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1. 发明授权

US08895947B2 Ultraviolet light generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light generating target 有权
标题翻译：紫外线发光靶，电子束激发紫外光源，以及紫外线发生靶的制造方法
公开(公告)号：US08895947B2
公开(公告)日：2014-11-25
申请号：US14113398
申请日：2012-04-24
申请人： Yoshinori Honda , Fumitsugu Fukuyo , Takashi Suzuki , Norio Ichikawa , Takeaki Hattori , Koji Kawai , Shucheng Chu
发明人： Yoshinori Honda , Fumitsugu Fukuyo , Takashi Suzuki , Norio Ichikawa , Takeaki Hattori , Koji Kawai , Shucheng Chu
IPC分类号： H01J63/06 , G01N21/53 , F21K2/00 , C09K11/77 , H01J63/04
CPC分类号： F21K2/00 , C09K11/7766 , H01J63/04 , H01J63/06
摘要： An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
摘要翻译：紫外线发生靶20包括由蓝宝石，石英或岩石晶体制成的基板21; 以及设置在基板21上的Pr：LuAG多晶膜22，其在接收电子束时产生紫外光。通过使用Pr：LuAG多晶体作为靶，与使用Pr：LuAG单晶膜时相比，紫外线发光效率可以更显着地提高。

2. 发明申请

US20140034853A1 ULTRAVIOLET LIGHT GENERATING TARGET, ELECTRON-BEAM-EXCITED ULTRAVIOLET LIGHT SOURCE, AND METHOD FOR PRODUCING ULTRAVIOLET LIGHT GENERATING TARGET 有权
标题翻译：超紫外光发生靶，电子束激光紫外光源，以及生产超紫外光发光靶的方法
公开(公告)号：US20140034853A1
公开(公告)日：2014-02-06
申请号：US14113398
申请日：2012-04-24
申请人： Yoshinori Honda , Fumitsugu Fukuyo , Takashi Suzuki , Norio Ichikawa , Takeaki Hattori , Koji Kawai , Shucheng Chu
发明人： Yoshinori Honda , Fumitsugu Fukuyo , Takashi Suzuki , Norio Ichikawa , Takeaki Hattori , Koji Kawai , Shucheng Chu
IPC分类号： F21K2/00
CPC分类号： F21K2/00 , C09K11/7766 , H01J63/04 , H01J63/06
摘要： An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
摘要翻译：紫外线发生靶20包括由蓝宝石，石英或岩石晶体制成的基板21; 以及设置在基板21上的Pr：LuAG多晶膜22，其在接收电子束时产生紫外光。通过使用Pr：LuAG多晶体作为靶，与使用Pr：LuAG单晶膜时相比，紫外线发光效率可以更显着地提高。

3. 发明申请

US20050140293A1 Light detecting sensor 失效
标题翻译：光检测传感器
公开(公告)号：US20050140293A1
公开(公告)日：2005-06-30
申请号：US10511086
申请日：2003-04-11
申请人： Tadashi Kitahara , Yoshiro Nomoto , Norio Ichikawa
发明人： Tadashi Kitahara , Yoshiro Nomoto , Norio Ichikawa
IPC分类号： G01J1/42 , H01J40/04 , H01J40/06
CPC分类号： G01J1/02 , G01J1/0204 , G01J1/0271 , G01J1/429 , H01J40/04
摘要： A substrate 18, a cathode 20 and an anode 22 are stored in a space demarcated by a casing 10, and the space is evacuated. The cathode 20 and the anode 22 are provided on the same surface of a substrate 18 having electric insulation, and have a comb-tooth shape so as to be mutually engaged. Therefore, the area of the part in which the cathode 20 and the anode 22 approach each other becomes larger, and thereby photoelectrons discharged from the cathode 20 through the incidence of ultraviolet rays are transmitted in the vacuum, and are favorably collected in the anode 22.
摘要翻译：衬底18，阴极20和阳极22存储在由壳体10划分的空间中，并且空间被抽空。阴极20和阳极22设置在具有电绝缘性的基板18的相同表面上，并且具有梳齿形状以相互接合。因此，阴极20和阳极22接近的部分的面积变大，从而通过紫外线的入射从阴极20排出的光电子在真空中传输，并且有利地收集在阳极22中。

