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1. 发明授权

US06220831B1 Turbomolecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US06220831B1
公开(公告)日：2001-04-24
申请号：US09133331
申请日：1998-08-13
申请人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
发明人： Atsushi Shiokawa , Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa
IPC分类号： F04B1704
CPC分类号： F04D17/168 , F04D19/04
摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
摘要翻译：一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。

2. 发明授权

US6062810A Turbomolecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：US6062810A
公开(公告)日：2000-05-16
申请号：US133332
申请日：1998-08-13
申请人： Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa , Atsushi Shiokawa , Junichi Arami
发明人： Matsutaro Miyamoto , Hiroshi Sobukawa , Toshiharu Nakazawa , Atsushi Shiokawa , Junichi Arami
IPC分类号： F04D29/10 , F04D17/16 , F04D19/04 , F04D15/00 , F04B17/00 , F04B49/22
CPC分类号： F04D19/04 , F04D17/168
摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.
摘要翻译：涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。支撑构件延伸穿过转子和定子中的至少一个。涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。

3. 发明授权

US06398524B1 Magnetic bearing control device and turbo-molecular pump device 有权
标题翻译：磁轴承控制装置和涡轮分子泵装置
公开(公告)号：US06398524B1
公开(公告)日：2002-06-04
申请号：US09555648
申请日：2000-06-02
申请人： Akiko Taira , Hiroyuki Chino , Toshiharu Nakazawa , Matsutaro Miyamoto
发明人： Akiko Taira , Hiroyuki Chino , Toshiharu Nakazawa , Matsutaro Miyamoto
IPC分类号： F04B1700
CPC分类号： F16C32/0446 , F04D19/048 , F16C2360/45
摘要： The present invention is to provide a magnetic bearing controller capable of reliably controlling the position of a floating member at a target position, even when the length of the cable connecting the magnetic bearing and the controller is changed. The magnetic bearing controller comprises: an electromagnet for supporting a floating member in a floating state; sensors (Z1, Z2) for sensing the floating position of the floating member; and a controller for supplying sensor signals and an exciting currents via cables to the sensors and electromagnets, respectively, in order to support the floating member at a predetermined floating position based on signals received from the sensors, wherein the controller comprises. a signal source (11) for supplying an AC signal to the sensors (Z1, Z2); a pair of sensor drive circuits (12) for supplying differential signals via cables (C) connected to both ends of the serially connected sensor elements (Z1, Z2); whereby the cables are disposed with balanced condition and capacitance generated by the length of the cable is canceled. The main pump section and controller of a turbo-molecular pump apparatus can be integrally formed.
摘要翻译：本发明是提供一种能够可靠地控制浮动构件在目标位置的位置的磁轴承控制器，即使当连接磁轴承和控制器的电缆的长度改变时，磁轴承控制器包括：电磁体用于支持浮动状态的浮动元件; 传感器（Z1，Z2），用于感测浮动部件的浮动位置; 以及控制器，用于分别通过电缆将传感器信号和激励电流提供给传感器和电磁体，以便基于从传感器接收的信号将浮动构件支撑在预定的浮动位置，其中控制器包括。用于向传感器（Z1，Z2）提供AC信号的信号源（11）; 一对传感器驱动电路，用于通过连接到串联的传感器元件（Z1，Z2）两端的电缆（C）提供差分信号; 由此电缆以平衡的状态设置，并且由电缆的长度产生的电容被取消。涡轮分子泵装置的主泵部分和控制器可以一体形成。

4. 发明授权

US06617722B2 Magnetic levitation rotating machine 失效
公开(公告)号：US06617722B2
公开(公告)日：2003-09-09
申请号：US09950054
申请日：2001-09-12
申请人： Atsushi Ooyama , Toshiharu Nakazawa , Matsutaro Miyamoto
发明人： Atsushi Ooyama , Toshiharu Nakazawa , Matsutaro Miyamoto
IPC分类号： H02K2914
CPC分类号： F16C32/0446
摘要： A magnetic levitation rotating machine is provided which can stably detect the displacement and rotating speed of a rotator and, at the same time, can reduce the size of the whole apparatus, that is, can render the whole apparatus compact. The magnetic levitation rotating machine for supporting a rotator in a levitated state by magnetic force of an electromagnet or a permanent magnet comprises: a position detection plane provided in the rotator and a concave and/or a convex provided in the plane; a displacement sensor provided on the fixed side, for detecting the displacement of the plane including the concave or the convex; and a detection mechanism for detecting the displacement of the rotator and the rotating speed of the rotator from the output of the displacement sensor.

