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1. 发明授权

US5389198A Structure and method of manufacturing the same 失效
标题翻译：其制造方法及结构
公开(公告)号：US5389198A
公开(公告)日：1995-02-14
申请号：US763519
申请日：1991-09-23
申请人： Akira Koide , Kazuo Sato , Seiko Suzuki , Norio Ichikawa , Hidehito Obayashi , Masahide Hayashi
发明人： Akira Koide , Kazuo Sato , Seiko Suzuki , Norio Ichikawa , Hidehito Obayashi , Masahide Hayashi
IPC分类号： G01P15/125 , B81B3/00 , H01L21/306 , H01L21/308 , H01L29/84 , H01L21/00
CPC分类号： H01L21/30608 , H01L21/3086 , G01P2015/0828
摘要： A method of manufacturing structures such as a pressure gauge, an accelerometer and the like with a single crystal material such as silicon uses etching techniques where the shape of a part subjected to stress concentration has a curvature, another part is formed in a plane body and a polyhedron is constituted by combining both.To attain the above constitution, a wafer of single crystal material is formed with a stepped surface having a value corresponding to at least the depth of the curvature in a first anisotropic etching process using a prescribed etching mask, and in a second anisotropic etching process, an etching mask is used by removing at least a part of the etching mask used in the first anisotropic etching process.
摘要翻译：使用诸如硅的单晶材料制造诸如压力计，加速度计等的结构的方法使用蚀刻技术，其中经受应力集中的部分的形状具有曲率，另一部分形成在平面体中，多面体是通过组合两者构成的。为了实现上述结构，在使用规定的蚀刻掩模的第一各向异性蚀刻工艺中，形成具有至少与曲率深度相对应的值的阶梯面的单晶材料晶片，在第二各向异性蚀刻工艺中，通过去除在第一各向异性蚀刻工艺中使用的蚀刻掩模的至少一部分来使用蚀刻掩模。

2. 发明授权

US5243861A Capacitive type semiconductor accelerometer 失效
标题翻译：电容式半导体加速度计
公开(公告)号：US5243861A
公开(公告)日：1993-09-14
申请号：US755838
申请日：1991-09-06
申请人： Benjamin Kloeck , Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto , Kazuo Sato , Akira Koide , Norio Ichikawa , Yukiko Kawai , Hiromichi Ebine
发明人： Benjamin Kloeck , Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto , Kazuo Sato , Akira Koide , Norio Ichikawa , Yukiko Kawai , Hiromichi Ebine
IPC分类号： B81B3/00 , B81B7/00 , G01P15/08 , G01P15/125
CPC分类号： B81B7/007 , G01P15/0802 , G01P15/125 , G01P2015/0828 , H01L2224/45144 , H01L2224/48463
摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.
摘要翻译：电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极，下玻璃板。

3. 发明授权

US5417312A Semiconductor acceleration sensor and vehicle control system using the same 失效
标题翻译：半导体加速度传感器和车辆控制系统使用相同
公开(公告)号：US5417312A
公开(公告)日：1995-05-23
申请号：US147083
申请日：1993-11-03
申请人： Shigeki Tsuchitani , Seiko Suzuki , Tomoyuki Tanaka , Masayuki Miki , Masahiro Matsumoto , Norio Ichikawa , Hiromichi Ebine , Yukiko Sugisawa , Kanemasa Sato , Sadayasu Ueno , Yasuhiro Asano , Masanori Kubota , Masayoshi Suzuki
发明人： Shigeki Tsuchitani , Seiko Suzuki , Tomoyuki Tanaka , Masayuki Miki , Masahiro Matsumoto , Norio Ichikawa , Hiromichi Ebine , Yukiko Sugisawa , Kanemasa Sato , Sadayasu Ueno , Yasuhiro Asano , Masanori Kubota , Masayoshi Suzuki
IPC分类号： G01P1/00 , G01P15/125 , G01P15/13 , B60T8/58 , B60T8/72 , G01P15/08
CPC分类号： G01P15/125 , G01P1/003 , G01P15/131 , G01P2015/0828
摘要： A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates. A sensor detector unit processing circuit has the output characteristic of the circuit digitally adjusted by suitable switching of a plurality of resistors, and the sensor chip and the detector unit integrated circuit may be located on a common base and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40.degree. C. or lower is, advantageously, charged into the hermetically sealed chamber.
摘要翻译：半导体加速度传感器由具有在一端具有预定质量的导电可移动电极的悬臂形成，相对于位于可动电极的相对侧上的可动电极固定的至少一对固定导电电极和提供的间隙在可动电极和固定电极之间。为了防止可动电极与被接触的固定电极熔合，在本发明的第一方面中，在可动电极和固定电极之间设置绝缘层，该层位于可动电极上或固定电极上，第二方面，可动电极或优选固定电极由高熔点材料形成。在这样的第二方面，为了提高高熔点材料与安装有固定电极的基板之间的粘附性，首先在基板上涂覆较低熔点的材料。传感器检测器单元处理电路具有通过多个电阻器的合适切换数字调节的电路的输出特性，并且传感器芯片和检测器单元集成电路可以位于公共基座上并且安装在气密密封的室中以防止影响传感器和检测器单元组件运行的不利环境影响。露点为-40℃或更低的气体有利地被装入密封的气室中。

