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1. 发明授权

US06589009B1 Turbo-molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US06589009B1
公开(公告)日：2003-07-08
申请号：US09592411
申请日：2000-06-13
申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroyuki Kawasaki , Hiroshi Sobukawa , Hiroaki Ogamino
发明人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroyuki Kawasaki , Hiroshi Sobukawa , Hiroaki Ogamino
IPC分类号： F04D1904
CPC分类号： F04D19/042 , F04D29/522 , F04D29/701
摘要： A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.
摘要翻译：涡轮分子泵包括壳体，其具有进气口，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。定子和转子构成涡轮叶片泵送部分和用于抽空气体的槽泵送部分。提供防止转子碎片通过进气口散射的防散射构件。

2. 发明授权

US06220831B1 Turbomolecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US06220831B1
公开(公告)日：2001-04-24
申请号：US09133331
申请日：1998-08-13
申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
发明人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
IPC分类号： F04B1704
CPC分类号： F04D17/168 , F04D19/04
摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
摘要翻译：一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。

3. 发明授权

US6062810A Turbomolecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US6062810A
公开(公告)日：2000-05-16
申请号：US133332
申请日：1998-08-13
申请人： Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa , Atsushi Shiokawa , Junichi Arami
发明人： Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa , Atsushi Shiokawa , Junichi Arami
IPC分类号： F04D29/10 , F04D17/16 , F04D19/04 , F04D15/00 , F04B17/00 , F04B49/22
CPC分类号： F04D19/04 , F04D17/168
摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.
摘要翻译：涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。支撑构件延伸穿过转子和定子中的至少一个。涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。

4. 发明授权

US08109744B2 Turbo vacuum pump 有权
标题翻译：涡轮真空泵
公开(公告)号：US08109744B2
公开(公告)日：2012-02-07
申请号：US12410780
申请日：2009-03-25
申请人： Hiroyuki Kawasaki , Hiroaki Ogamino , Hiroshi Sobukawa
发明人： Hiroyuki Kawasaki , Hiroaki Ogamino , Hiroshi Sobukawa
IPC分类号： F04B37/14 , F04B37/10
CPC分类号： F04D19/042 , F04D17/168 , F04D29/0513 , F04D29/28
摘要： An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supporting the rotor blades, and a bearing and motor section having a motor for rotating the main shaft and a bearing mechanism for supporting the main shaft rotatably. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft.
摘要翻译：无油涡轮真空泵能够将室内的气体从大气压降至高真空。涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分，用于支撑转子叶片的主轴以及具有用于使主轴旋转的马达的轴承和马达部分以及用于可旋转地支撑主轴。气体轴承用作用于沿推力方向支撑主轴的轴承，在气体轴承的静止部分的两个表面上形成螺旋槽，并且具有螺旋槽的固定部分设置在上部旋转部分和固定在主轴上的下部旋转部。

5. 发明申请

US20090218506A1 ELECTRON BEAM APPARATUS 有权
标题翻译：电子束设备
公开(公告)号：US20090218506A1
公开(公告)日：2009-09-03
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
IPC分类号： H01J1/50 , A61N5/00 , H01J3/14
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译：从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级电子束充分分离。此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。

6. 发明授权

US08067732B2 Electron beam apparatus 有权
标题翻译：电子束装置
公开(公告)号：US08067732B2
公开(公告)日：2011-11-29
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomi Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori , Yuichiro Yamazaki , Ichirota Nagahama
IPC分类号： G01N23/00
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译：从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级电子束充分分离。此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。

7. 发明授权

US06343910B1 Turbo-molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US06343910B1
公开(公告)日：2002-02-05
申请号：US09531894
申请日：2000-03-21
申请人： Hiroyuki Kawasaki , Hiroshi Sobukawa
发明人： Hiroyuki Kawasaki , Hiroshi Sobukawa
IPC分类号： F01D136
CPC分类号： F04D19/046 , F04D19/044 , F04D27/0292 , F04D29/321
摘要： A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.
摘要翻译：涡轮分子泵具有壳体，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。涡轮叶片泵送组件和用于排放气体分子的螺纹槽泵送组件设置在定子和转子之间。转子包括构成涡轮机叶片泵送组件和螺纹槽泵送组件的至少两个部件。这些部件在预定位置彼此分离，并且彼此接合以形成转子。

