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1. 发明授权

US08641859B2 Bonding method 有权
标题翻译：粘合方法
公开(公告)号：US08641859B2
公开(公告)日：2014-02-04
申请号：US13131756
申请日：2009-11-30
申请人： Franz Richter
发明人： Franz Richter
IPC分类号： B29C65/52
CPC分类号： H01L21/6835 , B32B37/1018 , B32B37/12 , B32B2457/14 , H01L21/67132 , H01L2221/6834 , H01L2224/2929 , H01L2924/0002 , H01L2924/10253 , H01L2924/10321 , H01L2924/10322 , H01L2924/10323 , H01L2924/10324 , H01L2924/10325 , H01L2924/10326 , H01L2924/10327 , H01L2924/10328 , H01L2924/10329 , H01L2924/1033 , H01L2924/10331 , H01L2924/10332 , H01L2924/10333 , H01L2924/10334 , H01L2924/10335 , H01L2924/157 , H01L2924/15788
摘要： The invention relates to a method for bonding a first surface (1a) and a second surface (7a) by means of an interlayer (3), comprising the steps: a) providing a first item (1) which has the first surface (1a), b) providing flowable, solidifiable material for the interlayer (3), c) providing a second item (7) which has the second surface (7a), d) applying the material for the interlayer onto the first surface (1a) so that a bulge (3a) encircling the surface is produced, e) applying a vacuum around the first item (1) and the second item (2), f) bringing the second surface (7a) of the second item (7) into contact with the circumferential bulge so that a sealed-off cavity (5) is produced, g) increasing the ambient pressure so that the cavity (5) is eliminated without resulting in a stream of gas flowing into the cavity and h) increasing the viscosity of the material for the interlayer.
摘要翻译：本发明涉及一种通过中间层（3）将第一表面（1a）和第二表面（7a）接合的方法，包括以下步骤：a）提供具有第一表面（1a）的第一项目（1）），b）为中间层（3）提供可流动的，可固化的材料，c）提供具有第二表面（7a）的第二项目（7），d）将用于中间层的材料施加到第一表面（1a）上产生环绕表面的凸起（3a），e）围绕第一物品（1）和第二物品（2）施加真空，f）使第二物品（7）的第二表面（7a）接触具有周向凸起，使得产生密封空腔（5），g）增加环境压力，使得消除空腔（5），而不会导致流入空腔的气流，并且h）增加中间层材料。

2. 发明申请

US20080259517A1 Network Protector 审中-公开
标题翻译：网络保护
公开(公告)号：US20080259517A1
公开(公告)日：2008-10-23
申请号：US10592974
申请日：2005-03-17
申请人： Leon Kotze , Alexander Franz Richter
发明人： Leon Kotze , Alexander Franz Richter
IPC分类号： H02H1/04
CPC分类号： H01R13/6666 , H01R13/6616 , H01R13/6625 , H01R13/68 , H01R24/62
摘要： The invention provides a network protector (10) which comprises node connecting means (14) for connecting the network protector to a node (24) in an electronic network and hub connecting means (16) for connecting the network protector to a hub (22) in the electronic network. The network protector also includes a non-earthed surge protection circuit (28) for allowing electronic communication between the node connecting means and the hub connecting means. The surge protection circuit includes circuit breaking means (40, 42, 48, 50) for disrupting electronic communication between the node connecting means and the hub connecting means in response to electrical surges exceeding a specified value.
摘要翻译：本发明提供了一种网络保护器（10），其包括用于将网络保护器连接到电子网络中的节点（24）的节点连接装置（14）和用于将网络保护器连接到集线器（22）的集线器连接装置（16）在电子网络中。网络保护器还包括用于允许节点连接装置和集线器连接装置之间的电子通信的非接地浪涌保护电路（28）。浪涌保护电路包括响应于超过特定值的电涌而中断节点连接装置和集线器连接装置之间的电子通信的断路装置（40,42,48,50）。

