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    • 10. 发明授权
    • Method for measuring fracture toughness of thin films
    • 测量薄膜断裂韧性的方法
    • US6053034A
    • 2000-04-25
    • US168570
    • 1998-10-09
    • Ting Y. TsuiYoung-Chang Joo
    • Ting Y. TsuiYoung-Chang Joo
    • G01N3/00G01N3/02G01N3/42G01Q60/24G01N3/48
    • G01Q60/366B82Y35/00G01N3/42G01N2203/0064G01N2203/0067G01N2203/027G01N2203/0282G01N2203/0286Y10S977/70Y10S977/856Y10S977/90
    • A nanoindentation apparatus is used to measure the in-plane fracture toughness of a thin film formed on a substrate. One or more notches are formed in the thin film. An indenter is applied to the thin film near the notch or notches and a load is applied to the indenter to force it into the thin film. Because the substrate is softer than the thin film, the indenter does not penetrate the thin film, but "sinks in" to the soft substrate. The sink in effect enhances the tensile strain and stress at the notch. In one embodiment, both the penetration of the indenter into the thin film and substrate and the load on the indenter are measured. When the thin film fractures at the notch or notches, the indenter sharply sinks into the substrate. The thin film fracture toughness is then calculated based on the value of the load and penetration at the point of fracture using either finite element analysis or an analytical model. In a second embodiment, the cross-section of the notch or notches is measured after removing the indenter which has formed an indentation in the thin film. The indenter acts as a crack extension force. The thin film fracture toughness is then calculated based upon the geometry of a crack tip at the tip of the notch and using finite element analysis, or an analytical model, such as a Crack Tip Opening Displacement (CTOD) method.
    • 纳米压痕装置用于测量在基板上形成的薄膜的面内断裂韧性。 在薄膜中形成一个或多个凹口。 将压头施加到缺口附近的薄膜或凹口,并将负载施加到压头以将其压入薄膜中。 由于衬底比薄膜柔软,所以压头不穿透薄膜,而是“沉入”到柔性衬底。 水槽有效地增强了缺口处的拉伸应变和应力。 在一个实施例中,测量压头到薄膜和基底的穿透以及压头上的载荷。 当薄膜在切口或凹口处断裂时,压头急剧下沉到基板中。 然后使用有限元分析或分析模型,基于负荷点和断裂点的穿透值计算薄膜断裂韧度。 在第二实施例中,在去除在薄膜中形成凹陷的压头之后,测量切口或切口的横截面。 压头作为裂纹扩展力。 然后基于缺口尖端处的裂纹尖端的几何形状和使用有限元分析或诸如裂纹尖端开口位移(CTOD)方法的分析模型来计算薄膜断裂韧度。