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1. 发明授权

US07105098B1 Method to control artifacts of microstructural fabrication 有权
标题翻译：控制微结构制作工艺的方法
公开(公告)号：US07105098B1
公开(公告)日：2006-09-12
申请号：US10165356
申请日：2002-06-06
申请人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
发明人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
IPC分类号： B44C1/22
CPC分类号： H01L21/3085 , B81C1/00626
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对被蚀刻到衬底材料中的特征的深度提供差分控制。蚀刻相关的结构伪影的补偿可以通过适当地使用这种蚀刻延迟层来实现。

2. 发明授权

US06930051B1 Method to fabricate multi-level silicon-based microstructures via use of an etching delay layer 有权
标题翻译：通过使用蚀刻延迟层制造多层硅基微结构的方法
公开(公告)号：US06930051B1
公开(公告)日：2005-08-16
申请号：US10165861
申请日：2002-06-06
申请人： Ronald P. Manginell , W. Kent Schubert , Randy J. Shul
发明人： Ronald P. Manginell , W. Kent Schubert , Randy J. Shul
IPC分类号： B81C1/00 , H01L21/302 , H01L21/308
CPC分类号： B81C1/00626 , B81C2201/0142 , H01L21/3083
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Structures having features with different depth can be formed thereby in a single etching step.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对蚀刻到衬底材料中的特征的深度提供差分控制。可以在单个蚀刻步骤中形成具有不同深度的特征的结构。

3. 发明授权

US07799280B1 Tortuous path chemical preconcentrator 有权
标题翻译：曲折路径化学预浓缩器
公开(公告)号：US07799280B1
公开(公告)日：2010-09-21
申请号：US11355480
申请日：2006-02-16
申请人： Ronald P. Manginell , Patrick R. Lewis , Douglas R. Adkins , David R. Wheeler , Robert J. Simonson
发明人： Ronald P. Manginell , Patrick R. Lewis , Douglas R. Adkins , David R. Wheeler , Robert J. Simonson
IPC分类号： B01L99/00
CPC分类号： B01L3/502753 , B01L2200/0668 , B01L2300/0883 , B01L2300/16 , B01L2400/086 , G01N1/405 , Y10T436/2575
摘要： A non-planar, tortuous path chemical preconcentrator has a high internal surface area having a heatable sorptive coating that can be used to selectively collect and concentrate one or more chemical species of interest from a fluid stream that can be rapidly released as a concentrated plug into an analytical or microanalytical chain for separation and detection. The non-planar chemical preconcentrator comprises a sorptive support structure having a tortuous flow path. The tortuosity provides repeated twists, turns, and bends to the flow, thereby increasing the interfacial contact between sample fluid stream and the sorptive material. The tortuous path also provides more opportunities for desorption and readsorption of volatile species. Further, the thermal efficiency of the tortuous path chemical preconcentrator is comparable or superior to the prior non-planar chemical preconcentrator. Finally, the tortuosity can be varied in different directions to optimize flow rates during the adsorption and desorption phases of operation of the preconcentrator.
摘要翻译：非平面曲折路径化学预浓缩器具有高内表面积，其具有可加热吸附涂层，其可用于选择性地收集和浓缩一种或多种感兴趣的化学物质，所述流体物流可作为集中塞快速释放用于分离和检测的分析或微量分析链。非平面化学预浓缩器包括具有曲折流动路径的吸附支撑结构。弯曲度为流动提供了反复的扭转，弯曲和弯曲，从而增加了样品流体流与吸附材料之间的界面接触。曲折的路径还为挥发物种的解吸和吸收提供了更多的机会。此外，曲折路径化学预浓缩器的热效率相当于或优于现有的非平面化学预浓缩器。最后，曲折度可以在不同的方向上变化，以优化预浓缩器的吸附和解吸阶段的流速。

