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1. 发明申请

US20100116823A1 HYDROFORMED FLUID CHANNELS 审中-公开
标题翻译：加氢流体通道
公开(公告)号：US20100116823A1
公开(公告)日：2010-05-13
申请号：US12267191
申请日：2008-11-07
申请人： James David Felsch , Anthony Vesci , Michael P. Karazim
发明人： James David Felsch , Anthony Vesci , Michael P. Karazim
IPC分类号： B65D6/10 , B23P15/26 , B65D6/40 , B65D90/02
CPC分类号： B21D26/021 , B21D26/029 , B23K31/02 , B23K2101/14 , B23K2103/04 , B23K2103/05 , B23K2103/10 , Y10T29/49371 , Y10T29/49375
摘要： A method and apparatus for providing a fluid channel on a surface that is subject to extreme temperatures is described. The embodiments described herein provide a fluid channel wherein the surface that is subject to the extreme temperatures forms one side of the fluid channel.
摘要翻译：描述了在经受极端温度的表面上提供流体通道的方法和装置。本文所述的实施例提供了流体通道，其中经受极端温度的表面形成流体通道的一侧。

2. 发明申请

US20070059460A1 Flow-formed chamber component having a textured surface 有权
标题翻译：具有纹理表面的流动形成的室部件
公开(公告)号：US20070059460A1
公开(公告)日：2007-03-15
申请号：US11234012
申请日：2005-09-09
申请人： Stephen Abney , Anthony Vesci , Joseph Sommers , Marc Schweitzer , Scott Dickerson , Jennifer Tiller
发明人： Stephen Abney , Anthony Vesci , Joseph Sommers , Marc Schweitzer , Scott Dickerson , Jennifer Tiller
IPC分类号： B31B45/00
CPC分类号： C23C14/564 , B21D22/16 , B21J5/12 , C23C16/4404 , H01J37/32009 , Y10T428/13
摘要： A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
摘要翻译：制造用于衬底处理室的部件的方法包括提供具有内部和外部表面的预成型件，并且提供具有纹理表面的心轴，其具有包括凸起和凹陷的纹理特征图案。预成型件部件的内表面与芯棒的纹理表面接触，并且将压力施加到预成型件的外表面。压力足够高以使预成型件在心轴的纹理表面上塑性变形，以形成具有纹理化内表面的部件，该内表面包括纹理特征图案，其形状和尺寸适于粘附在基底加工中产生的工艺残留物。

3. 发明申请

US20080141939A1 ENCAPSULATED AND WATER COOLED ELECTROMAGNET ARRAY 有权
标题翻译：封装和水冷电磁炉阵列
公开(公告)号：US20080141939A1
公开(公告)日：2008-06-19
申请号：US11610075
申请日：2006-12-13
申请人： Andrew Gillard , Anthony Vesci , Keith A. Miller
发明人： Andrew Gillard , Anthony Vesci , Keith A. Miller
IPC分类号： C23C16/513 , H01F41/04 , H01F7/20
CPC分类号： H01J37/3266 , H01F7/128 , H01F7/20 , H01F27/16 , H01J37/32623 , H01J37/3458 , H01J37/347 , Y10T29/4902
摘要： A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.
摘要翻译：一种电磁体阵列结构，其包括捕获在例如固化环氧树脂的刚性密封剂中的多个电磁线圈，以形成可放置在等离子体处理室的壁周围的整体式独立结构。液体冷却盘管也可以被捕获在电磁线圈之间的密封剂中。该结构还可以包括水配件，定位销，通过用于室螺栓的管和提升支架。

4. 发明申请

US20070246346A1 ELECTROFORMED SPUTTERING TARGET 审中-公开
标题翻译：电动飞溅目标
公开(公告)号：US20070246346A1
公开(公告)日：2007-10-25
申请号：US11764133
申请日：2007-06-15
申请人： Anantha Subramani , Anthony Vesci , Scott Dickerson
发明人： Anantha Subramani , Anthony Vesci , Scott Dickerson
IPC分类号： C23C14/34 , C23C14/06
CPC分类号： C23C14/3414
摘要： A sputtering target comprising an inverted annular trough encircling a central cylindrical well, and additionally comprising a plurality of electroplated layers of sputtering material is described. The sputtering material comprises at least one of aluminum, copper, tantalum, titanium and tungsten.
摘要翻译：描述了一种溅射靶，其包括环形中心圆柱形阱的倒置环形槽，并且另外包括多个溅射材料的电镀层。溅射材料包括铝，铜，钽，钛和钨中的至少一种。

