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1. 发明授权

US06261378B1 Substrate cleaning unit and cleaning method 失效
标题翻译：基材清洗装置和清洗方法
公开(公告)号：US06261378B1
公开(公告)日：2001-07-17
申请号：US09272314
申请日：1999-03-19
申请人： Hiroshi Hashimoto , Yoshitaka Matsuda , Norio Uchihira , Masaaki Yoshida , Fumio Satou
发明人： Hiroshi Hashimoto , Yoshitaka Matsuda , Norio Uchihira , Masaaki Yoshida , Fumio Satou
IPC分类号： B08B700
CPC分类号： H01L21/67051 , B05C11/08 , B08B1/008 , B08B1/04 , B08B3/02 , B08B2203/0288 , H01L21/67046 , Y10S134/902
摘要： A cleaning unit for cleaning a substrate is disclosed, that comprises a holding mechanism for rotatably and horizontally holding the substrate, a first traveling means for holding both sides of a cleaning mechanism having at least one cleaning member and for moving the cleaning mechanism in such a manner that the first traveling means is kept in parallel with the substrate held by the holding mechanism, and a second traveling means for holding both sides of a processing solution supplying mechanism having supplying mechanisms for supplying different types of processing solution and for moving the cleaning mechanism in such a manner that the second traveling means is kept in parallel with the substrate held by the holding mechanism. Thus, the strength of the cleaning unit according to the present invention is higher than the strength of a conventional cleaning unit that holds an arm on one side thereof. In addition, a process of a cleaning mechanism and a process of a supplying mechanism can be equally performed on the entire surface of the substrate.
摘要翻译：公开了一种用于清洁基板的清洁单元，其包括用于可旋转和水平地保持基板的保持机构，用于保持具有至少一个清洁构件的清洁机构的两侧的第一行进装置，以及用于将清洁机构第一行进装置与由保持机构保持的基板保持平行的方式，以及用于保持处理液供给机构的两侧的第二行进装置，该处理液供给机构具有用于供给不同类型的处理液的供给机构和用于移动清洁机构使得第二行进装置与由保持机构保持的基板保持平行。因此，根据本发明的清洁单元的强度高于在其一侧保持臂的常规清洁单元的强度。此外，可以在基板的整个表面上同样进行清洁机构的处理和供给机构的处理。

2. 发明授权

US06398879B1 Method and apparatus for cleaning treatment 失效
公开(公告)号：US06398879B1
公开(公告)日：2002-06-04
申请号：US09686823
申请日：2000-10-12
申请人： Fumio Satou , Mitsuhiro Sakai , Takeshi Tsukamoto , Yoichi Honda , Kiyomitsu Yamaguchi , Kimio Motoda , Yoshitaka Matsuda
发明人： Fumio Satou , Mitsuhiro Sakai , Takeshi Tsukamoto , Yoichi Honda , Kiyomitsu Yamaguchi , Kimio Motoda , Yoshitaka Matsuda
IPC分类号： B08B302
CPC分类号： B05C11/08 , Y10S134/902
摘要： An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.

3. 发明授权

US6159288A Method and apparatus for cleaning treatment 失效
公开(公告)号：US6159288A
公开(公告)日：2000-12-12
申请号：US935917
申请日：1997-09-23
申请人： Fumio Satou , Mitsuhiro Sakai , Takeshi Tsukamoto , Yoichi Honda , Kiyomitsu Yamaguchi , Kimio Motoda , Yoshitaka Matsuda , Tetsuya Sada , Kiyohisa Tateyama
发明人： Fumio Satou , Mitsuhiro Sakai , Takeshi Tsukamoto , Yoichi Honda , Kiyomitsu Yamaguchi , Kimio Motoda , Yoshitaka Matsuda , Tetsuya Sada , Kiyohisa Tateyama
IPC分类号： B05C11/08 , B05C9/06 , B05C11/00
CPC分类号： B05C11/08 , Y10S134/902
摘要： An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.

