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    • 2. 发明授权
    • Heterojunction semiconductor laser fabrication utilizing laser radiation
    • 使用激光辐射的异质结半导体激光制造
    • US4318752A
    • 1982-03-09
    • US150460
    • 1980-05-16
    • Ping K. Tien
    • Ping K. Tien
    • H01L21/225H01L21/22H01L21/263H01L21/268H01L29/205H01S5/00H01L21/203
    • H01L21/22H01L21/268H01L29/205Y10S148/084
    • A stripe geometry is fabricated in a laser-diode structure having a plurality of epitaxial layers, including in tandem an undoped active semiconductor layer (3), a p-doped semiconductor layer (4), a moderately n-doped semiconductor layer (5) and a heavily p.sup.+ -doped layer (6) by focusing laser radiation on the n-doped semiconductor layer (5). The laser radiation is chosen to have a wavelength which passes through the p.sup.+ -doped layer (6) without absorption. When the laser radiation is absorbed in the n-doped layer, heat is generated which causes diffusion of p-dopant from the two adjacent layers to convert the exposed region to p-type. As the laser beam is scanned, a stripe having a forward pn junction for laser action is formed.
    • 条纹几何形状以具有多个外延层的激光二极管结构制造,包括串联未掺杂的有源半导体层(3),p掺杂半导体层(4),中等掺杂半导体层(5) 和通过将激光辐射聚焦在n掺杂半导体层(5)上的重p +掺杂层(6)。 选择激光辐射具有穿过p +掺杂层(6)而不吸收的波长。 当激光辐射被吸收在n掺杂层中时,产生热量,其引起来自两个相邻层的p掺杂剂的扩散,以将曝光区域转换为p型。 当扫描激光束时,形成具有用于激光作用的正向pn结的条纹。
    • 4. 发明授权
    • Forming focusing diffraction gratings for integrated optics
    • 形成用于集成光学的聚焦衍射光栅
    • US4140362A
    • 1979-02-20
    • US815721
    • 1977-07-14
    • Ping K. Tien
    • Ping K. Tien
    • G02B5/18G02B5/32G02B6/122G02B6/13G03H1/04H01S3/063
    • G02B5/32H01S3/0635Y10S359/90
    • An apparatus is disclosed for making unchirped holographic diffraction gratings that are formed from curved lines in a thin film. The gratings so made focus as well as reflect light that is confined to the film incorporating the grating. SUBACKGROUND OF THE INVENTIONGratings have been incorporated in integrated optics devices for several purposes, including the fabrication of distributed feedback lasers, light-wave couplers, and band-rejection filters. Integrated-optics gratings known to the prior art were composed at straight lines, and therefore could not focus the light being processed. Gratings that combine focusing and diffraction were known to be desirable, but the prior art was unable to produce them.The closest prior art that has come to our attention is a method and apparatus for producing curved-line holographic gratings that have unequally spaced, or chirped, lines (U.S. Pat. No. 3,578,845, issued on May 18, 1971 to K. E. Brooks et al). This reference teaches the production of gratings that focus light that propagates into and out of the plane of the grating. It does not teach the relative orientation of laser beams and focal lines that are required in order to produce curved-line gratings that will function in integrated optics devices.SUMMARY OF THE INVENTIONThe invention relates to a method and apparatus for producing unchirped, curved-line, holographic diffraction gratings in a thin film, which gratings will focus as well as diffract light that is confined to the film in which the grating is formed. (In integrated optics, the film containing the light is called the optical waveguide, and the waveguide with a grating in it is called a corrugated waveguide.) The gratings are made by forming an interference pattern in a photosensitive material, fixing the interference pattern so formed and then using the fixed pattern as a mask for ion or chemical etching processes of conventional type to form corrugated waveguides.One feature of the invention is the use of two cylindrically focused beams of coherent optical radiation for writing holographic diffraction gratings, the focal lines of which beams are oriented in a predetermined manner with respect to each other and with respect to the grating being written.Another feature of the invention is the use of coplanar focal lines of the two beams oriented so that the plane which contains the focal lines also contains the axis of the grating, thereby providing uniform spacing between the grating lines.Further features and advantages of the invention will become apparent from a study of the detailed description and of the drawings.
    • {PG,1公开了一种用于制造由薄膜中的曲线形成的非激光全息衍射光栅的装置。 光栅使得聚焦以及反射限于结合光栅的膜的光。