 , G05B2219/32234
摘要： A method determines the servicing requirements of axes of a robot arm of an industrial robot. The data of a movement sequence of at least one axis during at least one working cycle of the industrial robot is made available. The rotational movements of the at least one axis are established on the basis of the data, and a servicing interval for the at least one axis is determined by an assessment of the rotational movements established. A system for determining a servicing requirement performs the method.
摘要翻译：一种方法确定工业机器人的机器人手臂的轴的维修要求。提供了在工业机器人的至少一个工作循环期间至少一个轴的运动顺序的数据。基于数据建立至少一个轴的旋转运动，并且通过对建立的旋转运动的评估来确定至少一个轴的维修间隔。用于确定服务需求的系统执行该方法。

10. 发明授权

US5254209A Method of making micromechanical components 失效
标题翻译：制造微机械部件的方法
公开(公告)号：US5254209A
公开(公告)日：1993-10-19
申请号：US960817
申请日：1992-10-08
申请人： Steffen Schmidt , Hans-Peter Trah , Franz Riedinger
发明人： Steffen Schmidt , Hans-Peter Trah , Franz Riedinger
IPC分类号： C23F1/02 , B81C1/00 , C30B33/00 , G03F9/00 , H01L21/306 , B44C1/22 , C03C15/00 , C03C25/06
CPC分类号： C30B29/06 , B81C1/00626 , C30B33/00 , G03F9/7003 , G03F9/7084
摘要： A method of making micromechanical structures from silicon involves cutting a monocrystalline silicon wafer. The orientation of the crystal structure relative to the flat of the wafer is first determined, and this information is taken into account in the subsequent structuring steps.
摘要翻译：从硅制造微机械结构的方法涉及切割单晶硅晶片。首先确定晶体结构相对于晶片的平面的取向，并且在随后的结构化步骤中考虑该信息。

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