4. 发明授权

US5395003A Covered airtight container 失效
标题翻译：覆盖密封容器
公开(公告)号：US5395003A
公开(公告)日：1995-03-07
申请号：US177268
申请日：1994-01-04
申请人： Yoshitaka Matsuda
发明人： Yoshitaka Matsuda
IPC分类号： B65D17/34 , B65D43/02
CPC分类号： B65D43/026 , B65D2101/0038 , B65D2543/00092 , B65D2543/00101 , B65D2543/00296 , B65D2543/00509 , B65D2543/00537 , B65D2543/00555 , B65D2543/00629 , B65D2543/00685 , B65D2543/00731 , B65D2543/00796 , B65D2543/00842 , B65D2543/0099
摘要： A covered airtight container capable of preventing a soup from leaking therefrom. The covered airtight container comprises a body made of hard plastics and a cover made of soft plastics wherein the cover has a reverse channel-shaped edge portion piece formed by bending the upper end edge thereof upward and reversing it downward so as to cover the upper end portion of the body. The body has an annular stepped portion to which the cover is retained at the inner peripheral surface of the upper end portion of the peripheral wall. The cover has an annularly projected fin for elastically contacting the edge of said annular stepped portion. The covered airtight container may be formed square shaped with circumferential surfaces of the body and cover being slightly curved shape close to a circle. Particularly, the leaking prevention effect can be conspicuous since the sealing effect or state is assured at the inner and outer surfaces of the peripheral wall of the body. Even if the edge portion piece is pulled off after the cover is open so that the vertical double annular projection of the body is disengaged from the vertical annular grooves, the soup is prevented from leaking because of the annular fin of the cover. As a result, the container can be used even after the cover is open. When the covered airtight container is formed square shaped while the circumferential surfaces of the body and cover are formed in a curved shape, it does not occupy much space during transportation or the keeping thereof and the end of the edge portion piece of the cover can be cut off along the upper annular groove, which is very convenient for handling.
摘要翻译：一种能够防止汤从其中泄漏的被覆盖的密封容器。覆盖的密封容器包括由硬塑料制成的主体和由软塑料制成的盖，其中盖具有通过向上弯曲其上端边缘并向下反向而形成的反向通道形边缘部分，以覆盖上端身体的一部分。主体具有环状的阶梯部，盖部保持在周壁的上端部的内周面。盖具有环形突出的翅片，用于弹性地接触所述环形台阶部分的边缘。覆盖的密封容器可以形成为正方形，其具有身体的周向表面，并且盖子稍微弯曲形状接近圆形。特别地，由于在本体的周壁的内表面和外表面上确保了密封效果或状态，因此防漏效果显着。即使在盖打开之后边缘部分被拉下，使得主体的垂直双环形突起与垂直环形槽脱离，由于盖的环形翅片防止了汤泄漏。结果，即使在盖打开之后也可以使用容器。当被覆盖的气密容器形成为正方形，同时本体和盖的圆周表面形成为弯曲形状时，其在运输或保持期间不占据空间，盖的边缘部分的端部可以是沿着上环形槽切断，这对于处理非常方便。

