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    • 2. 发明申请
    • ALIGNING DEVICE, BONDING APPARATUS, AND ALIGNING METHOD
    • 对准装置,联结装置和对准方法
    • US20080245472A1
    • 2008-10-09
    • US12137286
    • 2008-06-11
    • Atsuhiko HirataShigeki FukunagaShigeki YamaneMitsuhiro NamuraArata SuzukiTomonari Watanabe
    • Atsuhiko HirataShigeki FukunagaShigeki YamaneMitsuhiro NamuraArata SuzukiTomonari Watanabe
    • H05K3/30G02F1/13
    • H01L21/682B32B37/0046B32B38/1833B32B2305/55B32B2309/68B32B2309/70B32B2457/14G02F2001/133354Y10T29/49131Y10T29/5313Y10T29/53174Y10T29/53178Y10T29/53183Y10T156/1075
    • An aligning device that can reliably correct misalignment between electronic components for increasing the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method. The aligning device comprises a chamber; a flexible bellows configured to define an airtight chamber therein with the chamber; a driving unit configured to move one of a first block member and a second block member relative to the other, the first block member being for holding a first electronic component and being provided in the airtight chamber, and the second block member being for holding a second electronic component and being provided in the airtight chamber; and an image-taking port protruding inward from an outer surface of the chamber so as to define a space, the image-taking port having an observation window through which at least one of the first electronic component and the second electronic component is observed. In an embodiment, an image-taking port 21 protrudes inward from an outer surface of a chamber 3 so as to define a space 11. Thus, even when the chamber 3 moves together with a second block-member 28, an image recognizing device 47 can be provided in the space 11 so as to be prevented from interfering with the motion of the chamber 3. This allows the chamber 3 to freely move without any restriction. As a result, one of a first block member 12 and the second block member 28 can be freely moved relative to the other without being restricted by the placement of the image recognizing device 47, and a first wafer W1 and a second wafer W2 can be aligned reliably.
    • 可以可靠地校正电子部件之间的未对准的对准装置,用于提高对准电子部件的精度,配备有对准装置的接合装置和对准方法。 对准装置包括一个室; 柔性波纹管,其构造成在其中与所述腔室限定气密室; 驱动单元,其构造成相对于另一块移动第一块构件和第二块构件中的一个,所述第一块构件用于保持第一电子部件并设置在所述气密室中,并且所述第二挡块构件用于保持 第二电子部件并设置在气密室中; 以及从所述室的外表面向内突出以形成空间的摄像端口,所述摄像端口具有观察窗,通过所述观察窗观察所述第一电子部件和所述第二电子部件中的至少一个。 在一个实施例中,摄像端口21从腔室3的外表面向内突出,以限定空间11。 因此,即使当室3与第二块构件28一起移动时,也可以在空间11中设置图像识别装置47,以防止与室3的运动相干扰。 这允许室3自由移动而没有任何限制。 结果,第一块构件12和第二块构件28中的一个可以相对于另一个而不受图像识别装置47的放置的限制而自由移动,并且第一晶片W 1和第二晶片W 2 可以可靠地对齐。
    • 7. 发明授权
    • Linear actuator
    • 线性执行机构
    • US06198179B1
    • 2001-03-06
    • US09250409
    • 1999-02-16
    • Shigeki FukunagaTakeshi HashimotoShigeru Tsuji
    • Shigeki FukunagaTakeshi HashimotoShigeru Tsuji
    • H02K4100
    • H02K41/0356
    • A linear actuator can obtain a roughly fixed load within a stroke range. The linear actuator comprises a fixed element, comprising a yoke and a magnet which is magnetized in the radial direction, and a moving element, comprising an electromagnetic coil and a bobbin which surrounds the magnet. A spring is provided for applying a force acting in opposition to the thrust direction acting on the moving element. A constant load stroke area is provided so that the characteristics of the opposite force of this spring balance the characteristics of the thrust force acting on the moving element. The constant load stroke area is an area where one end of the coil in the stroke direction is located in an outside position from one end of the magnet in the stroke direction, and the other end of the coil in the stroke direction is located in an inside position from both ends of the magnet in the stroke direction.
    • 线性致动器可以在行程范围内获得大致固定的负载。 线性致动器包括固定元件,其包括磁轭和沿径向磁化的磁体,以及包括电磁线圈和围绕磁体的线轴的移动元件。 提供弹簧用于施加与作用在移动元件上的推力方向相反的力。 提供恒定的载荷冲程区域,使得该弹簧的相反力的特性平衡作用在移动元件上的推力的特性。 恒定载荷行程区域是行程方向上的线圈的一端位于从行程方向的磁体的一端的外侧位置的区域,线圈的行程方向的另一端位于 从磁铁的两端在行程方向的内侧位置。
    • 8. 发明授权
    • Parts mounting apparatus
    • 零件安装装置
    • US07134188B2
    • 2006-11-14
    • US10647007
    • 2003-08-22
    • Shigeki Fukunaga
    • Shigeki Fukunaga
    • B23P19/00
    • H05K13/0812Y10T29/4913Y10T29/49131Y10T29/49144Y10T29/53174Y10T29/53178Y10T29/53191
    • A suction head is inserted between first and second cameras relatively disposed facing one another with aligned optical axes, so that the first camera takes images of a head reference mark on the suction head, and the second camera of a first part suctioned to the suction head. Next, a stage is inserted between the first and second cameras so that the first camera takes images of a second part held on the stage, and the second camera of a stage reference mark thereupon. The relative positions between the first part and the suction head, and between the second part and the stage, are calculated based upon image information from the cameras, and the suction head and the stage are positioned, the first and second parts being relatively positioned based upon positional information and relative positional information from the first and second cameras, and mounting is performed.
