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    • 1. 发明申请
    • Exhaust gas processing device, and method of using the same
    • 废气处理装置及其使用方法
    • US20060088452A1
    • 2006-04-27
    • US10541153
    • 2004-01-29
    • Hajime OkuraToshio KatsubeTakayuki Saito
    • Hajime OkuraToshio KatsubeTakayuki Saito
    • B01D50/00B01D53/50
    • F23J15/06F23J15/02F23J15/08Y02E20/363
    • In an exhaust gas processing device wherein in order to efficiently outwardly discharge heat at high temperatures of about 90-150° C. released from a GGH reheater during the shutdown of a desulfurizer, to prevent damage to equipment and corrosion preventive lining material, and to ensure long-term stabilized use of the exhaust gas processing device, at least a GGH heat recovery unit, an absorption tower, a mist eliminator (M/E), and the GGH reheater are placed in a duct for exhaust gases discharged from a fire furnace, in the order named as seen from the upstream side of a flow of exhaust gases, an exhaust gas duct between the M/E and the reheater is provided with a heat radiation device or the like having a heat suppression function for suppressing dissipated heat from the reheater.
    • 在废气处理装置中,为了在脱硫器关闭期间从GGH再热器释放的约90-150℃的高温有效地向外排出热量,以防止对设备和防腐蚀衬里材料的损坏,以及 确保废气处理装置的长期稳定使用,至少将GGH热回收单元,吸收塔,除雾器(M / E)和GGH再热器放置在用于从火中排出的废气的管道中 炉子以从废气流的上游侧看的顺序,M / E和再热器之间的排气管道设置有具有用于抑制散热的热抑制功能的散热装置等 从再热器。
    • 2. 发明授权
    • Exhaust gas processing device, and method of using the same
    • 废气处理装置及其使用方法
    • US07651329B2
    • 2010-01-26
    • US10541153
    • 2004-01-29
    • Hajime OkuraToshio KatsubeTakayuki Saito
    • Hajime OkuraToshio KatsubeTakayuki Saito
    • F23D14/00
    • F23J15/06F23J15/02F23J15/08Y02E20/363
    • In an exhaust gas processing device wherein in order to efficiently outwardly discharge heat at high temperatures of about 90-150° C. released from a GGH reheater during the shutdown of a desulfurizer, to prevent damage to equipment and corrosion preventive lining material, and to ensure long-term stabilized use of the exhaust gas processing device, at least a GGH heat recovery unit, an absorption tower, a mist eliminator (M/E), and the GGH reheater are placed in a duct for exhaust gases discharged from a fire furnace, in the order named as seen from the upstream side of a flow of exhaust gases, an exhaust gas duct between the M/E and the reheater is provided with a heat radiation device or the like having a heat suppression function for suppressing dissipated heat from the reheater.
    • 在废气处理装置中,为了在脱硫器关闭期间从GGH再热器释放的约90-150℃的高温有效地向外排出热量,以防止对设备和防腐蚀衬里材料的损坏,以及 确保废气处理装置的长期稳定使用,至少将GGH热回收单元,吸收塔,除雾器(M / E)和GGH再热器放置在用于从火中排出的废气的管道中 炉子以从废气流的上游侧看的顺序,M / E和再热器之间的排气管道设置有具有用于抑制散热的热抑制功能的散热装置等 从再热器。
    • 4. 发明授权
    • Sensor structure
    • 传感器结构
    • US08549901B2
    • 2013-10-08
    • US13367939
    • 2012-02-07
    • Takayuki SaitoKeiji HanzawaTakayuki Yogo
    • Takayuki SaitoKeiji HanzawaTakayuki Yogo
    • G01M15/04
    • G01F1/6842F02D41/187G01F5/00
    • In relation to a humidity sensor sensitive to water and contamination, a sensor implementation structure that achieves both protection performance against water and contaminants and measurement performance such as humidity responsiveness is provided. A sensor structure has a mass airflow measurement element that measures a mass airflow flowing in an intake pipe, a humidity sensing element that senses humidity of air flowing in the intake pipe, a housing structural component having a connector that carries out input/output to/from outside and a terminal component of the connector, and a bypass passage that is composed by using part of the housing structural component and takes in part of the air that flows in the intake pipe, the mass airflow measurement element being mounted in the bypass passage; wherein space is provided in the housing structural component in the vicinity of the bypass passage, the humidity sensing element is mounted in the space.