5. 发明申请

US20070278317A1 Mini Card Adapter 失效
标题翻译：迷你卡适配器
公开(公告)号：US20070278317A1
公开(公告)日：2007-12-06
申请号：US10598762
申请日：2005-03-10
申请人： Masayoshi Onishi , Yasuaki Wakizaka , Yoshitaka Matsuda , Koichi Ozaki
发明人： Masayoshi Onishi , Yasuaki Wakizaka , Yoshitaka Matsuda , Koichi Ozaki
IPC分类号： G06K21/06
CPC分类号： G06K19/07739 , G06K19/07
摘要： A mini card adapter for removably holding and fixing a mini card in a secure manner is provided. The mini card adapter holds a mini card having the same thickness as the standard card and outline dimensions smaller than those of the standard card. The mini card comprises a reference wall 8 having the same thickness as the standard card and a bulging section 9 formed on the top surface of the reference wall 8. In the reference wall 8, a card pocket 10 for is formed for loading therein the mini card 1. The land section 9 is formed in a region Z corresponding to the emboss section of the standard card, and a part of the land section 9 bulges over the card pocket 10. As a result, an eaves wall 15 for supporting one side of the mini card 1 is formed. The eaves wall 15 has a boss 16 which fits in a hole 3 formed in the mini card 1. A receiving nail 17 for receiving the periphery of the mini card 1 in corporation with the eaves wall 15 is provided on the peripheral lower surface of the card pocket 10.
摘要翻译：提供了一种用于以可靠方式可拆卸地固定和固定微型卡的微型卡适配器。迷你卡适配器容纳具有与标准卡相同厚度的小型卡，并且外形尺寸小于标准卡的尺寸。迷你卡包括具有与标准卡相同厚度的参考壁8和形成在参考壁8的顶表面上的凸起部分9。在参考壁8中，形成有用于在其中装载迷你卡1的卡槽10。陆部9形成在与标准卡的压花部对应的区域Z中，陆部9的一部分在卡袋10上方隆起。结果，形成了用于支撑小型卡1的一侧的檐壁15。檐壁15具有嵌合在形成在小型卡1中的孔3中的凸台16。在卡片袋10的周边下表面上设置有用于接收迷你卡1的外围与檐壁15一起的接收钉17。

6. 发明授权

US5945161A Apparatus and method for supplying process solution to surface of substrate to be processed 失效
标题翻译：将处理液供给到待处理基板的表面的装置和方法
公开(公告)号：US5945161A
公开(公告)日：1999-08-31
申请号：US993021
申请日：1997-12-18
申请人： Hiroshi Hashimoto , Kiyohisa Tateyama , Kiyomitsu Yamaguchi , Yoshitaka Matsuda , Norio Uchihira , Mitsuhiro Sakai , Fumio Satou
发明人： Hiroshi Hashimoto , Kiyohisa Tateyama , Kiyomitsu Yamaguchi , Yoshitaka Matsuda , Norio Uchihira , Mitsuhiro Sakai , Fumio Satou
IPC分类号： B05C11/08 , B05D1/00 , H01L21/00 , B05D3/12
CPC分类号： H01L21/6715 , B05C11/08 , B05D1/005
摘要： Disclosed is a processing apparatus comprising holding means, support means, process solution supply means, life means, and rotating means. A substrate to be processed is rotatably held by the holding means. An overhanging portion of the substrate extending over an edge of the holding means is supported by the support means to maintain a front surface of the substrate horizontally flat. A process solution is supplied from the process solution supply means onto the front surface of the substrate held by the holding means and supported by the support means. The substrate held by the holding means is vertically moved by the lift means relative to the support means. Further, the substrate moved upward relative to the support means is rotated by the rotating means.
摘要翻译：公开了一种处理装置，包括保持装置，支撑装置，处理液供给装置，寿命装置和旋转装置。待加工的基板被保持装置可旋转地保持。在保持装置的边缘上延伸的衬底的悬伸部分被支撑装置支撑，以使衬底的前表面水平地保持平坦。处理液从处理液供给装置供给到由保持装置保持的基板的前表面上并由支撑装置支撑。由保持装置保持的基板通过提升装置相对于支撑装置垂直移动。此外，相对于支撑装置向上移动的基板由旋转装置旋转。

