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1. 发明授权

US08227777B2 Method and apparatus for operating an electrical discharge device 失效
标题翻译：用于操作放电装置的方法和装置
公开(公告)号：US08227777B2
公开(公告)日：2012-07-24
申请号：US11720638
申请日：2005-11-29
申请人： Michael Loeken , Jakob Willi Neff , Juergen Klein , Sven Probst
发明人： Michael Loeken , Jakob Willi Neff , Juergen Klein , Sven Probst
IPC分类号： A61N2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： The present invention relates to a method of operating an electrical discharge device (12) comprising at least one first electrode (14) and at least one second electrode (16) at a distance therefrom, which electrodes are electrically connected to a power supply (18) and, upon ignition of a first gas discharge (22) between the electrodes (14, 16), transmit an electrical current (I), as a result of which a plasma (24) is produced in a working gas (26), which plasma emits radiation (28), in particular extreme ultraviolet and/or soft X-ray radiation, which is passed via a solid angle (30) into a chamber (32) outside the electrodes (14, 16). In order to prevent erosion at the electrodes (14, 16), it is proposed that the formation of a secondary plasma (34) in the chamber (32) is suppressed by a device (42).
摘要翻译：本发明涉及一种操作放电装置（12）的方法，该放电装置包括至少一个第一电极（14）和至少一个第二电极（16），该电极与电源（18）电连接），并且在点燃电极（14,16）之间的第一气体放电（22）时，传输电流（I），结果在工作气体（26）中产生等离子体（24），该等离子体发射辐射（28），特别是经由立体角（30）通过电极（14,16）外部的室（32）中的极紫外和/或软X射线辐射。为了防止电极（14,16）的侵蚀，建议通过装置（42）抑制在室（32）中形成二级等离子体（34）。

2. 发明授权

US07811384B2 Method and apparatus for treating substrates in a rotary installation 有权
标题翻译：用于在旋转装置中处理基板的方法和装置
公开(公告)号：US07811384B2
公开(公告)日：2010-10-12
申请号：US11148740
申请日：2005-06-09
申请人： Matthias Bicker , Stephan Behle , Andreas Lüettringhaus-Henkel , Gregor Arnold , Juergen Klein
发明人： Matthias Bicker , Stephan Behle , Andreas Lüettringhaus-Henkel , Gregor Arnold , Juergen Klein
IPC分类号： C23C16/00 , B05D7/22
CPC分类号： C23C16/045 , C23C16/0272 , C23C16/401 , C23C16/54
摘要： The invention relates to a method and an apparatus for the treatment of substrates, in particular for the coating of plastic containers on a rotary installation. A plurality of treatment devices are arranged on the rotor and pass through a plurality of process phases as a function of their angle position on the rotor. For at least one process phase, the angle position can be set variably as a function of the current rotational speed of the rotor.
摘要翻译：本发明涉及用于处理基材的方法和装置，特别是用于在旋转装置上涂覆塑料容器。多个处理装置设置在转子上并且作为它们在转子上的角度位置的函数通过多个处理阶段。对于至少一个处理阶段，角位置可以根据转子的当前转速可变地设定。

3. 发明申请

US20090071399A2 APPARATUS FOR TREATING WORKPIECES 审中-公开
标题翻译：用于处理工作的装置
公开(公告)号：US20090071399A2
公开(公告)日：2009-03-19
申请号：US11417967
申请日：2006-05-04
申请人： Gregor Arnold , Andreas Luettringhaus-Henkel , Juergen Klein , Stephan Behle
发明人： Gregor Arnold , Andreas Luettringhaus-Henkel , Juergen Klein , Stephan Behle
IPC分类号： B05B13/06
CPC分类号： F16L39/04 , C23C16/045 , C23C16/54
摘要： The invention relates to a fluid rotary leadthrough having a journal and a sleeve. The sleeve and the journal are sealed off with respect to one another. The journal and the sleeve each have a line connection. The line connections, at least from time to time, are connected to one another via a fluid passage so that a flow of fluid through the fluid rotary leadthrough is made possible. The journal is arranged rotatably in the sleeve.
摘要翻译：本发明涉及具有轴颈和套筒的流体旋转引导件。袖子和杂志相对于彼此密封。日志和袖子各有一条线路连接。至少有时线路连接通过流体通道相互连接，使流体通过流体旋转引线的流动成为可能。轴颈可旋转地布置在套筒中。