4. 发明授权

US06877383B2 Capacitive type pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：US06877383B2
公开(公告)日：2005-04-12
申请号：US10247637
申请日：2002-09-20
申请人： Junichi Horie , Yasuo Onose , Norio Ichikawa , Seiji Kuryu , Satoshi Shimada , Akihiko Saito , Keiji Hanzawa , Masahiro Matsumoto , Hiroshi Moriya , Akio Yasukawa , Atsushi Miyazaki
发明人： Junichi Horie , Yasuo Onose , Norio Ichikawa , Seiji Kuryu , Satoshi Shimada , Akihiko Saito , Keiji Hanzawa , Masahiro Matsumoto , Hiroshi Moriya , Akio Yasukawa , Atsushi Miyazaki
IPC分类号： G01L9/00 , G01L9/12
CPC分类号： G01L9/0073
摘要： By sealing a diaphragm with less processes and lower cost and reducing deformation due to remaining stress, a stable and highly reliable pressure sensor construction is proposed. The pressure sensor is low in measurement error and small in floating capacitance and leakage current and good in characteristic. As a means to attain the above object, a polycrystalline silicon diaphragm is sealed with a silicon oxide film deposited through a LPCVD method and then completely covered. The diaphragm is placed on a surface of a semiconductor substrate with a nearly constant gap of 0.15 to 1.3 μm, and has difference-in-grade constructions of a deformation reducing means due to remaining stress.
摘要翻译：通过以较少的工艺密封隔膜，降低成本，减少由于剩余应力引起的变形，提出了一种稳定可靠的压力传感器结构。压力传感器测量误差小，浮动电容和漏电流小，特性好。作为实现上述目的的手段，用通过LPCVD方法沉积的氧化硅膜密封多晶硅隔膜，然后完全覆盖。隔膜被放置在半导体衬底的表面上，具有0.15-1.3μm的几乎恒定的间隙，并且由于剩余应力而具有变形减小装置的不同级别的构造。

5. 发明授权

US5676851A Method of making a capacitance type acceleration sensor 失效
标题翻译：制造电容式加速度传感器的方法
公开(公告)号：US5676851A
公开(公告)日：1997-10-14
申请号：US723875
申请日：1996-09-23
申请人： Masayoshi Suzuki , Takao Sasayama , Keizi Hanzawa , Norio Ichikawa , Junichi Horie , Yukiko Sugisawa , Yuuji Ogasawara
发明人： Masayoshi Suzuki , Takao Sasayama , Keizi Hanzawa , Norio Ichikawa , Junichi Horie , Yukiko Sugisawa , Yuuji Ogasawara
IPC分类号： G01P1/02 , G01P15/125 , B44C1/22 , H01L21/00
CPC分类号： G01P1/023 , G01P15/125 , G01P2015/0828
摘要： A capacitance acceleration sensor and method of making same are disclosed. A capacitance acceleration sensor includes a movable electrode etched from a silicon plate which is clamped between two solid dielectric plate members of glass, silicon oxides, or oxygen oxides. Static electrodes are secured to surfaces of the dielectric members facing opposite the movable electrode, thereby providing easy manufacturing assessibility for leadout wires from these electrodes. In certain embodiments, the movable electrode is formed integrally with a monocrystalline silicon plate member which also contains an integrated circuit for generating an output acceleration signal in response to movement of the movable electrode when the assembly experiences acceleration forces.
摘要翻译：公开了一种电容加速度传感器及其制造方法。电容加速度传感器包括从硅板蚀刻的可移动电极，其被夹在玻璃，氧化硅或氧化物的两个固体电介质板构件之间。静电极固定在与可动电极相对的电介质元件的表面上，从而为这些电极提供引出线的易制造评估。在某些实施例中，可移动电极与单晶硅板构件整体形成，该单晶硅板构件还包含用于当组件经受加速力时响应于可移动电极的移动而产生输出加速度信号的集成电路。

