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    • 1. 发明授权
    • Method for manufacturing electro ceramic components
    • 电陶瓷部件的制造方法
    • US06764881B2
    • 2004-07-20
    • US10193972
    • 2002-07-12
    • Bryan P. StakerDouglas L. Teeter, Jr.Eric L. Bogatin
    • Bryan P. StakerDouglas L. Teeter, Jr.Eric L. Bogatin
    • H01L2144
    • B81B7/0006G02B6/3518G02B6/357G02B6/3582G02B6/3584G02B2006/12104
    • An array apparatus has a micromachined SOI structure, such as a MEMS array, mounted directly on a class of insulative substrate, such as low temperature co-fired ceramic or a thermal-coefficient of expansion matched glass, in which is embedded electrostatic electrodes disposed in alignment with the individual MEMS elements, where the electrostatic electrodes are configured for substantial fanout. In a specific embodiment in order to compensate for differences in thermal-expansion characteristics between SOI and ceramic, a flexible mounting is effected by means of posts, bridges and/or mechanical elements which allow uneven expansion in x and y while maintaining z-axis stability. Methods according to the invention include fabrication steps wherein electrodes are fabricated to a post-fired ceramic substrate and coupled via traces through the ceramic substrate to driver modules.
    • 阵列装置具有微机械加工SOI结构,例如MEMS阵列,其直接安装在一类绝缘基底上,例如低温共烧陶瓷或热膨胀系数匹配玻璃,其中嵌入静电电极 与各个MEMS元件对准,其中静电电极被配置为实质上扇出。 在一个具体实施例中,为了补偿SOI和陶瓷之间的热膨胀特性的差异,通过柱,桥和/或机械元件实现柔性安装,其允许x和y中的不均匀膨胀,同时保持z轴稳定性 。 根据本发明的方法包括制造步骤,其中电极被制造成后烧制陶瓷衬底,并且经由陶瓷衬底的迹线耦合到驱动器模块。