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    • 1. 发明申请
    • Surface acoustic wave device, electronic apparatus, and sensor apparatus
    • 声表面波装置,电子仪器和传感器装置
    • US20120086308A1
    • 2012-04-12
    • US13223411
    • 2011-09-01
    • Naohisa ObataKunihito Yamanaka
    • Naohisa ObataKunihito Yamanaka
    • H01L41/04H03B5/32
    • H03H9/02834H03H9/02551H03H9/02661H03H9/14538
    • A SAW device has an IDT which is provided in the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between the electrode fingers of the IDT. The depth G of the inter-electrode-finger grooves is 0.01λ≦G≦0.07λ, and an electrode finger thickness H and an IDT line occupancy η satisfy a predetermined relationship. Thus, a frequency-temperature characteristic constantly has an inflection point between a maximum value and a minimum value in an operation temperature range, thereby suppressing a fluctuation in an inflection-point temperature due to a manufacturing variation in the IDT line occupancy η.
    • SAW器件具有IDT,其设置在具有欧拉角(-1.5°< l1; n1E; 1.5°,117°≦̸& Thetas;≦̸ 142°,|ψ|≠90°的石英晶体基板的主表面上 °×n(其中n = 0,1,2,3))并且在阻带上端模式中激发瑞利波(波长:λ)。 电极间指状槽凹陷在IDT的电极指之间。 电极指状槽的深度G为0.01λ< NlE; G≦̸0.07λ,电极指厚度H和IDT线占有率& 满足预定的关系。 因此,频率温度特性在操作温度范围内始终具有最大值和最小值之间的拐点,从而抑制由于IDT线占有率的制造变化引起的拐点温度的波动。
    • 2. 发明授权
    • Surface acoustic wave device, electronic apparatus, and sensor apparatus
    • 声表面波装置,电子仪器和传感器装置
    • US09048806B2
    • 2015-06-02
    • US13223405
    • 2011-09-01
    • Naohisa Obata
    • Naohisa Obata
    • H03H9/19H01L41/18H03H9/05H03H9/02H03H9/145
    • H03H9/02551H01L41/04H03H9/0542H03H9/14594
    • A SAW device includes an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between electrode fingers of the IDT. An IDT line occupancy η and an inter-electrode-finger groove depth G satisfy a predetermined relationship in terms of the wavelength λ, such that the SAW device has a frequency-temperature characteristic of a cubic curve having an inflection point between a maximum value and a minimum value in an operation temperature range. The inflection point is adjustable to a desired temperature or a desired temperature range depending on the IDT line occupancy η within an operation temperature range.
    • SAW器件包括设置在具有欧拉角(-1.5°& nlE;& nlE; 1.5°,117°≦̸& Thetas;≦̸ 142°,|ψ|≠90°)的石英晶体基板的主表面上的IDT °×n(其中n = 0,1,2,3))并且在阻带上端模式中激发瑞利波(波长:λ)。 电极间指状槽在IDT的电极指之间凹进。 IDT线路占用率 并且电极指槽深度G在波长λ方面满足预定关系,使得SAW器件具有在具有最大值和最小值之间的拐点的三次曲线的频率温度特性 工作温度范围。 根据IDT线路占有率,拐点可调节到所需温度或期望的温度范围; 在工作温度范围内。
    • 5. 发明申请
    • SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS
    • 表面声波装置,电子装置和传感器装置
    • US20120068573A1
    • 2012-03-22
    • US13223405
    • 2011-09-01
    • Naohisa OBATA
    • Naohisa OBATA
    • H01L41/04
    • H03H9/02551H01L41/04H03H9/0542H03H9/14594
    • A SAW device includes an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between electrode fingers of the IDT. An IDT line occupancy η and an inter-electrode-finger groove depth G satisfy a predetermined relationship in terms of the wavelength λ, such that the SAW device has a frequency-temperature characteristic of a cubic curve having an inflection point between a maximum value and a minimum value in an operation temperature range. The inflection point is adjustable to a desired temperature or a desired temperature range depending on the IDT line occupancy η within an operation temperature range.
    • SAW器件包括设置在具有欧拉角(-1.5°& nlE;& nlE; 1.5°,117°≦̸& Thetas;≦̸ 142°,|ψ|≠90°)的石英晶体基板的主表面上的IDT °×n(其中n = 0,1,2,3))并且在阻带上端模式中激发瑞利波(波长:λ)。 电极间指状槽在IDT的电极指之间凹进。 IDT线路占用率 并且电极指槽深度G在波长λ方面满足预定关系,使得SAW器件具有在具有最大值和最小值之间的拐点的三次曲线的频率温度特性 工作温度范围。 根据IDT线路占有率,拐点可调节到所需温度或期望的温度范围; 在工作温度范围内。
    • 9. 发明授权
    • Surface acoustic wave device, electronic apparatus, and sensor apparatus
    • 声表面波装置,电子仪器和传感器装置
    • US08723394B2
    • 2014-05-13
    • US13223411
    • 2011-09-01
    • Naohisa ObataKunihito Yamanaka
    • Naohisa ObataKunihito Yamanaka
    • H03H9/25
    • H03H9/02834H03H9/02551H03H9/02661H03H9/14538
    • A SAW device has an IDT which is provided in the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between the electrode fingers of the IDT. The depth G of the inter-electrode-finger grooves is 0.01λ≦G≦0.07λ, and an electrode finger thickness H and an IDT line occupancy η satisfy a predetermined relationship. Thus, a frequency-temperature characteristic constantly has an inflection point between a maximum value and a minimum value in an operation temperature range, thereby suppressing a fluctuation in an inflection-point temperature due to a manufacturing variation in the IDT line occupancy η.
    • SAW器件具有IDT,其设置在具有欧拉角(-1.5°< l1; n1E; 1.5°,117°≦̸& Thetas;≦̸ 142°,|ψ|≠90°的石英晶体基板的主表面上 °×n(其中n = 0,1,2,3))并且在阻带上端模式中激发瑞利波(波长:λ)。 电极间指状槽凹陷在IDT的电极指之间。 电极指状槽的深度G为0.01λ< NlE; G≦̸0.07λ,电极指厚度H和IDT线占有率& 满足预定的关系。 因此,频率温度特性在操作温度范围内始终具有最大值和最小值之间的拐点,从而抑制由于IDT线占有率的制造变化引起的拐点温度的波动。