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    • 10. 发明申请
    • Nitride-based semiconductor light emitting device and methods of manufacturing the same
    • 氮化物系半导体发光元件及其制造方法
    • US20080012002A1
    • 2008-01-17
    • US11812435
    • 2007-06-19
    • Tan SakongJoong-kon SonHo-sun PaekSung-nam Lee
    • Tan SakongJoong-kon SonHo-sun PaekSung-nam Lee
    • H01L33/00
    • H01L33/06H01L33/32
    • A nitride-based semiconductor light emitting device having a structure capable of improving optical output performance, and methods of manufacturing the same are provided. The active layer may include a first barrier layer formed of InxGa(1-x)N (0.01≦x≦0.05) on a n-type semiconductor layer, a first diffusion barrier layer formed of InyGa(1-y)N (0≦y≦0.01) on the first barrier layer, and doped with an anti-defect agent including at least one of an N (nitrogen) element and a Si (silicon) element, a quantum well layer formed of InzGa(1-z)N (0.25≦z≦0.35) on the first diffusion barrier layer, a second diffusion barrier layer formed of InyGa(1-y)N (0≦y≦0.01) on the quantum well layer, and doped with an anti-defect agent including at least one of an N element and a Si element, and a second barrier layer formed of InxGa(1-x)N (0.01≦x≦0.05) on the second diffusion barrier layer. The nitride-based semiconductor light emitting device may include an n-type semiconductor layer, the active layer, and a p-type semiconductor layer that are sequentially stacked on a substrate.
    • 提供具有能够提高光输出性能的结构的氮化物系半导体发光元件及其制造方法。 有源层可以包括在n型半导体层上由In x Ga(1-x)N(0.01 <= x <= 0.05)形成的第一势垒层 ,在第一阻挡层上由In(x)y(1-y)N(0 <= y <0.01))形成的第一扩散阻挡层,并掺杂有 包括N(氮)元素和Si(硅)元素中的至少一种元素的抗缺陷剂,由In(z)(1-z)形成的量子阱层 在第一扩散阻挡层上的N(0.25 <= z <= 0.35),由In Y y(1-y)N(0)表示的第二扩散阻挡层 并且掺杂有包含N元素和Si元素中的至少一种的抗缺陷剂,以及由In元素和Si元素形成的第二势垒层, 在第二扩散阻挡层上的Ga(1-x)N(0.01 <= x <= 0.05)。 氮化物系半导体发光元件可以包括依次层叠在基板上的n型半导体层,有源层和p型半导体层。