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1. 发明授权

US07809112B2 Method and device for generating EUV radiation and/or soft X-ray radiation 有权
标题翻译：用于产生EUV辐射和/或软X射线辐射的方法和装置
公开(公告)号：US07809112B2
公开(公告)日：2010-10-05
申请号：US10596441
申请日：2004-12-13
申请人： Günther Hans Derra , Rolf Theo Anton Apetz , Willi Neff , Oliver Rosier , Peter Zink
发明人： Günther Hans Derra , Rolf Theo Anton Apetz , Willi Neff , Oliver Rosier , Peter Zink
IPC分类号： H01J35/06 , H05G2/00
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).
摘要翻译：描述了由等离子体（26）发射的产生特别是EUV辐射（12）和/或软X射线辐射（12a）的方法。等离子体（26）由放电空间（14）中的工作气体（22）形成，其包括至少一个辐射发射窗（16）和具有至少一个阳极（18）和至少一个阴极（18）的电极系统 20）。该电极系统通过引入放电空间（14）的电荷载体（24）将电能传递到等离子体（26）。建议以高重复频率获得等离子体（26）的可靠点燃，即由至少一个辐射源（28）产生的辐射（30）被引入放电空间（14）中以使得放电载体（ 24）。

2. 发明申请

US20080298552A1 Method and Device for Generating in Particular Euv Radiation And/or Soft X-Ray Radiation 有权
标题翻译：在特定的Euv辐射和/或软X射线辐射中产生的方法和装置
公开(公告)号：US20080298552A1
公开(公告)日：2008-12-04
申请号：US10596441
申请日：2004-12-13
申请人： Gunther Hans Derra , Rolf Theo Anton Apetz , Willi Neff , Oliver Rosier , Peter Zink
发明人： Gunther Hans Derra , Rolf Theo Anton Apetz , Willi Neff , Oliver Rosier , Peter Zink
IPC分类号： H01J35/06
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916
摘要： A method of generating in particular EUV radiation (12) and/or soft X-ray radiation (12a) emitted by a plasma (26) is described. The plasma (26) is formed by an operating gas (22) in a discharge space (14) which comprises at least one radiation emission window (16) and an electrode system with at least one anode (18) and at least one cathode (20). This electrode system transmits electrical energy to the plasma (26) by means of charge carriers (24) introduced into the discharge space (14). It is suggested for obtaining a reliable ignition of the plasma (26) at high repetition frequencies that a radiation (30) generated by at least one radiation source (28) is introduced into the discharge space (14) for making available the discharge carriers (24).
摘要翻译：描述了由等离子体（26）发射的产生特别是EUV辐射（12）和/或软X射线辐射（12a）的方法。等离子体（26）由放电空间（14）中的工作气体（22）形成，其包括至少一个辐射发射窗（16）和具有至少一个阳极（18）和至少一个阴极（18）的电极系统 20）。该电极系统通过引入放电空间（14）的电荷载体（24）将电能传递到等离子体（26）。建议以高重复频率获得等离子体（26）的可靠点燃，使得由至少一个辐射源（28）产生的辐射（30）被引入放电空间（14）中以使得放电载体（ 24）。

3. 发明授权

US07518300B2 Method and device for the generation of a plasma through electric discharge in a discharge space 有权
标题翻译：用于通过放电空间中的放电产生等离子体的方法和装置
公开(公告)号：US07518300B2
公开(公告)日：2009-04-14
申请号：US10548243
申请日：2004-03-05
申请人： Eric Gerardus Theodoor Bosch , Jeroen Jonkers , Willi Neff , Günther Hans Derra
发明人： Eric Gerardus Theodoor Bosch , Jeroen Jonkers , Willi Neff , Günther Hans Derra
IPC分类号： H01J17/26
CPC分类号： H05G2/003 , H05G2/005 , H05H1/48
摘要： The invention relates to a method and a device for the generation of a plasma through electric discharge in a discharge space which contains at least two electrodes, at least one of which is constructed from a matrix material or carrier material, such that an erosion-susceptible region with an evaporation spot is formed at least by the current flow. To present a method or a device for the generation of a plasma by electric discharge, it is suggested that a sacrificial substrate (38) is provided at least at the evaporation spot, the boiling point of said sacrificial suvstrate (38) during discharge operation lying below the melting point of the carrier material (30), such that charge carriers arising in the current flow are mainly generated from the sacrificial substrate (38).
摘要翻译：本发明涉及一种用于在放电空间中通过放电产生等离子体的方法和装置，其包含至少两个电极，其中至少一个电极由基质材料或载体材料构成，使得易受侵蚀至少由电流形成具有蒸发点的区域。为了呈现通过放电产生等离子体的方法或装置，建议至少在蒸发点处提供牺牲衬底（38），在放电操作期间所述牺牲衬套（38）的沸点位于低于载体材料（30）的熔点，使得在电流中产生的电荷载体主要从牺牲衬底（38）产生。

