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1. 发明授权

US08519368B2 Method and device for generating EUV radiation or soft X-rays 有权
标题翻译：用于产生EUV辐射或软X射线的方法和装置
公开(公告)号：US08519368B2
公开(公告)日：2013-08-27
申请号：US13054807
申请日：2009-07-21
申请人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
发明人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.
摘要翻译：本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气态介质中点燃，其中所述气体介质至少部分地由施加到在放电空间中移动的表面的液体材料（6）产生，至少部分被一个或几个脉冲能量束蒸发。在所提出的方法和装置中，所述脉冲能量束的脉冲（9）相对于所述表面的移动方向指向至少两个不同的横向位置。通过这种措施，辐射发射体积扩大，对空间波动的敏感性较低，可以更好地适应任何应用的光学系统的要求。此外，可以通过该措施来增加光输出功率。

2. 发明授权

US08227777B2 Method and apparatus for operating an electrical discharge device 失效
标题翻译：用于操作放电装置的方法和装置
公开(公告)号：US08227777B2
公开(公告)日：2012-07-24
申请号：US11720638
申请日：2005-11-29
申请人： Michael Loeken , Jakob Willi Neff , Juergen Klein , Sven Probst
发明人： Michael Loeken , Jakob Willi Neff , Juergen Klein , Sven Probst
IPC分类号： A61N2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： The present invention relates to a method of operating an electrical discharge device (12) comprising at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, which electrodes are electrically connected to a power supply (18) and, upon ignition of a first gas discharge (22) between the electrodes (14, 16), transmit an electrical current (I), as a result of which a plasma (24) is produced in a working gas (26), which plasma emits radiation (28), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle (30) into a chamber (32) outside the electrodes (14, 16). In order to prevent erosion at the electrodes (14, 16), it is proposed that the formation of a secondary plasma (34) in the chamber (32) is suppressed by a device (42).
摘要翻译：本发明涉及一种操作放电装置（12）的方法，该放电装置包括至少一个第一电极（14）和至少一个第二电极（16），该电极与电源（18）电连接），并且在点燃电极（14,16）之间的第一气体放电（22）时，传输电流（I），结果在工作气体（26）中产生等离子体（24），该等离子体发射辐射（28），特别是经由立体角（30）通过电极（14,16）外部的室（32）中的极紫外和/或软X射线辐射。为了防止电极（14,16）的侵蚀，建议通过装置（42）抑制在室（32）中形成二级等离子体（34）。

3. 发明授权

US07897948B2 EUV plasma discharge lamp with conveyor belt electrodes 有权
标题翻译： EUV等离子放电灯带传送带电极
公开(公告)号：US07897948B2
公开(公告)日：2011-03-01
申请号：US12439696
申请日：2007-08-29
申请人： Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
发明人： Jeroen Jonkers , Jakob Willi Neff , Ralf Pruemmer
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a plasma discharge lamp for generating EUV radiation and/or soft X-rays by means of an electrically operated discharge. The proposed lamp comprises at least two electrodes arranged in a discharge space at a distance from one another to form a gap which allows the ignition of a plasma (14) in a gaseous medium between said electrodes. A metal applying device applies a metal to a surface of said electrodes. The electrodes are formed of conveyer belts (15) driven to transport the metal to said gap, wherein for each of the electrodes a shaper element (13) is provided at the gap to ensure a proper form and distance of the electrodes at the gap. An energy beam device (4) is adapted to direct an energy beam onto at least one of said surfaces in the gap evaporating said applied metal at least partially thereby producing said gaseous medium. With the proposed plasma discharge lamp high input powers can be achieved at a compact design of the lamp.
摘要翻译：本发明涉及一种用于通过电动放电产生EUV辐射和/或软X射线的等离子体放电灯。所提出的灯包括布置在彼此间隔一定距离的放电空间中的至少两个电极，以形成允许在所述电极之间的气态介质中的等离子体（14）点火的间隙。金属施加装置将金属施加到所述电极的表面。电极由驱动以将金属输送到所述间隙的输送带（15）形成，其中对于每个电极，在间隙处设置成形元件（13），以确保电极在间隙处的适当形式和距离。能量束装置（4）适于将能量束引导到间隙中的至少一个所述表面中，至少部分地蒸发所述施加的金属，从而产生所述气体介质。利用所提出的等离子体放电灯，可以在灯的紧凑设计下实现高输入功率。

