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    • 7. 发明授权
    • Device for gripping and holding a flat substrate
    • 用于夹持和保持平坦基底的装置
    • US06317406B1
    • 2001-11-13
    • US09285105
    • 1999-04-02
    • Michael KönigJohannes BeulStefan Bangert
    • Michael KönigJohannes BeulStefan Bangert
    • B25J1508
    • C23C14/50B65G47/90
    • A device for gripping and holding a compact disc comprising a housing, a plurality of grippers that are arranged in said housing, each of said grippers being provided with a magnet, said gripper being guided in recesses in the housing which allow a movement of each gripper transverse to a vertical axis of said housing and cooperating with an electromagnet. The magnetic field axis of which coincides with the vertical axis (H) of the housing (3) and which moves the grippers (5, . . . ) back and forward between two limit stops (a, b) depending on the polarity of the electromagnet (16). The housing (3) is encompassed with play by a holder (10), wherein elements (13, . . . ) of an elastic material are provided between the holder (10) and the housing (3), namely in the part (9) of the housing (3) that is encompassed by the holder (10). The grippers (5, . . . ) respectively contain two limbs (5a, 5b, . . . ), one of which (5a, . . . ) extends downward perpendicular to the first limb (5b, . . . ) and encompasses the edge of the central opening (15) of the substrate (14) with its end.
    • 一种用于夹持和保持光盘的装置,包括壳体,布置在所述壳体中的多个夹具,每个所述夹持器设置有磁体,所述夹持器被引导到所述壳体中的凹部中,这允许每个夹持器 横向于所述壳体的垂直轴线并与电磁体配合。 其磁场轴线与壳体(3)的垂直轴线(H)重合,并使夹具(5 ...)在两个极限挡块(a,b)之间向前和向后移动,取决于 电磁铁(16)。 壳体(3)由保持器(10)包围,其中弹性材料的元件(13 ...)设置在保持器(10)和壳体(3)之间,即部件(9)中 )由所述保持器(10)包围的壳体(3)。 夹具(5 ...)分别包含两个分支(5a,5b,...),其中一个(5a,...)垂直于第一支柱(5b ...)向下延伸,并且包括 衬底(14)的中心开口(15)的边缘与其端部。
    • 8. 发明授权
    • Sputtering device for coating an essentially flat disk-shaped substrate
    • 用于涂覆基本平坦的盘形基底的溅射装置
    • US06203677B1
    • 2001-03-20
    • US09161319
    • 1998-09-28
    • Michael König
    • Michael König
    • C23C1434
    • C23C14/566C23C14/34
    • A device for coating a disk-like substrate (3,3′, . . . ) with the aid of cathodic sputtering, having an essentially cylindrical transport chamber (7) and with a vacuum pump (8) connected to the transport chamber (7) and with an opening (9) that can be closed off by a plate (16) for inserting and removing the substrates (3,3′. . . ) and with a coating chamber (11) containing the cathode (10) and with a substrate carrier (12) seated so as to be able to rotate in the transport chamber (7), the substrate carrier (12) is connected to the output shaft (13) of a motor-gear assembly unit (14) and, on the one hand, can be displaced by the latter inside the transport space (19) from a center operating position (A) in a vertical lifting motion into an upper coating position (B) and a lower rest position (C) and, on the other, can be rotated by the output shaft (13) inside the transport space (19), wherein the suction connector (15) of the vacuum pump (8) on the bottom part (4) of the transport space (19) can closed off by the substrate carrier (12) in the rest position (C).
    • 借助于阴极溅射涂覆盘状基底(3,3',...)的装置,具有基本圆柱形的运送室(7)和连接到输送室(7)的真空泵(8) )和可以由用于插入和移除基板(3,3'...)的平板(16)和具有包含阴极(10)的涂覆室(11)封闭的开口(9)并与 以能够在传送室(7)中旋转的基板载体(12),基板载体(12)连接到电动机 - 齿轮组件单元(14)的输出轴(13) 一方面可以由传送空间(19)中的运动空间(19)从垂直提升运动中的中心操作位置(A)移动到上涂层位置(B)和下静止位置(C)中,并且在 另一方面,可以通过输送轴(13)在输送空间(19)内旋转,其中真空泵(8)的吸入连接器(15)位于运输工具的底部(4)上 在静止位置(C),踏板(19)可以被衬底载体(12)封闭。