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1. 发明申请

US20120320367A1 INSPECTION METHOD AND DEVICE FOR SAME 审中-公开
标题翻译：检测方法和装置
公开(公告)号：US20120320367A1
公开(公告)日：2012-12-20
申请号：US13577287
申请日：2011-02-01
申请人： Yu Yanaka , Shigeru Serikawa , Kiyotaka Horie , Ryuta Suzuki
发明人： Yu Yanaka , Shigeru Serikawa , Kiyotaka Horie , Ryuta Suzuki
IPC分类号： G01J3/42
CPC分类号： G11B5/84 , G01N21/956 , G11B5/855
摘要： In order to rapidly inspect shape defects in the object of inspection that is the minute pattern on a magnetic recording medium formed from patterned media, in the disclosed patterned media defect inspection method detected spectral waveform data is compared with reference-standard spectral reflectance waveform data, which is stored in a database and the pattern-shape of which is known, and defects are detected. The type of the defects is determined on the basis of the disparity, for each detected wavelength, between the spectral waveform data of the detected defects, and the reference-standard spectral reflectance waveform data.
摘要翻译：为了快速检查在由图案化介质形成的磁记录介质上的微小图案的检查对象中的形状缺陷，将所公开的图案化介质缺陷检查方法检测的光谱波形数据与参考标准光谱反射率波形数据进行比较，其被存储在数据库中，其图案形状是已知的，并且检测到缺陷。基于检测到的缺陷的光谱波形数据与参考标准光谱反射率波形数据之间的每个检测波长的差异来确定缺陷的类型。

2. 发明授权

US08547545B2 Method and apparatus for inspecting a surface of a substrate 失效
标题翻译：用于检查基板表面的方法和装置
公开(公告)号：US08547545B2
公开(公告)日：2013-10-01
申请号：US13210418
申请日：2011-08-16
申请人： Hideaki Sasazawa , Takayuki Ishiguro , Kiyotaka Horie , Yu Yanaka
发明人： Hideaki Sasazawa , Takayuki Ishiguro , Kiyotaka Horie , Yu Yanaka
IPC分类号： G01N21/88 , G01N21/55 , G01N21/47
CPC分类号： G01N21/8851 , G01N21/95 , G01N2021/4711 , G01N2021/556 , G01N2021/8854 , G01N2021/8874
摘要： The present invention provides a method and apparatus for inspecting a surface of a substrate. The apparatus includes: a rotatable stage on which a substrate to be inspected is placed; an inspection optical system having an illumination light source for emitting light to a substrate placed on the stage and a detector for detecting light from the substrate which is irradiated with the light from the illumination light source; an A/D converter for amplifying and A/D converting signals output from the detector in the inspection optical system; and a defect detector for detecting defects in a surface of the substrate by processing signals output from the detector and converted by the A/D converter and classifying the defected defects. The defect detector extracts micro defects in the surface of the substrate by processing the signals output from the detector, and detects linear defects existing discretely in a linear region.
摘要翻译：本发明提供一种用于检查基板表面的方法和装置。该装置包括：可旋转台，放置待检查的基板; 具有用于向放置在载物台上的基板发光的照明光源的检查光学系统和用于检测来自基板的光的检测器，所述检测光照射来自照明光源的光; A / D转换器，用于放大和A / D转换检测光学系统中的检测器输出的信号; 以及缺陷检测器，用于通过处理从检测器输出并由A / D转换器转换并对缺陷缺陷进行分类的信号来检测基板的表面中的缺陷。缺陷检测器通过处理从检测器输出的信号来提取衬底表面的微缺陷，并检测线性区域中离散存在的线性缺陷。

