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1. 发明授权

US5803599A Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures 失效
标题翻译：用于混合用于化学机械抛光程序的化学品的装置和方法
公开(公告)号：US5803599A
公开(公告)日：1998-09-08
申请号：US898882
申请日：1997-06-27
申请人： Edward T. Ferri, Jr. , J. Tobin Geatz , Gary L. Corlett
发明人： Edward T. Ferri, Jr. , J. Tobin Geatz , Gary L. Corlett
IPC分类号： B01F15/04 , B01J4/00 , B01J4/02 , B24B37/04 , B24B57/02 , B67D7/02 , G01F11/28 , H01L21/00 , B01F15/02 , B67D5/54
CPC分类号： H01L21/67276 , B01F15/00422 , B01F15/0454 , B01J4/02 , B24B37/04 , B24B57/02 , B67D7/0272 , B67D7/0283 , G01F11/28 , B01F2215/0036 , B01J2219/00006 , Y10T137/3109 , Y10T137/3127 , Y10T137/4891
摘要： Apparatus for the delivery of a chemical slurry to at least one downstream facility. The apparatus comprises a measuring vessel of predetermined volume into which a liquid chemical component is introduced. A conduit connects the measuring vessel to multiple chemical sources, wherein each of said chemical sources comprises a liquid chemical component. Another conduit connects the measuring vessel to at least one mix tank. A pressure-vacuum vessel is in communication with said at least one mix tank, whereby chemical is drawn from said at least one mix tank to the pressure-vacuum vessel under negative pressure and chemical is delivered from the pressure-vacuum vessel to said at least one downstream facility under positive pressure. The pressure-vacuum vessel is in fluid communication with both said at least one mix tank and said at least one downstream facility. Valves on each of the conduits control the chemical flow therethrough. The chemical slurry is produced in said least at one mix tank by combining chemicals from one or more of the multiple chemical sources, and the slurry is delivered from said at least one mix tank to said at least one downstream facility.
摘要翻译：用于将化学浆料输送到至少一个下游设备的装置。该装置包括其中引入液体化学成分的预定体积的测量容器。导管将测量容器连接到多个化学源，其中每个所述化学源包括液体化学组分。另一导管将测量容器连接到至少一个混合罐。压力 - 真空容器与所述至少一个混合罐连通，由此在负压下将化学品从所述至少一个混合罐抽吸到压力 - 真空容器，化学品从压力 - 真空容器输送至所述至少一个一个下游设施正压。压力 - 真空容器与所述至少一个混合罐和所述至少一个下游设备流体连通。每个管道上的阀门控制通过其中的化学物质流动。所述化学浆料在所述至少一个混合罐中通过组合来自所述多种化学源中的一种或多种的化学品而产生，并且所述浆料从所述至少一个混合罐输送到所述至少一个下游设备。

2. 发明授权

US06379538B1 Apparatus for separation and recovery of liquid and slurry abrasives used for polishing 失效
标题翻译：用于分离和回收用于抛光的液体和浆料研磨剂的设备
公开(公告)号：US06379538B1
公开(公告)日：2002-04-30
申请号：US09299697
申请日：1999-04-26
申请人： Gary L. Corlett , Edward T. Ferri, Jr. , J. Tobin Geatz
发明人： Gary L. Corlett , Edward T. Ferri, Jr. , J. Tobin Geatz
IPC分类号： B08B1300
CPC分类号： B01D21/0009 , B01D21/0027 , B01D21/009 , B01D21/02 , B01D21/2405 , B01D21/2411 , B01D21/2444 , B01D21/245 , B01D21/26 , B01D21/32 , B01D21/34 , B01D61/14 , B01D61/22 , B01D2221/14 , B24B37/04 , B24B57/02 , C02F1/006 , C02F1/008 , C02F1/20 , C02F1/32 , C02F1/38 , C02F1/385 , C02F1/42 , C02F1/444 , C02F1/463 , C02F1/469 , C02F1/58 , C02F1/66 , C02F9/00 , C02F2103/346 , C02F2209/06 , C02F2209/11 , G01N33/18 , G01N2033/0095 , Y10S134/902 , Y10T137/2509
摘要： Abrasive components and clear fluids are separated from an aqueous chemical mechanical slurry used for planarization of semiconductor materials, to permit the reuse of the clear liquid effluent in non-process applications as well as for gray water for irrigation, process cooling water, or as make-up water for a reverse osmosis system, or safe disposal in the industrial waste stream, as desired. A solids detection device determines the concentration of abrasive solids in the aqueous waste effluent stream, and a diverter receives and diverts the entire aqueous waste effluent stream to at least one reuse water collection tank when the abrasive solids concentration is below a desired threshold, and diverts the entire aqueous waste effluent stream to at least one concentrate water collection tank when the abrasive solids concentration is greater than or equal to the threshold. With the additional use of ion exchange, the resulting water stream can be reused in high purity water applications.
摘要翻译：研磨组分和透明流体与用于半导体材料平坦化的水性化学机械浆料分离，以允许在非工艺应用中再利用清澈的液体流出物，以及用于灰水进行灌溉，工艺冷却水或作为用于反渗透系统的水，或根据需要在工业废物流中的安全处置。固体检测装置确定含水废物流出物流中的磨料固体的浓度，并且当磨料固体浓度低于期望的阈值时，转向器接收并转移整个含水废物流出物流至至少一个再利用水收集罐，并转移当磨料固体浓度大于或等于阈值时，整个含水废水流到至少一个浓缩水收集罐。通过额外使用离子交换，所得水流可以在高纯度水应用中重复使用。

