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1. 发明授权

US07105098B1 Method to control artifacts of microstructural fabrication 有权
标题翻译：控制微结构制作工艺的方法
公开(公告)号：US07105098B1
公开(公告)日：2006-09-12
申请号：US10165356
申请日：2002-06-06
申请人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
发明人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
IPC分类号： B44C1/22
CPC分类号： H01L21/3085 , B81C1/00626
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对被蚀刻到衬底材料中的特征的深度提供差分控制。蚀刻相关的结构伪影的补偿可以通过适当地使用这种蚀刻延迟层来实现。

2. 发明授权

US5624529A Dry etching method for compound semiconductors 失效
标题翻译：化学半导体干蚀刻法
公开(公告)号：US5624529A
公开(公告)日：1997-04-29
申请号：US437532
申请日：1995-05-10
申请人： Randy J. Shul , Christopher Constantine
发明人： Randy J. Shul , Christopher Constantine
IPC分类号： H01L21/306 , H01L21/3213 , H01S5/183 , H01S5/20 , H01S5/227 , H01S5/343 , H01L21/00
CPC分类号： B82Y20/00 , H01L21/30621 , H01L21/32136 , H01S5/209 , H01S5/2275 , H01S5/34326
摘要： A dry etching method. According to the present invention, a gaseous plasma comprising, at least in part, boron trichloride, methane, and hydrogen may be used for dry etching of a compound semiconductor material containing layers including aluminum, or indium, or both. Material layers of a compound semiconductor alloy such as AlGaInP or the like may be anisotropically etched for forming electronic devices including field-effect transistors and heterojunction bipolar transistors and for forming photonic devices including vertical-cavity surface-emitting lasers, edge-emitting lasers, and reflectance modulators.
摘要翻译：干蚀刻法。根据本发明，至少部分地包含三氯化硼，甲烷和氢气的气态等离子体可用于干法蚀刻包含铝或铟的二者的化合物半导体材料或两者。可以各向异性地蚀刻诸如AlGaInP等的化合物半导体合金的材料层，以形成包括场效应晶体管和异质结双极晶体管的电子器件，并且用于形成包括垂直腔表面发射激光器，边缘发射激光器和反射调制剂。

3. 发明授权

US06930051B1 Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer 有权
标题翻译：通过使用蚀刻延迟层制造多层硅基微结构的方法
公开(公告)号：US06930051B1
公开(公告)日：2005-08-16
申请号：US10165861
申请日：2002-06-06
申请人： Ronald P. Manginell , W. Kent Schubert , Randy J. Shul
发明人： Ronald P. Manginell , W. Kent Schubert , Randy J. Shul
IPC分类号： B81C1/00 , H01L21/302 , H01L21/308
CPC分类号： B81C1/00626 , B81C2201/0142 , H01L21/3083
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Structures having features with different depth can be formed thereby in a single etching step.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对蚀刻到衬底材料中的特征的深度提供差分控制。可以在单个蚀刻步骤中形成具有不同深度的特征的结构。

