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    • 2. 发明申请
    • ALIGNING DEVICE, BONDING APPARATUS, AND ALIGNING METHOD
    • 对准装置,联结装置和对准方法
    • US20080245472A1
    • 2008-10-09
    • US12137286
    • 2008-06-11
    • Atsuhiko HirataShigeki FukunagaShigeki YamaneMitsuhiro NamuraArata SuzukiTomonari Watanabe
    • Atsuhiko HirataShigeki FukunagaShigeki YamaneMitsuhiro NamuraArata SuzukiTomonari Watanabe
    • H05K3/30G02F1/13
    • H01L21/682B32B37/0046B32B38/1833B32B2305/55B32B2309/68B32B2309/70B32B2457/14G02F2001/133354Y10T29/49131Y10T29/5313Y10T29/53174Y10T29/53178Y10T29/53183Y10T156/1075
    • An aligning device that can reliably correct misalignment between electronic components for increasing the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method. The aligning device comprises a chamber; a flexible bellows configured to define an airtight chamber therein with the chamber; a driving unit configured to move one of a first block member and a second block member relative to the other, the first block member being for holding a first electronic component and being provided in the airtight chamber, and the second block member being for holding a second electronic component and being provided in the airtight chamber; and an image-taking port protruding inward from an outer surface of the chamber so as to define a space, the image-taking port having an observation window through which at least one of the first electronic component and the second electronic component is observed. In an embodiment, an image-taking port 21 protrudes inward from an outer surface of a chamber 3 so as to define a space 11. Thus, even when the chamber 3 moves together with a second block-member 28, an image recognizing device 47 can be provided in the space 11 so as to be prevented from interfering with the motion of the chamber 3. This allows the chamber 3 to freely move without any restriction. As a result, one of a first block member 12 and the second block member 28 can be freely moved relative to the other without being restricted by the placement of the image recognizing device 47, and a first wafer W1 and a second wafer W2 can be aligned reliably.
    • 可以可靠地校正电子部件之间的未对准的对准装置,用于提高对准电子部件的精度,配备有对准装置的接合装置和对准方法。 对准装置包括一个室; 柔性波纹管,其构造成在其中与所述腔室限定气密室; 驱动单元,其构造成相对于另一块移动第一块构件和第二块构件中的一个,所述第一块构件用于保持第一电子部件并设置在所述气密室中,并且所述第二挡块构件用于保持 第二电子部件并设置在气密室中; 以及从所述室的外表面向内突出以形成空间的摄像端口,所述摄像端口具有观察窗,通过所述观察窗观察所述第一电子部件和所述第二电子部件中的至少一个。 在一个实施例中,摄像端口21从腔室3的外表面向内突出,以限定空间11。 因此,即使当室3与第二块构件28一起移动时,也可以在空间11中设置图像识别装置47,以防止与室3的运动相干扰。 这允许室3自由移动而没有任何限制。 结果,第一块构件12和第二块构件28中的一个可以相对于另一个而不受图像识别装置47的放置的限制而自由移动,并且第一晶片W 1和第二晶片W 2 可以可靠地对齐。
    • 6. 发明授权
    • Process for producing carbonic ester
    • 生产碳酸酯的方法
    • US07446218B2
    • 2008-11-04
    • US10522754
    • 2003-08-06
    • Nobuhisa MiyakeTomonari Watanabe
    • Nobuhisa MiyakeTomonari Watanabe
    • C07C69/96
    • C07C68/04C07C69/96
    • A method for producing a carbonic ester, comprising: (1) performing a reaction between an organometal compound mixture and carbon dioxide, the organometal compound mixture comprising a reactive organometal compound and an unregenerable unreactive compound derived from the reactive organometal compound, to thereby obtain a reaction mixture containing a carbonic ester, the unregenerable unreactive compound, and a regenerable metamorphic organometal compound derived from the reactive organometal compound, (2) separating the reaction mixture into a first portion containing the carbonic ester and the unregenerable unreactive compound, and a second portion containing the regenerable metamorphic organometal compound, and (3) reacting the second portion of the reaction mixture with an alcohol to form an organometal compound mixture and water and removing the water from the organometal compound mixture, the organometal compound mixture comprising a reactive organometal compound and an unregenerable unreactive compound derived from the reactive organometal compound.
    • 一种制备碳酸酯的方法,包括:(1)在有机金属化合物混合物和二氧化碳之间进行反应,所述有机金属化合物混合物包含反应性有机金属化合物和衍生自反应性有机金属化合物的不可再生非反应性化合物,从而获得 含有碳酸酯的反应混合物,不可再生的非反应性化合物和衍生自反应性有机金属化合物的可再生的变质有机金属化合物,(2)将反应混合物分离成含有碳酸酯和不可再生非反应性化合物的第一部分, 含有可再生变质有机金属化合物,和(3)使第二部分反应混合物与醇反应以形成有机金属化合物混合物和水,并从有机金属化合物混合物中除去水,所述有机金属化合物混合物包含反应性有机金属化合物和 一个未注册者 衍生自反应性有机金属化合物的非反应性化合物。