3. 发明授权

US5874049A Two-stage chemical mixing system 失效
标题翻译：两级化学混合系统
公开(公告)号：US5874049A
公开(公告)日：1999-02-23
申请号：US789335
申请日：1997-01-23
申请人： Edward T. Ferri, Jr. , J. Tobin Geatz , Randall L. Green
发明人： Edward T. Ferri, Jr. , J. Tobin Geatz , Randall L. Green
IPC分类号： B01F15/04 , G05D11/13
CPC分类号： G05D11/138 , G05D11/133
摘要： A chemical mixing system for mixing ingredients at desired concentrations concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel and transferred to a relatively large mix drum. The concentration of the chemical within the mix drum is measured by a concentration monitor. If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.
摘要翻译：用于在合格范围内混合所需浓度浓度成分的化学混合系统。将混合化学品的批料在相对小的混合容器中混合并转移到相对较大的混合鼓中。混合鼓中化学品的浓度通过浓度监测器测量。如果混合鼓中化学品的测量浓度在合格范围内，则将混合容器中的化学品批次混合至所需浓度。如果混合桶中化学品的测量浓度低于限定范围，则将混合容器中的化学品批次混合至高于所需浓度的高浓度。如果混合鼓中化学品的测量浓度高于限定范围，则将混合容器中的化学品批次混合至低于所需浓度的低浓度。从而进行批量平均以将混合鼓中的化学品浓度保持在所需的限定范围内。

4. 发明授权

US06482325B1 Apparatus and process for separation and recovery of liquid and slurry abrasives used for polishing 失效
标题翻译：用于抛光的液体和浆料研磨剂的分离和回收装置和方法
公开(公告)号：US06482325B1
公开(公告)日：2002-11-19
申请号：US09813037
申请日：2001-03-19
申请人： Gary L. Corlett , Edward T. Ferri, Jr. , J. Tobin Geatz
发明人： Gary L. Corlett , Edward T. Ferri, Jr. , J. Tobin Geatz
IPC分类号： C02F142
CPC分类号： B01D21/0009 , B01D21/0027 , B01D21/009 , B01D21/02 , B01D21/2405 , B01D21/2411 , B01D21/2444 , B01D21/245 , B01D21/26 , B01D21/32 , B01D21/34 , B01D61/14 , B01D61/22 , B01D2221/14 , B24B37/04 , B24B57/02 , C02F1/006 , C02F1/008 , C02F1/20 , C02F1/32 , C02F1/38 , C02F1/385 , C02F1/42 , C02F1/444 , C02F1/463 , C02F1/469 , C02F1/58 , C02F1/66 , C02F9/00 , C02F2103/346 , C02F2209/06 , C02F2209/11 , G01N33/18 , G01N2033/0095 , Y10S134/902 , Y10T137/2509
摘要： Abrasive components and clear fluids are separated from an aqueous chemical mechanical slurry used for planarization of semiconductor materials, to permit the reuse of the clear liquid effluent in non-process applications as well as for gray water for irrigation, process cooling water, or as make-up water for a reverse osmosis system, or safe disposal in the industrial waste stream, as desired. A solids detection device determines the concentration of abrasive solids in the aqueous waste effluent stream, and a diverter valve receives and diverts the entire aqueous waste effluent stream to at least one reuse water collection tank when the abrasive solids concentration is below a desired threshold, and diverts the entire aqueous waste effluent stream to at least one concentrate water collection tank when the abrasive solids concentration is greater than or equal to the threshold. With the additional use of ion exchange, the resulting water stream can be reused in high purity water applications.
摘要翻译：研磨组分和透明流体与用于半导体材料平面化的水性化学机械浆料分离，以允许在非工艺应用中再利用清澈的液体流出物，以及用于灰水用于灌溉，工艺冷却水或作为用于反渗透系统的水，或根据需要在工业废物流中的安全处置。固体检测装置确定含水废物流出物流中的磨料固体的浓度，当磨料固体浓度低于所需阈值时，分流阀接收并转移整个含水废水流至至少一个再利用水收集罐，以及当磨料固体浓度大于或等于阈值时，将整个含水废水流转移至至少一个浓缩水收集池。通过额外使用离子交换，所得水流可以在高纯度水应用中重复使用。

