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1. 发明申请

US20070108984A1 Ionization test for electrical verification 失效
标题翻译：电验证电离试验
公开(公告)号：US20070108984A1
公开(公告)日：2007-05-17
申请号：US10595541
申请日：2003-11-12
申请人： Christopher Cline , Edward Yarmchuk , Vincent Arena , Donald Merte , Thomas Picunko , Brian Wojszynski , Charles Hendricks , Michael Scaman , Robert Olyha , Arnold Halperin
发明人： Christopher Cline , Edward Yarmchuk , Vincent Arena , Donald Merte , Thomas Picunko , Brian Wojszynski , Charles Hendricks , Michael Scaman , Robert Olyha , Arnold Halperin
IPC分类号： G01N27/62
CPC分类号： G01R31/2805 , G01R19/0061 , G01R31/302
摘要： A method and apparatus for the non-contact electrical test of both opens and shorts in electronic substrates. Top surface electrical test features are exposed to an ionization source under ambient conditions and the subsequent charge build up is measured as a drain current by probes contacting corresponding bottom surface features. Opens are detected by an absence of a drain current and shorts are detected by turning off the ionization source and re-measuring the bottom surface probes with a varying bias applied to each probe in the array.
摘要翻译：用于电子基板中的开口和短路的非接触电测试的方法和装置。顶部表面电测试特征在环境条件下暴露于电离源，随后的电荷积聚通过探针接触相应的底表面特征作为漏极电流测量。通过不存在漏极电流来检测开路，并且通过关闭电离源并且利用施加到阵列中的每个探针的变化的偏置来重新测量底表面探针来检测短路。

2. 发明授权

US07808257B2 Ionization test for electrical verification 失效
标题翻译：电验证电离试验
公开(公告)号：US07808257B2
公开(公告)日：2010-10-05
申请号：US10595541
申请日：2003-11-12
申请人： Christopher W. Cline , Edward J. Yarmchuk , Vincent A. Arena , Donald A. Merte , Thomas Picunko , Brian J. Wojszynski , Charles J. Hendricks , Michael E. Scaman , Robert S. Olyha, Jr. , Arnold Halperin
发明人： Christopher W. Cline , Edward J. Yarmchuk , Vincent A. Arena , Donald A. Merte , Thomas Picunko , Brian J. Wojszynski , Charles J. Hendricks , Michael E. Scaman , Robert S. Olyha, Jr. , Arnold Halperin
IPC分类号： G01R31/302
CPC分类号： G01R31/2805 , G01R19/0061 , G01R31/302
摘要： A method and apparatus for the non-contact electrical test of both opens and shorts in electronic substrates. Top surface electrical test features are exposed to an ionization source under ambient conditions and the subsequent charge build up is measured as a drain current by probes contacting corresponding bottom surface features. Opens are detected by an absence of a drain current and shorts are detected by turning off the ionization source and re-measuring the bottom surface probes with a varying bias applied to each probe in the array.
摘要翻译：用于电子基板中的开口和短路的非接触电测试的方法和装置。顶部表面电测试特征在环境条件下暴露于电离源，随后的电荷积聚通过探针接触相应的底表面特征作为漏极电流测量。通过不存在漏极电流来检测开路，并且通过关闭电离源并且利用施加到阵列中的每个探针的变化偏置来重新测量底表面探针来检测短路。

3. 发明授权

US5770948A Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool 失效
标题翻译：旋转信号耦合用于化学机械抛光终点检测与strasbaugh工具
公开(公告)号：US5770948A
公开(公告)日：1998-06-23
申请号：US620723
申请日：1996-03-19
申请人： Leping Li , Steven George Barbee , Arnold Halperin , Richard Mars Ruggiero , William Joseph Surovie
发明人： Leping Li , Steven George Barbee , Arnold Halperin , Richard Mars Ruggiero , William Joseph Surovie
IPC分类号： B24B37/013 , B24B37/24 , B24B37/26 , G01B7/06 , H01L21/302
CPC分类号： B24B37/013 , B24B37/245 , B24B37/26 , B24B49/12 , G01B7/06
摘要： An apparatus for rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process by a polisher is provided with a sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process, a conductor coupled to the sensor for receiving the signal, the conductor fixed to the rotatable wafer carrier, a contact coupled to the conductor, the contact fixed to a stationary drive arm, and signal transfer means coupled to the contact for transferring the signal to a monitoring means.
摘要翻译：用于通过抛光机原位监测化学机械抛光工艺的旋转信号耦合装置设置有固定到可旋转晶片载体的传感器，用于产生响应于化学机械抛光工艺的信号，耦合到传感器的导体为了接收信号，固定到可旋转晶片载体的导体，耦合到导体的触点，固定到固定驱动臂的触点和耦合到触点的信号传送装置，用于将信号传送到监视装置。

