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    • 3. 发明授权
    • Vacuum system with molecular flow line
    • 具有分子流线的真空系统
    • US4860546A
    • 1989-08-29
    • US230573
    • 1988-08-10
    • John T. HarvellPhilip A. Lessard
    • John T. HarvellPhilip A. Lessard
    • B01D8/00F04B37/08
    • F04B37/08B01D8/00Y10S417/901
    • In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock to the work chamber 12 for absorption by the cryopump of the work chamber. Alternatively, the flow line is connected between the load lock cryopump and the cryopump of the work chamber for directly passing the noncondensible gases to the work chamber cryopump. The flow line prevents buildup of noncondensible gases within the cryopump of the load lock. The flow line may include baffles to damp pressure surges during cryopumping of the load lock. A control valve connected to the flow line allows operator control of the passing of noncondensible gases from the load lock cryopump to the work chamber or to the work chamber cryopump through the flow line. The dimensions of the flow line provide molecular flow of the noncondensible gases.
    • 在具有与工作室协作的负载锁定的真空系统中,流线连接在负载锁的低温泵和工作室之间。 流动管线通过不被负载锁的低温泵吸收到工作室12中的非冷凝气体,以便被工作室的低温泵吸收。 或者,流动管线连接在负载锁定低温泵和工作室的低温泵之间,用于将不可冷凝气体直接传递到工作室低温泵。 流动管线可防止在负载锁的低温泵内产生不可冷凝气体。 流动管线可以包括挡板,以在加载锁的低温泵送期间减轻压力冲击。 连接到流动管线的控制阀允许操作者通过流动管线控制不可冷凝气体从负载锁定低温泵通到工作室或工作室低温泵。 流线的尺寸提供了不凝性气体的分子流。
    • 4. 发明授权
    • Temperature control of cryogenic systems
    • 低温系统的温度控制
    • US4679401A
    • 1987-07-14
    • US752354
    • 1985-07-03
    • Philip A. LessardAllen J. BartlettJohn F. Peterson
    • Philip A. LessardAllen J. BartlettJohn F. Peterson
    • B01D8/00F04B37/08
    • B01D8/00F04B37/08Y10S417/901
    • To control the temperature of one or more heat sinks of a cryogenic refrigerator in a cryopump, refrigerant gas to the refrigerator is diverted through heat exchangers associated with the refrigerator heat sinks. The diverted refrigerant gas may be used to maintain the temperature of the first stage cryopumping surfaces above some level to avoid cross over hangup. The second stage cryopumping surfaces may be warmed by the diverted refrigerant to some temperature level for partial regeneration. Both heat sinks may be warmed for full regeneration of the cryopump. Bleed flow of refrigerant gas cooled by the first stage of the refrigerator can be directed past a thermal mass to cool that mass. By reversing the flow of refrigerant gas during cooldown of the system, the thermal mass can be used to more rapidly cool the refrigerator. The thermal mass is thermally isolated from the refrigerator heat sinks and is positioned within the vacuum vessel of the cryopump adjacent to the first stage of the refrigerator.
    • 为了控制低温泵中的低温冰箱的一个或多个散热器的温度,通向与冰箱散热器相关联的热交换器将制冷剂气体输送到冰箱。 转向的制冷剂气体可用于将第一级低温泵的表面的温度保持在一定程度上,以避免交叉悬挂。 可将第二级低温泵送表面由转向制冷剂加热到一定温度以进行部分再生。 这两个散热片可能会被加热,以便低温泵完全再生。 由冰箱的第一级冷却的制冷剂气体的流出可以被引导通过热质量以冷却该质量。 通过在系统的冷却期间逆转制冷剂气体的流动,可以使用热质量来更快速地冷却冰箱。 热物质与冰箱散热器热隔离,并且位于与冰箱的第一级相邻的低温泵的真空容器内。
    • 7. 发明授权
    • Cryogenic recondenser with remote cold box
    • 低温冷凝器与遥控冷藏箱
    • US4766741A
    • 1988-08-30
    • US5082
    • 1987-01-20
    • Allen J. BartlettBruce R. AndeenPhilip A. Lessard
    • Allen J. BartlettBruce R. AndeenPhilip A. Lessard
    • F17C3/08F25B9/00F25B9/10F25J1/00F25J1/02F28F1/42H01F6/00H01F7/20F25B19/00
    • H01F6/00F17C3/085F25B9/00F28F1/42F17C2205/0326F17C2205/0347F17C2205/0355F17C2221/017F17C2223/0161F17C2223/033F17C2227/0353F17C2227/036F17C2250/0626F17C2250/0636F17C2265/012F17C2270/0509F17C2270/0536
    • A recondenser cycles a working volume of cryogen gas through a remote cold box and a coaxial recondensing, heat exchanger transfer line which is inserted into a cryostat. The working volume of gas is compressed to a high pressure and cooled through cooling means which include a mechanical refrigerator of the regenerator-displacer type. The cooled gas is expanded through a first JT valve to a medium pressure and further cooled. The further cooled medium pressure gas is transferred in a closed coaxial transfer line to a cryostat in which boil-off is recondensed. A second JT valve in the cryostat end of an inner tube coaxially positioned in an outer tube forming the transfer line expands the gas to a lower pressure and forms a liquid-gas mixture. The liquid-gas mixture is passed in heat exchange relation with the boil-off from an inner tube to an outer tube of a coaxial recondensing heat exchanger. The outer surface of the outer tube at the cryostat end of the transfer line has burrs which provide the necessary surface area on which to recondense the boil-off. The gas is transferred back to the cooling means through intermediate channels formed between the outer tube and the coaxially positioned inner tube.
    • 再冷凝器通过远程冷箱和插入低温恒温器的同轴再冷凝换热器输送管线循环冷冻剂气体的工作体积。 将气体的工作体积压缩至高压,并通过冷却装置冷却,冷却装置包括再生器置换器型机械式制冷机。 冷却的气体通过第一JT阀膨胀至中压并进一步冷却。 进一步冷却的中压气体在闭合的同轴输送管线中转移到冷凝器中,在该恒温器中再蒸发。 同轴地位于形成输送管的外管的内管的低温恒温器端中的第二JT阀将气体膨胀到较低压力并形成液态气体混合物。 液体 - 气体混合物与从内管到同轴再冷凝式热交换器的外管的蒸发热交换。 在输送管线的低温恒温器端部的外管的外表面具有毛刺,其提供必要的表面积以重新冷凝该蒸发。 通过形成在外管和同轴定位的内管之间的中间通道将气体转移回冷却装置。