5. 发明申请

US20050115678A1 Magnet assembly for plasma containment 有权
标题翻译：用于等离子体容纳的磁体组件
公开(公告)号：US20050115678A1
公开(公告)日：2005-06-02
申请号：US10726008
申请日：2003-12-01
申请人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark Pyl , Tetsuya Ishikawa , Evans Lee
发明人： Anthony Vesci , Vince Kirchhoff , James Woodward , Kevin Hughes , Mark Pyl , Tetsuya Ishikawa , Evans Lee
IPC分类号： H01J37/32 , H01L21/306
CPC分类号： H01J37/32623 , H01J37/3266 , Y10S156/916
摘要： A magnet assembly for a plasma process chamber has a hollow collar comprising a cross-section that is absent seams. The hollow collar has an open end face and a cap is provided to seal the open end face of the collar. A plurality of magnets are in the hollow collar, the magnets being insertable through the open end face. The collar is capable of being snap fitted onto the chamber wall. The magnet assembly can also comprise one or more of the collars such that the collars, when installed, form a substantially continuous ring about a chamber wall.
摘要翻译：用于等离子体处理室的磁体组件具有包括不存在接缝的横截面的中空轴环。空心轴环具有敞开的端面，并且设有盖以密封轴环的开口端面。多个磁体位于空心环中，磁体可通过开口端面插入。套环能够被卡扣到室壁上。磁体组件还可以包括一个或多个轴环，使得套环在安装时围绕室壁形成基本上连续的环。

6. 发明授权

US4042937A Ink supply for pressurized ink jet 失效
标题翻译：用于加压喷墨的墨水供应
公开(公告)号：US4042937A
公开(公告)日：1977-08-16
申请号：US691699
申请日：1976-06-01
申请人： Francis James Perry , Anthony Vesci
发明人： Francis James Perry , Anthony Vesci
IPC分类号： B05B9/00 , B41J2/175 , G01D15/18
CPC分类号： G01D15/18 , B41J2/175
摘要： Ink supply system and sequencing for purge, startup, operation, and shutoff of pressurized ink jet systems. Employing an ink jet head having an inlet, startup is accomplished by filling the head with ink, closing an inlet valve, building pressure behind the valve to a level significantly greater than required for operation, and opening the valve. The system includes an inlet valve connecting a pump from a reservoir to the ink jet head, and an outlet valve connecting an outlet from the head to the reservoir and a vacuum source. At shutoff, the inlet valve is closed with the outlet valve open to create a negative pressure in the head.
摘要翻译：墨水供应系统和用于清洗，启动，操作和关闭加压喷墨系统的排序。使用具有入口的喷墨头，通过用墨水填充头部，关闭入口阀，阀后面的建筑压力到明显大于操作所需的水平并打开阀门来实现启动。该系统包括将泵从储存器连接到喷墨头的入口阀以及将头部的出口连接到储存器的出口阀和真空源。关闭时，入口阀关闭，出口阀打开以在头部产生负压。

7. 发明授权

US07297247B2 Electroformed sputtering target 失效
标题翻译：电铸溅射靶
公开(公告)号：US07297247B2
公开(公告)日：2007-11-20
申请号：US10431399
申请日：2003-05-06
申请人： Anantha K. Subramani , Anthony Vesci , Scott Dickerson
发明人： Anantha K. Subramani , Anthony Vesci , Scott Dickerson
IPC分类号： C25D5/10 , C25D5/22 , C25D7/00
CPC分类号： C23C14/3414
摘要： A method of fabricating a sputtering target for sputter depositing material onto a substrate in a sputtering chamber is described. In one embodiment of the method, a preform having a surface is formed and a layer of sputtering material is electroplated onto the surface of the preform to form the target. The method can be applied to form a sputtering target having a non-planar surface.
摘要翻译：描述了一种制造溅射靶的方法，溅射靶用于溅射沉积溅射室中的衬底上的材料。在该方法的一个实施例中，形成具有表面的预成型件，并且将溅射材料层电镀到预型件的表面上以形成靶。该方法可以应用于形成具有非平面表面的溅射靶。

