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1. 发明授权

US5156007A Cryopump with improved second stage passageway 失效
标题翻译：具有改进的第二阶段通行证的CRYOPUMP
公开(公告)号：US5156007A
公开(公告)日：1992-10-20
申请号：US647848
申请日：1991-01-30
申请人： Allen J. Bartlett , Philip A. Lessard , Stephen J. Yamartino , John T. Harvell
发明人： Allen J. Bartlett , Philip A. Lessard , Stephen J. Yamartino , John T. Harvell
IPC分类号： F04B37/08 , F25D19/00
CPC分类号： F04B37/08 , F25D19/006 , Y10S417/901
摘要： Condensation on a cryopump second stage refrigerator cylinder is prevented by arranging a passageway between a colder second stage cylinder shield in thermal contact with the coldest section of the second stage and a warmer radiation shield in thermal contact with the warmer first stage. This arrangement produces a uniform and significant temperature differential in the passageway. The passageway is arranged so that the ratio of its length, L, to its width, W, is ideally greater than five. This ensures molecular collisions with the cold surface of the cylinder shield so that gas molecules are tightly bound to the cylinder shield. As a result, condensation on the refrigerator cylinder and resultant pressure variations are prevented.
摘要翻译：通过在与第二级的最冷部分热接触的较冷的第二级气缸罩与在较暖的第一级热接触的较暖的辐射屏蔽之间设置通道来防止在低温泵第二级冷藏箱上的冷凝。这种布置在通道中产生均匀且显着的温差。该通道被布置成使得其长度L与其宽度W之比理想地大于5。这确保了与气缸屏蔽件的冷表面的分子碰撞，使得气体分子紧密地结合到气缸罩。结果，可以防止冰箱圆筒上的冷凝和合成的压力变化。

2. 发明授权

US5862671A Purge and rough cryopump regeneration process, cryopump and controller 失效
标题翻译：吹扫和粗略的低温泵再生过程，低温泵和控制器
公开(公告)号：US5862671A
公开(公告)日：1999-01-26
申请号：US848973
申请日：1997-05-02
申请人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
发明人： Philip A. Lessard , Paul E. Dresens , Maureen C. Buonpane , Timothy M. Pulling , Alan C. Brightman , Robert M. Patterson , Mark A. Stira , Allen J. Bartlett , Stephen J. Yamartino , Gary S. Ash , James A. O'Neil
IPC分类号： F04B37/16 , F04B37/08 , B01D8/00
CPC分类号： F04B37/085 , Y10S417/901
摘要： A cryopump is regenerated by roughing the cryopump during purging. Purging and roughing is carried out in first a high temperature mode and then a lower ambient temperature mode. In the lower temperature mode, the cryogenic refrigerator is turned on. If the system fails a rough test after roughing at the lower temperature, it is repurged with the rough valve open.
摘要翻译：在清洗过程中，通过对低温泵进行粗加工来再生低温泵。首先在高温模式下进行吹扫和粗加工，然后在较低的环境温度模式下进行。在较低温度模式下，低温冰箱打开。如果系统在较低温度下进行粗加工后未能进行粗糙试验，则会在粗阀打开时重新进行。