3. 发明授权

US08951886B2 Method for separating a layer system comprising a wafer by precisely maintaining the position of the separating front 有权
标题翻译：通过精确地保持分离前沿的位置来分离包括晶片的层系统的方法
公开(公告)号：US08951886B2
公开(公告)日：2015-02-10
申请号：US13141470
申请日：2009-12-23
申请人： Franz Richter
发明人： Franz Richter
IPC分类号： H01L21/46 , H01L21/322 , H01L21/683
CPC分类号： H01L21/6835 , H01L21/6836 , H01L2221/68318 , H01L2221/68327 , H01L2221/68386 , H01L2221/6839
摘要： A method for mechanically separating a laminar structure from a first carrier assembly, comprising or consisting of a first carrier, wherein the laminar structure comprises a wafer and a second, stretchable carrier is disclosed. Also disclosed are the use of a particular separating aid for separating a laminar structure and a device for carrying out the method.
摘要翻译：一种用于将层状结构与第一载体组件机械分离的方法，包括或由第一载体组成，其中所述层状结构包括晶片和第二可拉伸载体。还公开了使用特定的分离助剂来分离层状结构和用于实施该方法的装置。

4. 发明申请

US20120028438A1 METHOD FOR SEPARATING A LAYER SYSTEM COMPRISING A WAFER 有权
标题翻译：用于分离包含波浪的层系统的方法
公开(公告)号：US20120028438A1
公开(公告)日：2012-02-02
申请号：US13141470
申请日：2009-12-23
申请人： Franz Richter
发明人： Franz Richter
IPC分类号： H01L21/762
CPC分类号： H01L21/6835 , H01L21/6836 , H01L2221/68318 , H01L2221/68327 , H01L2221/68386 , H01L2221/6839
摘要： A method for mechanically separating a laminar structure from a carrier assembly is disclosed. The method can include providing a layered system comprising the carrier assembly, having a first carrier, and the laminar structure, having a wafer and optionally a second, stretchable carrier, and creating a mechanical stress in the interface region between carrier assembly and the laminar structure, so that the laminar structure is separated from the carrier assembly. The method also includes: i) providing a separating aid; fixing the separating aid on the second carrier so that during the separating operation the second carrier remains fixed on the separating aid directly behind a separating front that arises during separation; and mechanically separating the laminar structure from the carrier assembly utilizing a separating front, and/or ii) producing a vibration in the layer system, and/or iii) changing the temperature of the layer system or of parts of the layer system.
摘要翻译：公开了一种从载体组件机械分离层状结构的方法。该方法可以包括提供包括具有第一载体的载体组件和层状结构的分层系统，其具有晶片和任选的第二可拉伸载体，并且在载体组件和层状结构之间的界面区域中产生机械应力，使得层状结构与载体组件分离。该方法还包括：i）提供分离助剂; 将分离助剂固定在第二载体上，使得在分离操作期间，第二载体保持固定在分离助剂上，直接在分离前产生的分离前面; 并且利用分离前端机械地将层状结构与载体组件分开，和/或ii）在层系统中产生振动，和/或iii）改变层系统或层系统的部分的温度。

5. 发明授权

US5777979A Apparatus for laser exposure of a substrate disk and a method for the centered mounting of a substrate disk 失效
标题翻译：用于基板盘的激光曝光的装置和用于基板盘的中心安装的方法
公开(公告)号：US5777979A
公开(公告)日：1998-07-07
申请号：US753796
申请日：1996-11-27
申请人： Bernd Hensel , Friedrich Hofmann , Hermann Koop , Eberhard Feick , Franz Richter
发明人： Bernd Hensel , Friedrich Hofmann , Hermann Koop , Eberhard Feick , Franz Richter
IPC分类号： G11B17/022 , G11B7/26 , G11B23/00 , G11B25/04
CPC分类号： G11B7/26
摘要： A vertically disposed drive spindle (5) rotates turntable (6) supporting a substrate (7) at high speed, the turntable having a smaller diameter than the substrate. Coaxial with the turntable (6), a centering ring (10) having a frustoconical inside surface can be raised vertically between a lower and upper position. The latter has on its upper side a greater diameter and on its lower side a smaller diameter than the substrate (7). In its lower position the centering ring (10) is at a distance from a substrate (7) lying on the turntable (6), but in its upper position its inside surface supports the substrate (7) at an axial distance above turntable (6).
摘要翻译：垂直设置的驱动主轴（5）以高速旋转支撑基板（7）的转盘（6），该转盘具有比该基板更小的直径。与转盘（6）同轴，具有截头圆锥形内表面的定心环（10）可以在下部和上部位置之间垂直地升高。后者在其上侧具有更大的直径，并且在其下侧具有比衬底（7）更小的直径。在其较低位置，定心环（10）距离位于转盘（6）上的基板（7）一定距离，但是在其上部位置，其内表面在转台（6）之上的轴向距离处支撑基板（7））。