8. 发明授权

US06382249B1 Vacuum exhaust system 失效
标题翻译：真空排气系统
公开(公告)号：US06382249B1
公开(公告)日：2002-05-07
申请号：US09671745
申请日：2000-09-29
申请人： Hiroyuki Kawasaki , Hiroshi Sobukawa
发明人： Hiroyuki Kawasaki , Hiroshi Sobukawa
IPC分类号： C23C1600
CPC分类号： F04D25/00 , C23C16/4412 , F04D17/168 , F04D19/046 , Y10T137/86139 , Y10T137/86163
摘要： A vacuum exhaust system comprising a vacuum chamber; means for introducing a gas into the vacuum chamber; a main pump for exhausting the vacuum chamber and reducing a pressure of the vacuum chamber to a desired pressure; an auxiliary pump disposed downstream from the main pump; and piping for connecting them, wherein an outer diameter of connecting piping as a connection between the main pump and the auxiliary pump is ½ inch (12.7 mm) or less; and a length of the connecting piping and capability of the auxiliary pump are combined so that a back pressure of the main pump becomes 5 Torr or more. This vacuum exhaust system can realize cost reduction through a saving in entire space, simplification of piping construction work, and so on.
摘要翻译：一种真空排气系统，包括一个真空室; 用于将气体引入真空室的装置; 用于排出真空室并将真空室的压力降低到所需压力的主泵; 辅助泵设置在主泵的下游; 和用于连接它们的管道，其中作为主泵和辅助泵之间的连接的连接管的外径为1/2英寸（12.7mm）或更小; 并且连接管道的长度和辅助泵的能力被组合，使得主泵的背压变为5托或更大。该真空排气系统可以通过节省整个空间实现成本降低，简化管道施工工作等。

9. 发明授权

US06585480B2 Turbo-molecular pump 有权
公开(公告)号：US06585480B2
公开(公告)日：2003-07-01
申请号：US10035145
申请日：2002-01-04
申请人： Hiroyuki Kawasaki , Hiroshi Sobukawa
发明人： Hiroyuki Kawasaki , Hiroshi Sobukawa
IPC分类号： F01D136
CPC分类号： F04D19/046 , F04D19/044 , F04D27/0292 , F04D29/321
摘要： A turbo-molecular pump has a casing, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. A turbine blade pumping assembly and a thread groove pumping assembly for discharging gas molecules are disposed between the stator and the rotor. The rotor comprises at least two components constituting the turbine blade pumping assembly and the thread groove pumping assembly. The components are separable from each other at a predetermined position, and joined to each other to form the rotor.

10. 发明授权

US06869890B2 Processing apparatus to be sealed against workpiece 有权
标题翻译：加工装置要与工件密封
公开(公告)号：US06869890B2
公开(公告)日：2005-03-22
申请号：US10034373
申请日：2002-01-03
申请人： Nobuharu Noji , Hiroshi Sobukawa , Masami Nagayama , Koji Ono , Mutsumi Saito
发明人： Nobuharu Noji , Hiroshi Sobukawa , Masami Nagayama , Koji Ono , Mutsumi Saito
IPC分类号： B08B3/04 , C23C16/04 , C23C16/44 , H01L21/00 , H01L21/205 , H01L21/304 , H01L21/31
CPC分类号： C23C16/4409 , B08B3/04 , B08B3/041 , C23C16/04 , H01L21/67126
摘要： A processing apparatus is used for processing a workpiece such as a semiconductor wafer. The processing apparatus comprises a cover for covering a portion of a surface, to be processed, of a workpiece, a process chamber formed by the cover and the surface, to be processed, of the workpiece, and a sealing portion provided between the cover and the surface of the workpiece for sealing the process chamber.
摘要翻译：处理装置用于处理诸如半导体晶片的工件。该处理装置包括用于覆盖被加工物的表面的一部分的盖，由盖的加工室和待加工的工件的表面形成的处理室，以及设置在盖和工件的表面用于密封加工室。

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