4. 发明授权

US08397667B2 Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters 有权
标题翻译：工件等离子体涂层的工艺和设备，具有工艺参数的光谱评估
公开(公告)号：US08397667B2
公开(公告)日：2013-03-19
申请号：US11215163
申请日：2005-08-30
申请人： Stephan Behle , Andreas Lüettringhaus-Henkel , Peter Eimann , Juergen Klein
发明人： Stephan Behle , Andreas Lüettringhaus-Henkel , Peter Eimann , Juergen Klein
IPC分类号： C23C16/00 , C23F1/00 , H01L21/306
CPC分类号： H01J37/32972 , C23C16/045 , C23C16/515 , C23C16/52
摘要： The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter.
摘要翻译：本发明提供了一种通过等离子体诱导的化学气相沉积来涂覆工件的方法，其中将工艺气体引入涂覆室中，并且等离子体在与涂覆室邻接的工件的至少一个区域中的电磁能量点燃，其中存在工艺气体，其中基于等离子体的至少一个测量的光谱参数来监测涂覆操作，并且在偏离参数的期望范围的情况下去除工件。

5. 发明申请

US20080090039A1 PICVD coating for plastic containers 有权
标题翻译： PICVD涂料用于塑料容器
公开(公告)号：US20080090039A1
公开(公告)日：2008-04-17
申请号：US11870941
申请日：2007-10-11
申请人： Juergen Klein , Tanja Woywod , Stephan Behle , Uwe Rothhaar
发明人： Juergen Klein , Tanja Woywod , Stephan Behle , Uwe Rothhaar
IPC分类号： B32B1/08 , B32B9/04 , H05H1/24
CPC分类号： C23C16/30 , C23C16/45523 , C23C16/50 , Y10T428/1317 , Y10T428/1321 , Y10T428/1352 , Y10T428/1355 , Y10T428/1359 , Y10T428/1379 , Y10T428/31663 , Y10T428/31678 , Y10T428/31786 , Y10T428/31855 , Y10T428/31909 , Y10T428/31913 , Y10T428/31938
摘要： The invention relates to a composite material (1), to containers made therefrom and to a method for producing the composite material (1), which comprises a substrate (2) and a coating (3) on the substrate (2), wherein the coating (3) provides at least a first region (31) facing the substrate (2) and at least a second region (32) facing away the substrate (2), and wherein the first region (31) comprises a barrier layer (4) and the second region (32) a passivation layer (5).
摘要翻译：本发明涉及复合材料（1），由其制成的容器及其制造方法，该复合材料（1）包括基材（2）和基材（2）上的涂层（3），其中涂层（3）至少提供面向衬底（2）的至少第一区域（31）和面向衬底（2）的至少第二区域（32），并且其中第一区域（31）包括阻挡层（4））和第二区（32）钝化层（5）。

6. 发明授权

US08067070B2 PICVD coating for plastic containers 有权
标题翻译： PICVD涂料用于塑料容器
公开(公告)号：US08067070B2
公开(公告)日：2011-11-29
申请号：US11870941
申请日：2007-10-11
申请人： Juergen Klein , Tanja Woywod , Stephan Behle , Uwe Rothhaar
发明人： Juergen Klein , Tanja Woywod , Stephan Behle , Uwe Rothhaar
IPC分类号： B32B15/04 , B32B15/08 , B32B15/085 , B32B15/09 , B32B1/08 , B32B27/06
CPC分类号： C23C16/30 , C23C16/45523 , C23C16/50 , Y10T428/1317 , Y10T428/1321 , Y10T428/1352 , Y10T428/1355 , Y10T428/1359 , Y10T428/1379 , Y10T428/31663 , Y10T428/31678 , Y10T428/31786 , Y10T428/31855 , Y10T428/31909 , Y10T428/31913 , Y10T428/31938
摘要： The invention relates to a composite material (1), to containers made therefrom and to a method for producing the composite material (1), which comprises a substrate (2) and a coating (3) on the substrate (2), wherein the coating (3) provides at least a first region (31) facing the substrate (2) and at least a second region (32) facing away the substrate (2), and wherein the first region (31) comprises a barrier layer (4) and the second region (32) a passivation layer (5).
摘要翻译：本发明涉及复合材料（1），由其制成的容器及其制造方法，该复合材料（1）包括基材（2）和基材（2）上的涂层（3），其中涂层（3）至少提供面向衬底（2）的至少第一区域（31）和面向衬底（2）的至少第二区域（32），并且其中第一区域（31）包括阻挡层（4））和第二区（32）钝化层（5）。

7. 发明申请

US20060051520A1 Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters 有权
公开(公告)号：US20060051520A1
公开(公告)日：2006-03-09
申请号：US11215163
申请日：2005-08-30
申请人： Stephan Behle , Andreas Luettringhaus-Henkel , Peter Eimann , Juergen Klein
发明人： Stephan Behle , Andreas Luettringhaus-Henkel , Peter Eimann , Juergen Klein
IPC分类号： H05H1/24 , C23C16/00 , B05C11/00
CPC分类号： H01J37/32972 , C23C16/045 , C23C16/515 , C23C16/52
摘要： The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter.