7. 发明授权

US5906860A Apparatus for treating a substrate with resist and resist-treating method 失效
标题翻译：用抗蚀剂和抗蚀剂处理方法处理基材的设备
公开(公告)号：US5906860A
公开(公告)日：1999-05-25
申请号：US832816
申请日：1997-04-04
申请人： Kimio Motoda , Kiyomitsu Yamaguchi , Yoshitaka Matsuda , Tetsu Kawasaki
发明人： Kimio Motoda , Kiyomitsu Yamaguchi , Yoshitaka Matsuda , Tetsu Kawasaki
IPC分类号： B05C11/08 , G03F7/16 , H01L21/00 , H01L21/683 , B05D3/12 , B05C11/02
CPC分类号： H01L21/6715 , B05C11/08 , G03F7/162 , H01L21/6838
摘要： The invention provides an apparatus for treating a substrate with resist, comprising a spin chuck for horizontally holding a substrate, a first motor for variably rotating the spin chuck, a nozzle for applying resist solution onto the upper surface of the substrate held on the spin chuck, a cup having an upper opening through which the substrate is put in or taken out of the cup and a lower opening through which extends the driving shaft of the spin chuck, the cup positioned to surround the substrate held on the spin chuck to receive liquid centrifugally separated from the substrate which is rotated about its axis, a lid to close the upper opening of the cup to define a space around the substrate, a second motor for variably rotating the cup independently of the spin chuck rotation, a liftable cylinder for relatively moving at least one of the spin chuck and cup, which are positioned apart from each other, toward each other to achieve mutual contact, and an O-ring for hermetically sealing the mutual contact portion between the cup and spin chuck when these cup and spin chuck are brought into mutual contact by the liftable cylinder. When the cup and spin chuck are brought into mutual contact by the liftable cylinder, the lower opening of the cup is closed by the spin chuck to form a hermetic space. The spin chuck and cup are rotated in synchronism by first and second motors while the chamber is kept hermetically closed.
摘要翻译：本发明提供了一种用抗蚀剂处理基板的装置，包括用于水平地保持基板的旋转卡盘，用于可变地旋转旋转卡盘的第一马达，用于将抗蚀剂溶液施加到保持在旋转卡盘上的基板的上表面上的喷嘴具有上部开口的杯子，衬底通过该开口被放入或从杯子中取出，以及下部开口，其通过旋转卡盘的驱动轴延伸，杯子定位成围绕保持在旋转卡盘上的衬底以接收液体与围绕其轴线旋转的基板离心分离，盖以封闭杯的上部开口以限定基板周围的空间，用于独立于旋转卡盘旋转可变地旋转杯的第二马达，用于相对地将彼此分开定位的旋转卡盘和杯中的至少一个彼此移动以实现相互接触，以及用于气密密封的O形环当这些杯和旋转卡盘通过可升降缸相互接触时，杯和旋转卡盘之间的相互接触部分。当杯和旋转卡盘通过可升降缸相互接触时，杯的下开口被旋转卡盘封闭以形成密封空间。旋转卡盘和杯子由第一和第二马达同步旋转，同时气室保持密闭。

8. 发明授权

US5338143A Car storage apparatus for car carrier 失效
标题翻译：汽车载具车载存储装置
公开(公告)号：US5338143A
公开(公告)日：1994-08-16
申请号：US913954
申请日：1992-07-17
申请人： Yoshitaka Matsuda , Koichi Kondo , Shuhei Kuribayashi , Akiko Noda , Takuya Nakashima , Ryutaro Saito , Kae Tsuji , Hideo Mori , Yoshinori Mori
发明人： Yoshitaka Matsuda , Koichi Kondo , Shuhei Kuribayashi , Akiko Noda , Takuya Nakashima , Ryutaro Saito , Kae Tsuji , Hideo Mori , Yoshinori Mori
IPC分类号： B63B25/00 , B63B25/20 , E04H6/18 , B63B27/00
CPC分类号： E04H6/182 , B63B25/002 , B63B25/20
摘要： This invention relates to a car storage apparatus in a car carrier having a plurality of stages of car storage decks. The car storage apparatus comprises a car loading port installed at the ship side on one of the decks, a loading/unloading berth extending from the loading port into the ship, elevator shafts extending vertically through the car storage decks, a lifter which is disposed in each elevator shaft and moves up and down with a car being mounted thereon, and conveyors which are installed on the loading/unloading berth, lifters, and car storage decks for transferring a car between them.
摘要翻译：本发明涉及一种具有多级轿厢存放甲板的轿厢内的汽车存放装置。该汽车存放装置包括：装载在其中一个甲板上的船侧的轿厢装载口，从装载口延伸到船上的装卸台;垂直延伸穿过轿厢存放甲板的电梯井;升降机，每个升降机竖井和其上安装的汽车上下移动;以及输送机，其安装在装载/卸载泊位，升降器和汽车储藏甲板上，用于在它们之间转移汽车。