5. 发明授权

US5632960A Two-stage chemical mixing system 失效
标题翻译：两级化学混合系统
公开(公告)号：US5632960A
公开(公告)日：1997-05-27
申请号：US554787
申请日：1995-11-07
申请人： Edward T. Ferri, Jr. , J. Tobin Geatz , Randall L. Green
发明人： Edward T. Ferri, Jr. , J. Tobin Geatz , Randall L. Green
IPC分类号： B01F15/04 , G05D11/13 , G05D9/00
CPC分类号： G05D11/138 , G05D11/133
摘要： A chemical mixing system for mixing ultra pure water and concentrated HF to a desired concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel and transferred to a relatively large mix drum. The concentration of the chemical within the mix drum is measured by a concentration monitor. If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.
摘要翻译：用于将超纯水和浓缩HF混合至合格范围内所需浓度的化学混合系统。将混合化学品的批料在相对小的混合容器中混合并转移到相对较大的混合鼓中。混合鼓中化学品的浓度通过浓度监测器测量。如果混合鼓中化学品的测量浓度在合格范围内，则将混合容器中的化学品批次混合至所需浓度。如果混合桶中化学品的测量浓度低于限定范围，则将混合容器中的化学品批次混合至高于所需浓度的高浓度。如果混合桶中化学品的测量浓度高于限定范围，则将混合容器中的化学品批次混合至低于所需浓度的低浓度。从而进行批量平均以将混合鼓中的化学品浓度保持在所需的限定范围内。

6. 发明授权

US5417346A Process and apparatus for electronic control of the transfer and delivery of high purity chemicals 失效
标题翻译：用于电子控制高纯度化学品转移和输送的方法和设备
公开(公告)号：US5417346A
公开(公告)日：1995-05-23
申请号：US275958
申请日：1994-07-15
申请人： Edward T. Ferri, Jr. , J. Tobin Geatz
发明人： Edward T. Ferri, Jr. , J. Tobin Geatz
IPC分类号： B01F15/04 , B24B37/04 , B67D7/02 , G01F11/28 , G01F23/00 , G01F23/02 , H01L21/00 , B67D5/06
CPC分类号： B67D7/0272 , B01F15/00422 , B01F15/0454 , B24B37/04 , B67D7/0283 , G01F11/28 , G01F23/00 , G01F23/02 , H01L21/67253 , H01L21/67276 , B01F2215/0036 , Y10T137/3109 , Y10T137/3124 , Y10T137/3127
摘要： The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing a series of vessels arranged in parallel, a vacuum system to draw chemical from one or more bulk sources into the vessels, and a pressure system to deliver chemical under pressure from the vessels, chemicals can be easily delivered from any bulk source to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous and uniform chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure. Computer controlled process systems provides system flexibility and full automation.
摘要翻译：本发明提供用于转移和输送用于半导体生产和类似方法的非常高纯度化学品的改进方法和装置。通过采用平行布置的一系列容器，将化学品从一个或多个主体源吸入容器中的真空系统，以及在压力下从容器输送化学物质的压力系统，化学品可以容易地从任何大容量源传递到一个或更多的最终用户。使用真空系统通过密封导管吸取化学物质，无需泵，这是维护问题和系统污染的根源。多个容器提供各种流量选项，包括在低使用期间向最终用户提供连续和均匀的化学品输送，循环和定期过滤，以及内置冗余，以避免在组件故障时系统关闭。计算机控制过程系统提供系统灵活性和全自动化。

