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1. 发明申请

US20050115678A1 Magnet assembly for plasma containment 有权
标题翻译：用于等离子体容纳的磁体组件
公开(公告)号：US20050115678A1
公开(公告)日：2005-06-02
申请号：US10726008
申请日：2003-12-01
申请人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark Pyl , Tetsuya Ishikawa , Evans Lee
发明人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark Pyl , Tetsuya Ishikawa , Evans Lee
IPC分类号： H01J37/32 , H01L21/306
CPC分类号： H01J37/32623 , H01J37/3266 , Y10S156/916
摘要： A magnet assembly for a plasma process chamber has a hollow collar comprising a cross-section that is absent seams. The hollow collar has an open end face and a cap is provided to seal the open end face of the collar. A plurality of magnets are in the hollow collar, the magnets being insertable through the open end face. The collar is capable of being snap fitted onto the chamber wall. The magnet assembly can also comprise one or more of the collars such that the collars, when installed, form a substantially continuous ring about a chamber wall.
摘要翻译：用于等离子体处理室的磁体组件具有包括不存在接缝的横截面的中空轴环。空心轴环具有敞开的端面，并且设有盖以密封轴环的开口端面。多个磁体位于空心环中，磁体可通过开口端面插入。套环能够被卡扣到室壁上。磁体组件还可以包括一个或多个轴环，使得套环在安装时围绕室壁形成基本上连续的环。

2. 发明申请

US20080066785A1 METHOD OF REFURBISHING A MAGNET ASSEMBLY FOR PLASMA PROCESS CHAMBER 审中-公开
标题翻译：用于等离子体处理室的磁体组件的重新组装方法
公开(公告)号：US20080066785A1
公开(公告)日：2008-03-20
申请号：US11836092
申请日：2007-08-08
申请人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark van der Pyl , Tetsuya Ishikawa , Evans Lee
发明人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark van der Pyl , Tetsuya Ishikawa , Evans Lee
IPC分类号： B08B9/08
CPC分类号： H01J37/32623 , H01J37/3266 , Y10S156/916
摘要： A method of refurbishing a wall of a plasma process chamber which has a surface with a magnet assembly fitted thereon. The magnet assembly has an expandable hollow collar with a plurality of magnets inside. In the method, the diameter of the hollow collar of the magnet assembly is expanded to remove the hollow collar from the wall. The surface of the wall is cleaned. The hollow collar of the original magnet assembly, or of another magnet assembly, is then snap fitted back onto the surface of the wall.
摘要翻译：一种对具有安装在其上的磁体组件的表面的等离子体处理室的壁进行翻新的方法。磁体组件具有可扩展的空心套环，内部具有多个磁体。在该方法中，磁体组件的空心轴环的直径被膨胀以从壁上移除空心轴环。墙壁的表面被清洁。然后将原始磁体组件或另一个磁体组件的空心凸缘卡扣到壁的表面上。

3. 发明授权

US07294224B2 Magnet assembly for plasma containment 有权
标题翻译：用于等离子体容纳的磁体组件
公开(公告)号：US07294224B2
公开(公告)日：2007-11-13
申请号：US10726008
申请日：2003-12-01
申请人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark van der Pyl , Tetsuya Ishikawa , Evans Lee
发明人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark van der Pyl , Tetsuya Ishikawa , Evans Lee
IPC分类号： H01L21/00
CPC分类号： H01J37/32623 , H01J37/3266 , Y10S156/916
摘要： A magnet assembly for a plasma process chamber has a hollow collar comprising a cross-section that is absent seams. The hollow collar has an open end face and a cap is provided to seal the open end face of the collar. A plurality of magnets are in the hollow collar, the magnets being insertable through the open end face. The collar is capable of being snap fitted onto the chamber wall. The magnet assembly can also comprise one or more of the collars such that the collars, when installed, form a substantially continuous ring about a chamber wall.
摘要翻译：用于等离子体处理室的磁体组件具有包括不存在接缝的横截面的中空轴环。空心轴环具有敞开的端面，并且设有盖以密封轴环的开口端面。多个磁体位于空心环中，磁体可通过开口端面插入。套环能够被卡扣到室壁上。磁体组件还可以包括一个或多个轴环，使得套环在安装时围绕室壁形成基本上连续的环。