3. 发明授权

US5375424A Cryopump with electronically controlled regeneration 失效
标题翻译：低温电子控制再生
公开(公告)号：US5375424A
公开(公告)日：1994-12-27
申请号：US23697
申请日：1993-02-26
申请人： Allen J. Bartlett , Stephen J. Yamartino
发明人： Allen J. Bartlett , Stephen J. Yamartino
IPC分类号： F04B37/08 , B01D8/00
CPC分类号： F04B37/08 , Y10S417/901
摘要： In a fast partial regeneration process, the second stage of a cryopump is heated as purge gas is applied to the cryopump. In a test loop, the purge gas is turned off and the roughing valve is opened. If the cryopump is judged to be sufficiently empty of gases from the second stage by being roughed to a sufficiently low pressure in a short period of time the system proceeds to a reconditioning phase. If the system fails the test, however, it is repurged with a burst of warm purge gas and then retested. After passing the emptiness test, the pressure is further reduced by the roughing pump as heat is applied to the second stage. The heat is then turned off for cool down as the system continues to be rough pumped to a base pressure. At about the base pressure, the roughing valve is cycled to maintain the cryopump pressure at a level near to the base pressure. Where multiple cryopumps are coupled to a common roughing pump manifold, they are processed through a partial regeneration sequence in lock step to avoid cross contamination.
摘要翻译：在快速部分再生过程中，当吹扫气被施加到低温泵时，加热低温泵的第二阶段。在测试循环中，关闭吹扫气体，打开粗压阀。如果通过在短时间内将低温泵粗糙化到足够低的压力，则系统进入修复阶段，从而将低温泵判断为足够空的第二级的气体。然而，如果系统测试失败，则会用一阵温和的吹扫气体重新测试，然后重新测试。在通过空白试验之后，当加热到第二阶段时，由粗加工泵进一步降低压力。然后，随着系统继续粗略地泵送到基础压力，然后将热量关闭以冷却。在大约基本压力下，粗循环阀循环，以将低温泵压力保持在接近基本压力的水平。当多个低温泵连接到普通的粗加工泵歧管时，它们通过锁定步骤中的部分再生序列进行加工，以避免交叉污染。

4. 再颁专利

USRE33878E Cryogenic recondenser with remote cold box 失效
公开(公告)号：USRE33878E
公开(公告)日：1992-04-14
申请号：US571870
申请日：1990-08-22
申请人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
发明人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
IPC分类号： F17C3/08 , F25B9/10 , F25J1/00 , H01F6/00
CPC分类号： F25J1/0276 , F17C3/085 , F25B9/10 , H01F6/00 , F17C2203/0629 , F17C2221/017 , F17C2223/0161 , F17C2223/033 , F17C2227/036 , F17C2265/034 , F17C2270/0509 , F17C2270/0536
摘要： A recondenser cycles a working volume of cryogen gas through a remote cold box and a coaxial recondensing, heat exchanger transfer line which is inserted into a cryostat. The working volume of gas is compressed to a high pressure and cooled through cooling means which include a mechanical refrigerator of the regenerator-displacer type. The cooled gas is expanded through a first JT valve to a medium pressure and further cooled. The further cooled medium pressure gas is transferred in a closed coaxial transfer line to a cryostat in which boil-off is recondensed. A second JT valve in the cryostat end of an inner tube coaxially positioned in an outer tube forming the transfer line expands the gas to a lower pressure and forms a liquid-gas mixture. The liquid-gas mixture is passed in heat exchange relation with the boil-off from an inner tube to an outer tube of a coaxial recondensing heat exchanger. The outer surface of the outer tube at the cryostat end of the transfer line has burrs which provide the necessary surface area on which to recondense the boil-off. The gas is transferred back to the cooling means through intermediate channels formed between the outer tube and the coaxially positioned inner tube.