9. 发明授权

US07673805B2 Mini card adapter 失效
标题翻译：迷你卡适配器
公开(公告)号：US07673805B2
公开(公告)日：2010-03-09
申请号：US10598762
申请日：2005-03-10
申请人： Masayoshi Onishi , Yasuaki Wakizaka , Yoshitaka Matsuda , Koichi Ozaki
发明人： Masayoshi Onishi , Yasuaki Wakizaka , Yoshitaka Matsuda , Koichi Ozaki
IPC分类号： G06K21/00
CPC分类号： G06K19/07739 , G06K19/07
摘要： A mini card adapter for removably holding and fixing a mini card in a secure manner is provided. The mini card adapter holds a mini card having the same thickness as the standard card and outline dimensions smaller than those of the standard card. The mini card comprises a reference wall having the same thickness as the standard card and a bulging section formed on the top surface of the reference wall. In the reference wall, a card pocket for is formed for loading therein the mini card. The land section is formed in a region corresponding to the emboss section of the standard card, and a part of the land section bulges over the card pocket. As a result, an eaves wall for supporting one side of the mini card is formed. The eaves wall has a boss which fits in a hole formed in the mini card. A receiving nail for receiving the periphery of the mini card in corporation with the eaves wall is provided on the peripheral lower surface of the card pocket.
摘要翻译：提供了一种用于以可靠方式可拆卸地固定和固定微型卡的微型卡适配器。迷你卡适配器容纳具有与标准卡相同厚度的小型卡，并且外形尺寸小于标准卡的尺寸。迷你卡包括具有与标准卡相同厚度的参考壁和形成在参考壁顶表面上的凸起部分。在参考壁中，形成用于在其中装载迷你卡的卡袋。地面部形成在与标准卡的压花部对应的区域中，并且陆部的一部分在卡袋上凸出。结果，形成了用于支撑迷你卡的一侧的檐壁。屋檐墙上有一个装在迷你卡上形成的一个孔的老板。在卡槽的周边下表面上设置有用于接收与檐壁一起的迷你卡的周边的接收钉。

10. 发明授权

US06451515B2 Substrate treating method 失效
公开(公告)号：US06451515B2
公开(公告)日：2002-09-17
申请号：US09366960
申请日：1999-08-04
申请人： Hideyuki Takamori , Kiyohisa Tateyama , Kengo Mizosaki , Noriyuki Anai , Yoshitaka Matsuda
发明人： Hideyuki Takamori , Kiyohisa Tateyama , Kengo Mizosaki , Noriyuki Anai , Yoshitaka Matsuda
IPC分类号： G03F738
CPC分类号： B05D3/0209 , B05D1/005 , G03F7/168
摘要： A substrate coated with a coating solution, for example, a resist solution is heated at a predetermined temperature, thereafter putted in a non-heated state, and then heated at a second predetermined temperature. Alternatively, a heating process in which a substrate coated with a resist solution is heated and a non-heated process in which the substrate is putted in a non-heated state are repeated a plurality of times. The adoption of the above treating methods can prevent the occurrence of transfer which is an index of ununiformity of film thickness of a resist solution and the like and change in line width of a circuit pattern, thus improving yield in substrate treatment.

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