4. 发明授权

US07561015B2 Magnet secured in a two part shell 有权
标题翻译：磁铁固定在两部分壳体
公开(公告)号：US07561015B2
公开(公告)日：2009-07-14
申请号：US10727132
申请日：2003-12-02
申请人： Anthony Vesci , Alan B. Liu , Donny Young , Joe F. Sommers , Kevin Hughes
发明人： Anthony Vesci , Alan B. Liu , Donny Young , Joe F. Sommers , Kevin Hughes
IPC分类号： H01F7/02
CPC分类号： H01F7/0221 , H01J37/3408 , H01J37/3455 , Y10S206/818
摘要： A magnet encapsulated within a canister formed from two cans into a laminated structure particularly useful in plasma processing reactors. Each can includes an end wall and a cylindrical sidewall. One can additionally includes an annular lip that slidably fits outside the sidewall of the other can with a small gap therebetween. The magnet is inserted into the two cans together with a flowable and curable adhesive such as epoxy. The cans are slid together and compressed to cause the adhesive to flow between the magnet and the two cans and between the lip of one can and the sidewall of the other. The adhesive is cured to bond the magnet to the cans and to bond the cans together and to also hermetically seal the structure. The cans may be deep drawn from non-magnetic stainless steel with wall thicknesses of less than 0.064 mm.
摘要翻译：包封在由两个罐形成的罐内的磁体成为特别可用于等离子体处理反应器的层压结构。每个可以包括端壁和圆柱形侧壁。另外还可以包括一个可滑动地配合在另一个罐的侧壁外侧的环形唇缘，其间具有小间隙。将磁体与可流动和可固化的粘合剂如环氧树脂一起插入两个罐中。罐一起滑动并压缩，使粘合剂在磁体和两个罐之间以及一个罐的唇缘和另一个罐的侧壁之间流动。固化粘合剂以将磁体粘合到罐上并将罐结合在一起并且还气密地密封结构。罐体可以从壁厚小于0.064mm的非磁性不锈钢制成。

5. 发明申请

US20050116392A1 Magnet secured in a two part shell 有权
标题翻译：磁铁固定在两部分壳体
公开(公告)号：US20050116392A1
公开(公告)日：2005-06-02
申请号：US10727132
申请日：2003-12-02
申请人： Anthony Vesci , Alan Liu , Donny Young , Joe Sommers , Kevin Hughes
发明人： Anthony Vesci , Alan Liu , Donny Young , Joe Sommers , Kevin Hughes
IPC分类号： B28B1/00 , C04B33/32 , H01F7/02 , H01J37/34
CPC分类号： H01F7/0221 , H01J37/3408 , H01J37/3455 , Y10S206/818
摘要： A magnet encapsulated within a canister formed from two cans into a laminated structure particularly useful in plasma processing reactors. Each can includes an end wall and a cylindrical sidewall. One can additionally includes an annular lip that slidably fits outside the sidewall of the other can with a small gap therebetween. The magnet is inserted into the two cans togther with a flowable and curable adhesive such as epoxy. The cans are slid together and compressed to cause the adhesive to flow between the magnet and the two cans and between the lip of one can and the sidewall of the other. The adhesive is cured to bond the magnet to the cans and to bond the cans together and to also hermetically seal the structure. The cans may be deep drawn from non-magnetic stainless steel with wall thicknesses of less than 0.064 mm.
摘要翻译：包封在由两个罐形成的罐内的磁体成为特别可用于等离子体处理反应器的层压结构。每个可以包括端壁和圆柱形侧壁。另外还可以包括一个可滑动地配合在另一个罐的侧壁外侧的环形唇缘，其间具有小间隙。用可流动和可固化的粘合剂如环氧树脂将磁体插入两个罐中。罐一起滑动并压缩，使粘合剂在磁体和两个罐之间以及一个罐的唇缘和另一个罐的侧壁之间流动。固化粘合剂以将磁体粘合到罐上并将罐结合在一起并且还气密地密封结构。罐体可以从壁厚小于0.064mm的非磁性不锈钢制成。

6. 发明申请

US20100116823A1 HYDROFORMED FLUID CHANNELS 审中-公开
标题翻译：加氢流体通道
公开(公告)号：US20100116823A1
公开(公告)日：2010-05-13
申请号：US12267191
申请日：2008-11-07
申请人： James David Felsch , Anthony Vesci , Michael P. Karazim
发明人： James David Felsch , Anthony Vesci , Michael P. Karazim
IPC分类号： B65D6/10 , B23P15/26 , B65D6/40 , B65D90/02
CPC分类号： B21D26/021 , B21D26/029 , B23K31/02 , B23K2101/14 , B23K2103/04 , B23K2103/05 , B23K2103/10 , Y10T29/49371 , Y10T29/49375
摘要： A method and apparatus for providing a fluid channel on a surface that is subject to extreme temperatures is described. The embodiments described herein provide a fluid channel wherein the surface that is subject to the extreme temperatures forms one side of the fluid channel.
摘要翻译：描述了在经受极端温度的表面上提供流体通道的方法和装置。本文所述的实施例提供了流体通道，其中经受极端温度的表面形成流体通道的一侧。