4. 发明申请

US20100264336A1 GAS DISCHARGE SOURCE, IN PARTICULAR FOR EUV-RADIATION 有权
标题翻译：气体排放源，特别是EUV辐射
公开(公告)号：US20100264336A1
公开(公告)日：2010-10-21
申请号：US12747520
申请日：2008-12-16
申请人： Jakob Willi Neff
发明人： Jakob Willi Neff
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a gas discharge source, for generating EUV radiation and/or soft X-radiation, comprising at least two electrode bodies (110,120), of which a first electrode body (110) comprises a rotatably mounted electrode disk (100). The source further comprises a rotary drive (130) for the electrode disk, a device for applying a liquid film of a target material (140) onto a radial outer surface of the electrode disk (100), and a laser that is focussed, within a discharge area (240), onto the radial outer surface of the electrode disk (100) to evaporate target material. The source is characterized by an intermediate space (160) is formed between the electrode bodies, which intermediate space has a reduced width of
摘要翻译：本发明涉及一种用于产生EUV辐射和/或软X射线的气体放电源，其包括至少两个电极体（110,120），其中第一电极体（110）包括可旋转地安装的电极盘（100）。该源还包括用于电极盘的旋转驱动器（130），用于将目标材料（140）的液膜施加到电极盘（100）的径向外表面上的装置，以及聚焦在该电极盘放电区域（240）放置在电极盘（100）的径向外表面上以蒸发目标材料。该源的特征在于在电极体之间形成中间空间（160），该中间空间在放电区域（240）的外侧具有小于放电区域的中间空间的小于5mm的宽度。该源使得能够以简单的方式通过更大的立体角发射所产生的辐射，而不被电极遮蔽。

5. 发明授权

US07518300B2 Method and device for the generation of a plasma through electric discharge in a discharge space 有权
标题翻译：用于通过放电空间中的放电产生等离子体的方法和装置
公开(公告)号：US07518300B2
公开(公告)日：2009-04-14
申请号：US10548243
申请日：2004-03-05
申请人： Eric Gerardus Theodoor Bosch , Jeroen Jonkers , Willi Neff , Günther Hans Derra
发明人： Eric Gerardus Theodoor Bosch , Jeroen Jonkers , Willi Neff , Günther Hans Derra
IPC分类号： H01J17/26
CPC分类号： H05G2/003 , H05G2/005 , H05H1/48
摘要： The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate (38) is provided at least at the evaporation spot, the boiling point of said sacrificial suvstrate (38) during discharge operation lying below the melting point of the carrier material (30), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate (38).
摘要翻译：本发明涉及一种用于在放电空间中通过放电产生等离子体的方法和装置，其包含至少两个电极，其中至少一个电极由基质材料或载体材料构成，使得易受侵蚀至少由电流形成具有蒸发点的区域。为了呈现通过放电产生等离子体的方法或装置，建议至少在蒸发点处提供牺牲衬底（38），在放电操作期间所述牺牲衬套（38）的沸点位于低于载体材料（30）的熔点，使得在电流中产生的电荷载体主要从牺牲衬底（38）产生。