5. 发明授权

US5679992A Bearing unit 失效
标题翻译：轴承单元
公开(公告)号：US5679992A
公开(公告)日：1997-10-21
申请号：US729031
申请日：1996-10-09
申请人： Matsutaro Miyamoto , Shun-ichi Aiyoshizawa , Toshiharu Nakazawa
发明人： Matsutaro Miyamoto , Shun-ichi Aiyoshizawa , Toshiharu Nakazawa
IPC分类号： F16F15/08 , F04D19/04 , F16C32/04 , F16C39/06 , F16F15/03 , F16F15/04 , H02K7/08 , H02K7/09
CPC分类号： F16C27/00 , F04D19/048 , F16C32/0425 , F16C32/0478 , F16C39/063 , F16C2360/45
摘要： A magnetic bearing unit is disclosed which comprises a rotor supported in a radial direction by magnetic effects generated by permanent magnets arranged within a passive radial magnetic bearing and supported in an axial direction by an actively-controlled axial magnetic bearing. The unit also comprises a movable member arranged between the stator and rotor, and the passive magnetic member is arranged between the movable member and the rotor. At least first and second pairs of axially opposing faces are provided on the stator and the movable member respectively. A biasing means is in functional association with the movable member for forcing the movable member to shorten a spacing between the first pair of opposing faces. The first pair of opposing faces is formed with a recess having a curved cross sectional shape on each of the opposing faces, and a plurality of balls having a radius not more than a radius of the recess are disposed in the recess. The second pair of opposing faces are bridged with a damping member made of an elastic material. The resulting bearing unit in such a compressive state can be used in any orientation without causing any operational problems such as those encountered when the conventional magnetic bearing is used in a horizontal orientation. The unit is easy to control and produces stable smooth operation in radial and axial directions at all times.
摘要翻译：公开了一种磁轴承单元，其包括通过由被动径向磁轴承中布置的永磁体产生的并且通过主动控制的轴向磁轴承沿轴向支撑的磁力作用沿径向方向支撑的转子。该单元还包括设置在定子和转子之间的可动构件，并且被动磁构件设置在可动构件和转子之间。至少第一和第二对轴向相对的面分别设置在定子和可动件上。偏压装置与可动件功能相关联，用于迫使可动件缩短第一对相对面之间的间距。第一对相对面形成有在每个相对面上具有弯曲横截面形状的凹部，并且具有半径不大于凹部半径的多个球设置在凹部中。第二对相对面与由弹性材料制成的阻尼构件桥接。所得到的轴承单元处于这种压缩状态，可以以任何方向使用，而不会引起任何操作问题，例如当常规磁性轴承以水平方向使用时所遇到的问题。该单元易于控制，始终在径向和轴向方向均匀平稳运行。

6. 发明授权

US6092994A Liquid delivery device, method of controlling such liquid delivery device, and liquid delivery pump 失效
标题翻译：液体输送装置，控制这种液体输送装置的方法和液体输送泵
公开(公告)号：US6092994A
公开(公告)日：2000-07-25
申请号：US14992
申请日：1998-01-28
申请人： Shigekazu Yamamoto , Tetsuma Ikegami , Hiroshi Sobukawa , Shun-ichi Aiyoshizawa , Toshiharu Nakazawa , Yoshinori Ojima
发明人： Shigekazu Yamamoto , Tetsuma Ikegami , Hiroshi Sobukawa , Shun-ichi Aiyoshizawa , Toshiharu Nakazawa , Yoshinori Ojima
IPC分类号： F04C2/16 , F04C15/00 , F04D3/02 , F04D13/06 , F04D15/00 , F04D29/04 , F04D29/048 , F17D1/14 , H02K7/09 , H02K7/14 , H02K29/00 , H02P6/22 , F04B23/10 , F01C1/16
CPC分类号： F04D29/048 , F04D13/0646 , F04D15/0066 , F04D3/02
摘要： A screw pump includes a casing having inlet and outlet ports and a pump rotor rotatably mounted in the casing and having screw threads communicating with said inlet and outlet ports. The pump rotor is rotated by a reversible speed-controllable motor, typically a DC brushless motor, mounted in the casing to deliver a liquid such as a chemical solution from the inlet port through a liquid passage defined by the screw threads to the outlet port.
摘要翻译：螺杆泵包括具有入口和出口的壳体和可转动地安装在壳体中的泵转子，并且具有与所述入口和出口连通的螺纹。泵转子通过安装在壳体中的可逆速度可控电动机（通常为DC无刷电动机）旋转，以将来自入口的液体（例如化学溶液）通过由螺纹限定的液体通道输出到出口。