4. 发明授权

US5814238A Method for dry etching of transition metals 失效
标题翻译：过渡金属的干蚀刻方法
公开(公告)号：US5814238A
公开(公告)日：1998-09-29
申请号：US542149
申请日：1995-10-12
申请人： Carol I. H. Ashby , Albert G. Baca , Peter Esherick , John E. Parmeter , Dennis J. Rieger , Randy J. Shul
发明人： Carol I. H. Ashby , Albert G. Baca , Peter Esherick , John E. Parmeter , Dennis J. Rieger , Randy J. Shul
IPC分类号： C23F4/00 , H01L21/3213 , B44C1/22 , C03C15/00 , C23F1/00
CPC分类号： C23F4/00 , H01L21/32136
摘要： A method for dry etching of transition metals. The method for dry etching of a transition metal (or a transition metal alloy such as a silicide) on a substrate comprises providing at least one nitrogen- or phosphorous-containing .pi.-acceptor ligand in proximity to the transition metal, and etching the transition metal to form a volatile transition metal/.pi.-acceptor ligand complex. The dry etching may be performed in a plasma etching system such as a reactive ion etching (RIE) system, a downstream plasma etching system (i.e. a plasma afterglow), a chemically-assisted ion beam etching (CAIBE) system or the like. The dry etching may also be performed by generating the .pi.-acceptor ligands directly from a ligand source gas (e.g. nitrosyl ligands generated from nitric oxide), or from contact with energized particles such as photons, electrons, ions, atoms, or molecules. In some preferred embodiments of the present invention, an intermediary reactant species such as carbonyl or a halide ligand is used for an initial chemical reaction with the transition metal, with the intermediary reactant species being replaced at least in part by the .pi.-acceptor ligand for forming the volatile transition metal/.pi.-acceptor ligand complex.
摘要翻译：一种干法蚀刻过渡金属的方法。过渡金属（或过渡金属合金如硅化物）在基板上的干蚀刻方法包括在过渡金属附近提供至少一种含氮或磷的pi受体配体，并蚀刻过渡金属以形成挥发性过渡金属/π-受体配体复合物。干蚀刻可以在诸如反应离子蚀刻（RIE）系统，下游等离子体蚀刻系统（等离子体余辉），化学辅助离子束蚀刻（CAIBE）系统等等的等离子体蚀刻系统中进行。干蚀刻也可以通过直接从配体源气体（例如由一氧化氮产生的亚硝酰基配体）或与激发的粒子例如光子，电子，离子，原子或分子的接触产生直接受体配体来进行。在本发明的一些优选实施方案中，中间反应物种如羰基或卤化物配体用于与过渡金属的初始化学反应，其中中间反应物种至少部分被pi受体配体替代形成挥发性过渡金属/π-受体配体复合物。

5. 发明授权

US08597985B1 MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads 有权
标题翻译： MEMS封装，具有蚀刻和薄化盖晶片以形成盖子并暴露器件晶片接合焊盘
公开(公告)号：US08597985B1
公开(公告)日：2013-12-03
申请号：US13364166
申请日：2012-02-01
申请人： Rajen Chanchani , Christopher Nordquist , Roy H. Olsson , Tracy C. Peterson , Randy J. Shul , Catalina Ahlers , Thomas A. Plut , Gary A. Patrizi
发明人： Rajen Chanchani , Christopher Nordquist , Roy H. Olsson , Tracy C. Peterson , Randy J. Shul , Catalina Ahlers , Thomas A. Plut , Gary A. Patrizi
IPC分类号： H01L21/00
CPC分类号： B81C1/00904 , B81C2203/0118 , B81C2203/035
摘要： In wafer-level packaging of microelectromechanical (MEMS) devices a lid wafer is bonded to a MEMS wafer in a predetermined aligned relationship. Portions of the lid wafer are removed to separate the lid wafer into lid portions that respectively correspond in alignment with MEMS devices on the MEMS wafer, and to expose areas of the MEMS wafer that respectively contain sets of bond pads respectively coupled to the MEMS devices.
摘要翻译：在微机电（MEMS）器件的晶片级封装中，盖晶片以预定的对准关系结合到MEMS晶片。去除盖晶片的部分以将盖晶片分离成分别对应于MEMS晶片上的MEMS器件的盖部分，并且暴露分别包含分别耦合到MEMS器件的接合焊盘组的MEMS晶片的区域。