6. 发明授权

US06269631B1 Process and device for operating an internal combustion engine with less pollutant emission 失效
标题翻译：运行污染物排放较少的内燃机的工艺和装置
公开(公告)号：US06269631B1
公开(公告)日：2001-08-07
申请号：US09214443
申请日：1999-04-14
申请人： Willi Neff , Klaus Pochner , Gerhard Lepperhoff , Georg Lütkemeyer
发明人： Willi Neff , Klaus Pochner , Gerhard Lepperhoff , Georg Lütkemeyer
IPC分类号： F01N300
CPC分类号： F01N3/0892 , B01D53/32 , F01N3/2882
摘要： Process and device for operating an internal combustion engine with less pollutant emission, whose exhaust gas is subjected to an electrical aftertreatment during engine operation to convert pollutants, the emissions of which are measured. To improve a process with the features mentioned initially, so that on the one hand the desired reduction of emissions of the internal combustion engine is achieved during its entire time of operation, but on the other hand so that the design of the electrical system of the internal combustion engine does not have to be unreasonably large and thus costly, the electrical aftertreatment of the exhaust gas occurs only during the portion of the operating time during which emission peaks occur.
摘要翻译：用于操作污染物排放较少的内燃机的过程和装置，其排气在发动机运行期间经受电后处理以转化污染物，其排放被测量。为了改进具有最初提及的特征的过程，一方面，在其整个操作过程中实现期望的内燃机排放量的减少，但另一方面，内燃机的电气系统的设计不必是不合理地大而且因此成本高，排气的电后处理仅在发生峰值的部分操作时间内发生。

7. 发明授权

US5023897A Device for generating X-radiation with a plasma source 失效
标题翻译：用等离子体源产生X射线的装置
公开(公告)号：US5023897A
公开(公告)日：1991-06-11
申请号：US568193
申请日：1990-08-16
申请人： Willi Neff , Raymond Holz , Rainer Lebert , Franz Richter
发明人： Willi Neff , Raymond Holz , Rainer Lebert , Franz Richter
IPC分类号： H05H1/48 , G03F7/20 , H05G2/00 , H05H1/24
CPC分类号： H05G2/003 , G03F7/70033 , H05H1/52
摘要： The invention is an improvement in a device for generating X-radiation with a plasma source. In the device, two concentric cylindrical electrodes (11, 12) are separated by an evacuated discharge space (13) filled with low-pressure gas. When the inner electrode is momentarily raised to an extremely high voltage, the gas is ionized and a plasma shock wave (17, 17') is created and compressed into a plasma focus (21) emitting X-radiation (20). The improvement introduces a first ("discharge") gas into the discharge space for initiation of the plasma, while introducing a second ("emitting") gas into the inner electrode for generating the X-radiation in the plasma focus. Special features of the improved device include a plurality of gas extraction ports, which can be used independently or together, and which can be combined with variations in the introduction and flow of the two gases to control the movement and intermixture of the gases and, thereby, the operation of the device. Also, the device introduces a third gas for improving the transmission of the X-radiation from the generating plasma focus to a work station for X-ray microscopy or for X-ray lithography.
摘要翻译：本发明是用于产生具有等离子体源的X射线的装置的改进。在该装置中，两个同心圆柱形电极（11,12）由填充有低压气体的抽空放电空间（13）分开。当内部电极瞬间升高到极高的电压时，气体被离子化，产生等离子体冲击波（17,17'）并压缩成发射X射线的等离子体焦点（21）（20）。该改进将第一（“放电”）气体引入到放电空间中以引发等离子体，同时将第二（“发射”）气体引入内部电极中，以在等离子体焦点中产生X射线。改进的装置的特征包括多个气体提取口，其可以独立地或一起使用，并且可以与两种气体的引入和流动的变化相结合以控制气体的运动和混合，从而，设备的操作。此外，该装置引入第三气体，用于改善从产生等离子体焦点的X射线的透射到用于X射线显微镜或X射线光刻的工作站。