    • 关于对水和污染物敏感的湿度传感器,提供了实现对水和污染物的保护性能以及诸如湿度响应性的测量性能的传感器实施结构。 传感器结构具有测量进气管中流动的质量气流的质量气流测量元件,感测进气管中流动的空气湿度的湿度感测元件,具有连接器的壳体结构部件,该连接器将输入/ 从连接器的外部和端子部件和旁通通路构成,所述旁通通路由使用所述壳体结构部件的一部分而占据所述进气管中流动的一部分空气,所述质量空气流量测量元件安装在所述旁路通路 ; 其中在所述外壳结构部件中在所述旁通通路附近设置空间,所述湿度感测元件安装在所述空间中。
    • 9. 发明申请
    • Substrate processing apparatus and substrate processing method
    • 基板加工装置及基板处理方法
    • US20090090397A1
    • 2009-04-09
    • US12314197
    • 2008-12-05
    • Takayuki SaitoTsukuru SuzukiKaoru YamadaKenya ItoMasayuki KamezawaKenji Yamaguchi
    • Takayuki SaitoTsukuru SuzukiKaoru YamadaKenya ItoMasayuki KamezawaKenji Yamaguchi
    • B08B3/04
    • H01L21/6708B08B3/02Y10S134/902
    • The present invention provides a substrate processing apparatus and a substrate processing method suitable for use in an etching apparatus which etches a thin film formed on a peripheral portion of a substrate. The present invention also provides a substrate processing apparatus and a substrate processing method suitable for use in a cleaning apparatus which performs a cleaning process on a substrate which has been etched. The substrate processing apparatus for use in etching includes a substrate holder 11 for holding a substrate W substantially horizontally and rotating the substrate W, and a processing liquid supply unit 15 for supplying a processing liquid onto a peripheral portion of the substrate W which is being rotated in such a manner that the processing liquid is stationary with respect to the substrate W. The substrate processing apparatus for use in cleaning a substrate includes a substrate holder 54 for holding a substrate W substantially horizontally and rotating the substrate W, and a cleaning liquid supply unit 53 having a cleaning liquid outlet 53a which is oriented from a center of the substrate W toward a peripheral portion of the substrate W with an elevation angle of not more than 45° from a surface of the substrate W. The cleaning liquid supply unit 53 supplies a cleaning liquid to the surface of the substrate W at a flow velocity of not less than 0.1 m/s.
    • 本发明提供一种适用于腐蚀形成在基板的周边部分上的薄膜的蚀刻装置中的基板处理装置和基板处理方法。 本发明还提供一种适用于在已被蚀刻的基板上进行清洗处理的清洗装置的基板处理装置和基板处理方法。 用于蚀刻的基板处理装置包括基板保持器11,用于基本上水平地保持基板W并旋转基板W;以及处理液体供应单元15,用于将处理液体供应到正在旋转的基板W的周边部分 处理液体相对于基板W是静止的。用于清洗基板的基板处理装置包括:基板保持件54,用于基本上水平地保持基板W并旋转基板W;以及清洗液供给部 单元53具有从基板W的中心朝向基板W的周边部分取向的清洗液出口53a,其与基板W的表面的仰角不大于45°。清洗液供给单元53 以不小于0.1m / s的流速将清洗液供给到基板W的表面。
    • 10. 发明授权
    • Substrate processing apparatus and substrate processing method
    • 基板加工装置及基板处理方法
    • US07476290B2
    • 2009-01-13
    • US10695826
    • 2003-10-30
    • Takayuki SaitoTsukuru SuzukiKaoru YamadaKenya ItoMasayuki KamezawaKenji Yamaguchi
    • Takayuki SaitoTsukuru SuzukiKaoru YamadaKenya ItoMasayuki KamezawaKenji Yamaguchi
    • B08B7/04
    • H01L21/6708B08B3/02Y10S134/902
    • The present invention provides a substrate processing apparatus and a substrate processing method suitable for use in an etching apparatus which etches a thin film formed on a peripheral portion of a substrate. The present invention also provides a substrate processing apparatus and a substrate processing method suitable for use in a cleaning apparatus which performs a cleaning process on a substrate which has been etched. The substrate processing apparatus for use in etching includes a substrate holder for holding a substrate substantially horizontally and rotating the substrate, and a processing liquid supply unit for supplying a processing liquid onto a peripheral portion of the substrate which is being rotated in such a manner that the processing liquid is stationary with respect to the substrate. The substrate processing apparatus for use in cleaning a substrate includes a substrate holder for holding a substrate substantially horizontally and rotating the substrate, and a cleaning liquid supply unit having a cleaning liquid outlet which is oriented from a center of the substrate toward a peripheral portion of the substrate with an elevation angle of not more than 45° from a surface of the substrate. The cleaning liquid supply unit supplies a cleaning liquid to the surface of the substrate at a flow velocity of not less than 0.1 m/s.
    • 本发明提供一种适用于腐蚀形成在基板的周边部分上的薄膜的蚀刻装置中的基板处理装置和基板处理方法。 本发明还提供一种适用于在已被蚀刻的基板上进行清洗处理的清洗装置的基板处理装置和基板处理方法。 用于蚀刻的基板处理装置包括:基板保持器,用于基本上水平地保持基板并旋转基板;以及处理液体供应单元,用于将处理液体供应到正在旋转的基板的周边部分, 处理液相对于基板静止。 用于清洗基板的基板处理装置包括基板保持器,用于基本水平地保持基板并旋转基板;以及清洗液供给单元,其具有从基板的中心朝向基板的周边部分 该衬底的仰角与衬底的表面不超过45°。 清洗液供给部以不小于0.1m / s的流速向基板的表面供给清洗液。