8. 发明授权

US06278585B1 Transducer suspension termination system 失效
标题翻译：传感器悬挂终端系统
公开(公告)号：US06278585B1
公开(公告)日：2001-08-21
申请号：US09294451
申请日：1999-04-19
申请人： Stephen Arnold Olson , Darrell Dean Palmer , Anthony Vesci
发明人： Stephen Arnold Olson , Darrell Dean Palmer , Anthony Vesci
IPC分类号： G11B555
CPC分类号： G11B5/4853 , G11B5/484 , G11B5/486 , G11B21/16
摘要： A suspension system comprises an actuator arm and two suspensions. Each suspension has a load beam and a laminated member comprised of a support layer, an electrically insulating layer, and an electrically conducting layer. The laminated members are etched to form electrical lines for each suspension. The laminate member of each suspension is bent along the side of the arm such that they overlap one another in order to reduce the required space.
摘要翻译：悬架系统包括致动器臂和两个悬架。每个悬架具有负载梁和由支撑层，电绝缘层和导电层组成的层叠构件。蚀刻层压构件以形成每个悬架的电线。每个悬架的层压构件沿着臂的侧面弯曲，使得它们彼此重叠，以便减少所需的空间。

9. 发明授权

US4089007A Digital flow pressure regulator 失效
标题翻译：数字流量调压器
公开(公告)号：US4089007A
公开(公告)日：1978-05-09
申请号：US689702
申请日：1976-05-24
申请人： Francis J. Perry , Anthony Vesci
发明人： Francis J. Perry , Anthony Vesci
IPC分类号： G05D16/00 , B41J2/175 , G05D16/20 , G01D15/16
CPC分类号： G05D16/2013 , B41J2/175 , Y10T137/2562 , Y10T137/7761
摘要： A high pressure fluid source is connected to a primary orifice and a valved orifice of a binarily activated pressure regulator. The primary orifice alone supplies the fluid at a pressure below the minimum desired, and both orifices together supply the fluid at a pressure greater than the maximum desired. A sensor at the output is adjusted to open the binary valve when the minimum pressure is reached, and close the valve when the maximum pressure is reached, thus cycling between the two conditions.
摘要翻译：高压流体源连接到初级孔口和二次启动的压力调节器的阀口。单独的主孔口以低于所需最低压力的压力提供流体，并且两个孔口一起在大于所需最大压力的位置供应流体。在达到最小压力时，调节输出端的传感器打开二元阀，并在达到最大压力时关闭阀门，从而在两个条件之间循环。

10. 发明授权

US07846310B2 Encapsulated and water cooled electromagnet array 有权
标题翻译：封装和水冷电磁铁阵列
公开(公告)号：US07846310B2
公开(公告)日：2010-12-07
申请号：US11610075
申请日：2006-12-13
申请人： Andrew Gillard , Anthony Vesci , Keith A. Miller
发明人： Andrew Gillard , Anthony Vesci , Keith A. Miller
IPC分类号： C23C14/35
CPC分类号： H01J37/3266 , H01F7/128 , H01F7/20 , H01F27/16 , H01J37/32623 , H01J37/3458 , H01J37/347 , Y10T29/4902
摘要： A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.
摘要翻译：一种电磁体阵列结构，其包括捕获在例如固化环氧树脂的刚性密封剂中的多个电磁线圈，以形成可放置在等离子体处理室的壁周围的整体式独立结构。液体冷却盘管也可以被捕获在电磁线圈之间的密封剂中。该结构还可以包括水配件，定位销，通过用于室螺栓的管和提升支架。

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