3. 发明申请

US20130077092A1 SUBSTRATE SURFACE DEFECT INSPECTION METHOD AND INSPECTION DEVICE 审中-公开
标题翻译：基板表面缺陷检查方法和检查装置
公开(公告)号：US20130077092A1
公开(公告)日：2013-03-28
申请号：US13565833
申请日：2012-08-03
申请人： Hideaki SASAZAWA , Shigeru SERIKAWA , Kiyotaka HORIE , Yu YANAKA
发明人： Hideaki SASAZAWA , Shigeru SERIKAWA , Kiyotaka HORIE , Yu YANAKA
IPC分类号： G01N21/956
CPC分类号： G01N21/94 , G01N21/95
摘要： A substrate surface inspection device includes an inspection optical system irradiating at least one light onto a substrate, which is an inspection target and carried on a turnable stage, and having at least one detector detecting reflected or scattered light from the substrate, a detector processing the signals, which are outputted from the at least one detector and A/D converted, and detecting a defect on the substrate, an output calculator performing scattered light simulation on a defect detection model and estimating a plurality of detector outputs; and a classifier constructor constructing a classifier by mechanical learning of a rule base, wherein the classifier constructor is adapted to present collection of a necessary actual defect sample on the basis of the classifier obtained by scattered light simulation, and construct the classifier under necessary and sufficient conditions.
摘要翻译：基板表面检查装置包括检查光学系统，其将至少一个光照射到作为检查对象的基板上并承载在可转动台上，并且具有至少一个检测器，其检测来自基板的反射或散射光，检测器处理信号，其从所述至少一个检测器输出并进行A / D转换，并检测所述基板上的缺陷;输出计算器，对缺陷检测模型执行散射光模拟并估计多个检测器输出; 以及通过规则库的机械学习构建分类器的分类器构造器，其中分类器构造器适于基于通过散射光模拟获得的分类器来呈现必要的实际缺陷样本的收集，并且在必要且足够的情况下构建分类器条件。

4. 发明申请

US20120154798A1 METHOD AND APPARATUS FOR INSPECTING PATTERNED MEDIA DISK 失效
标题翻译：用于检查图形介质盘的方法和装置
公开(公告)号：US20120154798A1
公开(公告)日：2012-06-21
申请号：US13332598
申请日：2011-12-21
申请人： Ryuta SUZUKI , Yu YANAKA , Yu KUSAKA
发明人： Ryuta SUZUKI , Yu YANAKA , Yu KUSAKA
IPC分类号： G01N21/55
CPC分类号： G01N21/55 , G01N21/956
摘要： In an inspection apparatus that inspects both surfaces of a patterned media disk, to perform inspection while maintaining a high level of throughput, a patterned media disk inspection apparatus of the present invention includes an optical inspection unit, a table unit that includes plural substrate rotation drive units on which a substrate is mounted and rotated and rotates and conveys the substrates mounted on the substrate rotation drive units between a position at which the substrate is inspected by the optical inspection unit and a position at which the substrate is taken out and supplied, a substrate reversing unit, a cassette unit that accommodates substrates, and a substrate handling unit that takes out an uninspected substrate from the cassette unit and supplies the uninspected substrate to the table unit, and further stores a substrate, both surfaces of which have already been inspected, in the cassette unit.
摘要翻译：在检查图案化介质盘的两个表面的检查装置中，为了在保持高水平的生产量的同时执行检查，本发明的图案化介质盘检查装置包括光学检查单元，台部单元，其包括多个基板旋转驱动单元，其上安装和旋转基板并旋转并将安装在基板旋转驱动单元上的基板传送到由光学检查单元检查基板的位置和基板被取出和供应的位置之间; 基板反转单元，容纳基板的盒单元以及从盒单元取出未预期基板并将未预期基板提供到台单元的基板处理单元，并且还存储两个表面已被检查的基板，在盒式单元中。

5. 发明申请

US20100246356A1 DISK SURFACE DEFECT INSPECTION METHOD AND APPARATUS 审中-公开
标题翻译：磁盘表面缺陷检查方法和装置
公开(公告)号：US20100246356A1
公开(公告)日：2010-09-30
申请号：US12719598
申请日：2010-03-08
申请人： Bin Abdulrashid FARIZ , Yu YANAKA , Keiji KATO , Takayuki ISHIGURO , Shigeru SERIKAWA
发明人： Bin Abdulrashid FARIZ , Yu YANAKA , Keiji KATO , Takayuki ISHIGURO , Shigeru SERIKAWA
IPC分类号： G11B20/18
CPC分类号： G01N21/95 , G01N2021/4711 , G01N2021/887
摘要： The present invention provides a disk surface defect inspection method including: irradiating a laser beam from an oblique direction onto a disk surface being rotated; detecting intensities of a first light that is scattered with low-angle and a second light that is scattered with high-angle from minute concave and convex defects; determining that a defect is the minute convex defect if a ratio of the intensity of the first light to the intensity of the second light is constant; and determining that a defect is the minute concave defect if the ratio of the intensity of the first light to the intensity of the second light is changed.
摘要翻译：本发明提供了一种盘表面缺陷检查方法，包括：将激光束从倾斜方向照射到旋转的盘表面上; 检测由小角度散射的第一光的强度和从微小的凹凸缺陷以高角散射的第二光; 如果第一光的强度与第二光的强度的比率恒定，则确定缺陷是微小凸起缺陷; 并且如果第一光的强度与第二光的强度的比率改变，则确定缺陷是微凹陷缺陷。