4. 发明授权

US5660672A In-situ monitoring of conductive films on semiconductor wafers 失效
标题翻译：半导体晶片导电膜的原位监测
公开(公告)号：US5660672A
公开(公告)日：1997-08-26
申请号：US419208
申请日：1995-04-10
申请人： Leping Li , Steven George Barbee , Arnold Halperin , Tony Frederick Heinz
发明人： Leping Li , Steven George Barbee , Arnold Halperin , Tony Frederick Heinz
IPC分类号： G01B7/00 , G01B7/06 , G01R31/26 , H01L21/302 , H01L21/3205 , H01L21/66
CPC分类号： G01B7/105
摘要： The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.
摘要翻译：通过在膜中感应电流来原位监测半导体衬底等底层上的膜的厚度变化，随着膜的厚度变化（增加或减小），检测电流的变化。利用导电膜，通过与包括电容器和电感器的传感器产生交变电磁场，在膜中引起涡流。

5. 发明授权

US5559428A In-situ monitoring of the change in thickness of films 失效
标题翻译：膜的厚度变化的现场监测
公开(公告)号：US5559428A
公开(公告)日：1996-09-24
申请号：US419206
申请日：1995-04-10
申请人： Leping Li , Steven G. Barbee , Arnold Halperin , Tony F. Heinz
发明人： Leping Li , Steven G. Barbee , Arnold Halperin , Tony F. Heinz
IPC分类号： G01B7/00 , G01B7/06 , H01L21/20 , H01L21/302 , H01L21/66 , G01R27/00
CPC分类号： G01B7/06 , G01B7/10
摘要： The change in thickness of a film on an underlying body such as a semiconductor substrate is monitored in situ by inducing a current in the film, and as the thickness of the film changes (either increase or decrease), the changes in the current are detected. With a conductive film, eddy currents are induced in the film by a generating an alternating electromagnetic field with a sensor which includes a capacitor and an inductor.
摘要翻译：通过在膜中感应电流来原位监测半导体衬底等底层上的膜的厚度变化，随着膜的厚度变化（增加或减小），检测电流的变化。利用导电膜，通过与包括电容器和电感器的传感器产生交变电磁场，在膜中引起涡流。

6. 发明授权

US5402072A System and method for testing and fault isolation of high density passive boards and substrates 失效
标题翻译：高密度无源板和基板的测试和故障隔离的系统和方法
公开(公告)号：US5402072A
公开(公告)日：1995-03-28
申请号：US843672
申请日：1992-02-28
申请人： Shinwu Chiang , Huntington W. Curtis , Arthur E. Falls , Arnold Halperin , John P. Karidis , John D. Mackay , Danny C. Wong , Ka-Chiu Woo , Li-Cheng Zai
发明人： Shinwu Chiang , Huntington W. Curtis , Arthur E. Falls , Arnold Halperin , John P. Karidis , John D. Mackay , Danny C. Wong , Ka-Chiu Woo , Li-Cheng Zai
IPC分类号： G01R31/02 , G01R31/28 , G01R27/26
CPC分类号： G01R31/2805
摘要： Apparatus and method are disclosed for performing testing and fault isolation of high density passive boards (e.g. unpopulated circuit boards) and substrates. Using a small number of moving probes, simultaneous network resistance and network capacitance measurements may be performed. Thus, test time is minimized by eliminating the need for electrical switching and/or excessive probe movement during the test of a normal circuit board network. Simultaneous network capacitance and network leakage measurement are also achieved using phase-sensitive detection. Dual-frequency measurement techniques allow the measurement of both the capacitance value and resistance value of a leakage path between a network being measured and an unknown network. Any leakage resistance between a network under test and ground or power planes within the circuit board may also be determined from the measurements. Simultaneous independent net-to-plane capacitance characterization is also achieved using signals of mutually independent frequencies accompanied by minimal signal processing. Thus, improved defect detection capabilities are obtained.
摘要翻译：公开了用于执行高密度无源板（例如未填充的电路板）和衬底的测试和故障隔离的装置和方法。使用少量移动探头，可以执行同时的网络电阻和网络电容测量。因此，在普通电路板网络的测试期间，通过消除电气切换和/或过度的探头移动的需要来最小化测试时间。使用相敏检测也可以实现网络电容和网络泄漏测量。双频测量技术允许测量被测网络与未知网络之间的泄漏路径的电容值和电阻值。被测网络和电路板内的接地或电源层之间的任何漏电阻也可以从测量中确定。使用相互独立的频率的信号伴随着最小的信号处理也实现了同时独立的网络到平面电容表征。因此，获得了改进的缺陷检测能力。

