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    • 2. 发明授权
    • Turbomolecular pump
    • 涡轮分子泵
    • US06220831B1
    • 2001-04-24
    • US09133331
    • 1998-08-13
    • Atsushi ShiokawaMatsutaro MiyamotoHiroshi SobukawaToshiharu Nakazawa
    • Atsushi ShiokawaMatsutaro MiyamotoHiroshi SobukawaToshiharu Nakazawa
    • F04B1704
    • F04D17/168F04D19/04
    • A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
    • 一种涡轮分子泵,包括转子和定子,其容纳在壳体中并在其间形成排气通道,以及形成在所述壳体中的吸入口和排出口。 其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体,所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构,其经由阀体支撑构件驱动所述阀体,所述阀体支撑构件延伸穿过通孔 形成在转子和/或定子和磁轴承单元中,用于在通孔内非接触地支撑阀体支撑构件,由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。
    • 5. 发明授权
    • Magnetic suspending device controlled by temperature of controlled object
    • 受控对象温度控制的磁悬浮装置
    • US06307294B1
    • 2001-10-23
    • US09522471
    • 2000-03-09
    • Atsusi OoyamaHiroyuki ChinoToshiharu NakazawaAtsushi Shiokawa
    • Atsusi OoyamaHiroyuki ChinoToshiharu NakazawaAtsushi Shiokawa
    • H02K709
    • F16C32/0451F16C32/0446
    • A magnetic suspending device which can detect the temperature of a controlled object and assure a safe operation thereof without any need for any special construction or work to the device and any special maintenance is disclosed. In the magnetic suspending device comprising a pair of electromagnets (11, 13) disposed opposite to each other, a magnetizable controlled object (15) disposed between the pair of electromagnets (11, 13) and position displacement detection sensors (12, 14) disposed opposite to each other for detecting a position displacement of the controlled object (15), wherein detection signals from the position displacement detection sensors (12, 14) are inputted to a control circuit unit (20) for performing phase compensation and gain adjustment, wherein control outputs from the control circuit unit (20) control magnetic attractive or repulsive forces of the pair of electromagnets (11, 13), and wherein the controlled object is magnetically suspended by the pair of electromagnets without contact at an arbitrary position, a temperature operational circuit unit (30) is provided for detecting the size and temperature of the controlled object (15) using the detection signals from the position displacement detection sensors (12, 14).
    • 公开了一种能够检测受控对象的温度并确保其安全操作而不需要对设备进行任何特殊构造或工作以及任何特殊维护的磁悬浮装置。 在包括彼此相对设置的一对电磁体(11,13)的磁悬浮装置中,设置在所述一对电磁体(11,13)之间的可磁化受控对象(15)和位置偏移检测传感器(12,14) 彼此相对地检测受控物体的位置偏移,其中来自位置检测传感器(12,14)的检测信号被输入到用于执行相位补偿和增益调整的控制电路单元(20),其中 来自控制电路单元(20)的控制输出控制该对电磁体(11,13)的吸引力或排斥力,并且其中受控对象由一对电磁铁磁性地悬挂在任意位置处没有接触, 提供电路单元(30),用于使用来自位置位移的检测信号来检测受控对象(15)的尺寸和温度 nt检测传感器(12,14)。