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1. 发明授权

US5616226A Cathode assembly 失效
标题翻译：阴极组件
公开(公告)号：US5616226A
公开(公告)日：1997-04-01
申请号：US554751
申请日：1995-11-07
申请人： Hans Kunz , Andreas Sauer , Manfred Schuhmacher , Joachim Szczyrbowski , Dietmar Marquardt
发明人： Hans Kunz , Andreas Sauer , Manfred Schuhmacher , Joachim Szczyrbowski , Dietmar Marquardt
IPC分类号： C23C14/34 , H01J37/34
CPC分类号： H01J37/3435 , C23C14/3407 , H01J37/3408 , H01J37/3426 , H01J37/3497
摘要： A pair of parallel elongate targets are fixed with respect to respective plates mounted in a vacuum chamber by means of clamps arranged along the longitudinal sides of each target, and an expandable wedge system between the rear plate and magnetic yokes on the backs of the targets. The wedge system for each target includes a wedge block having ramped surfaces which face outward, a pair of wedge jaws having ramped surfaces which slide against the ramped surfaces of the block, and a screw which draws the jaws together against the ramped surfaces of the block to expand the system and force the plate away from the yoke and fix the entire assembly in the clamps.
摘要翻译：一对平行的细长靶相对于安装在真空室中的相应板通过沿着每个靶的纵向侧面布置的夹具而固定，并且在后板和磁轭之间的可扩展的楔形系统位于靶的背部上。用于每个目标的楔形系统包括楔形块，其具有面向外的斜面，一对具有斜面的楔形爪，其具有抵靠该块的倾斜表面滑动的斜面;以及将夹爪拉在一起抵靠该块的倾斜表面的螺钉以扩展系统并迫使板远离轭并将整个组件固定在夹具中。

2. 发明授权

US5944967A Dual target cathode assembly with shielding 失效
标题翻译：双目标阴极组件与屏蔽
公开(公告)号：US5944967A
公开(公告)日：1999-08-31
申请号：US554750
申请日：1995-11-07
申请人： Hans Kunz , Andreas Sauer , Manfred Schuhmacher , Joachim Szczyrbowski , Dietmar Marquardt
发明人： Hans Kunz , Andreas Sauer , Manfred Schuhmacher , Joachim Szczyrbowski , Dietmar Marquardt
IPC分类号： C23C14/34 , H01J37/34
CPC分类号： H01J37/3435 , C23C14/3407 , H01J37/3408
摘要： A dual magnetron cathode assembly includes a pair of elongate, parallel targets in coplanar relationship fixed to respective magnetic yokes with associated rows of permanent magnets for producing a magnetic field over the targets. A common back plate is provided for both cathodes, a center shield plate extending from the back plate to between the targets, side shield plates and end shield plates likewise extending from the back plate to form side-by-side rectangular shielding enclosures which expose only the sputtering surface of the targets. The yokes are fixed with respect to the vacuum chamber by insulative holders which extend through openings in the back plate.
摘要翻译：双磁控管阴极组件包括一对共面关系的细长的平行靶，固定到相应的磁轭上，该磁轭具有相关的永磁体排，用于在靶上产生磁场。为两个阴极提供常见的背板，中央屏蔽板从后板延伸到目标之间，侧面屏蔽板和端部屏蔽板，同样从背板延伸，形成仅仅暴露的并排矩形屏蔽外壳靶的溅射表面。轭体通过延伸穿过背板中的开口的绝缘保持器相对于真空室固定。

