会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 10. 发明授权
    • Process flow for ARS mover using selenidation wafer bonding after processing a media side of a rotor wafer
    • 在处理转子晶片的介质侧之后使用硒化晶片接合的ARS移动器的工艺流程
    • US06440820B1
    • 2002-08-27
    • US09860452
    • 2001-05-21
    • Heon LeeChung-Ching YangPeter Hartwell
    • Heon LeeChung-Ching YangPeter Hartwell
    • H01L2130
    • G11B9/1418B82Y10/00G01Q80/00G11B9/1463
    • An improved process flow for an atomic resolution storage (ARS) system deposits conductive electrodes, together with a protective layer, on a media side of a rotor wafer before most of other device processing, thus preserving a surface for ARS storage media from subsequent wafer thinning process. CMOS circuitry is also formed in a stator wafer at a later stage. Therefore, the CMOS circuitry is less likely to be damaged by heat processing. In addition, processing of the media side of the rotor wafer may be performed with loosened thermal budget. Finally, because the media side of the rotor wafer is processed before wafer bonding of the rotor wafer and the stator wafer, there is less probability of degradation of the wafer bonding. Therefore, device yield may be enhanced, leading to lower manufacturing cost.
    • 原子分辨率存储(ARS)系统的改进的处理流程在其他器件处理之前大部分其它器件处理之前,将转移晶片的介质侧上的导电电极与保护层一起放置在一起,从而保留了ARS存储介质从后续晶片变薄的表面 处理。 在稍后阶段也在定子晶片中形成CMOS电路。 因此,CMOS电路不太可能被热处理所损坏。 此外,可以以松散的热量预算来执行转子晶片的介质侧的处理。 最后,因为转子晶片的介质侧在转子晶片和定子晶片的晶片接合之前被处理,所以晶片键合的劣化的可能性降低。 因此,可以提高装置产量,导致制造成本降低。