6. 发明申请

US20110272092A1 BONDING METHOD 有权
标题翻译：结合方法
公开(公告)号：US20110272092A1
公开(公告)日：2011-11-10
申请号：US13131756
申请日：2009-11-30
申请人： Franz Richter
发明人： Franz Richter
IPC分类号： B29C65/52
CPC分类号： H01L21/6835 , B32B37/1018 , B32B37/12 , B32B2457/14 , H01L21/67132 , H01L2221/6834 , H01L2224/2929 , H01L2924/0002 , H01L2924/10253 , H01L2924/10321 , H01L2924/10322 , H01L2924/10323 , H01L2924/10324 , H01L2924/10325 , H01L2924/10326 , H01L2924/10327 , H01L2924/10328 , H01L2924/10329 , H01L2924/1033 , H01L2924/10331 , H01L2924/10332 , H01L2924/10333 , H01L2924/10334 , H01L2924/10335 , H01L2924/157 , H01L2924/15788
摘要： The invention relates to a method for bonding a first surface (1a) and a second surface (7a) by means of an interlayer (3), comprising the steps: a) providing a first item (1) which has the first surface (1a), b) providing flowable, solidifiable material for the interlayer (3), c) providing a second item (7) which has the second surface (7a), d) applying the material for the interlayer onto the first surface (1a) so that a bulge (3a) encircling the surface is produced, e) applying a vacuum around the first item (1) and the second item (2), f) bringing the second surface (7a) of the second item (7) into contact with the circumferential bulge so that a sealed-off cavity (5) is produced, g) increasing the ambient pressure so that the cavity (5) is eliminated without resulting in a stream of gas flowing into the cavity and h) increasing the viscosity of the material for the interlayer.
摘要翻译：本发明涉及一种通过中间层（3）将第一表面（1a）和第二表面（7a）接合的方法，包括以下步骤：a）提供具有第一表面（1a）的第一项目（1）），b）为中间层（3）提供可流动的，可固化的材料，c）提供具有第二表面（7a）的第二项目（7），d）将用于中间层的材料施加到第一表面（1a）上产生环绕表面的凸起（3a），e）围绕第一物品（1）和第二物品（2）施加真空，f）使第二物品（7）的第二表面（7a）接触具有周向凸起，使得产生密封空腔（5），g）增加环境压力，使得消除空腔（5），而不会导致流入空腔的气流，并且h）增加中间层材料。

7. 发明授权

US5867460A Apparatus for laser beam exposure of a substrate disc 失效
标题翻译：用于基板盘的激光束曝光的装置
公开(公告)号：US5867460A
公开(公告)日：1999-02-02
申请号：US827477
申请日：1996-10-04
申请人： Bernd Hensel , Friedrich Hofmann , Hermann Koop , Paul Kaiser , Eberhard Feick , Franz Richter
发明人： Bernd Hensel , Friedrich Hofmann , Hermann Koop , Paul Kaiser , Eberhard Feick , Franz Richter
IPC分类号： G11B7/00
CPC分类号： G11B7/261
摘要： In an apparatus for the laser beam exposure of a substrate disc (5), linked block tables (19, 29) are provided, which have each a piezotranslator (24, 31). This makes it possible to perform a fine correction of the movements very rapidly and very precisely.
摘要翻译：在用于衬底盘（5）的激光束曝光的装置中，提供了连接的块表（19,29），其具有每个压电传译器（24,31）。这使得可以非常快速和非常精确地执行运动的精细校正。