5. 发明授权

US4766741A Cryogenic recondenser with remote cold box 失效
标题翻译：低温冷凝器与遥控冷藏箱
公开(公告)号：US4766741A
公开(公告)日：1988-08-30
申请号：US5082
申请日：1987-01-20
申请人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
发明人： Allen J. Bartlett , Bruce R. Andeen , Philip A. Lessard
IPC分类号： F17C3/08 , F25B9/00 , F25B9/10 , F25J1/00 , F25J1/02 , F28F1/42 , H01F6/00 , H01F7/20 , F25B19/00
CPC分类号： H01F6/00 , F17C3/085 , F25B9/00 , F28F1/42 , F17C2205/0326 , F17C2205/0347 , F17C2205/0355 , F17C2221/017 , F17C2223/0161 , F17C2223/033 , F17C2227/0353 , F17C2227/036 , F17C2250/0626 , F17C2250/0636 , F17C2265/012 , F17C2270/0509 , F17C2270/0536
摘要： A recondenser cycles a working volume of cryogen gas through a remote cold box and a coaxial recondensing, heat exchanger transfer line which is inserted into a cryostat. The working volume of gas is compressed to a high pressure and cooled through cooling means which include a mechanical refrigerator of the regenerator-displacer type. The cooled gas is expanded through a first JT valve to a medium pressure and further cooled. The further cooled medium pressure gas is transferred in a closed coaxial transfer line to a cryostat in which boil-off is recondensed. A second JT valve in the cryostat end of an inner tube coaxially positioned in an outer tube forming the transfer line expands the gas to a lower pressure and forms a liquid-gas mixture. The liquid-gas mixture is passed in heat exchange relation with the boil-off from an inner tube to an outer tube of a coaxial recondensing heat exchanger. The outer surface of the outer tube at the cryostat end of the transfer line has burrs which provide the necessary surface area on which to recondense the boil-off. The gas is transferred back to the cooling means through intermediate channels formed between the outer tube and the coaxially positioned inner tube.
摘要翻译：再冷凝器通过远程冷箱和插入低温恒温器的同轴再冷凝换热器输送管线循环冷冻剂气体的工作体积。将气体的工作体积压缩至高压，并通过冷却装置冷却，冷却装置包括再生器置换器型机械式制冷机。冷却的气体通过第一JT阀膨胀至中压并进一步冷却。进一步冷却的中压气体在闭合的同轴输送管线中转移到冷凝器中，在该恒温器中再蒸发。同轴地位于形成输送管的外管的内管的低温恒温器端中的第二JT阀将气体膨胀到较低压力并形成液态气体混合物。液体 - 气体混合物与从内管到同轴再冷凝式热交换器的外管的蒸发热交换。在输送管线的低温恒温器端部的外管的外表面具有毛刺，其提供必要的表面积以重新冷凝该蒸发。通过形成在外管和同轴定位的内管之间的中间通道将气体转移回冷却装置。

6. 发明授权

US4438632A Means for periodic desorption of a cryopump 失效
标题翻译：用于定期解吸低温泵的方法
公开(公告)号：US4438632A
公开(公告)日：1984-03-27
申请号：US395120
申请日：1982-07-06
申请人： Philip A. Lessard , Allen J. Bartlett
发明人： Philip A. Lessard , Allen J. Bartlett
IPC分类号： F04B37/02 , F04B37/08 , B01D5/00
CPC分类号： F04B37/02 , F04B37/08 , Y10S417/901
摘要： The invention discloses a cryopump comprising a primary cryopanel 67 associated with a low temperature heat sink 60 having means for adsorbing a first low boiling point gas and a secondary cryopanel 80 associated with heat sink 60 and a higher temperature heat sink 48 having means for condensing a higher boiling point gas. There are means 90 for selectively conducting heat to the primary cryopanel to raise the temperature of the cryopanel above that which is necessary to cause said first gas to become desorbed from said cryopanel while having minimal effect on the capacity of the higher temperature heat sink.
摘要翻译：本发明公开了一种低温泵，其包括与低温散热器60相关的初级冷冻板67，低温散热器60具有用于吸附第一低沸点气体的装置和与散热器60相关联的次级冷冻板80以及具有冷凝装置高沸点气体。存在用于选择性地向初级冷冻板传导热量的装置90，以将冷冻板的温度升高到使得所述第一气体从所述冷冻板解吸附所必需的温度，同时对较高温度的散热器的容量具有最小的影响。

