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1. 发明授权

US09989855B2 Chemical supply unit capable of automatically replacing a canister and a substrate treatment apparatus having the same 有权
公开(公告)号：US09989855B2
公开(公告)日：2018-06-05
申请号：US15401800
申请日：2017-01-09
申请人： SAMSUNG ELECTRONICS CO., LTD.
发明人： Sungmin Jang , Su-Hwan Kim , Dai-Hee Lee
IPC分类号： H01L21/027 , B25J11/00 , F17C13/08 , G03F7/16 , B67D7/84 , H01L21/67 , B67D7/02 , B65D47/04 , B67D1/08
CPC分类号： G03F7/16 , B65D47/04 , B67D1/0829 , B67D7/0272 , B67D7/0283 , B67D7/0288 , B67D7/84 , F17C13/08 , H01L21/0274 , H01L21/67017 , H01L21/6715 , H01L21/6719
摘要： A substrate treatment apparatus includes a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate, and a chemical supply unit configured to supply the chemical solution to the substrate treatment unit. The chemical supply unit includes a loader configured to load a canister containing the chemical solution to the chemical supply unit, a clamp configured to clamp the canister in place, a chemical supply line through which the chemical solution is supplied to the substrate treatment unit, and a coupler configured to couple the chemical supply line to the canister. The chemical supply unit is capable of automatically replacing the canister and the substrate.

2. 发明授权

US09038855B2 Fluid processing systems and methods 有权
标题翻译：流体处理系统和方法
公开(公告)号：US09038855B2
公开(公告)日：2015-05-26
申请号：US13375462
申请日：2010-06-08
申请人： Steven M. Lurcott , John E. Q. Hughes , Peter Wrschka , Thomas H. Baum , Donald D. Ware , Peng Zou
发明人： Steven M. Lurcott , John E. Q. Hughes , Peter Wrschka , Thomas H. Baum , Donald D. Ware , Peng Zou
IPC分类号： G01F11/00 , B01F15/02 , B01F3/08 , B67D7/02
CPC分类号： B01F15/0203 , B01F3/0861 , B01F15/0258 , B01F2003/0896 , B65B3/14 , B67D7/025 , B67D7/0261 , B67D7/0283 , B67D7/741
摘要： Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.
摘要翻译：公开了用于将含流体的进料传送到加工设备的系统和方法。基于衬管的压力分配容器通过在衬套和外包装之间施加真空而进行填充。不同校准流量范围的多个进料流量控制器可以针对单个进料进行选择性并行操作。用于放大的进料混合和测试可以通过由多个基于衬管的压力分配容器供应的进料进行。重量分析系统可用于测定多组分溶液或混合物中至少一种组分的浓度。

3. 发明申请

US20140230953A1 Adapter assembly and a process for supplying a sterilant to a packaging system for cleaning and filling of packages 有权
标题翻译：适配器组件和用于向包装系统提供消毒剂以清洁和填充包装的过程
公开(公告)号：US20140230953A1
公开(公告)日：2014-08-21
申请号：US14343865
申请日：2012-09-13
申请人： Matthew Hearon
发明人： Matthew Hearon
IPC分类号： F17C5/06
CPC分类号： B67D7/0288 , B67D7/0283
摘要： An adapter assembly (10) and a process for supplying a sterilant to a packaging system for cleaning and filling of packages. Specifically, an adapter assembly (10) for directly supplying from a packaging container, such as a blow-molded tight-head plastic packaging container, a sterilant, such as hydrogen peroxide, to the packaging system without using any intermediate carrier, such as a carboy.
摘要翻译：适配器组件（10）以及用于向包装系统提供消毒剂以清洁和填充包装的方法。具体地说，一种适配器组件（10），用于从诸如吹塑成型的紧头塑料包装容器的包装容器，诸如过氧化氢的灭菌剂直接供应到包装系统，而不使用任何中间载体，例如碳水化合物

