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    • 2. 发明授权
    • Substrate processing apparatus and substrate processing method
    • 基板加工装置及基板处理方法
    • US08112183B2
    • 2012-02-07
    • US12260211
    • 2008-10-29
    • Tomoyuki Yamada
    • Tomoyuki Yamada
    • G06F19/00
    • H01L21/67109H01L21/67253
    • A substrate processing apparatus detects malfunction of mechanisms in MFC. An inert gas supply line, a first shut-off valve shutting off the inert gas supply, a process gas supply line, and a second shut-off valve shutting off the process gas supply are installed upstream of the MFC. A gas supply pipe connected to a process chamber, a third shut-off valve shutting off gas supply to the gas supply pipe, an exhaust vent line which is exhaustible, and a fourth shut-off valve shutting off gas supply to the exhaust vent line are installed downstream of the MFC. A main control unit determines that the MFC is abnormal if a transition time exceeds a previously set time when the MFC transitions from a closed state to an opened state while the shut-off valves are in a closed state.
    • 基板处理装置检测MFC中的机构的故障。 惰性气体供给管线,关闭惰性气体源的第一截止阀,处理气体供应管线和关闭工艺气体供应的第二截止阀安装在MFC的上游。 连接到处理室的气体供给管,关闭气体供给管的气体供给的第三截止阀,可排出的排气管,以及关闭排气管线的气体供给的第四截止阀 安装在MFC的下游。 如果在关闭阀处于关闭状态时,当MFC从关闭状态转换到打开状态时,如果转换时间超过预先设定的时间,则主控制单元确定MFC异常。
    • 8. 发明授权
    • Layout verification method and device
    • 布局验证方法和设备
    • US07340701B2
    • 2008-03-04
    • US11224129
    • 2005-09-13
    • Tomoyuki Yamada
    • Tomoyuki Yamada
    • G06F17/50
    • G06F17/5081
    • There is provided a layout verification method including a space acquisition step of, with a wiring connected to a gate through a via as a target wiring, acquiring a space between the target wiring and a wiring adjacent thereto, a calculation step of calculating an antenna ratio according to the space between the target wiring and the adjacent wiring, the area of the gate, and the area of the target wiring, and an output step of outputting an antenna damage error when the antenna ratio exceeds a predetermined value.
    • 提供了一种布局验证方法,包括:空间获取步骤,通过通孔作为目标布线连接到栅极的布线,获取目标布线和与其相邻的布线之间的空间;计算步骤,计算天线比 根据目标布线和相邻布线之间的间隔,栅极的面积和目标布线的面积,以及当天线比超过预定值时输出天线损坏误差的输出步骤。
    • 9. 发明申请
    • Method Of Searching Specific Base Sequence
    • 搜索特定基本序列的方法
    • US20070202504A1
    • 2007-08-30
    • US10593753
    • 2005-03-23
    • Shinichi MorishitaTomoyuki YamadaYuki Naito
    • Shinichi MorishitaTomoyuki YamadaYuki Naito
    • C12Q1/68G06F17/30G06F19/00
    • C12Q1/6869G16B25/00G16B30/00C12Q2525/149
    • It is intended to efficiently determine a base sequence specifically appearing in an expression gene. For this, providing that the expression gene consists of exons (301) . . . (306) and especially that exon (301) is united with exon (302) and exon (302) with exon (303), an aggregate of base sequences (401) (403) being a union of exon base sequences (301) . . . (305) and a boundary base sequence obtained by uniting together base sequences (404) and (405) and base sequences (406) and (407) respectively existing over boundaries between exon (301) and exon (302) and between exon (302) and exon (303) is formed, and the aggregate is searched. If a base sequence is one specifically appearing in the expression gene, the number of search results is 1 and otherwise, the number is plural.
    • 旨在有效地确定特异性出现在表达基因中的碱基序列。 为此,提供表达基因由外显子(301)组成。 。 。 (306),特别是外显子(301)与外显子(302)和外显子(302)与外显子(303)结合,作为外显子碱基序列(301)的并集的碱基序列(401)(403)的聚集体。 。 。 (305)和通过将分别存在于外显子(301)和外显子(302)之间的边界上的基本序列(404)和(405)以及碱基序列(406)和(407)之间以及外显子(302)之间的组合而获得的边界碱基序列 )和外显子(303),并搜索聚集体。 如果碱基序列是表达基因中特定出现的碱基序列,则搜索结果数为1,否则为数。