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1. 发明申请

US20080308410A1 Redundant Anode Sputtering Method and Assembly 有权
标题翻译：冗余阳极溅射方法和装配
公开(公告)号：US20080308410A1
公开(公告)日：2008-12-18
申请号：US12092279
申请日：2006-11-06
申请人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
发明人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
IPC分类号： C23C14/00
CPC分类号： H01J37/3444 , C23C14/354 , C23C14/564 , H01J37/32532 , H01J37/3405 , H01J37/3408 , H01J37/3438
摘要： A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.
摘要翻译：提供了一种借助于磁控管阴极和两个被正电位和负电位交替冲击的电极涂覆衬底的方法。还公开了一种用于涂覆基板的组件，包括真空室，磁控管阴极，两个电极和电压源。在不大于阴极电位的水平的水平下产生负电位，因此防止被清洗的电极被剥离的程度大于在前一半波中涂覆的电极的程度。磁控管阴极和电极通过开关元件而不是电流地连接到电压源，使得从电压源产生的负电压和正电压可以替代地施加到电极，所述电压的电平不大于阴极电压。

2. 发明授权

US09117637B2 Redundant anode sputtering method and assembly 有权
标题翻译：冗余阳极溅射法和组装
公开(公告)号：US09117637B2
公开(公告)日：2015-08-25
申请号：US12092279
申请日：2006-11-06
申请人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
发明人： Goetz Teschner , Falk Milde , Enno Mirring , Frank Meissner , Goetz Grosser
IPC分类号： H01J37/34 , H01J37/32 , C23C14/35 , C23C14/56
CPC分类号： H01J37/3444 , C23C14/354 , C23C14/564 , H01J37/32532 , H01J37/3405 , H01J37/3408 , H01J37/3438
摘要： A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.
摘要翻译：提供了一种借助于磁控管阴极和两个被正电位和负电位交替冲击的电极涂覆衬底的方法。还公开了一种用于涂覆基板的组件，包括真空室，磁控管阴极，两个电极和电压源。在不大于阴极电位的水平的水平下产生负电位，因此防止被清洗的电极被剥离的程度大于在前一半波中涂覆的电极的程度。磁控管阴极和电极通过开关元件而不是电流地连接到电压源，使得从电压源产生的负电压和正电压可以替代地施加到电极，所述电压的电平不大于阴极电压。

3. 发明授权

US07785721B2 Thermally treatable layer assembly that filters sun and heat and method for producing the same 有权
标题翻译：用于过滤太阳和热的可热处理层组件及其制造方法
公开(公告)号：US07785721B2
公开(公告)日：2010-08-31
申请号：US10580504
申请日：2004-11-25
申请人： Matthias List , Falk Milde , Christoph Koeckert , Joerg Fiukowski
发明人： Matthias List , Falk Milde , Christoph Koeckert , Joerg Fiukowski
IPC分类号： B32B15/04 , B05D1/00
CPC分类号： C03C17/3626 , C03C17/3423 , C03C17/3435 , C03C17/36 , C03C17/3642 , C03C17/3655 , C03C17/366 , C03C17/3681 , C03C2218/151
摘要： A layer system that filters sun and heat can be applied to glass by a vacuum coating process. The system comprises at least one series of metal layers in addition to a respective series of lower dielectric layers and a respective series of upper dielectric layers. At least one series of metal layers and one series of upper and lower dielectric layers are configured as a sandwich system, wherein one metal layer is encapsulated by an upper and a lower intermediate layer consisting of hypostoichiometrically nitrided or oxidized metal of the metal layer and sandwich systems of the series of layers contain individual sandwich layers of a stoichiometric and hypostoichiometric oxide or nitride of a metal or semiconductor. An oxygen or nitrogen deficit of the sandwich layers increases towards a neighboring sandwich system and the oxide and nitride layers are produced in a vacuum coating process.
摘要翻译：过滤太阳和热的层系统可以通过真空涂覆工艺施加到玻璃上。除了相应的一系列下电介质层和相应的一系列上电介质层之外，该系统还包括至少一系列的金属层。至少一系列金属层和一系列上下电介质层被构造为夹层系统，其中一个金属层被上和下中间层包围，该中间层由金属层的次元素化学计量氮化或氧化金属和三明治一系列层的系统包含金属或半导体的化学计量和低化学计量氧化物或氮化物的单个夹层。夹层的氧或氮缺乏朝相邻夹层系统增加，氧化物和氮化物层在真空镀膜工艺中产生。