7. 发明申请

US20070059460A1 Flow-formed chamber component having a textured surface 有权
标题翻译：具有纹理表面的流动形成的室部件
公开(公告)号：US20070059460A1
公开(公告)日：2007-03-15
申请号：US11234012
申请日：2005-09-09
申请人： Stephen Abney , Anthony Vesci , Joseph Sommers , Marc Schweitzer , Scott Dickerson , Jennifer Tiller
发明人： Stephen Abney , Anthony Vesci , Joseph Sommers , Marc Schweitzer , Scott Dickerson , Jennifer Tiller
IPC分类号： B31B45/00
CPC分类号： C23C14/564 , B21D22/16 , B21J5/12 , C23C16/4404 , H01J37/32009 , Y10T428/13
摘要： A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
摘要翻译：制造用于衬底处理室的部件的方法包括提供具有内部和外部表面的预成型件，并且提供具有纹理表面的心轴，其具有包括凸起和凹陷的纹理特征图案。预成型件部件的内表面与芯棒的纹理表面接触，并且将压力施加到预成型件的外表面。压力足够高以使预成型件在心轴的纹理表面上塑性变形，以形成具有纹理化内表面的部件，该内表面包括纹理特征图案，其形状和尺寸适于粘附在基底加工中产生的工艺残留物。

8. 发明授权

US07846310B2 Encapsulated and water cooled electromagnet array 有权
标题翻译：封装和水冷电磁铁阵列
公开(公告)号：US07846310B2
公开(公告)日：2010-12-07
申请号：US11610075
申请日：2006-12-13
申请人： Andrew Gillard , Anthony Vesci , Keith A. Miller
发明人： Andrew Gillard , Anthony Vesci , Keith A. Miller
IPC分类号： C23C14/35
CPC分类号： H01J37/3266 , H01F7/128 , H01F7/20 , H01F27/16 , H01J37/32623 , H01J37/3458 , H01J37/347 , Y10T29/4902
摘要： A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.
摘要翻译：一种电磁体阵列结构，其包括捕获在例如固化环氧树脂的刚性密封剂中的多个电磁线圈，以形成可放置在等离子体处理室的壁周围的整体式独立结构。液体冷却盘管也可以被捕获在电磁线圈之间的密封剂中。该结构还可以包括水配件，定位销，通过用于室螺栓的管和提升支架。

9. 发明授权

US5864449A Precision limit stop for high density disk drives 失效
标题翻译：高密度磁盘驱动器的精密限位
公开(公告)号：US5864449A
公开(公告)日：1999-01-26
申请号：US918662
申请日：1997-08-22
申请人： Miguel Dominguez, Jr. , David McMurtry , Anthony Vesci
发明人： Miguel Dominguez, Jr. , David McMurtry , Anthony Vesci
IPC分类号： G11B21/22
CPC分类号： G11B21/22
摘要： A limit stop for magnetic storage disk drive systems comprising a spring portion and a mount portion. The spring portion is a single piece molded structure that is preloaded against a precision machined surface on the mount portion during assembly. The preloaded spring feature provides good energy absorption characteristics to reduce the limit stop deflection during actuator contact. The precision machined surface on the mount portion accurately determines the limit stop position, thereby reducing tolerance requirements on the spring portion.
摘要翻译：一种包括弹簧部分和安装部分的磁存储盘驱动系统的限位装置。弹簧部分是单件模制结构，其在组装期间相对于安装部分上的精密加工表面预加载。预加载的弹簧特征提供了良好的能量吸收特性，以减少执行器接触期间的极限停止偏转。安装部分上的精密加工表面精确地确定了极限停止位置，从而降低了对弹簧部分的公差要求。

10. 发明授权

US07297247B2 Electroformed sputtering target 失效
标题翻译：电铸溅射靶
公开(公告)号：US07297247B2
公开(公告)日：2007-11-20
申请号：US10431399
申请日：2003-05-06
申请人： Anantha K. Subramani , Anthony Vesci , Scott Dickerson
发明人： Anantha K. Subramani , Anthony Vesci , Scott Dickerson
IPC分类号： C25D5/10 , C25D5/22 , C25D7/00
CPC分类号： C23C14/3414
摘要： A method of fabricating a sputtering target for sputter depositing material onto a substrate in a sputtering chamber is described. In one embodiment of the method, a preform having a surface is formed and a layer of sputtering material is electroplated onto the surface of the preform to form the target. The method can be applied to form a sputtering target having a non-planar surface.
摘要翻译：描述了一种制造溅射靶的方法，溅射靶用于溅射沉积溅射室中的衬底上的材料。在该方法的一个实施例中，形成具有表面的预成型件，并且将溅射材料层电镀到预型件的表面上以形成靶。该方法可以应用于形成具有非平面表面的溅射靶。

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