8. 发明授权

US08227779B2 Gas discharge source for generating EUV-radiation 有权
标题翻译：用于产生EUV辐射的气体放电源
公开(公告)号：US08227779B2
公开(公告)日：2012-07-24
申请号：US12747520
申请日：2008-12-16
申请人： Jakob Willi Neff
发明人： Jakob Willi Neff
IPC分类号： H05G2/00
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a gas discharge source, for generating EUV radiation and/or soft X-radiation, comprising at least two electrode bodies (110,120), of which a first electrode body (110) comprises a rotatably mounted electrode disk (100). The source further comprises a rotary drive (130) for the electrode disk, a device for applying a liquid film of a target material (140) onto a radial outer surface of the electrode disk (100), and a laser that is focussed, within a discharge area (240), onto the radial outer surface of the electrode disk (100) to evaporate target material. The source is characterized by an intermediate space (160) is formed between the electrode bodies, which intermediate space has a reduced width of
摘要翻译：本发明涉及一种用于产生EUV辐射和/或软X射线的气体放电源，其包括至少两个电极体（110,120），其中第一电极体（110）包括可旋转地安装的电极盘（100）。该源还包括用于电极盘的旋转驱动器（130），用于将目标材料（140）的液膜施加到电极盘（100）的径向外表面上的装置，以及聚焦在该电极盘放电区域（240）放置在电极盘（100）的径向外表面上以蒸发目标材料。该源的特征在于在电极体之间形成中间空间（160），该中间空间在放电区域（240）的外侧具有小于放电区域的中间空间的小于5mm的宽度。该源使得能够以简单的方式通过更大的立体角发射所产生的辐射，而不被电极遮蔽。

9. 发明申请

US20110127442A1 METHOD AND DEVICE FOR GENERATING EUV RADIATION OR SOFT X-RAYS 有权
标题翻译：用于产生EUV辐射或软X射线的方法和装置
公开(公告)号：US20110127442A1
公开(公告)日：2011-06-02
申请号：US13054807
申请日：2009-07-21
申请人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
发明人： Jakob Willi Neff , Dominik Marcel Vaudrevange , Peter Zink
IPC分类号： H01J17/02 , G01T1/16
CPC分类号： H05G2/003 , H05G2/005
摘要： The present invention relates to a method and device for generating optical radiation, in particular EUV radiation or soft x-rays, by means of an electrically operated discharge. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6) which is applied to a surface moving in the discharge space and is at least partially evaporated by one or several pulsed energy beams. In the proposed method and device the pulses (9) of said pulsed energy beams are directed to at least two different lateral locations with respect to a moving direction of said surface. With this measure, the radiation emission volume is expanded, less sensitive to spatial fluctuations and can be adapted better to the requirements of optical systems of any applications. Furthermore, the optical output power can be increased by this measure.
摘要翻译：本发明涉及通过电动放电产生光辐射，特别是EUV辐射或软X射线的方法和装置。等离子体（15）在至少两个电极（1,2）之间的气体介质中点燃，其中所述气态介质至少部分地由施加到在放电空间中移动的表面的液体材料（6）产生，至少部分被一个或几个脉冲能量束蒸发。在所提出的方法和装置中，所述脉冲能量束的脉冲（9）相对于所述表面的移动方向指向至少两个不同的横向位置。通过这种措施，辐射发射体积扩大，对空间波动的敏感性较低，可以更好地适应任何应用的光学系统的要求。此外，可以通过该措施来增加光输出功率。

10. 发明授权

US07809112B2 Method and device for generating EUV radiation and/or soft X-ray radiation 有权
标题翻译：用于产生EUV辐射和/或软X射线辐射的方法和装置
公开(公告)号：US07809112B2
公开(公告)日：2010-10-05
申请号：US10596441
申请日：2004-12-13
申请人： Günther Hans Derra , Rolf Theo Anton Apetz , Willi Neff , Oliver Rosier , Peter Zink
发明人： Günther Hans Derra , Rolf Theo Anton Apetz , Willi Neff , Oliver Rosier , Peter Zink
IPC分类号： H01J35/06 , H05G2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).
摘要翻译：描述了由等离子体（26）发射的产生特别是EUV辐射（12）和/或软X射线辐射（12a）的方法。等离子体（26）由放电空间（14）中的工作气体（22）形成，其包括至少一个辐射发射窗（16）和具有至少一个阳极（18）和至少一个阴极（18）的电极系统 20）。该电极系统通过引入放电空间（14）的电荷载体（24）将电能传递到等离子体（26）。建议以高重复频率获得等离子体（26）的可靠点燃，即由至少一个辐射源（28）产生的辐射（30）被引入放电空间（14）中以使得放电载体（ 24）。

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