    • 将吸头插入第一和第二相机之间,彼此相对地布置有对准的光轴,使得第一相机在吸头上拍摄头部基准标记的图像,并且将第一部分的第二照相机吸入吸头 。 接下来,在第一和第二相机之间插入一个台阶,使得第一相机拍摄保持在舞台上的第二部分的图像,并且在其上设置阶段参考标记的第二相机。 基于来自照相机的图像信息计算第一部分和吸头之间以及第二部分和舞台之间的相对位置,并且吸引头和舞台被定位,第一和第二部分基于相对位置 根据来自第一和第二相机的位置信息和相对位置信息,并进行安装。
    • 9. 发明授权
    • Component conveyor
    • 部件输送机
    • US06334523B1
    • 2002-01-01
    • US09567016
    • 2000-05-09
    • Shigeki Fukunaga
    • Shigeki Fukunaga
    • B65G4700
    • B23Q7/02B23P19/007B65G29/00B65G47/82B65G54/02H05K13/0406
    • A component conveyor which can spend sufficient time for picking and placing operation has low energy consumption, and the moving speed of the head is fast. In order to pick and place a component P, there are provided several movable heads 6 to 9, movable along a closed path, magnets 15a2 to 15d2 and coils 14a to 14d, both of which stop the head at the picking position and the placing position, and magnets 16a to 16d which transfer the kinetic energy of the moving head to the stopped head at the picking position or the placement position. By applying the initial velocity in the progress direction to at least one head, the kinetic energy is sequentially transmitted to the following head. A moving head is made to stop at a position of the preceding head. Thus, the kinetic energy of the moving head is transmitted to the stopped head. By using the repulsion effect, moving and stopping of the head is efficiently performed.
    • 能够花费足够的时间进行拾取和放置操作的部件输送机具有低能量消耗,并且头部的移动速度快。 为了拾取和放置部件P,设置有多个可沿着封闭路径移动的可移动头6至9,磁体15a2至15d2和线圈14a至14d,这两个可动头在拾取位置停止头部和放置位置 以及磁体16a至16d,其在移动位置或放置位置处将移动头的动能传递到停止的头部。 通过将进给方向上的初始速度应用于至少一个头部,动能依次传送到随后的头部。 使移动头停在前一个头部的位置。 因此,移动头的动能被传递到停止的头部。 通过使用排斥效果,有效地进行头部的移动和停止。
    • 10. 发明授权
    • Method for mounting component by suction nozzle
    • 通过吸嘴安装部件的方法
    • US07540080B2
    • 2009-06-02
    • US10573058
    • 2004-09-09
    • Shigeki Fukunaga
    • Shigeki Fukunaga
    • H05K3/30
    • G02B6/4224H01S5/02252H01S5/02272H01S5/02284Y10T29/4913Y10T29/49131Y10T29/49133Y10T29/53174Y10T29/53178Y10T29/53191
    • A method and apparatus for mounting a light emitting element, enabling positioning on an object with precision with reference to the optic axis of a light emitting element, and mounting the element. A suction head is inserted between a first camera and a second camera having relatively fixed optic axes, a head reference mark of the suction head is captured with the first camera, the end face of a light emitting element suctioned by the suction head is captured with the second camera, the light axis emitted by the light emitting element is captured with a third camera, a stage is inserted between the first camera and the second camera, a board held on the stage is captured with the first camera, a stage reference mark of the stage is captured with the second camera, the relative position between the light emitting element and the suction head and the relative position between the board and the stage are calculated using the image information from both cameras, the suction head and the stage are moved to a mounting position, the head reference mark and the stage reference mark are recognized with the first and second cameras, and the suction head and the stage are subjected to position correction based on the relative position information.
    • 一种用于安装发光元件的方法和装置,使得能够相对于发光元件的光轴精确地定位在物体上,并且安装元件。 吸头位于第一相机和具有相对固定的光轴的第二相机之间,用第一相机捕获吸头的头部基准标记,由吸头吸引的发光元件的端面被捕获 第二相机,由第三相机捕获由发光元件发射的光轴,在第一相机和第二相机之间插入台,用第一相机捕获保持在台上的板,阶段参考标记 使用第二相机拍摄,利用来自两个照相机的图像信息计算发光元件和吸头之间的相对位置以及板与台之间的相对位置,使吸头和台被移动 在安装位置,第一和第二相机识别出头部基准标记和阶段参考标记,并且吸引头和平台被施加 基于相对位置信息的离子校正。