3. 发明授权

US5662784A Apparatus for applying thin layers to a substrate 失效
标题翻译：用于将薄层施加到基底的装置
公开(公告)号：US5662784A
公开(公告)日：1997-09-02
申请号：US622443
申请日：1996-03-25
申请人： Manfred Schuhmacher , Erwin Winter , Andreas Sauer , Dietmar Marquardt
发明人： Manfred Schuhmacher , Erwin Winter , Andreas Sauer , Dietmar Marquardt
IPC分类号： C23C14/34 , C23C14/56 , H01J37/32 , H01J37/34
CPC分类号： H01J37/3244 , H01J37/34 , H01J37/3438
摘要： Hollow members having conduits for process gas and coolant are mounted in parallel on sidewall of a vacuum chamber with a sputtering cathode therebetween. Anode members having an L-shaped cross section are mounted over the hollow members and held in place by thumb screws in threaded bores of strips fixed to the chamber walls above the hollow members. Mask members having a Z-shaped cross section are mounted over the anodes and are also held in place by the thumb screws.
摘要翻译：具有工艺气体和冷却剂导管的空心构件平行地安装在真空室的侧壁上，其间具有溅射阴极。具有L形横截面的阳极部件安装在中空部件上，并通过翼形螺钉固定在固定到中空部件上方的室壁的螺纹孔中的适当位置。具有Z形横截面的掩模构件安装在阳极上，并且还通过翼形螺钉保持就位。

4. 发明授权

US06302372B1 Gate valve 失效
标题翻译：闸阀
公开(公告)号：US06302372B1
公开(公告)日：2001-10-16
申请号：US09455175
申请日：1999-12-06
申请人： Andreas Sauer , Manfred Schuhmacher , Johannes Kunz , Gerhard Joos
发明人： Andreas Sauer , Manfred Schuhmacher , Johannes Kunz , Gerhard Joos
IPC分类号： F16K318
CPC分类号： C23C14/568
摘要： A gate valve (1) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (8,9) of two chamber walls (4,5) that are provided between two vacuum chambers (1,3) and aligned with one another. To this end, it has two valve plates (20, 21), which are a component of a slider (15), which is situated so that it can move with play from a position clearing the passage openings (8,9) to a position which closes the passage openings (8,9). To move the valve plates (20,21) to the closing setting against the passage openings (8,9) on the slider (15), at least one lifting element (24), which is acted on by pressure, is provided.
摘要翻译：闸阀（1）被构造用于同时阻塞或清除两个室壁（4,5）的两个矩形通道开口（8,9），两个腔室壁（4,5）设置在两个真空室（1,3）之间并彼此对准。为此，其具有两个作为滑块（15）的部件的阀板（20,21），其位于使其能够从打开通道开口（8,9）的位置移动到关闭通道开口（8,9）的位置。为了使阀板（20,21）相对于滑块（15）上的通道开口（8,9）移动到关闭设置，提供了由压力作用的至少一个提升元件（24）。

5. 发明申请

US20060096855A1 Cathode arrangement for atomizing a rotatable target pipe 审中-公开
标题翻译：用于雾化可旋转靶管的阴极装置
公开(公告)号：US20060096855A1
公开(公告)日：2006-05-11
申请号：US10983179
申请日：2004-11-05
申请人： Richard Newcomb , Scott Trube , Tom Riso , Ken Kawakami , Dietmar Marquardt , Andreas Sauer
发明人： Richard Newcomb , Scott Trube , Tom Riso , Ken Kawakami , Dietmar Marquardt , Andreas Sauer
IPC分类号： C23C14/00
CPC分类号： F03H1/00 , H01J37/3405
摘要： A quick attachment system for cathodes is described. One embodiment of the system comprises a laterally movable support shaft; a flange connected to the support shaft, the flange including a cavity locking element and a shoulder locking element; a bordering separator connectable to a target pipe, the bordering separator comprising ring extensions for engaging the cavity locking element of flange; and a straining ring configured to engage the bordering separator and the shoulder locking element of the flange to thereby secure the laterally movable shaft to the target pipe.
摘要翻译：描述了用于阴极的快速附接系统。该系统的一个实施例包括横向可移动的支撑轴; 连接到所述支撑轴的凸缘，所述凸缘包括腔锁定元件和肩部锁定元件; 可连接到目标管道上的接壤分离器，接合分离器包括用于接合凸缘的腔体锁定元件的环形延伸部分; 以及应变环，其构造成接合凸缘的边界分离器和肩部锁定元件，从而将横向可移动的轴固定到目标管。