7. 发明授权

US06307294B1 Magnetic suspending device controlled by temperature of controlled object 有权
标题翻译：受控对象温度控制的磁悬浮装置
公开(公告)号：US06307294B1
公开(公告)日：2001-10-23
申请号：US09522471
申请日：2000-03-09
申请人： Atsusi Ooyama , Hiroyuki Chino , Toshiharu Nakazawa , Atsushi Shiokawa
发明人： Atsusi Ooyama , Hiroyuki Chino , Toshiharu Nakazawa , Atsushi Shiokawa
IPC分类号： H02K709
CPC分类号： F16C32/0451 , F16C32/0446
摘要： A magnetic suspending device which can detect the temperature of a controlled object and assure a safe operation thereof without any need for any special construction or work to the device and any special maintenance is disclosed. In the magnetic suspending device comprising a pair of electromagnets (11, 13) disposed opposite to each other, a magnetizable controlled object (15) disposed between the pair of electromagnets (11, 13) and position displacement detection sensors (12, 14) disposed opposite to each other for detecting a position displacement of the controlled object (15), wherein detection signals from the position displacement detection sensors (12, 14) are inputted to a control circuit unit (20) for performing phase compensation and gain adjustment, wherein control outputs from the control circuit unit (20) control magnetic attractive or repulsive forces of the pair of electromagnets (11, 13), and wherein the controlled object is magnetically suspended by the pair of electromagnets without contact at an arbitrary position, a temperature operational circuit unit (30) is provided for detecting the size and temperature of the controlled object (15) using the detection signals from the position displacement detection sensors (12, 14).
摘要翻译：公开了一种能够检测受控对象的温度并确保其安全操作而不需要对设备进行任何特殊构造或工作以及任何特殊维护的磁悬浮装置。在包括彼此相对设置的一对电磁体（11,13）的磁悬浮装置中，设置在所述一对电磁体（11,13）之间的可磁化受控对象（15）和位置偏移检测传感器（12,14）彼此相对地检测受控物体的位置偏移，其中来自位置检测传感器（12,14）的检测信号被输入到用于执行相位补偿和增益调整的控制电路单元（20），其中来自控制电路单元（20）的控制输出控制该对电磁体（11,13）的吸引力或排斥力，并且其中受控对象由一对电磁铁磁性地悬挂在任意位置处没有接触，提供电路单元（30），用于使用来自位置位移的检测信号来检测受控对象（15）的尺寸和温度 nt检测传感器（12,14）。

8. 发明授权

US06873075B2 Magnetic bearing control device 有权
标题翻译：磁轴承控制装置
公开(公告)号：US06873075B2
公开(公告)日：2005-03-29
申请号：US10257937
申请日：2001-04-20
申请人： Akiko Taira , Toshiharu Nakazawa
发明人： Akiko Taira , Toshiharu Nakazawa
IPC分类号： F16C32/04 , F16C39/06 , H02P27/08 , H02P29/00 , H02K7/09
CPC分类号： F16C32/0442 , F16C32/0444 , F16C32/0457 , F16C2360/45 , F16C2380/26 , H02P27/08
摘要： A magnetic bearing control device that can operate a motor with low noise, has a simple system construction and is compact and inexpensive comprises: at least a pair of opposed electromagnets for supporting a suspended unit without contact; a motor M for rotating the suspended unit; and a controller for driving and controlling them.A DC/DC converter 13 supplies a driving power to an inverter 14 for driving the motor M. The inverter 14 for driving the motor M uses both PWM and PAM control schemes to drive and rotate the motor M.
摘要翻译：一种能够操作具有低噪声的电动机的磁性轴承控制装置，具有简单的系统结构并且紧凑且便宜的包括：至少一对相对的电磁体，用于支撑悬挂单元而不接触; 用于旋转悬挂单元的马达M; 一个用于驱动和控制它们的控制器.DC / DC转换器13向用于驱动电动机M的逆变器14提供驱动电力。用于驱动电动机M的逆变器14使用PWM和PAM控制方案来驱动和旋转电动机 M.