4. 发明申请

US20080032157A1 INFRARED REFLECTING LAYER SYSTEM FOR TRANSPARENT SUBSTRATE 失效
标题翻译：用于透明基板的红外反射层系统
公开(公告)号：US20080032157A1
公开(公告)日：2008-02-07
申请号：US11749900
申请日：2007-05-17
申请人： Christoph Koekert , Holger Proehl , Falk Milde
发明人： Christoph Koekert , Holger Proehl , Falk Milde
IPC分类号： B32B9/00 , C23C16/00
CPC分类号： G02B5/281 , C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3652 , C03C17/366 , C03C2217/734 , Y10T428/24942
摘要： An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.
摘要翻译：提供了在透明基板上的红外线反射透明层系统及其制造方法。红外线辐射反射层系统包括红外辐射反射层序列，其包括通常由贵金属（大部分为银）或其合金组成的选择性功能，并且在红外范围具有良好的选择性反射率。该层序列由至少一个金属氧化物的透明介电层，半导体或半导体合金的半导体或半导体合金补充，该半导体或半导体合金直接布置在基板上或红外线辐射反射层序列上。

5. 发明授权

US08377578B2 Infrared reflecting layer system for transparent substrate 失效
标题翻译：用于透明基板的红外反射层系统
公开(公告)号：US08377578B2
公开(公告)日：2013-02-19
申请号：US13349007
申请日：2012-01-12
申请人： Christoph Koeckert , Holger Proehl , Falk Milde
发明人： Christoph Koeckert , Holger Proehl , Falk Milde
IPC分类号： B32B15/04
CPC分类号： G02B5/281 , C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3652 , C03C17/366 , C03C2217/734 , Y10T428/24942
摘要： An infrared radiation reflecting transparent layer system on a transparent substrate and a method for producing same is provided. The infrared radiation reflecting layer system comprises an infrared radiation reflecting layer sequence which includes a selective function usually consisting of a noble metal, mostly silver, or an alloy thereof and having a good selective reflectivity in the infrared range. The layer sequence is supplemented by at least one transparent dielectric layer of an oxynitride of a metal, a semiconductor or a semiconductor alloy having a low to moderate refractive index arranged directly on the substrate or above the infrared radiation reflecting layer sequence.
摘要翻译：提供了在透明基板上的红外线反射透明层系统及其制造方法。红外线辐射反射层系统包括红外辐射反射层序列，其包括通常由贵金属（大部分为银）或其合金组成的选择性功能，并且在红外范围具有良好的选择性反射率。该层序列由至少一个金属氧化物的透明介电层，半导体或半导体合金的半导体或半导体合金补充，该半导体或半导体合金直接布置在基板上或红外线辐射反射层序列上。

6. 发明授权

US08197222B2 Getter pump and vacuum coating installation comprising a getter pump 失效
标题翻译：吸气泵和吸尘器安装包括吸气泵
公开(公告)号：US08197222B2
公开(公告)日：2012-06-12
申请号：US12306956
申请日：2007-07-04
申请人： Falk Milde , Hans-Christian Hecht , Joern Brueckner
发明人： Falk Milde , Hans-Christian Hecht , Joern Brueckner
IPC分类号： F04B37/02
CPC分类号： C23C14/56 , F04B37/02
摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
摘要翻译：将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。吸气泵包括具有曝光开口的泵壳体。壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。内部和外部子部分的位置可以通过吸气体的移动而互换。吸气泵配备有用于从内部子部分去除吸气剂材料的装置。

