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1. 发明授权

US08781758B2 Optical inspection method and its apparatus 失效
标题翻译：光学检测方法及其装置
公开(公告)号：US08781758B2
公开(公告)日：2014-07-15
申请号：US13209555
申请日：2011-08-15
申请人： Shigeru Serikawa , Bin Abdulrashid Fariz , Keiji Kato
发明人： Shigeru Serikawa , Bin Abdulrashid Fariz , Keiji Kato
IPC分类号： G01N21/88 , G06F19/00 , G01N21/95 , G01N21/89 , G11B19/04
CPC分类号： G11B19/048 , G01N21/89 , G01N21/95
摘要： The present invention provides an optical inspection method capable of detecting a finer defect in the surface of a substrate, including the steps of: irradiating a surface of a sample which is rotating and continuously moving in one direction with illumination light which is incident in a direction obliquely to the sample surface; detecting an image of light formed by a forward scattering light around an optical axis of regular-reflection light while excluding the regular-reflection light from the sample surface irradiated with the illumination light; condensing and detecting lateral scattering light which scatters laterally from the sample surface with respect to an incidence direction of the illumination light; and processing a signal obtained by detecting the image of light formed by the forward scattering light and a signal obtained by condensing and detecting the lateral scattering light to extract a defect including a scratch defect.
摘要翻译：本发明提供一种能够检测基板表面更细的缺陷的光学检查方法，包括以下步骤：照射沿一个方向入射的照明光沿一个方向旋转并连续移动的样品的表面倾斜于样品表面; 检测由正射反射光的光轴周围的前向散射光形成的光的图像，同时排除来自照射光的样品表面的正反射光; 冷凝和检测相对于照明光的入射方向从样品表面横向散射的横向散射光; 并且处理通过检测由前向散射光形成的光的图像获得的信号和通过聚焦和检测横向散射光而获得的信号，以提取包括划痕缺陷的缺陷。

2. 发明申请

US20120046885A1 OPTICAL INSPECTION METHOD AND ITS APPARATUS 失效
标题翻译：光学检测方法及其设备
公开(公告)号：US20120046885A1
公开(公告)日：2012-02-23
申请号：US13209555
申请日：2011-08-15
申请人： Shigeru SERIKAWA , Bin Abdulrashid FARIZ , Keiji KATO
发明人： Shigeru SERIKAWA , Bin Abdulrashid FARIZ , Keiji KATO
IPC分类号： G01N21/88 , G06F19/00
CPC分类号： G11B19/048 , G01N21/89 , G01N21/95
摘要： The present invention provides an optical inspection method capable of detecting a finer defect in the surface of a substrate, including the steps of: irradiating a surface of a sample which is rotating and continuously moving in one direction with illumination light which is incident in a direction obliquely to the sample surface; detecting an image of light formed by a forward scattering light around an optical axis of regular-reflection light while excluding the regular-reflection light from the sample surface irradiated with the illumination light; condensing and detecting lateral scattering light which scatters laterally from the sample surface with respect to an incidence direction of the illumination light; and processing a signal obtained by detecting the image of light formed by the forward scattering light and a signal obtained by condensing and detecting the lateral scattering light to extract a defect including a scratch defect.
摘要翻译：本发明提供一种能够检测基板表面更细的缺陷的光学检查方法，包括以下步骤：照射沿一个方向入射的照明光沿一个方向旋转并连续移动的样品的表面倾斜于样品表面; 检测由正射反射光的光轴周围的前向散射光形成的光的图像，同时排除来自照射光的样品表面的正反射光; 冷凝和检测相对于照明光的入射方向从样品表面横向散射的横向散射光; 并且处理通过检测由前向散射光形成的光的图像获得的信号和通过聚焦和检测横向散射光而获得的信号，以提取包括划痕缺陷的缺陷。

3. 发明申请

US20100246356A1 DISK SURFACE DEFECT INSPECTION METHOD AND APPARATUS 审中-公开
标题翻译：磁盘表面缺陷检查方法和装置
公开(公告)号：US20100246356A1
公开(公告)日：2010-09-30
申请号：US12719598
申请日：2010-03-08
申请人： Bin Abdulrashid FARIZ , Yu YANAKA , Keiji KATO , Takayuki ISHIGURO , Shigeru SERIKAWA
发明人： Bin Abdulrashid FARIZ , Yu YANAKA , Keiji KATO , Takayuki ISHIGURO , Shigeru SERIKAWA
IPC分类号： G11B20/18
CPC分类号： G01N21/95 , G01N2021/4711 , G01N2021/887
摘要： The present invention provides a disk surface defect inspection method including: irradiating a laser beam from an oblique direction onto a disk surface being rotated; detecting intensities of a first light that is scattered with low-angle and a second light that is scattered with high-angle from minute concave and convex defects; determining that a defect is the minute convex defect if a ratio of the intensity of the first light to the intensity of the second light is constant; and determining that a defect is the minute concave defect if the ratio of the intensity of the first light to the intensity of the second light is changed.
摘要翻译：本发明提供了一种盘表面缺陷检查方法，包括：将激光束从倾斜方向照射到旋转的盘表面上; 检测由小角度散射的第一光的强度和从微小的凹凸缺陷以高角散射的第二光; 如果第一光的强度与第二光的强度的比率恒定，则确定缺陷是微小凸起缺陷; 并且如果第一光的强度与第二光的强度的比率改变，则确定缺陷是微凹陷缺陷。

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