8. 发明授权

US4535065A Method for regeneration of moist powder adsorption agents 失效
标题翻译：湿粉吸附剂再生方法
公开(公告)号：US4535065A
公开(公告)日：1985-08-13
申请号：US421111
申请日：1982-09-20
申请人： Juergen Klein , Peter Schulz
发明人： Juergen Klein , Peter Schulz
IPC分类号： B01J8/24 , B01J20/34 , C01B31/08 , C02F1/28 , C01B31/10 , C10J3/54
CPC分类号： C01B31/088 , B01J20/20 , B01J20/3416 , B01J20/3458 , B01J20/3483 , C01B31/087 , C02F1/283 , B01J2220/56
摘要： In a method for regeneration of moist powder adsorption agent, the moist-charged adsorption agent is first fed into the lower area of a fluidized bed which is provided with an aeration and heat-carrying material; the agent then is fed upwardly through the heat-carrying material while being simultaneously dried, and then the agent is withdrawn together with the vortex gas from the fluidized bed. The agent is separated from the vortex gas in a successively switched separator, and is then fed to a further fluidized bed which is provided with a further aeration and heat-carrying material. The agent is fed in that further bed upwardly through the further heat-carrying material and is simultaneously regenerated. The agent is then discharged together with the further vortex gas from the further fluidized bed. The vortex gases which are withdrawn can be reused as mixing gases during the vortex gas generation. The adsorption agent can be mixed with a sludge, for example, from a sewage treatment plant, which, if necessary, is gasified together with the substances of the adsorption agents in the regeneration step.
摘要翻译：在湿粉末吸附剂的再生方法中，首先将加湿吸附剂进料到设有曝气和承载材料的流化床的下部区域中，然后将试剂向上通过载热材料同时干燥，然后将试剂与来自流化床的涡流气体一起取出。该试剂在连续切换的分离器中与涡流气体分离，然后进料到另外的流化床中，该床具有进一步的曝气和加热材料。将该试剂在该另外的床中通过另外的载热材料向上进料，并同时再生。然后将试剂与来自另外的流化床的另外的涡流一起排出。在涡流生成过程中，被排出的涡流可以作为混合气体重新使用。吸附剂可以与例如污水处理厂的污泥混合，如果需要，在再生步骤中将其与吸附剂的物质一起气化。

9. 发明授权

US07446944B2 Objective lens 有权
标题翻译：物镜
公开(公告)号：US07446944B2
公开(公告)日：2008-11-04
申请号：US11714524
申请日：2007-03-06
申请人： Juergen Klein , Juergen Noffke , Dietmar Gaengler
发明人： Juergen Klein , Juergen Noffke , Dietmar Gaengler
IPC分类号： G02B21/02 , G02B15/14 , G02B9/00
CPC分类号： G02B15/177 , G02B13/04
摘要： An objective lens comprises a housing, an iris diaphragm and a plurality of lens groups. For focusing the objective lens while minimizing the variation of the image angle at least two lens groups are adapted to be moved relative to the housing. The one lens group is arranged in front of the iris diaphragm. The other lens group is arranged at least partially behind the iris diaphragm.
摘要翻译：物镜包括壳体，虹膜光阑和多个透镜组。为了在最小化图像角度的变化的同时聚焦物镜，至少两个透镜组适于相对于壳体移动。一个透镜组布置在虹膜隔膜的前面。另一透镜组至少部分地布置在虹膜隔膜后面。

10. 发明申请

US20070236805A1 Objective lens 有权
标题翻译：物镜
公开(公告)号：US20070236805A1
公开(公告)日：2007-10-11
申请号：US11714524
申请日：2007-03-06
申请人： Juergen Klein , Juergen Noffke , Dietmar Gaengler
发明人： Juergen Klein , Juergen Noffke , Dietmar Gaengler
IPC分类号： G02B15/14
CPC分类号： G02B15/177 , G02B13/04
摘要： An objective lens comprises a housing, an iris diaphragm and a plurality of lens groups. For focusing the objective lens while minimizing the variation of the image angle at least two lens groups are adapted to be moved relative to the housing. The one lens group is arranged in front of the iris diaphragm. The other lens group is arranged at least partially behind the iris diaphragm.
摘要翻译：物镜包括壳体，虹膜光阑和多个透镜组。为了在最小化图像角度的变化的同时聚焦物镜，至少两个透镜组适于相对于壳体移动。一个透镜组布置在虹膜隔膜的前面。另一透镜组至少部分地布置在虹膜隔膜后面。

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