4. 发明授权

US4909223A Air-fuel ratio control apparatus for multicylinder engine 失效
标题翻译：用于多缸发动机的空燃比控制装置
公开(公告)号：US4909223A
公开(公告)日：1990-03-20
申请号：US240626
申请日：1988-09-06
申请人： Takauki Ituzi , Sadayasu Ueno , Norio Ichikawa
发明人： Takauki Ituzi , Sadayasu Ueno , Norio Ichikawa
IPC分类号： F02B1/04 , F02D41/00 , F02D41/14 , F02D41/36
CPC分类号： F02D41/1486 , F02D41/0087 , F02B1/04
摘要： In an apparatus of the type in which the air-fuel ratio of an engine is detected by an air-fuel ratio sensor and the air-fuel ratio is feedback-controlled in accordance with the detection result to operate the engine at a desired air-fuel ratio, a change of the output characteristic of the air-fuel ratio sensor is always corrected for. The apparatus includes means for detecting the air-fuel ratio of the engine from its exhaust gas composition, means for determining whether the engine is in a given constant operating condition, means for determining a desired air-fuel ratio for the constant operating condition, means for supplying the quantity of fuel corresponding to the desired air-fuel ratio to each cylinder of the engine, means for causing some of all the cylinders of the engine not greater in number than N-1 (N represents the total number of cylinders) to misfire when the engine comes into the constant operating condition, and means for correcting the output characteristic of the air-fuel ratio detecting means in accordance with the amount of change of the output of the air-fuel ratio detecting means before and after the misfiring.
摘要翻译：在通过空燃比传感器检测发动机的空燃比并且根据检测结果反馈控制空燃比的类型的装置中，以期望的空气 - 燃料比传感器来操作发动机，燃料比，总是校正空燃比传感器的输出特性的变化。该装置包括用于从其排气组成检测发动机的空燃比的装置，用于确定发动机是否处于给定恒定运行状态的装置，用于确定恒定运行状态的期望空燃比的装置用于将对应于所需空燃比的燃料量提供给发动机的每个气缸，用于使发动机的所有气缸的一部分数量不大于N-1（N表示总气缸数）的装置，在发动机处于恒定运行状态时失火，以及根据空燃比检测装置的输出在发生故障之前和之后的变化量来校正空燃比检测装置的输出特性的装置。

5. 发明授权

US4164462A Oxygen sensor 失效
标题翻译：氧传感器
公开(公告)号：US4164462A
公开(公告)日：1979-08-14
申请号：US855325
申请日：1977-11-28
申请人： Norio Ichikawa , Kanemasa Sato , Sadayasu Ueno
发明人： Norio Ichikawa , Kanemasa Sato , Sadayasu Ueno
IPC分类号： G01N27/409 , G01N27/406 , G01N27/407 , G01N27/413 , H01M8/12 , G01N27/58
CPC分类号： G01N27/4077 , H01M4/9058
摘要： A protective layer of zirconia particles having particle sizes of 0.5-5 .mu.M is provided on a surface of an electron-conducting layer of an oxygen sensor at a side of a gas whose oxygen concentration is to be detected to a thickness of 4-100 .mu.M by bonding zirconia particles to one another and the first electron-conducting layer by 10-30% by weight of a high melting point adhesive, such as powders of borosilicate glass, based on total weight of the zirconia particles.
摘要翻译：在氧浓度检测的气体侧的氧传感器的电子传导层的表面上设置粒径为0.5〜5μm的氧化锆粒子的保护层，厚度为4〜通过将氧化锆颗粒彼此粘合并且第一电子传导层以基于氧化锆颗粒的总重量的10-30重量％的高熔点粘合剂（例如硼硅酸盐玻璃的粉末）粘合。

6. 发明授权

US07166830B2 Light detecting sensor 失效
标题翻译：光检测传感器
公开(公告)号：US07166830B2
公开(公告)日：2007-01-23
申请号：US10511086
申请日：2003-04-11
申请人： Tadashi Kitahara , Yoshiro Nomoto , Norio Ichikawa
发明人： Tadashi Kitahara , Yoshiro Nomoto , Norio Ichikawa
IPC分类号： G01J1/44 , H01L29/06
CPC分类号： G01J1/02 , G01J1/0204 , G01J1/0271 , G01J1/429 , H01J40/04
摘要： A substrate 18, a cathode 20 and an anode 22 are stored in a space demarcated by a casing 10, and the space is evacuated. The cathode 20 and the anode 22 are provided on the same surface of a substrate 18 having electric insulation, and have a comb-tooth shape so as to be mutually engaged. Therefore, the area of the part in which the cathode 20 and the anode 22 approach each other becomes larger, and thereby photoelectrons discharged from the cathode 20 through the incidence of ultraviolet rays are transmitted in the vacuum, and are favorably collected in the anode 22.
摘要翻译：衬底18，阴极20和阳极22存储在由壳体10划分的空间中，并且空间被抽空。阴极20和阳极22设置在具有电绝缘性的基板18的相同表面上，并且具有梳齿形状以相互接合。因此，阴极20和阳极22接近的部分的面积变大，从而通过紫外线的入射从阴极20排出的光电子在真空中传输，并且有利地收集在阳极22中。

