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    • 2. 发明授权
    • Microelectromechanical acceleration-sensing apparatus
    • 微机电加速度传感装置
    • US07148436B1
    • 2006-12-12
    • US10641860
    • 2003-08-14
    • Robb M. LeeRandy J. ShulMarc A. PoloskyDarren A. HokeGeorge E. Vernon
    • Robb M. LeeRandy J. ShulMarc A. PoloskyDarren A. HokeGeorge E. Vernon
    • H01H35/02
    • H01H1/0036H01H35/14H01H2001/0047
    • An acceleration-sensing apparatus is disclosed which includes a moveable shuttle (i.e. a suspended mass) and a latch for capturing and holding the shuttle when an acceleration event is sensed above a predetermined threshold level. The acceleration-sensing apparatus provides a switch closure upon sensing the acceleration event and remains latched in place thereafter. Examples of the acceleration-sensing apparatus are provided which are responsive to an acceleration component in a single direction (i.e. a single-sided device) or to two oppositely-directed acceleration components (i.e. a dual-sided device). A two-stage acceleration-sensing apparatus is also disclosed which can sense two acceleration events separated in time. The acceleration-sensing apparatus of the present invention has applications, for example, in an automotive airbag deployment system.
    • 公开了一种加速度感测装置,其包括可移动梭(即,悬挂质量)和用于在高于预定阈值水平感测加速度事件时捕捉和保持梭子的闩锁。 加速度传感装置在感测加速度事件时提供开关闭合,此后保持锁定在适当位置。 提供加速度感测装置的例子,其响应于单个方向上的加速度分量(即,单侧装置)或两个相反方向的加速度分量(即双面装置)。 还公开了可以感测在时间上分离的两个加速度事件的两级加速度感测装置。 本发明的加速度感测装置例如可以应用于汽车安全气囊展开系统。
    • 4. 发明授权
    • Surface-micromachined chain for use in microelectromechanical structures
    • 用于微机电结构的表面微加工链
    • US06328903B1
    • 2001-12-11
    • US09520643
    • 2000-03-07
    • George E. Vernon, Sr.
    • George E. Vernon, Sr.
    • B81B500
    • H02N1/008B81B5/00F16H7/06
    • A surface-micromachined chain and a microelectromechanical (MEM) structure incorporating such a chain are disclosed. The surface-micromachined chain can be fabricated in place on a substrate (e.g. a silicon substrate) by depositing and patterning a plurality of alternating layers of a chain-forming material (e.g. polycrystalline silicon) and a sacrificial material (e.g. silicon dioxide or a silicate glass). The sacrificial material is then removed by etching to release the chain for movement. The chain has applications for forming various types of MEM devices which include a microengine (e.g. an electrostatic motor) connected to rotate a drive sprocket, with the surface-micromachined chain being connected between the drive sprocket and one or more driven sprockets.
    • 公开了一种包含这种链的表面微加工链和微机电(MEM)结构。 表面微加工链可以通过沉积和图案化形成链的材料(例如多晶硅)和牺牲材料(例如二氧化硅或硅酸盐)的多个交替层而在衬底(例如硅衬底)上制成就位 玻璃)。 然后通过蚀刻去除牺牲材料以释放链条用于移动。 该链具有用于形成各种类型的MEM装置的应用,其包括连接以旋转驱动链轮的微型发动机(例如静电马达),其中表面微加工链条连接在驱动链轮和一个或多个从动链轮之间。