6. 发明授权

US5032248A Gas sensor for measuring air-fuel ratio and method of manufacturing the gas sensor 失效
标题翻译：用于测量空燃比的气体传感器和制造气体传感器的方法
公开(公告)号：US5032248A
公开(公告)日：1991-07-16
申请号：US362619
申请日：1989-06-07
申请人： Masatoshi Kanamaru , Takeshi Harada , Yoshiro Ibaraki , Sadayasu Ueno , Norio Ichikawa
发明人： Masatoshi Kanamaru , Takeshi Harada , Yoshiro Ibaraki , Sadayasu Ueno , Norio Ichikawa
IPC分类号： G01N27/407 , G01N27/416
CPC分类号： G01N27/4075 , G01N27/4077
摘要： The invention relates to a gas sensor for measuring an air-fuel ratio of an air-fuel mixture of an internal combustion engine and to a method of manufacturing the gas sensor. The sensor of the invention comprises: a solid state electrolyte layer made of an oxygen ion conductive metal oxide; a first electrode of a porous thin film having the catalyst function which was coated on one surface of the solid state electrolyte layer; a second electrode of a porous thin film having the catalyst function which was coated on the other surface of the solid state electrolyte layer; an electrode shielding layer made of a sintered material of ultra fine particulates whose average grain diameter is 1 .mu.m or less which covers the surface other than the region of a predetermined area of the second electrode; and a gas diffusion layer made of a porous electric insulative metal oxide which covers the region of the predetermined area of at least the second electrode.

7. 发明授权

US4200511A Device for electrochemically measuring the concentration of oxygen in combustion gases 失效
标题翻译：用于电化学测量燃烧气体中氧浓度的装置
公开(公告)号：US4200511A
公开(公告)日：1980-04-29
申请号：US909520
申请日：1978-05-25
申请人： Kanemasa Sato , Sadayasu Ueno , Norio Ichikawa
发明人： Kanemasa Sato , Sadayasu Ueno , Norio Ichikawa
IPC分类号： G01N27/409 , G01N27/403 , G01N27/407 , G01N27/416 , G01N27/46
CPC分类号： G01N27/4075 , G01N27/4062 , G01N27/407 , G01N27/4078
摘要： A first cylindrical member formed of an ion-conducting solid electrolyte is sealed at one end thereof by a discal plate and inserted at the other end thereof into an axial central bore, formed in a supporting member, in such a manner that the other end of the first cylindrical member is in airtight contact with an offset portion formed in an inner wall surface of the supporting member defining the axial central bore. The first cylindrical member has a first electrode formed on its inner wall surface and a second electrode formed on its outer wall surface. First and second conductors are formed at upper end portions of the first and second electrodes respectively. A second cylindrical member closed at its bottom and housing therein the first cylindrical member in enclosing relationship supports the latter at its bottom and is rigidly secured at its upper end to the supporting member. The second cylindrical member is formed in its wall with a multitude of openings for supplying combustion gases to the exterior of the first cylindrical member. A first terminal member formed therein with an axial central bore is fitted in the axial central bore in the supporting member, so that atmosphere is supplied through the axial central bore in the first terminal member to the interior of the first cylindrical member. A second terminal member formed of a platinum ribbon is connected to the second conductor.
摘要翻译：由离子导电固体电解质形成的第一圆柱形构件在其一端通过圆盘形板密封，并在其另一端插入形成在支撑构件中的轴向中心孔，使得另一端第一圆柱形构件与形成在限定轴向中心孔的支撑构件的内壁表面中的偏移部分气密接触。第一圆柱形构件具有形成在其内壁表面上的第一电极和形成在其外壁表面上的第二电极。第一和第二导体分别形成在第一和第二电极的上端部分。第二圆柱形构件在其底部封闭并且以封闭关系容纳第一圆柱形构件，其在其底部处支撑该第一圆柱形构件，并且在其上端刚性地固定到支撑构件。第二圆柱形构件在其壁上形成有用于将燃烧气体供应到第一圆柱形构件的外部的多个开口。在其中形成有轴向中心孔的第一端子构件装配在支撑构件中的轴向中心孔中，使得空气通过第一端子构件中的轴向中心孔供应到第一圆柱形构件的内部。由铂带形成的第二端子构件连接到第二导体。