7. 发明授权

US4496900A Nonlinearity detection using fault-generated second harmonic 失效
标题翻译：使用故障生成二次谐波的非线性检测
公开(公告)号：US4496900A
公开(公告)日：1985-01-29
申请号：US373318
申请日：1982-04-30
申请人： Thomas H. Di Stefano , Arnold Halperin
发明人： Thomas H. Di Stefano , Arnold Halperin
IPC分类号： G01R31/02 , G01N27/20 , G01R31/28 , G01N27/00
CPC分类号： G01N27/20 , G01R31/281 , Y10T29/49004
摘要： The tester and method for nondestructively detecting nonlinearity faults in conductors includes the application of a composite AC and DC drive signal to the device under test in such manner that nonlinearities in the device under test produce fault signals including second harmonics, due to local changes of resistance caused by ohmic heating. Electronic filters are used to select out and amplify the second harmonic only, eliminating the direct current and fundamental frequency components of the initial test pulse, plus third and subsequent harmonics. The filtered second harmonic signals from the device under test are then phase-compared to a phase-shifted second harmonic signal produced by a frequency doubler from the test signal generator oscillator to cancel out the second harmonic signals from the good conductor; the remaining phase anomaly signals control a threshold detector remaining to provide fault indication.
摘要翻译：用于非破坏性地检测导体中非线性故障的测试器和方法包括将复合AC和DC驱动信号施加到被测器件，使得被测器件中的非线性由于电阻的局部变化而产生包括二次谐波的故障信号由欧姆加热引起。电子滤波器仅用于选择和放大二次谐波，消除初始测试脉冲的直流和基频分量，以及第三次和随后的谐波。然后将来自被测器件的滤波后的二次谐波信号与来自测试信号发生器振荡器的倍频器产生的相移二次谐波信号进行相位比较，以抵消来自良导体的二次谐波信号; 剩余相位异常信号控制剩余的阈值检测器以提供故障指示。

8. 发明授权

US06226619B1 Method and system for preventing counterfeiting of high price wholesale and retail items 有权
标题翻译：防止假冒高价批发零售品的方法和制度
公开(公告)号：US06226619B1
公开(公告)日：2001-05-01
申请号：US09182269
申请日：1998-10-29
申请人： Arnold Halperin , Paul Andrew Moskowitz , Alejandro Gabriel Schrott , Charles P. Tresser , Robert Jacob von Gutfeld
发明人： Arnold Halperin , Paul Andrew Moskowitz , Alejandro Gabriel Schrott , Charles P. Tresser , Robert Jacob von Gutfeld
IPC分类号： G06F1760
CPC分类号： G06K19/07758 , B65D23/14 , B65D2203/10 , G06K19/04 , G06K19/07749 , G06K19/10 , G06Q20/208
摘要： A method and system for preventing counterfeiting of an item, include an interrogatable tag attached to the item. The item includes visible indicia for comparison with secret, non-duplicable information stored in the tag designating authenticity.
摘要翻译：一种用于防止物品伪造的方法和系统，包括附在该物品上的可询问标签。该项目包括用于与存储在指定真实性的标签中的秘密，不可重复的信息进行比较的可见标记。