4. 发明授权

US07727314B1 Methods for improved preconcentrators 有权
标题翻译：改善预浓缩器的方法
公开(公告)号：US07727314B1
公开(公告)日：2010-06-01
申请号：US11699904
申请日：2007-01-30
申请人： Ronald P. Manginell , Patrick R. Lewis , Murat Okandan
发明人： Ronald P. Manginell , Patrick R. Lewis , Murat Okandan
IPC分类号： B01D53/02 , G01N25/00
CPC分类号： G01N1/405 , G01N1/4022 , G01N30/08 , G01N30/6095
摘要： The present invention relates generally to chemical analysis (e.g. by gas chromatography), and in particular to a compact chemical preconcentrator formed on a substrate with a heatable sorptive membrane that can be used to accumulate and concentrate one or more chemical species of interest over time and then rapidly release the concentrated chemical species upon demand for chemical analysis.
摘要翻译：本发明一般涉及化学分析（例如通过气相色谱法），特别涉及形成在具有可加热吸附膜的基底上的紧凑型化学预浓缩器，其可用于在一段时间内积聚和浓缩一种或多种感兴趣的化学物种，然后根据化学分析的需要快速释放浓缩的化学物质。

5. 发明授权

US07708943B1 Microfabricated fuel heating value monitoring device 有权
标题翻译：微型燃油发热值监测装置
公开(公告)号：US07708943B1
公开(公告)日：2010-05-04
申请号：US11355661
申请日：2006-02-16
申请人： Alex L. Robinson , Ronald P. Manginell , Matthew W. Moorman
发明人： Alex L. Robinson , Ronald P. Manginell , Matthew W. Moorman
IPC分类号： G01N25/20
CPC分类号： G01N33/225
摘要： A microfabricated fuel heating value monitoring device comprises a microfabricated gas chromatography column in combination with a catalytic microcalorimeter. The microcalorimeter can comprise a reference thermal conductivity sensor to provide diagnostics and surety. Using microfabrication techniques, the device can be manufactured in production quantities at a low per-unit cost. The microfabricated fuel heating value monitoring device enables continuous calorimetric determination of the heating value of natural gas with a 1 minute analysis time and 1.5 minute cycle time using air as a carrier gas. This device has applications in remote natural gas mining stations, pipeline switching and metering stations, turbine generators, and other industrial user sites. For gas pipelines, the device can improve gas quality during transfer and blending, and provide accurate financial accounting. For industrial end users, the device can provide continuous feedback of physical gas properties to improve combustion efficiency during use.
摘要翻译：微加料燃料加热值监测装置包括与催化微量热计相结合的微细气相色谱柱。微量热计可以包括参考热导率传感器以提供诊断和保证。使用微细加工技术，该设备可以以低单位成本生产。微加料燃料加热值监视装置能够使用空气作为载气，以1分钟分析时间和1.5分钟循环时间连续测定天然气的发热值。该设备适用于偏远天然气采矿站，管道交换和计量站，涡轮发电机等工业用户场所。对于天然气管道，该设备可以在转移和混合过程中提高气体质量，并提供准确的财务会计。对于工业终端用户，该设备可以提供物理气体性能的连续反馈，以提高使用过程中的燃烧效率。

