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    • 4. 发明申请
    • Enhanced lithographic resolution through double exposure
    • 通过双重曝光增强光刻分辨率
    • US20050162627A1
    • 2005-07-28
    • US10765218
    • 2004-01-28
    • Jozef FindersDonis FlagelloSteven Hansen
    • Jozef FindersDonis FlagelloSteven Hansen
    • G03B27/42G03F7/20H01L21/027
    • G03F7/70433G03F7/70466
    • A system and method for enhancing the image resolution in a lithographic system, is presented herein. The invention comprises decomposing a reticle pattern into at least two constituent sub-patterns that are capable of being optically resolved by the lithographic system, coating a substrate with a pre-specified photoresist layer, and exposing a first of the at least two constituent sub-patterns by directing a projection beam through the first sub-pattern such that the lithographic system produces a first sub-pattern image onto the pre-specified photoresist layer of the substrate. The invention further comprises processing the exposed substrate, exposing a second of the at least two constituent sub-patterns by directing the projection beam through the second sub-pattern such that the lithographic system produces a second sub-pattern image onto the pre-specified photoresist layer of the substrate, and then combining the first and second sub-pattern images to produce a desired pattern on the substrate.
    • 本文给出了用于增强光刻系统中的图像分辨率的系统和方法。 本发明包括将掩模版图案分解为能够被光刻系统光学分辨的至少两个构成子图案,用预定的光致抗蚀剂层涂覆基底,以及暴露至少两个构成子图案中的第一个, 通过将投影光束引导通过第一子图案使得光刻系统在基板的预定光致抗蚀剂层上产生第一子图案图像。 本发明还包括处理曝光的基板,通过将投影光束引导通过第二子图案来暴露至少两个构成子图案中的第二个,使得光刻系统在预定的光致抗蚀剂上产生第二子图案图像 层,然后组合第一和第二子图案图像以在衬底上产生期望的图案。
    • 10. 发明申请
    • Polyesters and slurries containing microfiber and micropowder, and methods for using and making same
    • 含有超细纤维和微粉的聚酯和浆料,以及使用和制造方法
    • US20060155064A1
    • 2006-07-13
    • US11032575
    • 2005-01-10
    • Steven Hansen
    • Steven Hansen
    • C08L5/00C08L67/02
    • C08K7/02C08K3/22C08L27/18C08L67/02C08L2666/04
    • Polyester compositions comprising microfibers and micropowders are disclosed. The polyester compositions are made by contacting microfibers and micropowders with polymerizable components, such as monomers, suitable for making polyesters, and polymerizing the polymerizable components. The microfibers and micropowders can be provided in the form of either separate slurries, or a single slurry. The micropowders can also alternatively be provided in the form of a powder rather than a slurry. A slurry containing microfiber and micropowders, and a process for making such a slurry, is also disclosed. Incorporating microfibers and micropowders into a polyester improves the properties of the molded parts, films and/or fibers that are made from such a polyester. A slurry containing microfibers and micropowders is more stable and easier to process, wherein the micropowder is less likely to separate out of the slurry or agglomerate when compared to a slurry containing only micropowder.
    • 公开了包含微纤维和微粉末的聚酯组合物。 聚酯组合物通过使微纤维和微粉与可聚合组分(例如单体)接触,制备聚酯并使可聚合组分聚合来制备。 微纤维和微粉可以以单独的浆液或单一浆料的形式提供。 微粉也可以以粉末形式而不是浆料提供。 还公开了含有超细纤维和微粉的浆料,以及制备这种浆料的方法。 将微纤维和微粉掺入聚酯中改善了由这种聚酯制成的模塑部件,膜和/或纤维的性能。 含有微纤维和微粉的浆料更稳定并且易于加工,其中当与仅含有微粉末的浆料相比时,该微粉不太可能分离出浆料或附聚物。