7. 发明授权

US4679401A Temperature control of cryogenic systems 失效
标题翻译：低温系统的温度控制
公开(公告)号：US4679401A
公开(公告)日：1987-07-14
申请号：US752354
申请日：1985-07-03
申请人： Philip A. Lessard , Allen J. Bartlett , John F. Peterson
发明人： Philip A. Lessard , Allen J. Bartlett , John F. Peterson
IPC分类号： B01D8/00 , F04B37/08
CPC分类号： B01D8/00 , F04B37/08 , Y10S417/901
摘要： To control the temperature of one or more heat sinks of a cryogenic refrigerator in a cryopump, refrigerant gas to the refrigerator is diverted through heat exchangers associated with the refrigerator heat sinks. The diverted refrigerant gas may be used to maintain the temperature of the first stage cryopumping surfaces above some level to avoid cross over hangup. The second stage cryopumping surfaces may be warmed by the diverted refrigerant to some temperature level for partial regeneration. Both heat sinks may be warmed for full regeneration of the cryopump. Bleed flow of refrigerant gas cooled by the first stage of the refrigerator can be directed past a thermal mass to cool that mass. By reversing the flow of refrigerant gas during cooldown of the system, the thermal mass can be used to more rapidly cool the refrigerator. The thermal mass is thermally isolated from the refrigerator heat sinks and is positioned within the vacuum vessel of the cryopump adjacent to the first stage of the refrigerator.
摘要翻译：为了控制低温泵中的低温冰箱的一个或多个散热器的温度，通向与冰箱散热器相关联的热交换器将制冷剂气体输送到冰箱。转向的制冷剂气体可用于将第一级低温泵的表面的温度保持在一定程度上，以避免交叉悬挂。可将第二级低温泵送表面由转向制冷剂加热到一定温度以进行部分再生。这两个散热片可能会被加热，以便低温泵完全再生。由冰箱的第一级冷却的制冷剂气体的流出可以被引导通过热质量以冷却该质量。通过在系统的冷却期间逆转制冷剂气体的流动，可以使用热质量来更快速地冷却冰箱。热物质与冰箱散热器热隔离，并且位于与冰箱的第一级相邻的低温泵的真空容器内。

8. 发明申请

US20130239593A1 CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE 有权
标题翻译：控制氢气排放的CRYOPUMP
公开(公告)号：US20130239593A1
公开(公告)日：2013-09-19
申请号：US13988497
申请日：2011-11-23
申请人： Michael J. Eacobacci, JR. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
发明人： Michael J. Eacobacci, JR. , Allen J. Bartlett , John J. Casello , Jeffrey A. Wells
IPC分类号： B01D8/00
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：低温泵系统包括具有第一冷却级的冷冻泵和连接到第一冷却级的第二冷却级，第二冷却级包括具有至少约2标准升的氢吸附能力的气体吸附器。第二冷却阶段的蓄热能力足以使得能够控制低温泵内的氢气压力，以满足排气管线中的点火安全限制和氢气流量的限制，使之在与低温泵连接的减排系统的限度内，在再次达到完全负载的低温泵的第二冷却阶段变暖。

9. 发明申请

US20110265496A1 PROCESS CHAMBER WITH INTEGRATED PUMPING 审中-公开
标题翻译：具有集成泵送的过程室
公开(公告)号：US20110265496A1
公开(公告)日：2011-11-03
申请号：US13111149
申请日：2011-05-19
申请人： Allen J. Bartlett
发明人： Allen J. Bartlett
IPC分类号： B01D8/00
摘要： A process chamber with integrated pumping including a process chamber, refrigerators and arrays, or pumping surface, that are integral to the process chamber.
摘要翻译：具有集成泵浦的处理室，包括处理室，制冷器和阵列或泵送表面，其与处理室成一体。

10. 发明授权

US07788942B2 Helium management control system 有权
标题翻译：氦管理控制系统
公开(公告)号：US07788942B2
公开(公告)日：2010-09-07
申请号：US11590673
申请日：2006-10-31
申请人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
发明人： Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce Andeen , Y. Roberto Than , Joseph Chopy, Jr.
IPC分类号： F25B45/00 , B01D8/00 , F25J1/00
CPC分类号： F04B37/08 , B01D8/00 , F17D1/04 , F17D3/01 , F17D3/18 , F24F11/30 , F24F2110/50 , F25B9/002 , F25B9/14 , F25B45/00 , F25B2309/001 , F25B2309/002 , F25B2309/1428 , F25B2345/001 , F25B2345/003 , F25J1/0007
摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
摘要翻译：用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。

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