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1. 发明申请

US20070029192A1 Tube cathode for use in sputter processes 审中-公开
标题翻译：用于溅射工艺的管阴极
公开(公告)号：US20070029192A1
公开(公告)日：2007-02-08
申请号：US11441271
申请日：2006-05-25
申请人： Manfred Schuhmacher , Gerhard Joos
发明人： Manfred Schuhmacher , Gerhard Joos
IPC分类号： C23C14/00
CPC分类号： C23C14/3407 , H01J37/3435
摘要： The invention relates to a tube cathode with a target carrier and a target. The target can herein be a single- or a multi-part target. Between target carrier and target are placed several annular elements of a thermally conductive material along the longitudinal axis of the target carrier. The annular elements are separated from one another by narrow rings. The target has on at least one end face a chamfer, which permits sliding the target readily over the discrete annular elements.
摘要翻译：本发明涉及一种具有目标载体和靶的管状阴极。目标可以是单一或多部分目标。在目标载体和目标物之间沿着目标载体的纵向轴线放置导热材料的若干环形元件。环形元件通过窄环彼此分离。目标在至少一个端面上具有倒角，这允许目标容易地在离散的环形元件上滑动。

2. 发明申请

US20060196414A1 System for coating a substrate, and an insert element 审中-公开
标题翻译：用于涂覆基材的系统和插入元件
公开(公告)号：US20060196414A1
公开(公告)日：2006-09-07
申请号：US11363762
申请日：2006-02-27
申请人： Manfred Schuhmacher , Gerhard Joos
发明人： Manfred Schuhmacher , Gerhard Joos
IPC分类号： C23C14/00 , B05C5/00 , B05B15/12 , B05B5/025
CPC分类号： C23C14/56 , C03C17/002 , C23C14/568 , H01J37/32458 , H01J37/34 , H01J37/3411 , H01L21/67173 , H01L21/6719 , H01L21/6776
摘要： A system 1 for coating a substrate 3, in particular a transparent substrate, comprises at least one coating chamber 2, at least one pump means 5 for producing a vacuum within the coating chamber 2, and at least one sputtering cathode 9. One or more cathodes 9 are integrated within an insert 8 together with system components which undergo process-induced dirt pick-up, for example shields, covers or transport rollers 6 for conveying a substrate 3 through the process chamber 2. The insert 8 can slide, like a drawer, through a lateral opening 10 within the chamber wall 2a, into the interior of the chamber. For maintenance purposes, any components of the coating system 1 which require thorough maintenance and cleaning can be removed easily from the interior of the coating chamber 2 by means of the insert 8. The removed insert 8 can be replaced directly by an insert that has just been serviced.
摘要翻译：用于涂覆基板3，特别是透明基板的系统1包括至少一个涂覆室2，用于在涂覆室2内产生真空的至少一个泵装置5和至少一个溅射阴极9。一个或多个阴极9与系统部件一起集成在一起，该系统部件经历过程感应的污垢拾取器，例如屏蔽罩，或用于将衬底3输送通过处理室2的传送辊6。插入件8可以像抽屉一样通过室壁2a内的侧向开口10滑入室的内部。为了维护目的，需要彻底维护和清洁的涂层系统1的任何部件可以通过插入件8从涂层室2的内部容易地移除。移除的插入物8可以直接由刚被维修的插入物代替。

3. 发明授权

US5421978A Target cooling system with trough 失效
标题翻译：目标冷却系统带槽
公开(公告)号：US5421978A
公开(公告)日：1995-06-06
申请号：US174149
申请日：1993-12-28
申请人： Manfred Schuhmacher , Helmut Schilling , Gerhard Joos
发明人： Manfred Schuhmacher , Helmut Schilling , Gerhard Joos
IPC分类号： C23C14/34 , H01J37/34
CPC分类号： H01J37/3435 , C23C14/3407 , H01J37/3497
摘要： Cathode sputtering apparatus includes a target, a cooling channel, and a flexible diaphragm therebetween. The target is fixed to a base independently of the diaphragm, so that the target can be replaced with disturbing the cooling channel. In a preferred embodiment, the diaphragm and the target are fixed by respective sets of cleats retained by screws received from respective opposite directions.
摘要翻译：阴极溅射装置包括靶，冷却通道和它们之间的柔性隔膜。目标固定在独立于隔膜的基座上，从而可以用干扰冷却通道来更换目标。在优选实施例中，隔膜和目标通过由相应的相反方向接收的螺钉保持的相应组的夹板固定。

4. 发明申请

US20060037538A1 Holding device for a screen 审中-公开
标题翻译：握住屏幕的设备
公开(公告)号：US20060037538A1
公开(公告)日：2006-02-23
申请号：US11171996
申请日：2005-06-30
申请人： Andreas Sauer , Harald Wurster , Gerhard Joos , Guido Hattendorf
发明人： Andreas Sauer , Harald Wurster , Gerhard Joos , Guido Hattendorf
IPC分类号： C23C16/00
CPC分类号： H01J37/3447 , H01J37/34
摘要： A holding device 12 for mounting at least one screen 9 in a coating chamber 2 of an installation for coating a substrate, especially a glass substrate, is configured such that a screen 9 held by the holding device 12 can be moved at least from a first position within the coating chamber 2 to a second position by movement of the holding device 12. The holding device 12 has means 13 of such kind as to enable the screen 9 to avoid obstructions on the way from the first position to the second position. In particular, during its movement from the first to the second position, the screen 9 is mounted slewably on the holding device 12.
摘要翻译：用于将至少一个屏幕9安装在用于涂覆基板，特别是玻璃基板的设备的涂布室2中的保持装置12被构造成使得由保持装置12保持的屏幕9可以至少从第一通过保持装置12的移动将涂布室2内的位置移动到第二位置。保持装置12具有这样的装置13，使得屏幕9能够避免在从第一位置到第二位置的路上的障碍物。特别地，在从第一位置到第二位置的移动期间，屏幕9可旋转地安装在保持装置12上。

5. 发明授权

US06302372B1 Gate valve 失效
标题翻译：闸阀
公开(公告)号：US06302372B1
公开(公告)日：2001-10-16
申请号：US09455175
申请日：1999-12-06
申请人： Andreas Sauer , Manfred Schuhmacher , Johannes Kunz , Gerhard Joos
发明人： Andreas Sauer , Manfred Schuhmacher , Johannes Kunz , Gerhard Joos
IPC分类号： F16K318
CPC分类号： C23C14/568
摘要： A gate valve (1) is constructed for the simultaneous blocking or clearing of two rectangular passage openings (8,9) of two chamber walls (4,5) that are provided between two vacuum chambers (1,3) and aligned with one another. To this end, it has two valve plates (20, 21), which are a component of a slider (15), which is situated so that it can move with play from a position clearing the passage openings (8,9) to a position which closes the passage openings (8,9). To move the valve plates (20,21) to the closing setting against the passage openings (8,9) on the slider (15), at least one lifting element (24), which is acted on by pressure, is provided.
摘要翻译：闸阀（1）被构造用于同时阻塞或清除两个室壁（4,5）的两个矩形通道开口（8,9），两个腔室壁（4,5）设置在两个真空室（1,3）之间并彼此对准。为此，其具有两个作为滑块（15）的部件的阀板（20,21），其位于使其能够从打开通道开口（8,9）的位置移动到关闭通道开口（8,9）的位置。为了使阀板（20,21）相对于滑块（15）上的通道开口（8,9）移动到关闭设置，提供了由压力作用的至少一个提升元件（24）。

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