7. 发明授权

US5370269A Process and apparatus for precise volumetric diluting/mixing of chemicals 失效
标题翻译：化学品精密体积稀释/混合的工艺和设备
公开(公告)号：US5370269A
公开(公告)日：1994-12-06
申请号：US35252
申请日：1993-03-22
申请人： Eugene W. Bernosky , J. Tobin Geatz , Edward T. Ferri, Jr. , Glenn A. Roberson, Jr.
发明人： Eugene W. Bernosky , J. Tobin Geatz , Edward T. Ferri, Jr. , Glenn A. Roberson, Jr.
IPC分类号： G01N1/00 , B01F15/04 , B01J4/00 , B24B37/04 , B67D7/02 , B67D7/74 , F17D1/08 , G01F11/28 , G01F23/00 , G01F23/02 , H01L21/00 , B67D5/08
CPC分类号： B67D7/0272 , B01F15/00422 , B01F15/0454 , B24B37/04 , B67D7/0277 , B67D7/0283 , G01F11/28 , G01F23/00 , G01F23/02 , H01L21/67253 , H01L21/67276 , B01F2215/0036
摘要： Apparatus and method for accurate measuring and mixing of chemicals is disclosed. The apparatus includes one or more metered vessels having a container of predetermined volume and at least one constricted vent tube therein. By mounting a sensor on the constricted vent tube, a greatly amplified measurement of the precise chemical volume in the metered vessel is provided. The apparatus and method of the present invention readily lends itself to a variety of applications and can be adapted to handle virtually any form of chemical mixing, diluting, or generating process.
摘要翻译：公开了用于精确测量和混合化学品的装置和方法。该装置包括一个或多个计量容器，其具有预定体积的容器和其中至少一个收缩通气管。通过将传感器安装在狭窄的排气管上，提供了对计量容器中精确化学容积的大大放大测量。本发明的装置和方法容易地适用于各种应用，并且可适用于几乎任何形式的化学混合，稀释或生成过程。

8. 发明授权

US5330072A Process and apparatus for electronic control of the transfer and delivery of high purity chemicals 失效
标题翻译：用于电子控制高纯度化学品转移和输送的方法和设备
公开(公告)号：US5330072A
公开(公告)日：1994-07-19
申请号：US948392
申请日：1992-09-21
申请人： Edward T. Ferri, Jr. , J. Tobin Geatz
发明人： Edward T. Ferri, Jr. , J. Tobin Geatz
IPC分类号： F17D1/08 , B01F15/04 , B24B37/04 , B67D7/02 , G01F11/28 , H01L21/00 , H01L21/304 , B67D5/08
CPC分类号： B67D7/0272 , B01F15/00422 , B01F15/0454 , B24B37/04 , B67D7/0283 , G01F11/28 , H01L21/67253 , H01L21/67276 , B01F2215/0036 , Y10T137/3109 , Y10T137/3124 , Y10T137/3127
摘要： The present invention provides improved method and apparatus for the transfer and delivery of very high purity chemicals for use in semiconductor production and similar processes. By employing a series of vessels arranged in parallel, a vacuum system to draw chemical from one or more bulk sources into the vessels, and a pressure system to deliver chemical under pressure from the vessels, chemicals can be easily delivered from any bulk source to one or more end-users. The use of a vacuum system to draw chemicals through sealed conduits eliminates the need for pumps which are a source of both maintenance problems and contamination in the system. Multiple vessels provide for a variety of flow options, which include continuous and uniform chemical delivery to the end-users, recirculation and regular filtration during periods of low use, and built-in redundancy to avoid system shut down if there is a component failure. Computer controlled process systems provides system flexibility and full automation.
摘要翻译：本发明提供用于转移和输送用于半导体生产和类似方法的非常高纯度化学品的改进方法和装置。通过采用平行布置的一系列容器，将化学品从一个或多个主体源吸入容器中的真空系统，以及在压力下从容器输送化学物质的压力系统，化学品可以容易地从任何大容量源传递到一个或更多的最终用户。使用真空系统通过密封导管吸取化学物质，无需泵，这是维护问题和系统污染的根源。多个容器提供各种流量选项，包括在低使用期间向最终用户提供连续和均匀的化学品输送，循环和定期过滤，以及内置冗余，以避免在组件故障时系统关闭。计算机控制过程系统提供系统灵活性和全自动化。