8. 发明授权

US06667126B1 High temperature fuel cell 有权
标题翻译：高温燃料电池
公开(公告)号：US06667126B1
公开(公告)日：2003-12-23
申请号：US09398690
申请日：1999-09-20
申请人： Harald Landes , Franz Richter , Hermann Schichl
发明人： Harald Landes , Franz Richter , Hermann Schichl
IPC分类号： H01M486
CPC分类号： H01M4/9033
摘要： A high temperature fuel cell has a cathode which comprises at least a first layer and a second layer disposed on one side of the first layer, in which the first layer contains 30 to 60% by weight of a first electrolyte made up of zirconium oxide ZrO2 and at least one proportion of scandium oxide Sc2O3, and the second layer comprises substoichiometric lanthanum strontium manganate having the formula LaxSryMnO3 in which the sum of x and y is less than 1. By means of this, a high ionic conductivity is achieved for the cathode (6). The ionic conductivity further remains substantially constant as a function of the operating time t.
摘要翻译：高温燃料电池具有阴极，该阴极至少包括设置在第一层一侧的第一层和第二层，其中第一层含有30至60重量％的由氧化锆ZrO2组成的第一电解质和至少一种比例的氧化钪Sc 2 O 3，第二层包括具有式X和Y的和小于1的式LaxSryMnO 3的亚化学计量的镧镧锰酸锶。由此，对于阴极，实现了高离子电导率（6）。离子电导率进一步作为操作时间t的函数保持基本恒定。

9. 发明授权

US5023897A Device for generating X-radiation with a plasma source 失效
标题翻译：用等离子体源产生X射线的装置
公开(公告)号：US5023897A
公开(公告)日：1991-06-11
申请号：US568193
申请日：1990-08-16
申请人： Willi Neff , Raymond Holz , Rainer Lebert , Franz Richter
发明人： Willi Neff , Raymond Holz , Rainer Lebert , Franz Richter
IPC分类号： H05H1/48 , G03F7/20 , H05G2/00 , H05H1/24
CPC分类号： H05G2/003 , G03F7/70033 , H05H1/52
摘要： The invention is an improvement in a device for generating X-radiation with a plasma source. In the device, two concentric cylindrical electrodes (11, 12) are separated by an evacuated discharge space (13) filled with low-pressure gas. When the inner electrode is momentarily raised to an extremely high voltage, the gas is ionized and a plasma shock wave (17, 17') is created and compressed into a plasma focus (21) emitting X-radiation (20). The improvement introduces a first ("discharge") gas into the discharge space for initiation of the plasma, while introducing a second ("emitting") gas into the inner electrode for generating the X-radiation in the plasma focus. Special features of the improved device include a plurality of gas extraction ports, which can be used independently or together, and which can be combined with variations in the introduction and flow of the two gases to control the movement and intermixture of the gases and, thereby, the operation of the device. Also, the device introduces a third gas for improving the transmission of the X-radiation from the generating plasma focus to a work station for X-ray microscopy or for X-ray lithography.
摘要翻译：本发明是用于产生具有等离子体源的X射线的装置的改进。在该装置中，两个同心圆柱形电极（11,12）由填充有低压气体的抽空放电空间（13）分开。当内部电极瞬间升高到极高的电压时，气体被离子化，产生等离子体冲击波（17,17'）并压缩成发射X射线的等离子体焦点（21）（20）。该改进将第一（“放电”）气体引入到放电空间中以引发等离子体，同时将第二（“发射”）气体引入内部电极中，以在等离子体焦点中产生X射线。改进的装置的特征包括多个气体提取口，其可以独立地或一起使用，并且可以与两种气体的引入和流动的变化相结合以控制气体的运动和混合，从而，设备的操作。此外，该装置引入第三气体，用于改善从产生等离子体焦点的X射线的透射到用于X射线显微镜或X射线光刻的工作站。

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