4. 发明申请

US20050040347A1 Method and device for the generation of far ultraviolet or soft x-ray radiation 有权
公开(公告)号：US20050040347A1
公开(公告)日：2005-02-24
申请号：US10473906
申请日：2002-03-21
申请人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
发明人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
IPC分类号： G21K1/00 , G03F7/20 , G21K5/02 , G21K5/08 , H05G2/00 , H05H1/24 , G01J1/00
CPC分类号： H05G2/003 , G03F7/70033
摘要： In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

5. 发明授权

US06788763B1 Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge 有权
标题翻译：用于从气体放电产生极端紫外线和软x辐射的装置
公开(公告)号：US06788763B1
公开(公告)日：2004-09-07
申请号：US10019475
申请日：2002-08-09
申请人： Willi Neff , Rainer Lebert , Klaus Bergmann , Oliver Rosier
发明人： Willi Neff , Rainer Lebert , Klaus Bergmann , Oliver Rosier
IPC分类号： G21G400
CPC分类号： H05G2/003 , G03F7/70033
摘要： The invention relates to a device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve. There are two main electrodes, between which there is a gas-filled space, and each main electrode exhibits an opening, by means of which an axis of symmetry [(5)] is defined; and there are means to increase the conversion efficiency. Preferred fields of application are those requiring extreme ultraviolet (EUV) radiation or soft x-rays at a wavelength ranging from approximately 1 to 20 nm, and in particular around 13 nm, such as in EUV lithography.
摘要翻译：本发明涉及一种用于从气体放电产生极紫外和软X射线的装置，其在帕邢曲线的左手分支上操作。存在两个主电极，其间有气体填充的空间，并且每个主电极具有开口，通过该开口定义对称轴[（5）]; 并且有提高转换效率的方法。优选的应用领域是那些需要极紫外（EUV）辐射或在约1至20nm，特别是约13nm的波长范围内的软x射线，例如在EUV光刻中。

6. 发明授权

US06967341B2 Method and device for the generation of far ultraviolet or soft x-ray radiation 有权
标题翻译：用于产生远紫外或软X射线辐射的方法和装置
公开(公告)号：US06967341B2
公开(公告)日：2005-11-22
申请号：US10473906
申请日：2002-03-21
申请人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
发明人： Willi Neff , Klaus Bergmann , Oliver Rosier , Joseph Pankert
IPC分类号： G21K1/00 , G03F7/20 , G21K5/02 , G21K5/08 , H05G2/00 , H05H1/24
CPC分类号： H05G2/003 , G03F7/70033
摘要： In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.
摘要翻译：在通过气体放电产生极紫外辐射或软X射线辐射的方法中，特别是对于EUV光刻技术，放电容器具有连接到高电压的两个电极。在电极之间，在彼此同轴的两个电极凹部的区域中，提供根据在Paschen曲线的左分支上实现的放电操作的预定气体压力的气体填充。在该区域，在供给能量时产生发射辐射的等离子体。等离子体通过气体填充物在电极凹部的区域中的压力变化而移位或变形。

7. 发明授权

US06269631B1 Process and device for operating an internal combustion engine with less pollutant emission 失效
标题翻译：运行污染物排放较少的内燃机的工艺和装置
公开(公告)号：US06269631B1
公开(公告)日：2001-08-07
申请号：US09214443
申请日：1999-04-14
申请人： Willi Neff , Klaus Pochner , Gerhard Lepperhoff , Georg Lütkemeyer
发明人： Willi Neff , Klaus Pochner , Gerhard Lepperhoff , Georg Lütkemeyer
IPC分类号： F01N300
CPC分类号： F01N3/0892 , B01D53/32 , F01N3/2882
摘要： Process and device for operating an internal combustion engine with less pollutant emission, whose exhaust gas is subjected to an electrical aftertreatment during engine operation to convert pollutants, the emissions of which are measured. To improve a process with the features mentioned initially, so that on the one hand the desired reduction of emissions of the internal combustion engine is achieved during its entire time of operation, but on the other hand so that the design of the electrical system of the internal combustion engine does not have to be unreasonably large and thus costly, the electrical aftertreatment of the exhaust gas occurs only during the portion of the operating time during which emission peaks occur.
摘要翻译：用于操作污染物排放较少的内燃机的过程和装置，其排气在发动机运行期间经受电后处理以转化污染物，其排放被测量。为了改进具有最初提及的特征的过程，一方面，在其整个操作过程中实现期望的内燃机排放量的减少，但另一方面，内燃机的电气系统的设计不必是不合理地大而且因此成本高，排气的电后处理仅在发生峰值的部分操作时间内发生。

