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1. 发明授权

US06820469B1 Microfabricated teeter-totter resonator 有权
标题翻译：微型跷跷板谐振器
公开(公告)号：US06820469B1
公开(公告)日：2004-11-23
申请号：US10436597
申请日：2003-05-12
申请人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
发明人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
IPC分类号： G01N1110
CPC分类号： G01H13/00 , G01H11/06
摘要： A microfabricated teeter-totter resonator comprises a frame, a paddle pivotably anchored to the frame by pivot arms that define an axis of rotation, a current conductor line on a surface of the paddle, means for applying a static magnetic field substantially perpendicular to the rotational axis and in the plane of the paddle, and means for energizing the current conductor line with an alternating current. A Lorentz force is generated by the interaction of the magnetic field with the current flowing in the conductor line, causing the paddle to oscillate about the axis of rotation. The teeter-totter resonator can be fabricated with micromachining techniques with materials used in the integrated circuits manufacturing industry. The microfabricated teeter-totter resonator has many varied applications, both as an actuation device and as a sensor. When used as a chemical sensor, a chemically sensitive coating can be disposed on one or both surfaces of the paddle to enhance the absorption of chemical analytes from a fluid stream. The resulting mass change can be detected as a change in the resonant frequency or phase of the oscillatory motion of the paddle.
摘要翻译：微制造的跷跷板谐振器包括框架，通过限定旋转轴线的枢转臂可枢转地锚固到框架的桨，桨的表面上的电流导线，用于施加基本垂直于旋转的静态磁场的装置并且在桨叶的平面中，以及用于以交流电激励电流导线的装置。洛伦兹力通过磁场与在导体线中流动的电流的相互作用产生，导致桨绕着旋转轴线振荡。跷跷板谐振器可以用集成电路制造业中使用的材料的微加工技术制造。微制造的跷跷板谐振器具有许多不同的应用，既作为致动装置又用作传感器。当用作化学传感器时，化学敏感涂层可以设置在桨的一个或两个表面上，以增强化学分析物从流体流中的吸收。所产生的质量变化可以被检测为桨叶的振荡运动的共振频率或相位的变化。

2. 发明授权

US06772513B1 Method for making electro-fluidic connections in microfluidic devices 有权
标题翻译：在微流体装置中制作电流连接的方法
公开(公告)号：US06772513B1
公开(公告)日：2004-08-10
申请号：US10184782
申请日：2002-06-27
申请人： Gregory C. Frye-Mason , David Martinez , Ronald P. Manginell , Edwin J. Heller , Rajen Chanchani
发明人： Gregory C. Frye-Mason , David Martinez , Ronald P. Manginell , Edwin J. Heller , Rajen Chanchani
IPC分类号： H25K334
CPC分类号： B01L3/502715 , B01J2219/0081 , B01L3/502707 , B01L3/565 , B01L2200/027 , B01L2200/028 , B01L2200/10 , B01L2300/044 , B01L2300/0645 , B01L2300/0816 , B01L2300/0867 , B01L2400/0415 , G01N30/6095 , Y10T29/49117 , Y10T29/4913 , Y10T29/49144 , Y10T137/87249
摘要： A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.
摘要翻译：用于在微流体装置中形成电流互连的方法包括在包含有源电子元件和微流体基底的模具上的匹配接合焊盘之间形成电连接，并形成限定有源电元件和流体馈通的流体密封环。优选地，电连接和密封环在单个结合步骤中形成。简单的方法对于化学微量分析系统特别有用，其中多个微量分析组分例如化学预浓缩器，气相色谱柱和表面声波检测器在具有与外部支持电子器件电连接的混合微流体衬底上流体互连。

3. 发明授权

US06699392B1 Method to fabricate silicon chromatographic column comprising fluid ports 有权
标题翻译：制造包含流体端口的硅层析柱的方法
公开(公告)号：US06699392B1
公开(公告)日：2004-03-02
申请号：US10167238
申请日：2002-06-10
申请人： Ronald P. Manginell , Gregory C. Frye-Mason , Edwin J. Heller , Douglas R. Adkins
发明人： Ronald P. Manginell , Gregory C. Frye-Mason , Edwin J. Heller , Douglas R. Adkins
IPC分类号： B01D1508
CPC分类号： G01N30/6095
摘要： A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
摘要翻译：已经开发了一种用于制造包含贯穿基板流体端口的硅层析柱的新方法。这种新方法可以制造多层互连的硅层析柱。

4. 发明授权

US06823720B1 Method for chemical sensing using a microfabricated teeter-totter resonator 有权
标题翻译：使用微制造跷跷板谐振器的化学感测方法
公开(公告)号：US06823720B1
公开(公告)日：2004-11-30
申请号：US10436596
申请日：2003-05-12
申请人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
发明人： Douglas Ray Adkins , Edwin J. Heller , Randy J. Shul
IPC分类号： G01N1110
CPC分类号： G01N29/222 , G01N11/16 , G01N29/022 , G01N29/036 , G01N2291/0256 , G01N2291/0421
摘要： A method for sensing a chemical analyte in a fluid stream comprises providing a microfabricated teeter-totter resonator that relies upon a Lorentz force to cause oscillation in a paddle, applying a static magnetic field substantially aligned in-plane with the paddle, energizing a current conductor line on a surface of the paddle with an alternating electrical current to generate the Lorentz force, exposing the resonator to the analyte, and detecting the response of the oscillatory motion of the paddle to the chemical analyte. Preferably, a chemically sensitive coating is disposed on at least one surface of the paddle to enhance the sorption of the analyte by the paddle. The concentration of the analyte in a fluid stream can be determined by measuring the change in the resonant frequency or phase of the teeter-totter resonator as the chemical analyte is added to or removed from the paddle.
摘要翻译：用于感测流体流中的化学分析物的方法包括提供依赖于洛伦兹力在桨中产生振荡的微制造的跷跷板谐振器，施加与桨平行地基本上对准的静态磁场，激励电流导体在具有交流电流的桨的表面上行线以产生洛伦兹力，将谐振器暴露于分析物，以及检测桨对化学分析物的振荡运动的响应。优选地，化学敏感的涂层设置在桨的至少一个表面上以增强桨的分析物的吸附。分析物在流体物流中的浓度可以通过测量随着化学分析物被添加到桨中或从桨中移出的跷跷板谐振器的共振频率或相位的变化来确定。

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