6. 发明授权

US07051656B1 Microelectromechanical safing and arming apparatus 有权
标题翻译：微机电安全和布防装置
公开(公告)号：US07051656B1
公开(公告)日：2006-05-30
申请号：US10641980
申请日：2003-08-14
申请人： David R. Koehler , Darren A. Hoke , Louis S. Weichman , George E. Vernon , Randy J. Shul , Michael H. Beggans
发明人： David R. Koehler , Darren A. Hoke , Louis S. Weichman , George E. Vernon , Randy J. Shul , Michael H. Beggans
IPC分类号： F42C15/24
CPC分类号： F42C15/26 , F42C15/005 , F42C15/184 , F42C15/24 , H01H2001/0047
摘要： A two-stage acceleration sensing apparatus is disclosed which has applications for use in a fuze assembly for a projected munition. The apparatus, which can be formed by bulk micromachining or LIGA, can sense acceleration components along two orthogonal directions to enable movement of a shuttle from an “as-fabricated” position to a final position and locking of the shuttle in the final position. With the shuttle moved to the final position, the apparatus can perform one or more functions including completing an explosive train or an electrical switch closure, or allowing a light beam to be transmitted through the device.
摘要翻译：公开了一种两级加速度感测装置，其具有用于预计弹药的引信组件中的应用。可以通过体积微加工或LIGA形成的装置可以沿着两个正交方向感测加速度分量，以使梭子从“制造”位置移动到最终位置，并将梭子锁定在最终位置。当梭子移动到最终位置时，装置可以执行一个或多个功能，包括完成爆炸火车或电开关闭合，或允许光束通过装置传输。

7. 发明授权

US06820469B1 Microfabricated teeter-totter resonator 有权
标题翻译：微型跷跷板谐振器
公开(公告)号：US06820469B1
公开(公告)日：2004-11-23
申请号：US10436597
申请日：2003-05-12
申请人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
发明人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
IPC分类号： G01N1110
CPC分类号： G01H13/00 , G01H11/06
摘要： A microfabricated teeter-totter resonator comprises a frame, a paddle pivotably anchored to the frame by pivot arms that define an axis of rotation, a current conductor line on a surface of the paddle, means for applying a static magnetic field substantially perpendicular to the rotational axis and in the plane of the paddle, and means for energizing the current conductor line with an alternating current. A Lorentz force is generated by the interaction of the magnetic field with the current flowing in the conductor line, causing the paddle to oscillate about the axis of rotation. The teeter-totter resonator can be fabricated with micromachining techniques with materials used in the integrated circuits manufacturing industry. The microfabricated teeter-totter resonator has many varied applications, both as an actuation device and as a sensor. When used as a chemical sensor, a chemically sensitive coating can be disposed on one or both surfaces of the paddle to enhance the absorption of chemical analytes from a fluid stream. The resulting mass change can be detected as a change in the resonant frequency or phase of the oscillatory motion of the paddle.
摘要翻译：微制造的跷跷板谐振器包括框架，通过限定旋转轴线的枢转臂可枢转地锚固到框架的桨，桨的表面上的电流导线，用于施加基本垂直于旋转的静态磁场的装置并且在桨叶的平面中，以及用于以交流电激励电流导线的装置。洛伦兹力通过磁场与在导体线中流动的电流的相互作用产生，导致桨绕着旋转轴线振荡。跷跷板谐振器可以用集成电路制造业中使用的材料的微加工技术制造。微制造的跷跷板谐振器具有许多不同的应用，既作为致动装置又用作传感器。当用作化学传感器时，化学敏感涂层可以设置在桨的一个或两个表面上，以增强化学分析物从流体流中的吸收。所产生的质量变化可以被检测为桨叶的振荡运动的共振频率或相位的变化。

8. 发明授权

US5866925A Gallium nitride junction field-effect transistor 失效
标题翻译：氮化镓结场效应晶体管
公开(公告)号：US5866925A
公开(公告)日：1999-02-02
申请号：US781068
申请日：1997-01-09
申请人： John C. Zolper , Randy J. Shul
发明人： John C. Zolper , Randy J. Shul
IPC分类号： H01L21/265 , H01L21/337 , H01L29/10 , H01L29/20 , H01L29/808 , H01L29/80
CPC分类号： H01L29/66924 , H01L21/2656 , H01L29/1075 , H01L29/20 , H01L29/808
摘要： An all-ion implanted gallium-nitride (GaN) junction field-effect transistor (JFET) and method of making the same. Also disclosed are various ion implants, both n- and p-type, together with or without phosphorous co-implantation, in selected III-V semiconductor materials.
摘要翻译：全离子注入氮化镓（GaN）结场效应晶体管（JFET）及其制造方法。还公开了在选定的III-V半导体材料中的各种离子植入物，包括n型和p型，以及磷共注入。