6. 发明授权

US06187158B1 Device for coating plate-shaped substrates 有权
标题翻译：用于涂布板状基板的装置
公开(公告)号：US06187158B1
公开(公告)日：2001-02-13
申请号：US09362498
申请日：1999-07-30
申请人： Manfred Schuhmacher , Andreas Sauer , Katja Grundmann
发明人： Manfred Schuhmacher , Andreas Sauer , Katja Grundmann
IPC分类号： C23C1434
CPC分类号： H01J37/34 , C23C14/3464 , C23C14/568
摘要： A device for coating plate-shaped substrates by using cathode sputtering has several process chambers one after the other, each of which are bordered on the top by a chamber roof having in each case an opening. In this opening, which is covered at the top by a cathode arrangement, a frame is inserted. Screens and coolant lines of the process chamber are provided on the frame that can slide upwards out of the opening, projects into the process chamber, and is supported inside the opening of the chamber roof. A top of the cathode arrangement projects over the frame on the sides and is supported directly on the chamber roof so it seals it.
摘要翻译：通过使用阴极溅射来涂覆板状基板的装置具有几个处理腔，一个接一个地，每个处理室通过在每个情况下具有开口的室顶部在顶部附近。在通过阴极装置在顶部覆盖的该开口中，插入框架。处理室的筛网和冷却剂管线设置在框架上，该框架可以向上滑出开口，突出到处理室中，并被支撑在室顶部的开口内。阴极装置的顶部在两侧的框架上突出并且直接支撑在室顶上，从而使其密封。

7. 发明授权

US07114702B2 Slide valve 有权
标题翻译：滑阀
公开(公告)号：US07114702B2
公开(公告)日：2006-10-03
申请号：US10928326
申请日：2004-08-27
申请人： Andreas Sauer
发明人： Andreas Sauer
IPC分类号： F16K25/00 , F16K3/00
CPC分类号： F16K3/207 , F16K3/0281
摘要： In a slide valve, especially for coating installations, for fluidic separation of two modules or chambers, interconnected through an opening, containing at least one slide plate, integrated in a housing transfixed by said opening, and which may be bidirectionally moved between an inactive position, releasing said opening, and an operating position, completely covering said opening, and at least a closing drive, which may be activated to act upon said slide plate in its operating position and for its sealing contact in a closed position against a sealing surface transfixing said housing, according to the invention, at least one of said closing drives is firmly attached inside housing, relative to the activating movement of said slide plate.
摘要翻译：在滑阀中，特别是用于涂覆装置的两个模块或室的流体分离，通过开口相互连接，该开口包含至少一个滑动板，该滑动板集成在由所述开口固定的壳体中，并且可以在非活动位置之间双向移动释放所述开口和完全覆盖所述开口的操作位置以及至少一个闭合驱动器，所述操作位置可以被致动以在其操作位置作用在所述滑板上，并且其闭合位置处的密封接触抵抗密封表面的固定根据本发明，所述壳体中的至少一个相对于所述滑板的启动运动被牢固地附接在壳体内。

8. 发明授权

US08646573B2 Exhaust gas treatment device 有权
标题翻译：废气处理装置
公开(公告)号：US08646573B2
公开(公告)日：2014-02-11
申请号：US13033070
申请日：2011-02-23
申请人： Marcus Werni , Andreas Sauer
发明人： Marcus Werni , Andreas Sauer
IPC分类号： F01N1/08
CPC分类号： F01N3/005 , F01N3/2853 , F01N13/008 , F01N2490/08 , F01N2560/026 , Y02A50/2322 , Y02T10/20
摘要： The present invention relates to an exhaust gas treatment device for an exhaust system of an internal combustion engine, more preferably of a road vehicle with a housing, in which at least one exhaust gas treatment element is arranged and mounted by means of a bearing mat and with an outlet pipe which is fluidically connected to an outlet chamber formed in the housing. The risk of a contamination of the bearing mat with water can be reduced with a separating bottom which is arranged in the housing and separates the outlet chamber from a collecting chamber. The separating bottom includes several passage openings through which the outlet chamber is fluidically connected to the collecting chamber and which are each enclosed by a collar protruding into the outlet chamber.
摘要翻译：本发明涉及一种用于内燃机的排气系统的排气处理装置，更优选地是具有壳体的道路车辆，其中至少一个废气处理元件通过轴承垫布置和安装，具有流体连接到形成在壳体中的出口室的出口管。通过设置在壳体中的分离底部将出口室与收集室分离，可以减少轴承垫与水的污染的风险。分离底部包括多个通道开口，出口室通过该开口流体连接到收集室，并且每个通道开口由突出到出口室中的套环封闭。