7. 发明申请

US20090202362A1 GETTER PUMP AND VACUUM COATING INSTALLATION COMPRISING A GETTER PUMP 失效
标题翻译：进水泵和真空包装安装包括一个水泵
公开(公告)号：US20090202362A1
公开(公告)日：2009-08-13
申请号：US12306956
申请日：2007-07-04
申请人： Falk Milde , Hans-Christian Hecht , Joern Brueckner
发明人： Falk Milde , Hans-Christian Hecht , Joern Brueckner
IPC分类号： F04B37/08 , F04B37/02
CPC分类号： C23C14/56 , F04B37/02
摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
摘要翻译：将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。吸气泵包括具有曝光开口的泵壳体。壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。内部和外部子部分的位置可以通过吸气体的移动而互换。吸气泵配备有用于从内部子部分去除吸气剂材料的装置。

8. 发明授权

US08828194B2 Layer system that can be annealed and method for producing the same 有权
标题翻译：可退火的层系统及其制造方法
公开(公告)号：US08828194B2
公开(公告)日：2014-09-09
申请号：US11575985
申请日：2005-09-21
申请人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
发明人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
IPC分类号： C23C14/34 , C03C17/36 , C23C14/08 , C23C14/02 , C23C14/35
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译：可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。层序列包括基底近端阻挡层，选择层和底物远侧阻断层。还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。

9. 发明授权

US5846608A Process for ion-supported vacuum coating 失效
标题翻译：离子支持真空镀膜工艺
公开(公告)号：US5846608A
公开(公告)日：1998-12-08
申请号：US722024
申请日：1996-10-11
申请人： Manfred Neumann , Klaus Goedicke , Siegfried Schiller , Jonathan Reschke , Henry Morgner , Falk Milde , Fred Fietzke
发明人： Manfred Neumann , Klaus Goedicke , Siegfried Schiller , Jonathan Reschke , Henry Morgner , Falk Milde , Fred Fietzke
IPC分类号： H05H1/32 , C23C14/32 , C23C14/56 , H01J37/32 , H05H1/46 , C23C14/08
CPC分类号： H01J37/32422 , C23C14/32 , C23C14/562 , H01J37/32706
摘要： A process an device for ion-supported vacuum coating. The process and the affiliated device is intended to permit the high-rate ating of large-surfaced, electrically conductive and electrically insulating substrates with electrically insulating and electrically conductive coatings with relatively low expenditure. The substrates are predominantly band-shaped, in particular plastic sheets with widths of over a meter. According to the invention, in an intrinsically known device for vacuum coating, alternating negative and positive voltage pulses are applied to the electrically conductive substrate or in electrically insulating substrates, to an electrode disposed directly behind them, e.g. the cooling roller, relative to the plasma or to an electrode that is disposed almost at plasma potential. The form, the voltage, and the duration of the pulses are adapted to the coating task and the material. The process is used particularly for depositing abrasion protection, corrosion protection, and barrier coatings. The user is the packaging industry, among others.
摘要翻译： PCT No.PCT / DE95 / 00476 Sec。 371日期：1996年10月11日 102（e）日期1996年10月11日PCT提交1995年4月7日PCT公布。公开号WO95 / 28508 日期：1995年10月26日一种用于离子支持真空涂层的装置。该方法和附属装置旨在允许具有相对较低支出的具有电绝缘和导电涂层的大表面，导电和电绝缘基板的高速涂布。基底主要是带状，特别是宽度超过一米的塑料片。根据本发明，在本来已知的用于真空涂覆的装置中，将交替的负电压和正电压脉冲施加到导电衬底或电绝缘衬底，直接设置在其后面的电极，例如，冷却辊相对于等离子体或几乎处于等离子体电位的电极。脉冲的形式，电压和持续时间适用于涂层任务和材料。该方法特别用于沉积磨损保护，防腐蚀和阻隔涂层。用户是包装行业等。

10. 发明授权

US08367226B2 Annealable layer system 失效
标题翻译：可再生层系统
公开(公告)号：US08367226B2
公开(公告)日：2013-02-05
申请号：US12842497
申请日：2010-07-23
申请人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
发明人： Joerg Fiukowski , Matthias List , Hans-Christian Hecht , Falk Milde
IPC分类号： B32B15/04
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译：可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。层序列包括基底近端阻挡层，选择层和底物远侧阻断层。还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。

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