9. 发明授权

US6141093A Method and apparatus for locating power plane shorts using polarized light microscopy 失效
标题翻译：使用偏光显微镜定位电源平面短路的方法和装置
公开(公告)号：US6141093A
公开(公告)日：2000-10-31
申请号：US139515
申请日：1998-08-25
申请人： Bernell E. Argyle , Arnold Halperin , Michael E. Scaman , Edward J. Yarmchuk
发明人： Bernell E. Argyle , Arnold Halperin , Michael E. Scaman , Edward J. Yarmchuk
IPC分类号： G01N21/21 , G01R31/311 , G01N21/00 , G01R27/14
CPC分类号： G01N21/21 , G01R31/311
摘要： An apparatus and corresponding method for detecting, locating, or defining a short in a thin-film module. The apparatus includes a mechanical fixture supporting the module. A current source provides a current pulse to the module which produces a magnetic field and heating nearby the short which turns on and off as the pulsed current in the short turns on and off. Polarized light is directed onto the module, with an intermediate element disposed between the module and the source of the polarized light. The intermediate element may be a stress birefringent coating (e.g., a polyimide insulating layer) disposed on the module and onto which the polarized light is directed. The sample is rotated 0 to 45 degrees to maximize the birefringent effect. Alternatively, the intermediate element may be a magneto-optical Faraday rotator. A microscope is used to observe the module, facilitating identification of a short by the twisting of the polarization of the light as the short expands and shrinks in response to the heating or in response to the localized magnetic field. The preferred rotator is a composite having a garnet substrate, an iron garnet film disposed on the substrate, and a thin aluminum mirror layer disposed on the iron garnet film. The apparatus and method of the present invention have several applications.
摘要翻译：一种用于检测，定位或限定薄膜模块中的短路的装置和相应方法。该装置包括支撑模块的机械夹具。电流源向模块提供电流脉冲，其产生磁场并在短路附近加热，其短路中的脉冲电流接通和断开时导通和截止。偏振光被引导到模块上，中间元件设置在模块和偏振光源之间。中间元件可以是设置在模块上并且偏振光被引导到其上的应力双折射涂层（例如，聚酰亚胺绝缘层）。样品旋转0至45度以最大化双折射效应。或者，中间元件可以是磁光法拉第旋转器。使用显微镜来观察模块，通过随着短路的扩展和响应于加热或响应于局部磁场而收缩，通过扭转光的偏振来促进短路的识别。优选的旋转体是具有石榴石基材，设置在基材上的铁石榴石薄膜和设置在铁石榴石薄膜上的薄铝镜面层的复合体。本发明的装置和方法有几个应用。

10. 发明授权

US5663637A Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool 失效
标题翻译：用于西化工具的化学机械抛光终点检测的旋转信号耦合
公开(公告)号：US5663637A
公开(公告)日：1997-09-02
申请号：US620720
申请日：1996-03-19
申请人： Leping Li , Steven George Barbee , Gary Richard Doyle , Arnold Halperin , Kevin L. Holland , Francis Walter Kazak , Robert B. Lipori , Anne Elizabeth McGuire , Rock Nadeau , William Joseph Surovic
发明人： Leping Li , Steven George Barbee , Gary Richard Doyle , Arnold Halperin , Kevin L. Holland , Francis Walter Kazak , Robert B. Lipori , Anne Elizabeth McGuire , Rock Nadeau , William Joseph Surovic
IPC分类号： B24B37/04 , B24B49/00 , H01L21/66 , G01R27/00
CPC分类号： B24B37/013 , B24B37/04 , B24B49/00 , H01L22/26 , H01L2924/0002
摘要： Rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process. A sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process is coupled to a bottom half of a rotary transformer fixed to a rotating portion of the polisher. A top half of the rotary transformer, coupled to the bottom half of the rotary transformer, is fixed to a stationary portion of the polisher. The signal from the sensor is thus coupled through the rotary transformer to a process monitor.
摘要翻译：旋转信号耦合在原位监测化学机械抛光过程。固定到可旋转晶片载体上的用于产生响应于化学机械抛光工艺的信号的传感器耦合到固定到抛光机旋转部分的旋转变压器的下半部分。旋转变压器的上半部分，连接到旋转变压器的下半部分，固定在抛光机的静止部分。因此，来自传感器的信号通过旋转变压器耦合到过程监视器。

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