8. 发明授权

US5023897A Device for generating X-radiation with a plasma source 失效
标题翻译：用等离子体源产生X射线的装置
公开(公告)号：US5023897A
公开(公告)日：1991-06-11
申请号：US568193
申请日：1990-08-16
申请人： Willi Neff , Raymond Holz , Rainer Lebert , Franz Richter
发明人： Willi Neff , Raymond Holz , Rainer Lebert , Franz Richter
IPC分类号： H05H1/48 , G03F7/20 , H05G2/00 , H05H1/24
CPC分类号： H05G2/003 , G03F7/70033 , H05H1/52
摘要： The invention is an improvement in a device for generating X-radiation with a plasma source. In the device, two concentric cylindrical electrodes (11, 12) are separated by an evacuated discharge space (13) filled with low-pressure gas. When the inner electrode is momentarily raised to an extremely high voltage, the gas is ionized and a plasma shock wave (17, 17') is created and compressed into a plasma focus (21) emitting X-radiation (20). The improvement introduces a first ("discharge") gas into the discharge space for initiation of the plasma, while introducing a second ("emitting") gas into the inner electrode for generating the X-radiation in the plasma focus. Special features of the improved device include a plurality of gas extraction ports, which can be used independently or together, and which can be combined with variations in the introduction and flow of the two gases to control the movement and intermixture of the gases and, thereby, the operation of the device. Also, the device introduces a third gas for improving the transmission of the X-radiation from the generating plasma focus to a work station for X-ray microscopy or for X-ray lithography.
摘要翻译：本发明是用于产生具有等离子体源的X射线的装置的改进。在该装置中，两个同心圆柱形电极（11,12）由填充有低压气体的抽空放电空间（13）分开。当内部电极瞬间升高到极高的电压时，气体被离子化，产生等离子体冲击波（17,17'）并压缩成发射X射线的等离子体焦点（21）（20）。该改进将第一（“放电”）气体引入到放电空间中以引发等离子体，同时将第二（“发射”）气体引入内部电极中，以在等离子体焦点中产生X射线。改进的装置的特征包括多个气体提取口，其可以独立地或一起使用，并且可以与两种气体的引入和流动的变化相结合以控制气体的运动和混合，从而，设备的操作。此外，该装置引入第三气体，用于改善从产生等离子体焦点的X射线的透射到用于X射线显微镜或X射线光刻的工作站。

9. 发明授权

US07734014B2 Extreme UV and soft X ray generator 失效
标题翻译：极端的UV和软X射线发生器
公开(公告)号：US07734014B2
公开(公告)日：2010-06-08
申请号：US10567038
申请日：2004-07-29
申请人： Klaus Bergmann , Willi Neff
发明人： Klaus Bergmann , Willi Neff
IPC分类号： H01J35/06 , H01J35/02 , G21G4/00
CPC分类号： H05G2/003
摘要： A gas discharge source, in particular, for generating extreme ultraviolet and/or soft X-radiation, has a gas-filled intermediate electrode space located between two electrodes, devices for the admission and evacuation of gas, and one electrode that has an opening that defines an axis of symmetry and is provided for the discharge of radiation. A diaphragm exhibits at least one opening on the axis of symmetry and operates as a differential pump stage, between the two electrodes.
摘要翻译：特别是用于产生极端的紫外线和/或软X射线的气体放电源具有位于两个电极之间的气体填充的中间电极空间，用于进入和排出气体的装置，以及一个具有开口的电极定义了一个对称轴，并提供了放射线。隔膜在对称轴上具有至少一个开口，作为两个电极之间的差动泵级。

10. 发明授权

US07397190B2 Gas discharge lamp for extreme UV radiation 有权
标题翻译：用于极紫外辐射的气体放电灯
公开(公告)号：US07397190B2
公开(公告)日：2008-07-08
申请号：US10536918
申请日：2003-11-28
申请人： Guenther Hans Derra , Joseph Robert Rene Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
发明人： Guenther Hans Derra , Joseph Robert Rene Pankert , Willi Neff , Klaus Bergmann , Jeroen Jonkers
IPC分类号： H01J61/09
CPC分类号： H05G2/003 , H01J61/09
摘要： The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3′) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5′) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).
摘要翻译：本发明涉及一种用于具有阳极（1）和中空阴极（2）的EUV辐射的气体放电灯，其中中空阴极（2）具有至少两个开口（3,3'），阳极（1）具有一个通孔（4），其特征在于，中空阴极开口（3）的纵向轴线（5,5'）具有位于阳极开口（6）的对称轴线（6）上的公共交点S 4）。

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