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    • 2. 发明授权
    • Monitoring fluid condition through an aperture
    • 通过孔监测流体状况
    • US06377052B1
    • 2002-04-23
    • US09433495
    • 1999-11-03
    • Peter J. McGinnisPaul G. RopsMark H. PolczynskiFrancis C. EdrozoRichard W. HirtheSteven R. SchachameyerLian Q. Zou
    • Peter J. McGinnisPaul G. RopsMark H. PolczynskiFrancis C. EdrozoRichard W. HirtheSteven R. SchachameyerLian Q. Zou
    • G02N2702
    • G01N27/07G01N27/02G01N33/2888
    • A method for real time monitoring fluid in a vessel with a probe having a pair of electrodes immersed in the fluid. The disclosed probe has the electrodes arranged helically on a rod, sized and configured for insertion in an engine dipstick hole. Preferably, the probe has spiral electrode winding up regions different pitch to provide improved impedance response at low fractional Hertz and high (at least one Hertz) frequencies of excitation. In one version with alternating voltage the difference in current magnitude measured at the low and high frequencies is compared with stored known values for known fluid conditions and an electrical signal indicative of fluid condition is generated. Examples with engine drain oil and heavy duty transmission lubricant fluid are presented. The impedance properties measured can determine the percentage remaining useful life (RUL) of the fluid. In another version of the method the current phase shift angle is measured at the fractional Hertzian frequency; and, from known values of current phase shift angle of the fluid, at various conditions, the condition of the fluid determined. The differential current measured and the measured phase shift angle may be combined, for example, by the square of the sum of the squares procedure to provide an enhanced impedance change indicator.
    • 一种用于具有探针的血管中的实时监测流体的方法,所述探针具有浸在流体中的一对电极。 所公开的探针具有螺旋地布置在杆上的电极,其尺寸和构造用于插入发动机量油尺孔中。 优选地,探针具有不同间距的螺旋电极卷绕区域,以在低分数赫兹和高(至少一赫兹)激发频率下提供改进的阻抗响应。 在具有交流电压的一个版本中,在低频和高频测量的电流幅度差与已知流体条件的已知已知值进行比较,并且产生指示流体状态的电信号。 介绍了发动机排放油和重型变速器润滑油的实例。 测量的阻抗特性可以确定流体的剩余使用寿命(RUL)百分比。 在该方法的另一个版本中,当前相移角以分数赫兹频率测量; 并且根据流体的当前相移角的已知值,在各种条件下,确定流体的状态。 测量的差动电流和测量的相移角可以例如通过平方和的程序的平方相加来提供增强的阻抗变化指示器。
    • 6. 发明授权
    • Method for growing single crystalline silicon with intermediate bonding
agent and combined thermal and photolytic activation
    • 用中间粘合剂生长单晶硅并结合热和光解活化的方法
    • US4940505A
    • 1990-07-10
    • US279566
    • 1988-12-02
    • Steven R. SchachameyerMark W. Beranek
    • Steven R. SchachameyerMark W. Beranek
    • H01L21/205H01L21/306
    • H01L21/02046H01L21/02049H01L21/02381H01L21/02532H01L21/0262H01L21/02658Y10S117/904Y10S148/017Y10S148/048Y10S438/974
    • A method is provided for epitaxially growing single crystalline silicon on a silicon substrate (10) from a silicon-bearing gas (26) at a temperature below the pyrolytic threshold of the gas and at temperatures below those normally required for epitaxial growth. An oxidized silicon substrate (10) is fluorinated (equation 2, FIG. 2) to replace the silicon-oxide layer with an adsorbed fluorinated layer. The substrate is placed in a laser photo-CVD reactor chamber (20), the chamber is evacuated to a sub-UHV level of 10.sup.-3 to 10.sup.-7 Torr, the substrate is heated to 570.degree. C., hydrogen gas (24) is introduced into the chamber, and excimer pulsed ultraviolet laser radiation (32 from laser 12) is applied through the hydrogen gas to impinge the wafer substrate. The combined effect removes regrown native oxide and removes the adsorbed fluorinated layer and breaks the hydrogen into atomic hydrogen such that the latter bonds with the silicon in the substrate and replaces the adsorbed fluorinated layer with silicon-hydrogen bonds (equation 4, FIG. 2). The substrate is maintained at 570.degree. C. and disilane is introduced into the chamber, and excimer pulsed ultraviolet laser radiation is applied through the disilane gas to impinge the wafer substrate. The combined effect breaks the silicon-hydrogen bond and decomposes the disilane to silane and an unstable intermediate SiH.sub.z which decomposes to hydrogen and atomic silicon (equation 5, FIG. 2), which atomic silicon bonds to the now unbonded silicon in the substrate to epitaxially grow single crystalline silicon.
    • 提供了一种用于在低于气体的热解阈值的温度下并且低于通常外延生长所需温度的温度从含硅气体(26)在硅衬底(10)上外延生长单晶硅的方法。 氟化氧化硅衬底(10)(等式2,图2)以用吸附的氟化层代替氧化硅层。 将基板放置在激光光CVD反应器室(20)中,将室抽真空至10-3至10-7乇的亚UHV水平,将基板加热至570℃,加入氢气(24 )引入室中,并且通过氢气施加准分子脉冲紫外激光辐射(来自激光器12的32)以冲击晶片衬底。 组合效应除去再生长的自然氧化物并除去吸附的氟化层并将氢分解成原子氢,使得后者与衬底中的硅结合并用硅 - 氢键取代吸附的氟化层(方程式4,图2) 。 将基板保持在570℃,并将乙硅烷引入室中,并通过乙硅烷气体施加准分子脉冲紫外激光辐射以冲击晶片基板。 组合效应破坏硅 - 氢键并将乙硅烷分解成硅烷和分解成氢和原子硅的不稳定中间SiHH(等式5,图2),其原子硅键合到衬底中的现在未结合的硅到外延 生长单晶硅。