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1. 发明授权

US5814238A Method for dry etching of transition metals 失效
标题翻译：过渡金属的干蚀刻方法
公开(公告)号：US5814238A
公开(公告)日：1998-09-29
申请号：US542149
申请日：1995-10-12
申请人： Carol I. H. Ashby , Albert G. Baca , Peter Esherick , John E. Parmeter , Dennis J. Rieger , Randy J. Shul
发明人： Carol I. H. Ashby , Albert G. Baca , Peter Esherick , John E. Parmeter , Dennis J. Rieger , Randy J. Shul
IPC分类号： C23F4/00 , H01L21/3213 , B44C1/22 , C03C15/00 , C23F1/00
CPC分类号： C23F4/00 , H01L21/32136
摘要： A method for dry etching of transition metals. The method for dry etching of a transition metal (or a transition metal alloy such as a silicide) on a substrate comprises providing at least one nitrogen- or phosphorous-containing .pi.-acceptor ligand in proximity to the transition metal, and etching the transition metal to form a volatile transition metal/.pi.-acceptor ligand complex. The dry etching may be performed in a plasma etching system such as a reactive ion etching (RIE) system, a downstream plasma etching system (i.e. a plasma afterglow), a chemically-assisted ion beam etching (CAIBE) system or the like. The dry etching may also be performed by generating the .pi.-acceptor ligands directly from a ligand source gas (e.g. nitrosyl ligands generated from nitric oxide), or from contact with energized particles such as photons, electrons, ions, atoms, or molecules. In some preferred embodiments of the present invention, an intermediary reactant species such as carbonyl or a halide ligand is used for an initial chemical reaction with the transition metal, with the intermediary reactant species being replaced at least in part by the .pi.-acceptor ligand for forming the volatile transition metal/.pi.-acceptor ligand complex.
摘要翻译：一种干法蚀刻过渡金属的方法。过渡金属（或过渡金属合金如硅化物）在基板上的干蚀刻方法包括在过渡金属附近提供至少一种含氮或磷的pi受体配体，并蚀刻过渡金属以形成挥发性过渡金属/π-受体配体复合物。干蚀刻可以在诸如反应离子蚀刻（RIE）系统，下游等离子体蚀刻系统（等离子体余辉），化学辅助离子束蚀刻（CAIBE）系统等等的等离子体蚀刻系统中进行。干蚀刻也可以通过直接从配体源气体（例如由一氧化氮产生的亚硝酰基配体）或与激发的粒子例如光子，电子，离子，原子或分子的接触产生直接受体配体来进行。在本发明的一些优选实施方案中，中间反应物种如羰基或卤化物配体用于与过渡金属的初始化学反应，其中中间反应物种至少部分被pi受体配体替代形成挥发性过渡金属/π-受体配体复合物。

2. 发明授权

US06848325B2 Explosives screening on a vehicle surface 失效
标题翻译：在车辆表面进行爆炸物筛查
公开(公告)号：US06848325B2
公开(公告)日：2005-02-01
申请号：US09826502
申请日：2001-04-04
申请人： John E. Parmeter , Charles A. Brusseau , Jerry D. Davis , Kevin L. Linker , David W. Hannum
发明人： John E. Parmeter , Charles A. Brusseau , Jerry D. Davis , Kevin L. Linker , David W. Hannum
IPC分类号： G01N1/02 , G01N1/22 , G01N15/06 , G01N1/00
CPC分类号： G01N1/2226 , G01N1/2202 , G01N2001/022 , G01N2001/2223 , G01N2001/2241 , G01N2015/0662
摘要： A system for detecting particles on the outer surface of a vehicle has a housing capable of being placed in a test position adjacent to, but not in contact with, a portion of the outer surface of the vehicle. An elongate sealing member is fastened to the housing along a perimeter surrounding the wall, and the elongate sealing member has a contact surface facing away from the wall to contact the outer surface of the vehicle to define a test volume when the wall is in the test position. A gas flow system has at least one gas inlet extending through the wall for providing a gas stream against the surface of the vehicle within the test volume. This gas stream, which preferably is air, dislodges particles from the surface of the vehicle covered by the housing. The gas stream exits the test volume through a gas outlet and particles in the stream are detected.
摘要翻译：用于检测车辆外表面上的颗粒的系统具有壳体，其能够被放置在与车辆的外表面的一部分相邻但不与其接触的测试位置。细长密封构件沿着围绕壁的周边紧固到壳体，并且细长密封构件具有背离壁的接触表面以接触车辆的外表面以在壁处于测试中时限定测试体积位置。气流系统具有延伸穿过壁的至少一个气体入口，用于在测试体积内提供抵靠车辆表面的气流。优选为空气的气流从由壳体覆盖的车辆的表面移除颗粒。气流通过气体出口离开测试体积，并检测流中的颗粒。

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