9. 发明授权

US06206227B1 Closure assembly for pressure vessel 失效
标题翻译：压力容器封闭组件
公开(公告)号：US06206227B1
公开(公告)日：2001-03-27
申请号：US09236576
申请日：1999-01-26
申请人： Edward T. Ferri, Jr.
发明人： Edward T. Ferri, Jr.
IPC分类号： B65D4314
CPC分类号： B67D7/0238 , B67D7/3263
摘要： A closure assembly for a pressure vessel having an opening in the external surface thereof, comprising a concentric guide track secured to the external surface of the pressure vessel, a curved concentric closure or door configured to conform to the curvature of the pressurized tank, means for interlocking the concentric door to the pressure vessel when the door is in the closed position and an inflatable seal that fills the void between the door and the pressurized tank when the door is closed and the seal inflated. The concentric guide track includes upper and lower concentric tracks upon which the concentric door is mounted and capable of moving along the track such that it can be rotated to the back of the pressure vessel when in the opened position and rotated to close and seal the opening within the pressure vessel in the closed position. Door restraining flanges are provided which correspond and interact with the leading and trailing edges of the concentric door in order to interlock the door to the pressure vessel when the door is closed. Once the pressure vessel is pressurized, the concentric door is pressed against the restraining flanges and the forces of pressurization are transferred from the interlocked concentric door to the pressure vessel.
摘要翻译：一种用于压力容器的封闭组件，其在其外表面上具有开口，包括固定到压力容器的外表面的同心导轨，被构造为符合加压罐的曲率的弯曲同心闭合件或门，当门处于关闭位置时，将同心门与压力容器互锁，并且当门关闭并且密封件膨胀时填充门和加压罐之间的空隙的可膨胀密封件。同心导轨包括上部和下部同心轨道，同心门安装在该同心轨道上并且能够沿轨道运动，使得当处于打开位置时，其可以旋转到压力容器的后部并且旋转以关闭和密封开口在压力容器内处于关闭位置。提供了门限制法兰，其与同心门的前缘和后缘相对应并相互作用，以便在门关闭时将门与压力容器互锁。一旦压力容器被加压，同心门被压靠在限制凸缘上，并且加压力从互锁的同心门转移到压力容器。

10. 发明授权

US06336845B1 Method and apparatus for polishing semiconductor wafers 失效
标题翻译：用于抛光半导体晶片的方法和装置
公开(公告)号：US06336845B1
公开(公告)日：2002-01-08
申请号：US08968333
申请日：1997-11-12
申请人： Erik H. Engdahl , Edward T. Ferri, Jr. , Wilbur C. Krusell , Rahul Jairath , Randall L. Green , Anil Pant
发明人： Erik H. Engdahl , Edward T. Ferri, Jr. , Wilbur C. Krusell , Rahul Jairath , Randall L. Green , Anil Pant
IPC分类号： B24B722
CPC分类号： H01L21/31053 , B24B21/04 , B24B21/10 , B24B37/04 , B24B37/345 , B24B41/005
摘要： A system and method for planarizing a plurality of semiconductor wafers is provided. The method includes the steps of processing each wafer along the same process path using at least two polishing stations to each partially planarize the wafers. The system includes an improved process path exchanging a detachable wafer carrying head with spindles at each processing point and conveying the detached wafer carrying heads in a rotary index table between processing points. The system also provides for improved polishing accuracy using linear polishers having pneumatically adjustable belt tensioning and aligning capabilities.
摘要翻译：提供了一种用于平坦化多个半导体晶片的系统和方法。该方法包括以下步骤：使用至少两个抛光站沿着相同的处理路径处理每个晶片，以使晶片各自部分平坦化。该系统包括改进的处理路径，在每个处理点处交换具有主轴的可拆卸晶片承载头并将处理点之间的旋转索引台中的分离的晶片承载头传送。该系统还提供了使用具有气动可调节带张紧和对准能力的线性抛光机来提高抛光精度。

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