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    • 1. 发明授权
    • Method of fabricating nitride-based semiconductor laser diode
    • 制造氮化物基半导体激光二极管的方法
    • US07736925B2
    • 2010-06-15
    • US11448800
    • 2006-06-08
    • Tan SakongYoun-joon SungHo-sun Paek
    • Tan SakongYoun-joon SungHo-sun Paek
    • H01L21/00
    • H01S5/22B82Y20/00H01S5/0213H01S5/16H01S5/2201H01S5/34333H01S2304/12
    • A method of manufacturing a nitride-based semiconductor laser diode that can minimize optical absorption on a cavity mirror plane and improve the surface roughness of the cavity mirror plane is provided. The method includes the steps of: forming on a (0001) GaN (gallium nitride) substrate having at least two masks spaced apart by a distance equal to a laser cavity length in stripes that extend along the direction; growing an n-GaN layer on the GaN substrate between the masks so that two (1-100) edges of the n-GaN layer are thicker than the remaining regions thereof; sequentially stacking an n-clad layer, an active layer, and a p-clad layer on the n-GaN layer to form an edge-emitting laser cavity structure in which laser light generated in the active layer passes through a region of the n-clad layer aligned laterally with the active layer and is output; and etching a (1-100) plane of the laser cavity structure to form a cavity mirror plane.
    • 提供一种制造氮化物基半导体激光二极管的方法,其可以使腔镜面上的光吸收最小化并且改善腔镜面的表面粗糙度。 该方法包括以下步骤:在(0001)GaN(氮化镓)衬底上形成具有至少两个掩模,该掩模间隔开等于沿着<11-20>方向延伸的条纹的激光器腔长度的距离; 在掩模之间的GaN衬底上生长n-GaN层,使得n-GaN层的两个(1-100)边缘比其余区域厚; 顺序地在n-GaN层上层叠n包覆层,有源层和p覆盖层,以形成边缘发射激光器腔结构,其中在有源层中产生的激光穿过n-GaN层的区域, 包层与活性层横向排列并被输出; 并蚀刻激光腔结构的(1-100)面以形成腔镜面。
    • 6. 发明申请
    • Method of fabricating nitride-based semiconductor laser diode
    • 制造氮化物基半导体激光二极管的方法
    • US20070087460A1
    • 2007-04-19
    • US11448800
    • 2006-06-08
    • Tan SakongYoun-joon SungHo-sun Paek
    • Tan SakongYoun-joon SungHo-sun Paek
    • H01L21/00
    • H01S5/22B82Y20/00H01S5/0213H01S5/16H01S5/2201H01S5/34333H01S2304/12
    • A method of manufacturing a nitride-based semiconductor laser diode that can minimize optical absorption on a cavity mirror plane and improve the surface roughness of the cavity mirror plane is provided. The method includes the steps of: forming on a (0001) GaN (gallium nitride) substrate having at least two masks spaced apart by a distance equal to a laser cavity length in stripes that extend along the direction; growing an n-GaN layer on the GaN substrate between the masks so that two (1-100) edges of the n-GaN layer are thicker than the remaining regions thereof; sequentially stacking an n-clad layer, an active layer, and a p-clad layer on the n-GaN layer to form an edge-emitting laser cavity structure in which laser light generated in the active layer passes through a region of the n-clad layer aligned laterally with the active layer and is output; and etching a (1-100) plane of the laser cavity structure to form a cavity mirror plane.
    • 提供一种制造氮化物基半导体激光二极管的方法,其可以使腔镜面上的光吸收最小化并且改善腔镜面的表面粗糙度。 该方法包括以下步骤:在(0001)GaN(氮化镓)衬底上形成具有至少两个掩模,该掩模间隔开等于沿着<11-20>方向延伸的条纹的激光器腔长度的距离; 在掩模之间的GaN衬底上生长n-GaN层,使得n-GaN层的两个(1-100)边缘比其余区域厚; 顺序地在n-GaN层上层叠n包覆层,有源层和p覆盖层,以形成边缘发射激光器腔结构,其中在有源层中产生的激光穿过n-GaN层的区域, 包层与活性层横向排列并被输出; 并蚀刻激光腔结构的(1-100)面以形成腔镜面。
    • 8. 发明授权
    • Semiconductor optoelectronic device
    • 半导体光电器件
    • US07058105B2
    • 2006-06-06
    • US10624687
    • 2003-07-23
    • Sung-nam LeeKyoung-ho HaTan Sakong
    • Sung-nam LeeKyoung-ho HaTan Sakong
    • H01S5/00
    • H01S5/20B82Y20/00H01L33/02H01L33/06H01L33/32H01S5/2009H01S5/3211H01S5/34333
    • A highly efficient semiconductor optoelectronic device is provided. The semiconductor optoelectronic device includes an active layer, an upper waveguide layer provided on the active layer and a lower waveguide layer provided under the active layer, an upper cladding layer provided on the upper waveguide layer and a lower cladding layer provided under the lower waveguide layer, a substrate supporting a deposited structure of the lower cladding layer, the lower waveguide layer, the active layer, the upper waveguide layer, and the upper cladding layer, and upper and lower optical confinement layers provided between the active layer and the upper waveguide layer and between the active layer and the lower waveguide layer, respectively, and having an energy gap that is smaller than those of the upper and lower waveguide layers but greater than that of the active layer.
    • 提供了一种高效的半导体光电子器件。 半导体光电子器件包括有源层,设置在有源层上的上波导层和设置在有源层下的下波导层,设置在上波导层上的上包层和设置在下波导层下的下包层 ,支撑下包层,下波导层,有源层,上波导层和上包层的沉积结构的基板,以及设置在有源层和上波导层之间的上和下光限制层 并且分别在有源层和下波导层之间并且具有小于上波导层和下波导层的能隙的能隙,但是大于有源层的能隙。