6. 发明授权

US08605278B2 Method and apparatus for inspecting patterned media disk 失效
标题翻译：用于检查图案化介质盘的方法和装置
公开(公告)号：US08605278B2
公开(公告)日：2013-12-10
申请号：US13332598
申请日：2011-12-21
申请人： Ryuta Suzuki , Yu Yanaka , Yu Kusaka
发明人： Ryuta Suzuki , Yu Yanaka , Yu Kusaka
IPC分类号： G01N21/00
CPC分类号： G01N21/55 , G01N21/956
摘要： In an inspection apparatus that inspects both surfaces of a patterned media disk, to perform inspection while maintaining a high level of throughput, a patterned media disk inspection apparatus of the present invention includes an optical inspection unit, a table unit that includes plural substrate rotation drive units on which a substrate is mounted and rotated and rotates and conveys the substrates mounted on the substrate rotation drive units between a position at which the substrate is inspected by the optical inspection unit and a position at which the substrate is taken out and supplied, a substrate reversing unit, a cassette unit that accommodates substrates, and a substrate handling unit that takes out an uninspected substrate from the cassette unit and supplies the uninspected substrate to the table unit, and further stores a substrate, both surfaces of which have already been inspected, in the cassette unit.
摘要翻译：在检查图案化介质盘的两个表面的检查装置中，为了在保持高水平的生产量的同时执行检查，本发明的图案化介质盘检查装置包括光学检查单元，台部单元，其包括多个基板旋转驱动单元，其上安装和旋转基板并旋转并将安装在基板旋转驱动单元上的基板传送到由光学检查单元检查基板的位置和基板被取出和供应的位置之间; 基板反转单元，容纳基板的盒单元以及从盒单元取出未预期基板并将未预期基板提供到台单元的基板处理单元，并且还存储两个表面已被检查的基板，在盒式单元中。

7. 发明申请

US20120081701A1 METHOD AND APPARATUS FOR INSPECTING A SURFACE OF A SUBSTRATE 失效
标题翻译：用于检查基板表面的方法和装置
公开(公告)号：US20120081701A1
公开(公告)日：2012-04-05
申请号：US13210418
申请日：2011-08-16
申请人： Hideaki SASAZAWA , Takayuki ISHIGURO , Kiyotaka HORIE , Yu YANAKA
发明人： Hideaki SASAZAWA , Takayuki ISHIGURO , Kiyotaka HORIE , Yu YANAKA
IPC分类号： G01N21/88 , G01N21/55 , G01N21/47
CPC分类号： G01N21/8851 , G01N21/95 , G01N2021/4711 , G01N2021/556 , G01N2021/8854 , G01N2021/8874
摘要： The present invention provides a method and apparatus for inspecting a surface of a substrate. The apparatus includes: a rotatable stage on which a substrate to be inspected is placed; an inspection optical system having an illumination light source for emitting light to a substrate placed on the stage and a detector for detecting light from the substrate which is irradiated with the light from the illumination light source; an A/D converter for amplifying and A/D converting signals output from the detector in the inspection optical system; and a defect detector for detecting defects in a surface of the substrate by processing signals output from the detector and converted by the A/D converter and classifying the defected defects. The defect detector extracts micro defects in the surface of the substrate by processing the signals output from the detector, and detects linear defects existing discretely in a linear region.
摘要翻译：本发明提供一种用于检查基板表面的方法和装置。该装置包括：可旋转台，放置待检查的基板; 具有用于向放置在载物台上的基板发光的照明光源的检查光学系统和用于检测来自基板的光的检测器，所述检测器照射来自照明光源的光; A / D转换器，用于放大和A / D转换检测光学系统中的检测器输出的信号; 以及缺陷检测器，用于通过处理从检测器输出并由A / D转换器转换并对缺陷缺陷进行分类的信号来检测基板的表面中的缺陷。缺陷检测器通过处理从检测器输出的信号来提取衬底表面的微缺陷，并检测线性区域中离散存在的线性缺陷。

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