6. 发明授权

US07078237B1 Micropyrolyzer for chemical analysis of liquid and solid samples 有权
标题翻译：用于液体和固体样品的化学分析的微溶胶
公开(公告)号：US07078237B1
公开(公告)日：2006-07-18
申请号：US10035537
申请日：2001-10-23
申请人： Curtis D. Mowry , Catherine H. Morgan , Ronald P. Manginell , Gregory C. Frye-Mason
发明人： Curtis D. Mowry , Catherine H. Morgan , Ronald P. Manginell , Gregory C. Frye-Mason
IPC分类号： G01N25/20
CPC分类号： G01N31/12
摘要： A micropyrolyzer has applications to pyrolysis, heated chemistry, and thermal desorption from liquid or solid samples. The micropyrolyzer can be fabricated from semiconductor materials and metals using standard integrated circuit technologies. The micropyrolyzer enables very small volume samples of less than 3 microliters and high sample heating rates of greater than 20° C. per millisecond. A portable analyzer for the field analysis of liquid and solid samples can be realized when the micropyrolyzer is combined with a chemical preconcentrator, chemical separator, and chemical detector. Such a portable analyzer can be used in a variety of government and industrial applications, such as non-proliferation monitoring, chemical and biological warfare detection, industrial process control, water and air quality monitoring, and industrial hygiene.
摘要翻译：微型搅拌器具有从液体或固体样品中进行热解，加热化学和热解吸的应用。微型硅胶可以使用标准集成电路技术由半导体材料和金属制成。微型分选仪可实现小于3微升的非常小体积的样品和大于20℃/毫秒的高样品加热速率。当微型分解器与化学预浓缩器，化学分离器和化学检测器组合时，可以实现液体和固体样品的现场分析的便携式分析仪。这种便携式分析仪可用于各种政府和工业应用，如不扩散监测，化学和生物战争检测，工业过程控制，水和空气质量监测以及工业卫生。

7. 发明授权

US08298488B1 Microfabricated thermionic detector 有权
标题翻译：微型热离子检测器
公开(公告)号：US08298488B1
公开(公告)日：2012-10-30
申请号：US10981010
申请日：2004-11-04
申请人： Patrick R. Lewis , Ronald P. Manginell , David R. Wheeler , Daniel E. Trudell
发明人： Patrick R. Lewis , Ronald P. Manginell , David R. Wheeler , Daniel E. Trudell
IPC分类号： G01N27/00
CPC分类号： G01N30/64 , G01N2030/647
摘要： A microfabricated TID comprises a microhotplate and a thermionic source disposed on the microhotplate. The microfabricated TID can provide high sensitivity and selectivity to nitrogen- and phosphorous-containing compounds and other compounds containing electronegative function groups. The microfabricated TID can be microfabricated with semiconductor-based materials. The microfabricated TID can be combined with a microfabricated separation column and used in microanalytical system for the rapid on-site detection of pesticides, chemical warfare agents, explosives, pharmaceuticals, and other organic compounds that contain nitrogen or phosphorus.
摘要翻译：微制造的TID包括设置在微电子板上的微型板和热离子源。微加工的TID可以为含氮和磷的化合物和其他含有负官能团的化合物提供高灵敏度和选择性。微制造的TID可以用半导体材料进行微制造。微制造的TID可以与微加工的分离柱结合使用，用于微量分析系统，用于快速现场检测农药，化学战剂，爆炸物，药物和含氮或磷的其他有机化合物。

8. 发明授权

US07913534B1 Microfabricated field calibration assembly for analytical instruments 有权
标题翻译：用于分析仪器的微型现场校准组件
公开(公告)号：US07913534B1
公开(公告)日：2011-03-29
申请号：US11651890
申请日：2007-01-10
申请人： Alex L. Robinson , Ronald P. Manginell , Matthew W. Moorman , Philip J. Rodacy , Robert J. Simonson
发明人： Alex L. Robinson , Ronald P. Manginell , Matthew W. Moorman , Philip J. Rodacy , Robert J. Simonson
IPC分类号： G01N21/00
CPC分类号： G01N35/00693 , G01N2001/2893
摘要： A microfabricated field calibration assembly for use in calibrating analytical instruments and sensor systems. The assembly comprises a circuit board comprising one or more resistively heatable microbridge elements, an interface device that enables addressable heating of the microbridge elements, and, in some embodiments, a means for positioning the circuit board within an inlet structure of an analytical instrument or sensor system.
摘要翻译：用于校准分析仪器和传感器系统的微制造现场校准组件。该组件包括电路板，该电路板包括一个或多个电阻可加热微桥元件，能够对微桥元件进行寻址加热的接口装置，并且在一些实施例中，用于将电路板定位在分析仪器或传感器的入口结构内的装置系统。

