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    • 9. 发明申请
    • High Power Electrical Connector for a Laminated Heater
    • 用于层压加热器的大功率电连接器
    • US20080227323A1
    • 2008-09-18
    • US11687344
    • 2007-03-16
    • Arnold KholodenkoRussell MartinJohn RasnickChristopher Kimball
    • Arnold KholodenkoRussell MartinJohn RasnickChristopher Kimball
    • H01R13/02
    • H05B3/06
    • An electrical connector has a non-conductive outer housing and a spring-loaded conductive assembly mounted within. The non-conductive outer housing has a longitudinal axis along which the spring-loaded conductive assembly is allowed to move over a limited range, in either direction. The conductive assembly includes a conductive contact pad and an conductive elongated shaft which are mated together within the non-conductive outer housing. A spring mounted along the contact shaft and in abutment therewith biases the contact shaft in a direction away from the contact base. When the electrical connector is employed in a chamber lid of a chamber lid assembly having an integrated laminated heater, such as for use in conjunction with a wafer processing chamber, the spring biases a lower surface of the contact shaft against the heater.
    • 电连接器具有非导电外壳和安装在其内的弹簧加载导电组件。 非导电外壳具有纵向轴线,弹簧加载的导电组件沿着该纵向轴线可在任一方向上在有限的范围内移动。 导电组件包括导电接触垫和导电细长轴,其在非导电外壳内配合在一起。 沿着接触轴安装并抵靠的弹簧沿远离接触基座的方向偏压接触轴。 当电连接器用于具有集成层压加热器的室盖组件的室盖中时,诸如与晶片处理室结合使用时,弹簧将接触轴的下表面偏置抵靠加热器。