4. 发明申请

US20120186671A1 LIQUID HANDLING SYSTEM WITH ELECTRONIC INFORMATION STORAGE 有权
标题翻译：具有电子信息存储的液体处理系统
公开(公告)号：US20120186671A1
公开(公告)日：2012-07-26
申请号：US13438285
申请日：2012-04-03
申请人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
发明人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
IPC分类号： F17D3/00
CPC分类号： G05D7/0617 , B67D7/0283 , B67D7/348 , Y10T137/0318 , Y10T137/8158
摘要： An electronic storage device is coupled with a container capable of holding liquid for electronically storing information relating to the liquid stored in the container. The system can be configured with an antenna, for storing information to and reading information from the electronic storage device. A microprocessor-based controller, coupled with the antenna, may be employed for controlling processing of the liquid based on information read from the electronic storage device by the antenna. A connector of a secure reader system having a reader is provided to physically couple to a container having an information storing mechanism, for periodically reading information from an information storing mechanism. The connector may draw material from the container simultaneous with the reading.
摘要翻译：电子存储装置与能够保持液体的容器结合，以电子地存储与存储在容器中的液体有关的信息。该系统可以配置有天线，用于将信息存储到电子存储装置中并从其读取信息。与天线耦合的基于微处理器的控制器可以用于基于通过天线从电子存储装置读取的信息来控制液体的处理。具有读取器的安全读取器系统的连接器被提供以物理地耦合到具有信息存储机构的容器，用于从信息存储机构周期性地读取信息。连接器可以与读数同时从容器中抽出材料。

5. 发明授权

US07702418B2 Secure reader system 有权
标题翻译：安全阅读器系统
公开(公告)号：US07702418B2
公开(公告)日：2010-04-20
申请号：US10742125
申请日：2003-12-19
申请人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
发明人： Kevin T. O'Dougherty , Robert E. Andrews , Tripunithura V. Jayaraman , Joseph P. Menning , Christopher A. Baye-Wallace
IPC分类号： G06F17/00
CPC分类号： H01L21/6715 , B67D7/0283 , B67D7/348 , G06K19/07758 , G06K19/07762 , H01L21/67294
摘要： A secure reader system (SRS) for containers housing material to be employed in an application. A container is provided having an information storing mechanism. A connector of the SRS having a reader is provided to physically couple to the container for periodically reading information there from. The connector is configured to physically couple to the container and may draw material from the container simultaneous with the reading.
摘要翻译：用于容纳用于应用中的材料的容器的安全读取器系统（SRS）。提供具有信息存储机构的容器。提供具有读取器的SRS的连接器以物理地耦合到容器以便周期性地读取信息。连接器被配置为物理地耦合到容器并且可以与读数同时从容器中吸取材料。

6. 发明申请

US20050005968A1 Automated vacuum waste handling system 审中-公开
标题翻译：自动真空废物处理系统
公开(公告)号：US20050005968A1
公开(公告)日：2005-01-13
申请号：US10881590
申请日：2004-06-30
申请人： Kurtis Berry , Jason Cassaday , Peter Hodder , D. Kolodin
发明人： Kurtis Berry , Jason Cassaday , Peter Hodder , D. Kolodin
IPC分类号： B67D7/02 , B67D7/78 , F04F3/00
CPC分类号： B67D7/0283 , B67D7/78 , Y10T137/3109
摘要： This invention relates to an automated vacuum liquid waste handling system having two or more waste vessels, with a liquid-level sensor, a means for filling the waste vessels with waste, a means for switching from the first waste vessel, once full, to one or more other waste vessels that are not full, and a means for simultaneously removing said waste from the first full waste vessel to output holding stations and filling another waste vessel so that waste collection is not interrupted.
摘要翻译：本发明涉及一种具有两个或多个废液容器的自动化真空液体废物处理系统，其具有液位传感器，用于用废物填充废物容器的装置，用于从第一废液容器一次充满的装置转换成一个或更多其他未充满的其他废物容器，以及用于同时从第一完整废物容器中除去所述废物以输出保持站并填充另一废物容器以使废物收集不中断的装置。