8. 发明授权

US06564643B1 Capacitive pressure sensor 有权
标题翻译：电容式压力传感器
公开(公告)号：US06564643B1
公开(公告)日：2003-05-20
申请号：US09807325
申请日：2001-04-12
申请人： Junichi Horie , Atsushi Miyazaki , Satoshi Shimada , Akihiko Saitou , Yasuo Onose , Norio Ichikawa , Keiji Hanzawa
发明人： Junichi Horie , Atsushi Miyazaki , Satoshi Shimada , Akihiko Saitou , Yasuo Onose , Norio Ichikawa , Keiji Hanzawa
IPC分类号： G01L912
CPC分类号： G01L9/0073
摘要： A high-accuracy high-stability capacitor type pressure sensor which eliminates a parasitic capacitance between a reference capacitor and a semiconductor substrate. A capacitor type pressure sensor comprising, on a semiconductor substrate 10, an active capacitor 100 whose capacitance varies as the surrounding pressure varies, a reference capacitor 200 whose capacitance will not vary substantially as the surrounding pressure varies, and a circuit which is electrically connected to both said active and reference capacitors 100 and 200, detects the difference or ratio thereof, and uses the potential of a semiconductor substrate, wherein an electrode 30a of said reference capacitor is formed on the semiconductor substrate 10 with a dielectric 20 therebetween.
摘要翻译：一种消除参考电容器和半导体衬底之间的寄生电容的高精度高稳定性电容式压力传感器。一种电容式压力传感器，包括在半导体衬底10上的电容随着周围压力变化而变化的有源电容器100，其电容量不会随周围压力变化而变化不大的参考电容器200以及电连接到所述有源和参考电容器100和200都检测其差异或比例，并且使用半导体衬底的电位，其中所述参考电容器的电极30a形成在半导体衬底10上，其间具有电介质20。

9. 发明授权

US6051853A Semiconductor pressure sensor including reference capacitor on the same substrate 失效
标题翻译：半导体压力传感器包括在同一基板上的参考电容
公开(公告)号：US6051853A
公开(公告)日：2000-04-18
申请号：US943205
申请日：1997-10-03
申请人： Satoshi Shimada , Akihiko Saito , Masahiro Matsumoto , Seikou Suzuki , Terumi Nakazawa , Atsushi Miyazaki , Norio Ichikawa , Keiji Hanzawa
发明人： Satoshi Shimada , Akihiko Saito , Masahiro Matsumoto , Seikou Suzuki , Terumi Nakazawa , Atsushi Miyazaki , Norio Ichikawa , Keiji Hanzawa
IPC分类号： G01L9/00 , G01L19/04 , H01G7/00
CPC分类号： G01L9/0073 , G01L9/0042 , G01L9/125
摘要： A semiconductor pressure sensor utilizing electrostatic capacitance has a plurality of pressure sensing electrostatic capacitances and a reference electrostatic capacitance formed on one side of a silicon chip. As a movable electrode, the pressure sensing electrostatic capacitances each have a diaphragm, which may have a displacement portion composed of a central area thereof, and a peripheral portion which is more deformable than the central portion.
摘要翻译：利用静电电容的半导体压力传感器具有形成在硅芯片一侧的多个压力感测静电电容和基准静电电容。作为可动电极，压力感测静电电容各自具有隔膜，该膜片可以具有由其中心区域构成的位移部分和比中心部分更易变形的周边部分。

10. 发明授权

US5243861A Capacitive type semiconductor accelerometer 失效
标题翻译：电容式半导体加速度计
公开(公告)号：US5243861A
公开(公告)日：1993-09-14
申请号：US755838
申请日：1991-09-06
申请人： Benjamin Kloeck , Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto , Kazuo Sato , Akira Koide , Norio Ichikawa , Yukiko Kawai , Hiromichi Ebine
发明人： Benjamin Kloeck , Seiko Suzuki , Shigeki Tsuchitani , Masayuki Miki , Masahiro Matsumoto , Kazuo Sato , Akira Koide , Norio Ichikawa , Yukiko Kawai , Hiromichi Ebine
IPC分类号： B81B3/00 , B81B7/00 , G01P15/08 , G01P15/125
CPC分类号： B81B7/007 , G01P15/0802 , G01P15/125 , G01P2015/0828 , H01L2224/45144 , H01L2224/48463
摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.
摘要翻译：电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极，下玻璃板。

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