9. 发明授权

US07148436B1 Microelectromechanical acceleration-sensing apparatus 有权
标题翻译：微机电加速度传感装置
公开(公告)号：US07148436B1
公开(公告)日：2006-12-12
申请号：US10641860
申请日：2003-08-14
申请人： Robb M. Lee , Randy J. Shul , Marc A. Polosky , Darren A. Hoke , George E. Vernon
发明人： Robb M. Lee , Randy J. Shul , Marc A. Polosky , Darren A. Hoke , George E. Vernon
IPC分类号： H01H35/02
CPC分类号： H01H1/0036 , H01H35/14 , H01H2001/0047
摘要： An acceleration-sensing apparatus is disclosed which includes a moveable shuttle (i.e. a suspended mass) and a latch for capturing and holding the shuttle when an acceleration event is sensed above a predetermined threshold level. The acceleration-sensing apparatus provides a switch closure upon sensing the acceleration event and remains latched in place thereafter. Examples of the acceleration-sensing apparatus are provided which are responsive to an acceleration component in a single direction (i.e. a single-sided device) or to two oppositely-directed acceleration components (i.e. a dual-sided device). A two-stage acceleration-sensing apparatus is also disclosed which can sense two acceleration events separated in time. The acceleration-sensing apparatus of the present invention has applications, for example, in an automotive airbag deployment system.
摘要翻译：公开了一种加速度感测装置，其包括可移动梭（即，悬挂质量）和用于在高于预定阈值水平感测加速度事件时捕捉和保持梭子的闩锁。加速度传感装置在感测加速度事件时提供开关闭合，此后保持锁定在适当位置。提供加速度感测装置的例子，其响应于单个方向上的加速度分量（即，单侧装置）或两个相反方向的加速度分量（即双面装置）。还公开了可以感测在时间上分离的两个加速度事件的两级加速度感测装置。本发明的加速度感测装置例如可以应用于汽车安全气囊展开系统。

10. 发明授权

US06823720B1 Method for chemical sensing using a microfabricated teeter-totter resonator 有权
标题翻译：使用微制造跷跷板谐振器的化学感测方法
公开(公告)号：US06823720B1
公开(公告)日：2004-11-30
申请号：US10436596
申请日：2003-05-12
申请人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
发明人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
IPC分类号： G01N1110
CPC分类号： G01N29/222 , G01N11/16 , G01N29/022 , G01N29/036 , G01N2291/0256 , G01N2291/0421
摘要： A method for sensing a chemical analyte in a fluid stream comprises providing a microfabricated teeter-totter resonator that relies upon a Lorentz force to cause oscillation in a paddle, applying a static magnetic field substantially aligned in-plane with the paddle, energizing a current conductor line on a surface of the paddle with an alternating electrical current to generate the Lorentz force, exposing the resonator to the analyte, and detecting the response of the oscillatory motion of the paddle to the chemical analyte. Preferably, a chemically sensitive coating is disposed on at least one surface of the paddle to enhance the sorption of the analyte by the paddle. The concentration of the analyte in a fluid stream can be determined by measuring the change in the resonant frequency or phase of the teeter-totter resonator as the chemical analyte is added to or removed from the paddle.
摘要翻译：用于感测流体流中的化学分析物的方法包括提供依赖于洛伦兹力在桨中产生振荡的微制造的跷跷板谐振器，施加与桨平行地基本上对准的静态磁场，激励电流导体在具有交流电流的桨的表面上行线以产生洛伦兹力，将谐振器暴露于分析物，以及检测桨对化学分析物的振荡运动的响应。优选地，化学敏感的涂层设置在桨的至少一个表面上以增强桨的分析物的吸附。分析物在流体物流中的浓度可以通过测量随着化学分析物被添加到桨中或从桨中移出的跷跷板谐振器的共振频率或相位的变化来确定。

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