7. 发明授权

US06941815B2 Sensor with built-in circuits and pressure detector using the same 失效
标题翻译：传感器内置电路和压力检测器使用相同
公开(公告)号：US06941815B2
公开(公告)日：2005-09-13
申请号：US10173732
申请日：2002-06-19
申请人： Yasuo Onose , Junichi Horie , Seiji Kuryu , Akihiko Saito , Norio Ichikawa , Atsuo Watanabe , Satoshi Shimada
发明人： Yasuo Onose , Junichi Horie , Seiji Kuryu , Akihiko Saito , Norio Ichikawa , Atsuo Watanabe , Satoshi Shimada
IPC分类号： G01L9/00 , H01L29/84 , G01L9/04
CPC分类号： G01L9/0073 , G01L9/0042
摘要： A sensor with built-in circuits can be improved in the stability of the operation or characteristics. A circuit region and a sensor region are covered by a passivation film. The sensor region is partially covered by the passivation film. The sensor region and circuit region are protected by the passivation film, and an effect of the passivation film on the mechanical displacement of a diaphragm portion can be alleviated so that the sensor with built-in circuits may be improved in the stability of the operation or characteristics.
摘要翻译：具有内置电路的传感器可以提高操作的稳定性或特性。电路区域和传感器区域被钝化膜覆盖。传感器区域被钝化膜部分覆盖。传感器区域和电路区域被钝化膜保护，并且可以减轻钝化膜对隔膜部分的机械位移的影响，使得具有内置电路的传感器可以在操作的稳定性方面得到改善，或者特点

8. 发明授权

US06167761A Capacitance type pressure sensor with capacitive elements actuated by a diaphragm 失效
标题翻译：电容型压力传感器，其电容元件由隔膜驱动
公开(公告)号：US06167761A
公开(公告)日：2001-01-02
申请号：US09103612
申请日：1998-06-24
申请人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
发明人： Keiji Hanzawa , Akio Yasukawa , Satoshi Shimada , Seikou Suzuki , Akihiko Saito , Masahiro Matsumoto , Atsushi Miyazaki , Norio Ichikawa , Junichi Horie , Seiji Kuryu
IPC分类号： G01L912
CPC分类号： G01L9/0073
摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.
摘要翻译：在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变薄膜和可动电极。固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

9. 发明授权

US4644797A Semiconductor pressure transducer 失效
标题翻译：半导体压力传感器
公开(公告)号：US4644797A
公开(公告)日：1987-02-24
申请号：US753854
申请日：1985-07-11
申请人： Norio Ichikawa , Seijiro Takeda , Kazuhiro Tsuruoka
发明人： Norio Ichikawa , Seijiro Takeda , Kazuhiro Tsuruoka
IPC分类号： G01L9/04 , G01L9/00 , G01L19/14 , G01L7/08 , G01L9/08
CPC分类号： G01L19/0084 , G01L19/0645 , G01L19/14 , G01L19/142 , Y10S73/04
摘要： A semiconductor strain-gage is disposed in a recessed chamber of a housing. A step is provided in the recessed chamber. Minute grooves are provided in the inner peripheral portion of the step. An outer periphery of a metal disk with a pressure introducing bore is clamped to the minute grooves by means of plastic deformation thereof, after the seal diaphragm is disposed on a planer portion of the step, whereby the seal diaphragm closes the recessed chamber harmetically.
摘要翻译：半导体应变计设置在壳体的凹室中。在凹室中设置一个台阶。在台阶的内周部设有分槽。在密封隔膜设置在台阶的平面部分之后，具有压力引入孔的金属盘的外周边通过其塑性变形被夹紧在微小凹槽上，由此密封隔膜有效地关闭凹槽。

10. 发明授权

US4058787A Temperature sensor 失效
标题翻译：温度感应器
公开(公告)号：US4058787A
公开(公告)日：1977-11-15
申请号：US669702
申请日：1976-03-23
申请人： Norio Ichikawa , Sadayasu Ueno
发明人： Norio Ichikawa , Sadayasu Ueno
IPC分类号： G01K1/12 , G01K7/22 , H01C7/04
CPC分类号： G01K1/12 , G01K7/22
摘要： A drawer type electrode of a thermistor for sensing high temperatures, wherein a shaft and a sheath are connected to a thermistor, is constructed such that the shaft and the sheath are brought into contact with the positive and negative electrode surfaces of the thermistor through precious metal chips so that electrical connection between the precious metals, the shaft and the sheath will not be impaired in any way even if oxidation penetrates into the interior from the shaft and the sheath surface due to high temperature.
摘要翻译：用于感测高温的热敏电阻的抽屉式电极，其中将轴和护套连接到热敏电阻，构造成使得轴和护套通过贵金属与热敏电阻的正极和负极表面接触使得贵金属，轴和护套之间的电连接将不会以任何方式受到损害，即使氧化物由于高温而从轴和护套表面渗入内部。

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