7. 发明申请

US20040155057A1 Chemical delivery systems and methods of delivery 审中-公开
标题翻译：化学品输送系统和交货方式
公开(公告)号：US20040155057A1
公开(公告)日：2004-08-12
申请号：US10749949
申请日：2003-12-31
发明人： David Soberanis , Randy Forshey
IPC分类号： B67D005/08
CPC分类号： B67D7/0238 , B01F15/0266 , B01F15/028 , B01F15/0445 , B01F2215/0036 , B01F2215/0096 , B67D7/0272 , B67D7/0283 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
摘要翻译：本发明涉及用于输送液体化学品的化学物质输送系统和方法。在一个实施例中，本发明涉及具有用于输送半导体工业中使用的化学品的多储存器称重传感器组件的系统。在一个实施例中，本发明提供一种多储存器称重传感器组件，其包括控制器，缓冲储存器，主储存器，联接到组件和控制器的一个或多个称重传感器，可操作以称重储存器，多个供应管线，每个供应管线具有阀并将供应容器中的一个连接到主储存器;以及气体和真空源，用于当由控制器要求并且用于重新填充时从组件中抽出液体从供应容器组装。

8. 发明申请

US20030038147A1 Containment system 有权
标题翻译：遏制系统
公开(公告)号：US20030038147A1
公开(公告)日：2003-02-27
申请号：US10208714
申请日：2002-07-30
申请人： Entegris, Inc.
发明人： Barry L. Rauworth , John M. Hennen
IPC分类号： B67D005/60
CPC分类号： B67D7/0283 , B65D1/20 , B65D51/1616 , B67D7/0288 , B67D7/76 , Y10S285/921 , Y10T137/314
摘要： In a preferred embodiment, a blow molded drum has a port including a neck with exterior buttress threads and a port opening having a shoulder. A snap-in down tube assembly seats with the shoulder and has an upwardly extending nipple. Either a dispense head or a closure seats within and is secured by a threaded retainer nut. The dispense head has a first flow duct extending to a nipple engaging portion to seal with the upwardly extending nipple and a second flow duct leading to an annular space around the nipple for a return fluid line or for providing air or a gas for displacing withdrawn fluid. In a preferred embodiment the threaded nut provides an axial tightening force and also provides an axial removal force that disengages the nipple engaging portion with the nipple as the retainer nut is loosened
摘要翻译：在优选实施例中，吹塑成型的滚筒具有包括具有外部支撑螺纹的颈部和具有肩部的端口开口的端口。卡扣式下管组件与肩部座椅并具有向上延伸的接头。分配头或封闭件可以安装在螺纹固定螺母内并由螺纹固定螺母固定。分配头具有延伸到乳头接合部分以与向上延伸的接头密封的第一流动管道，以及通向乳头周围的环形空间的第二流动管道，用于返回流体管线或用于提供空气或用于移出排出流体的气体。在优选实施例中，螺纹螺母提供轴向紧固力并且还提供轴向移除力，其在保持螺母松动时使乳头接合部分与乳头脱离

9. 发明申请

US20020017534A1 Chemical delivery systems and methods of delivery 有权
标题翻译：化学品输送系统和交货方式
公开(公告)号：US20020017534A1
公开(公告)日：2002-02-14
申请号：US09968566
申请日：2001-09-29
发明人： David Soberunie , Randy Forshey
IPC分类号： B67D005/08
CPC分类号： B67D7/0238 , B01F15/0266 , B01F15/028 , B01F15/0445 , B01F2215/0036 , B01F2215/0096 , B67D7/0272 , B67D7/0283 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
摘要翻译：本发明涉及用于输送液体化学品的化学物质输送系统和方法。在一个实施例中，本发明涉及具有用于输送在半导体工业中使用的化学品的多储存器称重传感器组件的系统。在一个实施例中，本发明提供一种多储存器称重传感器组件，其包括控制器，缓冲储存器，主储存器，联接到组件和控制器的一个或多个称重传感器，可操作以称重储存器，多个供应管线，每个供应管线具有阀并将供应容器中的一个连接到主储存器;以及气体和真空源，用于当由控制器要求并且用于重新填充时从组件中抽出液体从供应容器组装。

10. 发明授权

US6098843A Chemical delivery systems and methods of delivery 有权
公开(公告)号：US6098843A
公开(公告)日：2000-08-08
申请号：US224607
申请日：1998-12-31
申请人： David Soberanis , Randy Forshey
发明人： David Soberanis , Randy Forshey
IPC分类号： B67D7/02 , B67D7/74 , C30B25/14 , B67D5/08
CPC分类号： B67D7/0238 , B67D7/0272 , B67D7/0283 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.

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