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1. 发明申请

US20130027144A1 SAW DEVICE, SAW OSCILLATOR, AND ELECTRONIC APPARATUS 失效
标题翻译： SAW器件，SAW振荡器和电子设备
公开(公告)号：US20130027144A1
公开(公告)日：2013-01-31
申请号：US13557748
申请日：2012-07-25
申请人： Kunihito YAMANAKA , Naohisa OBATA
发明人： Kunihito YAMANAKA , Naohisa OBATA
IPC分类号： H03B5/32 , H01L41/04
CPC分类号： H03B5/326 , H01L41/053 , H01L2224/05554 , H01L2224/48091 , H01L2224/73265 , H01L2924/16195 , H03H9/02897 , H03H9/058 , H03H9/0585 , H03H9/25 , H01L2924/00014
摘要： A SAW device includes a SAW chip formed of a piezoelectric substrate and an IDT formed thereon, a base substrate that supports the SAW chip, and a fixing member that fixes the SAW chip to the base substrate. The SAW chip that forms a cantilever is supported by the base substrate via the fixing member in a position where the IDT does not overlap with the fixing member in a plan view of the SAW chip. The length W of the SAW chip in a y-axis direction and the length D of the fixing member in the y-axis direction satisfy 1
摘要翻译： SAW器件包括由压电基片和形成在其上的IDT形成的SAW芯片，支撑SAW芯片的基底基板和将SAW芯片固定到基底基板的固定部件。形成悬臂的SAW芯片在SAW芯片的平面图中，通过固定部件被支撑在IDT与固定部件不重叠的位置的基底基板上。 1.6μm，SAW芯片在y轴方向上的长度W和固定构件在y轴方向上的长度D满足1

2. 发明申请

US20120068573A1 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS 有权
标题翻译：表面声波装置，电子装置和传感器装置
公开(公告)号：US20120068573A1
公开(公告)日：2012-03-22
申请号：US13223405
申请日：2011-09-01
申请人： Naohisa OBATA
发明人： Naohisa OBATA
IPC分类号： H01L41/04
CPC分类号： H03H9/02551 , H01L41/04 , H03H9/0542 , H03H9/14594
摘要： A SAW device includes an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, |ψ|≠90°×n (where n=0, 1, 2, 3)) and excites a Rayleigh wave (wavelength: λ) in a stopband upper end mode. Inter-electrode-finger grooves are recessed between electrode fingers of the IDT. An IDT line occupancy η and an inter-electrode-finger groove depth G satisfy a predetermined relationship in terms of the wavelength λ, such that the SAW device has a frequency-temperature characteristic of a cubic curve having an inflection point between a maximum value and a minimum value in an operation temperature range. The inflection point is adjustable to a desired temperature or a desired temperature range depending on the IDT line occupancy η within an operation temperature range.
摘要翻译： SAW器件包括设置在具有欧拉角（-1.5°＆amp; nlE;＆amp; nlE; 1.5°，117°＆nlE;＆amp; Thetas;＆nlE; 142°，|ψ|≠90°）的石英晶体基板的主表面上的IDT °×n（其中n = 0,1,2,3））并且在阻带上端模式中激发瑞利波（波长：λ）。电极间指状槽在IDT的电极指之间凹进。 IDT线路占用率并且电极指槽深度G在波长λ方面满足预定关系，使得SAW器件具有在具有最大值和最小值之间的拐点的三次曲线的频率温度特性工作温度范围。根据IDT线路占有率，拐点可调节到所需温度或期望的温度范围; 在工作温度范围内。

3. 发明申请

US20120062070A1 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS 有权
标题翻译：表面声波装置，电子装置和传感器装置
公开(公告)号：US20120062070A1
公开(公告)日：2012-03-15
申请号：US13223581
申请日：2011-09-01
申请人： Kunihito YAMANAKA , Takuya OWAKI , Naohisa OBATA
发明人： Kunihito YAMANAKA , Takuya OWAKI , Naohisa OBATA
IPC分类号： H01L41/04
CPC分类号： H03H9/14594 , H03H9/02551 , H03H9/0542
摘要： A SAW device has an IDT which is provided on the principal surface of a quartz crystal sustrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦42°, ψ) and excites a SAW in a stopband upper end mode. Inter-electrode-finger grooves 8 are recessed between the electrode fingers of the IDT. When the Euler angle ψ is 42.79°≦|ψ|≦49.57°, the thickness H of the electrode fingers of the IDT is set to be within 0.055 μm≦H≦0.335 μm, preferably, 0.080 μm≦H≦0.335 μm. When the Euler angle ψ is |ψ|≠90°×n (where n=0, 1, 2, 3), and the thickness H of the electrode fingers is set to 0.05 μm≦H≦0.20 μm.
摘要翻译： SAW器件具有设置在具有欧拉角（-1.5°＆nlE;＆amp;＆ls; 1.5°，117°＆nlE;＆amp; thetas;＆amp; 42°，ψ）的石英晶体的主表面上的IDT，并且激发a SAW在阻带上端模式。电极指状槽8在IDT的电极指之间凹陷。当欧拉角ψ为42.79°＆nlE; |ψ|＆nlE; 49.57°时，IDT的电极指的厚度H设定为0.055μm＆lt; NlE; H＆lt; ll;0.335μm，优选为0.080μm＆amp; NlE; H＆。当欧拉角ψ为|ψ|≠90°×n（其中n = 0,1,2,3）时，电极指的厚度H设定为0.05μm＆nlE; H＆lt; ll;0.20μm。

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