9. 发明授权

US07820077B2 Solutions of organic semiconductors 有权
标题翻译：有机半导体解决方案
公开(公告)号：US07820077B2
公开(公告)日：2010-10-26
申请号：US10589162
申请日：2005-02-17
申请人： Hubert Spreitzer , Andreas Sauer , Carsten Schwan , Neil Tallant
发明人： Hubert Spreitzer , Andreas Sauer , Carsten Schwan , Neil Tallant
IPC分类号： H01B1/12 , H01L35/24 , H01J1/62 , B05D5/06
CPC分类号： C09K11/025 , H01L51/0007 , H01L51/0035 , H05B33/10 , H05B33/14 , Y02E10/549 , Y02P70/521
摘要： The invention relates to solutions of at least one organic semiconductor containing at least one high-molecular constituent, in a solvent mixture of at least three different organic solvents A, B and C. The invention is characterized in that the solvents A and B are good solvents for the organic semiconductor, the solvent C is a bad solvent for the organic semiconductor, and Sdp.(A)
摘要翻译：本发明涉及至少一种含有至少一种高分子组分的有机半导体在至少三种不同有机溶剂A，B和C的溶剂混合物中的溶液。本发明的特征在于溶剂A和B是好的有机半导体的溶剂，溶剂C是有机半导体的不良溶剂，并且Sdp。（A）

10. 发明申请

US20090217872A1 BACKSIDE COATING PREVENTION DEVICE, COATING CHAMBER DEVICE FOR COATING PLATE-SHAPED SUBSTRATES, AND METHOD OF COATING 审中-公开
标题翻译：背面涂层防护装置，用于涂覆板形基材的涂层室装置和涂层方法
公开(公告)号：US20090217872A1
公开(公告)日：2009-09-03
申请号：US12128856
申请日：2008-05-29
申请人： Andreas Sauer , Juergen Henrich , Joachim Mueller
发明人： Andreas Sauer , Juergen Henrich , Joachim Mueller
IPC分类号： C23C16/00
CPC分类号： C23C16/45519 , C23C14/042 , C23C14/56 , C23C14/564 , H01J37/32477 , H01J37/32623
摘要： A backside coating prevention device adapted for a coating chamber for coating plate-shaped substrates, said coating chamber comprising a plurality of walls, a coating material source for dispensing coating material into the coating chamber, a substrate support, a front side of the substrate support facing the coating material source, the substrate support being adapted for supporting on the front side one or more plate-shaped substrates each having a substrate front side and thereby defining a substrate front plane, wherein said backside coating prevention device comprises two or more screens, the screens being provided at least two of the walls of the coating chamber, each screen having a protruding member protruding from the respective wall.
摘要翻译：一种适合用于涂覆板状基材的涂布室的背面涂层防止装置，所述涂布室包括多个壁，用于将涂料分散到涂布室中的涂料源，基材载体，基材载体的前侧所述基板支撑件适于在前侧支撑一个或多个具有基板前侧的板状基板，从而限定基板正面，其中所述背面涂层防止装置包括两个或更多个屏幕，屏幕设置在涂覆室的至少两个壁中，每个屏幕具有从相应的壁突出的突出构件。

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