9. 发明授权

US6096656A Formation of microchannels from low-temperature plasma-deposited silicon oxynitride 有权
标题翻译：从低温等离子体沉积的氮氧化硅形成微通道
公开(公告)号：US6096656A
公开(公告)日：2000-08-01
申请号：US339715
申请日：1999-06-24
申请人： Carolyn M. Matzke , Carol I. H. Ashby , Monica M. Bridges , Ronald P. Manginell
发明人： Carolyn M. Matzke , Carol I. H. Ashby , Monica M. Bridges , Ronald P. Manginell
IPC分类号： B81C1/00 , H01L21/00
CPC分类号： B81C1/00071 , B81C1/00436 , G01N27/44791 , G01N30/6095 , B81B2201/058 , B81C2201/0109
摘要： A process for forming one or more fluid microchannels on a substrate is disclosed that is compatible with the formation of integrated circuitry on the substrate. The microchannels can be formed below an upper surface of the substrate, above the upper surface, or both. The microchannels are formed by depositing a covering layer of silicon oxynitride over a mold formed of a sacrificial material such as photoresist which can later be removed. The silicon oxynitride is deposited at a low temperature (.ltoreq.100.degree. C.) and preferably near room temperature using a high-density plasma (e.g. an electron-cyclotron resonance plasma or an inductively-coupled plasma). In some embodiments of the present invention, the microchannels can be completely lined with silicon oxynitride to present a uniform material composition to a fluid therein. The present invention has applications for forming microchannels for use in chromatography and electrophoresis. Additionally, the microchannels can be used for electrokinetic pumping, or for localized or global substrate cooling.
摘要翻译：公开了一种在衬底上形成一个或多个流体微通道的方法，其与在衬底上形成集成电路相兼容。微通道可以形成在衬底的上表面下方，上表面上方或两者。通过在由牺牲材料（例如光致抗蚀剂）形成的模具上沉积氮氧化硅覆盖层而形成微通道，后者可以被去除。使用高密度等离子体（例如电子回旋共振等离子体或电感耦合等离子体）在低温（<100℃），优选在室温附近沉积氧氮化硅。在本发明的一些实施例中，微通道可以用氮氧化硅完全衬里，以向其中的流体呈现均匀的材料组成。本发明具有形成用于色谱和电泳的微通道的应用。此外，微通道可用于电动泵送，也可用于局部或全局衬底冷却。

10. 发明授权

US5820922A Method for localized deposition of noble metal catalysts with control of morphology 失效
标题翻译：用于形态学控制的贵金属催化剂的局部沉积方法
公开(公告)号：US5820922A
公开(公告)日：1998-10-13
申请号：US767987
申请日：1996-12-17
申请人： Antonio J. Ricco , Ronald P. Manginell , Robert J. Huber
发明人： Antonio J. Ricco , Ronald P. Manginell , Robert J. Huber
IPC分类号： C23C16/18 , C23C16/46 , G01N27/16 , C23C16/40
CPC分类号： G01N27/16 , C23C16/18 , C23C16/46
摘要： A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500 .degree. C.; Pt deposits only on the hot filament. The filaments tested to date are 2 .mu.m thick .times.10 .mu.m wide .times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer.
摘要翻译：一种可燃气体传感器，其使用电阻加热的贵金属涂覆的微加工多晶硅丝来量热检测可燃气体的存在和浓度。通过CVD将Pt催化Pt薄膜从前体Pt（acac）2沉积到电阻加热至约500℃的微丝上; Pt仅在热丝上沉积。迄今为止测试的长丝为2μm厚x10μm宽x100,250,500或1000μm长的多晶Si; 有些被外涂了0.25μm厚的保护性CVD Si 3 N 4层。

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