9. 发明授权

US06539043B1 Discharge-pumped excimer laser device 有权
标题翻译：放电泵浦准分子激光装置
公开(公告)号：US06539043B1
公开(公告)日：2003-03-25
申请号：US09856138
申请日：2001-05-29
申请人： Hiroyuki Shinozaki , Shinichi Sekiguchi , Toshimitsu Barada , Toshiharu Nakazawa
发明人： Hiroyuki Shinozaki , Shinichi Sekiguchi , Toshimitsu Barada , Toshiharu Nakazawa
IPC分类号： H01S322
CPC分类号： F16C32/047 , H01S3/036 , H01S3/225
摘要： The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life. The discharge-pumped excimer laser device according to the present invention has a laser chamber (1) filled with a laserigas and housing at least a pair of main discharge electrodes (2, 2) for producing an electric discharge to be able to oscillate a laser beam, housings (6, 7) joined to opposite sides of the laser chamber (1), a cross flow fan (3) having opposite ends rotatably supported by magnetic bearings (8, 9, 10, 11) accommodated in the housings (6, 7), for producing a high-speed laser gas flow between the main discharge electrodes (2, 2), a motor (12) accommodated in the housing (7) for rotating the cross flow fan (3), laser gas flow passages (61, 62) extending through gaps between rotor side and stator side of the magnetic bearings (8, 9, 10, 11) and the motor (12) over an axial entire length of the housings (6, 7), and communicating with an interior of the laser chamber (1), a laser gas introduction passage (60) extending from the interior of the laser chamber (1) and communicating with the laser gas flow passages (61, 62), and filters (20, 20) disposed in the laser gas introduction passage (60).
摘要翻译：本发明提供了一种排出泵浦的准分子激光装置，其包括填充有少量劣化的激光气体的激光室，磁性轴承和抵抗灰尘颗粒进入的电动机以及保持在与激光气体接触，损伤小，使用寿命长。本发明的排出泵浦准分子激光装置具有填充有激光的激光室（1），并容纳至少一对主放电电极（2,2），用于产生能够振荡激光束的放电，与激光室（1）的相对侧接合的壳体（6,7），具有相对端部的交叉流动风扇（3），其可旋转地支撑在容纳在壳体（6,7）中的磁性轴承（8,9,10,11），用于在主放电电极（2,2）之间产生高速激光气流，容纳在壳体（7），用于旋转横流风扇（3），激光气体在所述壳体（6,7）的轴向整个长度上延伸穿过所述磁性轴承（8,9,10,11）和所述电动机（12）的转子侧和定子侧之间的间隙的流动通道（61,62），以及与所述激光室（1）的内部连通，从所述激光室（1）的内部延伸并与所述激光气体流路（61,62）连通的激光气体导入通路（60） 20）设置在激光气体导入通路（60）中。

10. 发明授权

US06404088B1 Magnetic bearing device 有权
标题翻译：磁轴承装置
公开(公告)号：US06404088B1
公开(公告)日：2002-06-11
申请号：US09657067
申请日：2000-09-07
申请人： Toshimitsu Barada , Atsushi Ooyama , Toshiharu Nakazawa
发明人： Toshimitsu Barada , Atsushi Ooyama , Toshiharu Nakazawa
IPC分类号： H02K709
CPC分类号： F16C32/0446 , F16C32/0442 , F16C2231/00
摘要： A magnetic bearing device has an object levitated in an arbitrary position between confronting electromagnets. Positional displacement sensors detect a positional displacement of the object. When the electromagnets are successively energized, the object is moved in a mechanically movable maximum range between the electromagnets, and maximum and minimum values of a detected positional displacement signal from the positional displacement sensors are detected. A middle value between the maximum and minimum values is calculated and compared with a threshold level. An adjustment signal is applied to an offset corrector which produces an offset-corrected signal from the detected positional displacement signal, so as to substantially eliminate the difference between the middle value and the threshold level so that the middle value represents a position in which the object is to be levitated between the electromagnets.
摘要翻译：磁性轴承装置具有悬浮在面对的电磁体之间的任意位置的物体。位置位移传感器检测物体的位置位移。当电磁体依次通电时，物体在电磁铁之间以机械方式移动的最大范围内移动，并且检测来自位置位移传感器的检测到的位置位移信号的最大值和最小值。计算最大值和最小值之间的中间值，并将其与阈值级别进行比较。调整信号被应用于从检测到的位置位移信号产生偏移校正信号的偏移校正器，以便基本上消除中间值和阈值水平之间的差异，使得中间值表示对象将在电磁铁之间悬浮。

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